LASER-ROUGHENED REACTION-BONDED SILICON CARBIDE FOR WAFER CONTACT SURFACE | Patent Publication Number 20230321758

US 20230321758 A1
Patent Number-
Application Number17656481
Filled DateMar 25, 2022
Priority DateMar 25, 2022
Publication DateOct 12, 2023
Original Assignee
Current AssigneeCoherent Corp.
Inventor/ApplicantsJon Coppola
Mike Aghajanian
Nicholas Coombs
Aaron Chriss
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