CONTACTS FOR HIGHLY SCALED TRANSISTORS | Patent Publication Number 20230395687
US 20230395687 A1Publication DateDec 7, 2023
Original Assignee
Current AssigneeTaiwan Semiconductor Manufacturing Company
Inventor/ApplicantsChun-Hsiung Lin
Wai-Yi Lien
Chung-Cheng Wu
Jean-Pierre Colinge
Chih-Hao Wang
Carlos H. Diaz
Ying-Keung Leung
Chia-Hao Chang
Wai-Yi Lien
Chung-Cheng Wu
Jean-Pierre Colinge
Chih-Hao Wang
Carlos H. Diaz
Ying-Keung Leung
Chia-Hao Chang
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