SEMICONDUCTOR MEMS STRUCTURE | Patent Publication Number 20230365395

US 20230365395 A1
Patent Number-
Application Number18358620
Filled DateJul 25, 2023
Priority DateApr 29, 2016
Publication DateNov 16, 2023
Original Assignee
Current AssigneeTaiwan Semiconductor Manufacturing Company
Inventor/ApplicantsJung-Huei Peng
Yuan-Chih Hsieh
Hsing-Lien Lin
Yi-Chien Wu
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