Aditi Dutt

Array ( [id] => 16723789 [patent_doc_number] => 20210090936 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2021-03-25 [patent_title] => CARRIER PLATE FOR USE IN PLASMA PROCESSING SYSTEMS [patent_app_type] => utility [patent_app_number] => 17/113848 [patent_app_country] => US [patent_app_date] => 2020-12-07 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 13396 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 244 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17113848 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 18147178 [patent_doc_number] => 20230021035 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2023-01-19 [patent_title] => LINEARLY MOVING MECHANISM AND METHOD OF SUPPRESSING PARTICLE SCATTERING [patent_app_type] => utility [patent_app_number] => 17/757173 [patent_app_country] => US [patent_app_date] => 2020-12-07 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 12621 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -15 [patent_words_short_claim] => 280 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17757173 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 19701861 [patent_doc_number] => 12195877 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2025-01-14 [patent_title] => Substrate support device for a reaction chamber of an epitaxial reactor with gas flow rotation, reaction chamber and epitaxial reactor [patent_app_type] => utility [patent_app_number] => 17/778923 [patent_app_country] => US [patent_app_date] => 2020-11-23 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 5 [patent_figures_cnt] => 9 [patent_no_of_words] => 3938 [patent_no_of_claims] => 11 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 294 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17778923 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 20389229 [patent_doc_number] => 12488963 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2025-12-02 [patent_title] => Substrate processing apparatus [patent_app_type] => utility [patent_app_number] => 17/778757 [patent_app_country] => US [patent_app_date] => 2020-11-19 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 4 [patent_figures_cnt] => 4 [patent_no_of_words] => 0 [patent_no_of_claims] => 6 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 246 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17778757 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 19121291 [patent_doc_number] => 11965262 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2024-04-23 [patent_title] => Substrate supporting plate, thin film deposition apparatus including the same, and thin film deposition method [patent_app_type] => utility [patent_app_number] => 17/092599 [patent_app_country] => US [patent_app_date] => 2020-11-09 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 9 [patent_figures_cnt] => 15 [patent_no_of_words] => 6018 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 90 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17092599 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 16601481 [patent_doc_number] => 20210028012 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2021-01-28 [patent_title] => PLASMA ENHANCED CVD WITH PERIODIC HIGH VOLTAGE BIAS [patent_app_type] => utility [patent_app_number] => 17/070821 [patent_app_country] => US [patent_app_date] => 2020-10-14 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 5990 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -11 [patent_words_short_claim] => 95 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17070821 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 19717637 [patent_doc_number] => 12203161 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2025-01-21 [patent_title] => Component for plasma processing apparatus and plasma processing apparatus including component [patent_app_type] => utility [patent_app_number] => 17/764141 [patent_app_country] => US [patent_app_date] => 2020-09-29 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 2 [patent_figures_cnt] => 4 [patent_no_of_words] => 4961 [patent_no_of_claims] => 15 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 85 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17764141 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 18360767 [patent_doc_number] => 20230142358 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2023-05-11 [patent_title] => STRUCTURAL BODY AND HEATING APPARATUS [patent_app_type] => utility [patent_app_number] => 17/768814 [patent_app_country] => US [patent_app_date] => 2020-09-25 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 7602 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -9 [patent_words_short_claim] => 84 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17768814 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 19943564 [patent_doc_number] => 12315700 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2025-05-27 [patent_title] => Plasma processing apparatus and ceiling wall [patent_app_type] => utility [patent_app_number] => 17/766379 [patent_app_country] => US [patent_app_date] => 2020-09-25 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 11 [patent_figures_cnt] => 12 [patent_no_of_words] => 3313 [patent_no_of_claims] => 15 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 125 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17766379 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 18562891 [patent_doc_number] => 11728143 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2023-08-15 [patent_title] => Process kit with adjustable tuning ring for edge uniformity control [patent_app_type] => utility [patent_app_number] => 17/033177 [patent_app_country] => US [patent_app_date] => 2020-09-25 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 16 [patent_figures_cnt] => 25 [patent_no_of_words] => 10226 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 224 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17033177 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 18507530 [patent_doc_number] => 11705357 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2023-07-18 [patent_title] => Substrate processing system including electrostatic chuck and method for manufacturing electrostatic chuck [patent_app_type] => utility [patent_app_number] => 17/032099 [patent_app_country] => US [patent_app_date] => 2020-09-25 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 7 [patent_figures_cnt] => 7 [patent_no_of_words] => 6094 [patent_no_of_claims] => 18 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 81 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17032099 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 16557606 [patent_doc_number] => 20210002754 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2021-01-07 [patent_title] => COMPONENT FOR USE IN PLASMA PROCESSING APPARATUS, PLASMA PROCESSING APPARATUS, AND METHOD FOR MANUFACTURING THE COMPONENT [patent_app_type] => utility [patent_app_number] => 17/021643 [patent_app_country] => US [patent_app_date] => 2020-09-15 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 6227 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -10 [patent_words_short_claim] => 210 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17021643 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 17115499 [patent_doc_number] => 20210296096 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2021-09-23 [patent_title] => EDGE RING AND PLASMA PROCESSING APPARATUS [patent_app_type] => utility [patent_app_number] => 17/017487 [patent_app_country] => US [patent_app_date] => 2020-09-10 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 3732 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -18 [patent_words_short_claim] => 87 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17017487 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 16673572 [patent_doc_number] => 20210062335 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2021-03-04 [patent_title] => APPARATUS FOR MANUFACTURING SEMICONDUCTOR DEVICE [patent_app_type] => utility [patent_app_number] => 17/010541 [patent_app_country] => US [patent_app_date] => 2020-09-02 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 8157 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 99 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17010541 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 17431685 [patent_doc_number] => 20220059394 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2022-02-24 [patent_title] => METHOD AND DEVICE TO REDUCE EPITAXIAL DEFECTS DUE TO CONTACT STRESS UPON A SEMICONDCUTOR WAFER [patent_app_type] => utility [patent_app_number] => 17/000701 [patent_app_country] => US [patent_app_date] => 2020-08-24 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 5880 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 84 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17000701 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 18205417 [patent_doc_number] => 11587821 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2023-02-21 [patent_title] => Substrate lift mechanism and reactor including same [patent_app_type] => utility [patent_app_number] => 16/944271 [patent_app_country] => US [patent_app_date] => 2020-07-31 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 5 [patent_figures_cnt] => 5 [patent_no_of_words] => 4028 [patent_no_of_claims] => 8 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 228 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16944271 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 18331773 [patent_doc_number] => 11637027 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2023-04-25 [patent_title] => Thermal reflector device for semiconductor fabrication tool [patent_app_type] => utility [patent_app_number] => 16/939683 [patent_app_country] => US [patent_app_date] => 2020-07-27 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 10 [patent_figures_cnt] => 12 [patent_no_of_words] => 6808 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 137 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16939683 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 16617191 [patent_doc_number] => 20210035844 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2021-02-04 [patent_title] => SHEATH AND TEMPERATURE CONTROL OF PROCESS KIT [patent_app_type] => utility [patent_app_number] => 16/939160 [patent_app_country] => US [patent_app_date] => 2020-07-27 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 3773 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 56 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16939160 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 20331234 [patent_doc_number] => 12461507 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2025-11-04 [patent_title] => Substrate processing apparatus, substrate processing method, semiconductor device manufacturing method, and control program [patent_app_type] => utility [patent_app_number] => 16/921652 [patent_app_country] => US [patent_app_date] => 2020-07-06 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 14 [patent_figures_cnt] => 14 [patent_no_of_words] => 9644 [patent_no_of_claims] => 18 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 276 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16921652 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 18999050 [patent_doc_number] => 11915905 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2024-02-27 [patent_title] => Support unit and substrate treating apparatus including the same [patent_app_type] => utility [patent_app_number] => 16/918299 [patent_app_country] => US [patent_app_date] => 2020-07-01 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 8 [patent_figures_cnt] => 8 [patent_no_of_words] => 6616 [patent_no_of_claims] => 15 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 220 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16918299 [rel_patent_id] =>[rel_patent_doc_number] =>)