Search

Alan A. Mathews

Examiner (ID: 11510)

Most Active Art Unit
2101
Art Unit(s)
2203, 2101, 2851, 2882
Total Applications
2349
Issued Applications
2176
Pending Applications
25
Abandoned Applications
148

Applications

Application numberTitle of the applicationFiling DateStatus
Array ( [id] => 613725 [patent_doc_number] => 07148954 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2006-12-12 [patent_title] => 'Lithographic apparatus and method for its use' [patent_app_type] => utility [patent_app_number] => 11/086662 [patent_app_country] => US [patent_app_date] => 2005-03-23 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 1 [patent_figures_cnt] => 1 [patent_no_of_words] => 4349 [patent_no_of_claims] => 21 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 80 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/07/148/07148954.pdf [firstpage_image] =>[orig_patent_app_number] => 11086662 [rel_patent_id] =>[rel_patent_doc_number] =>)
11/086662
Lithographic apparatus and method for its use Mar 22, 2005 Issued
Array ( [id] => 5698449 [patent_doc_number] => 20060215133 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2006-09-28 [patent_title] => 'Image shift optic for optical system' [patent_app_type] => utility [patent_app_number] => 11/088210 [patent_app_country] => US [patent_app_date] => 2005-03-22 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 6 [patent_figures_cnt] => 6 [patent_no_of_words] => 5823 [patent_no_of_claims] => 37 [patent_no_of_ind_claims] => 5 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0215/20060215133.pdf [firstpage_image] =>[orig_patent_app_number] => 11088210 [rel_patent_id] =>[rel_patent_doc_number] =>)
11/088210
Image shift optic for optical system Mar 21, 2005 Issued
Array ( [id] => 377743 [patent_doc_number] => 07312847 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2007-12-25 [patent_title] => 'Refractive projection objective for immersion lithography' [patent_app_type] => utility [patent_app_number] => 11/085602 [patent_app_country] => US [patent_app_date] => 2005-03-22 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 4 [patent_figures_cnt] => 4 [patent_no_of_words] => 7572 [patent_no_of_claims] => 47 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 196 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/07/312/07312847.pdf [firstpage_image] =>[orig_patent_app_number] => 11085602 [rel_patent_id] =>[rel_patent_doc_number] =>)
11/085602
Refractive projection objective for immersion lithography Mar 21, 2005 Issued
Array ( [id] => 6951516 [patent_doc_number] => 20050226610 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2005-10-13 [patent_title] => 'Temporary surveillance system' [patent_app_type] => utility [patent_app_number] => 11/064812 [patent_app_country] => US [patent_app_date] => 2005-02-24 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 6 [patent_figures_cnt] => 6 [patent_no_of_words] => 4329 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0226/20050226610.pdf [firstpage_image] =>[orig_patent_app_number] => 11064812 [rel_patent_id] =>[rel_patent_doc_number] =>)
11/064812
Temporary surveillance system Feb 23, 2005 Issued
Array ( [id] => 5841578 [patent_doc_number] => 20060120714 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2006-06-08 [patent_title] => 'TEMPORARY SURVEILLANCE SYSTEM' [patent_app_type] => utility [patent_app_number] => 11/065999 [patent_app_country] => US [patent_app_date] => 2005-02-24 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 6 [patent_figures_cnt] => 6 [patent_no_of_words] => 4326 [patent_no_of_claims] => 26 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0120/20060120714.pdf [firstpage_image] =>[orig_patent_app_number] => 11065999 [rel_patent_id] =>[rel_patent_doc_number] =>)
11/065999
Temporary surveillance system Feb 23, 2005 Issued
Array ( [id] => 481699 [patent_doc_number] => 07224431 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2007-05-29 [patent_title] => 'Lithographic apparatus and device manufacturing method' [patent_app_type] => utility [patent_app_number] => 11/062765 [patent_app_country] => US [patent_app_date] => 2005-02-22 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 4 [patent_figures_cnt] => 9 [patent_no_of_words] => 5117 [patent_no_of_claims] => 21 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 64 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/07/224/07224431.pdf [firstpage_image] =>[orig_patent_app_number] => 11062765 [rel_patent_id] =>[rel_patent_doc_number] =>)
11/062765
Lithographic apparatus and device manufacturing method Feb 21, 2005 Issued
Array ( [id] => 5129984 [patent_doc_number] => 20070206381 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2007-09-06 [patent_title] => 'System for reducing the coherence of laser radiation' [patent_app_type] => utility [patent_app_number] => 10/590537 [patent_app_country] => US [patent_app_date] => 2005-02-22 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 4 [patent_figures_cnt] => 4 [patent_no_of_words] => 2795 [patent_no_of_claims] => 36 [patent_no_of_ind_claims] => 4 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0206/20070206381.pdf [firstpage_image] =>[orig_patent_app_number] => 10590537 [rel_patent_id] =>[rel_patent_doc_number] =>)
10/590537
System for reducing the coherence of laser radiation Feb 21, 2005 Issued
Array ( [id] => 7049268 [patent_doc_number] => 20050185155 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2005-08-25 [patent_title] => 'Exposure apparatus and method' [patent_app_type] => utility [patent_app_number] => 11/062025 [patent_app_country] => US [patent_app_date] => 2005-02-18 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 8 [patent_figures_cnt] => 8 [patent_no_of_words] => 6071 [patent_no_of_claims] => 16 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0185/20050185155.pdf [firstpage_image] =>[orig_patent_app_number] => 11062025 [rel_patent_id] =>[rel_patent_doc_number] =>)
11/062025
Exposure apparatus and method Feb 17, 2005 Abandoned
Array ( [id] => 5218299 [patent_doc_number] => 20070159610 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2007-07-12 [patent_title] => 'Exposure apparatus, device manufacturing method, maintenance method, and exposure method' [patent_app_type] => utility [patent_app_number] => 10/588146 [patent_app_country] => US [patent_app_date] => 2005-02-08 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 5 [patent_figures_cnt] => 5 [patent_no_of_words] => 14947 [patent_no_of_claims] => 17 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0159/20070159610.pdf [firstpage_image] =>[orig_patent_app_number] => 10588146 [rel_patent_id] =>[rel_patent_doc_number] =>)
10/588146
Exposure apparatus, device manufacturing method, maintenance method, and exposure method Feb 7, 2005 Issued
Array ( [id] => 7095998 [patent_doc_number] => 20050128456 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2005-06-16 [patent_title] => 'Method and systems for improving focus accuracy in a lithography system' [patent_app_type] => utility [patent_app_number] => 11/050694 [patent_app_country] => US [patent_app_date] => 2005-02-07 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 5 [patent_figures_cnt] => 5 [patent_no_of_words] => 6402 [patent_no_of_claims] => 17 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0128/20050128456.pdf [firstpage_image] =>[orig_patent_app_number] => 11050694 [rel_patent_id] =>[rel_patent_doc_number] =>)
11/050694
Method and systems for improving focus accuracy in a lithography system Feb 6, 2005 Issued
Array ( [id] => 117781 [patent_doc_number] => RE041307 [patent_country] => US [patent_kind] => E1 [patent_issue_date] => 2010-05-04 [patent_title] => 'Mask for clamping apparatus, e.g. for a lithographic apparatus' [patent_app_type] => reissue [patent_app_number] => 11/050624 [patent_app_country] => US [patent_app_date] => 2005-02-04 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 4 [patent_figures_cnt] => 7 [patent_no_of_words] => 5348 [patent_no_of_claims] => 34 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 113 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/RE/041/RE041307.pdf [firstpage_image] =>[orig_patent_app_number] => 11050624 [rel_patent_id] =>[rel_patent_doc_number] =>)
11/050624
Mask for clamping apparatus, e.g. for a lithographic apparatus Feb 3, 2005 Issued
Array ( [id] => 635554 [patent_doc_number] => 07130016 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2006-10-31 [patent_title] => 'Exposure apparatus and device manufacturing method' [patent_app_type] => utility [patent_app_number] => 11/048762 [patent_app_country] => US [patent_app_date] => 2005-02-03 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 18 [patent_figures_cnt] => 28 [patent_no_of_words] => 5847 [patent_no_of_claims] => 10 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 66 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/07/130/07130016.pdf [firstpage_image] =>[orig_patent_app_number] => 11048762 [rel_patent_id] =>[rel_patent_doc_number] =>)
11/048762
Exposure apparatus and device manufacturing method Feb 2, 2005 Issued
Array ( [id] => 6910796 [patent_doc_number] => 20050174554 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2005-08-11 [patent_title] => 'Stage control method, a stage control system, and a semiconductor manufacturing equipment' [patent_app_type] => utility [patent_app_number] => 11/047675 [patent_app_country] => US [patent_app_date] => 2005-02-02 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 4 [patent_figures_cnt] => 4 [patent_no_of_words] => 2795 [patent_no_of_claims] => 8 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0174/20050174554.pdf [firstpage_image] =>[orig_patent_app_number] => 11047675 [rel_patent_id] =>[rel_patent_doc_number] =>)
11/047675
Stage control method, a stage control system, and a semiconductor manufacturing equipment Feb 1, 2005 Issued
Array ( [id] => 444878 [patent_doc_number] => 07256870 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2007-08-14 [patent_title] => 'Method and apparatus for controlling iso-dense bias in lithography' [patent_app_type] => utility [patent_app_number] => 11/046902 [patent_app_country] => US [patent_app_date] => 2005-02-01 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 5 [patent_figures_cnt] => 5 [patent_no_of_words] => 7502 [patent_no_of_claims] => 26 [patent_no_of_ind_claims] => 8 [patent_words_short_claim] => 57 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/07/256/07256870.pdf [firstpage_image] =>[orig_patent_app_number] => 11046902 [rel_patent_id] =>[rel_patent_doc_number] =>)
11/046902
Method and apparatus for controlling iso-dense bias in lithography Jan 31, 2005 Issued
Array ( [id] => 459006 [patent_doc_number] => 07245354 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2007-07-17 [patent_title] => 'Source optimization for image fidelity and throughput' [patent_app_type] => utility [patent_app_number] => 11/041459 [patent_app_country] => US [patent_app_date] => 2005-01-21 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 13 [patent_figures_cnt] => 15 [patent_no_of_words] => 9619 [patent_no_of_claims] => 19 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 128 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/07/245/07245354.pdf [firstpage_image] =>[orig_patent_app_number] => 11041459 [rel_patent_id] =>[rel_patent_doc_number] =>)
11/041459
Source optimization for image fidelity and throughput Jan 20, 2005 Issued
Array ( [id] => 5164053 [patent_doc_number] => 20070285637 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2007-12-13 [patent_title] => 'Imaging System for a Microlithographical Projection Light System' [patent_app_type] => utility [patent_app_number] => 10/597776 [patent_app_country] => US [patent_app_date] => 2005-01-13 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 6 [patent_figures_cnt] => 6 [patent_no_of_words] => 5140 [patent_no_of_claims] => 28 [patent_no_of_ind_claims] => 18 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0285/20070285637.pdf [firstpage_image] =>[orig_patent_app_number] => 10597776 [rel_patent_id] =>[rel_patent_doc_number] =>)
10/597776
Imaging system for a microlithographical projection light system Jan 12, 2005 Issued
Array ( [id] => 849928 [patent_doc_number] => 07382434 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2008-06-03 [patent_title] => 'Exposure apparatus and device manufacturing method' [patent_app_type] => utility [patent_app_number] => 11/030515 [patent_app_country] => US [patent_app_date] => 2005-01-05 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 8 [patent_figures_cnt] => 8 [patent_no_of_words] => 4035 [patent_no_of_claims] => 1 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 228 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/07/382/07382434.pdf [firstpage_image] =>[orig_patent_app_number] => 11030515 [rel_patent_id] =>[rel_patent_doc_number] =>)
11/030515
Exposure apparatus and device manufacturing method Jan 4, 2005 Issued
Array ( [id] => 7073437 [patent_doc_number] => 20050146703 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2005-07-07 [patent_title] => 'Device manufacturing method, device manufactured thereby and a mask for use in the method' [patent_app_type] => utility [patent_app_number] => 11/023359 [patent_app_country] => US [patent_app_date] => 2004-12-29 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 5 [patent_figures_cnt] => 5 [patent_no_of_words] => 5883 [patent_no_of_claims] => 15 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0146/20050146703.pdf [firstpage_image] =>[orig_patent_app_number] => 11023359 [rel_patent_id] =>[rel_patent_doc_number] =>)
11/023359
Device manufacturing method, device manufactured thereby and a mask for use in the method Dec 28, 2004 Issued
Array ( [id] => 206033 [patent_doc_number] => 07630052 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2009-12-08 [patent_title] => 'Exposure processing system, exposure processing method and method for manufacturing a semiconductor device' [patent_app_type] => utility [patent_app_number] => 11/024322 [patent_app_country] => US [patent_app_date] => 2004-12-29 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 13 [patent_figures_cnt] => 17 [patent_no_of_words] => 5752 [patent_no_of_claims] => 15 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 291 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/07/630/07630052.pdf [firstpage_image] =>[orig_patent_app_number] => 11024322 [rel_patent_id] =>[rel_patent_doc_number] =>)
11/024322
Exposure processing system, exposure processing method and method for manufacturing a semiconductor device Dec 28, 2004 Issued
Array ( [id] => 5653860 [patent_doc_number] => 20060139595 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2006-06-29 [patent_title] => 'Lithographic apparatus and method for determining Z position errors/variations and substrate table flatness' [patent_app_type] => utility [patent_app_number] => 11/020552 [patent_app_country] => US [patent_app_date] => 2004-12-27 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 9 [patent_figures_cnt] => 9 [patent_no_of_words] => 8701 [patent_no_of_claims] => 34 [patent_no_of_ind_claims] => 8 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0139/20060139595.pdf [firstpage_image] =>[orig_patent_app_number] => 11020552 [rel_patent_id] =>[rel_patent_doc_number] =>)
11/020552
Lithographic apparatus and method for determining Z position errors/variations and substrate table flatness Dec 26, 2004 Abandoned
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