DUAL METAL CAPPED VIA CONTACT STRUCTURES FOR SEMICONDUCTOR DEVICES | Patent Publication Number 20230261070
US 20230261070 A1Publication DateAug 17, 2023
Original AssigneeTaiwan Semiconductor Manufacturing Company
Current AssigneeTaiwan Semiconductor Manufacturing Company
Inventor/ApplicantsZiwei Fang
Chung-Liang CHENG
Chung-Liang CHENG
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