Parasitic Capacitance Reduction | Patent Publication Number 20230402531

US 20230402531 A1
Patent Number-
Application Number18357307
Filled DateJul 24, 2023
Priority DateFeb 19, 2020
Publication DateDec 14, 2023
Original Assignee
Current AssigneeTaiwan Semiconductor Manufacturing Company
Inventor/ApplicantsChen-Ming Lee
Fu-Kai Yang
Jia-Heng Wang
Chun-Han Chen
Mei-Yun Wang
I-Wen Wu
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