SNSPD WITH INTEGRATED ALUMINUM NITRIDE SEED OR WAVEGUIDE LAYER | Patent Publication Number 20230309420

US 20230309420 A1
Patent Number-
Application Number18315459
Filled DateMay 10, 2023
Priority DateFeb 3, 2020
Publication DateSep 28, 2023
Original Assignee
Current AssigneeApplied Materials Israel
Inventor/ApplicantsNag B. Patibandla
Zihao Yang
Robert Jan Visser
Adi de la Zerda
Mingwei Zhu
Nir Yahav
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