Search

Alan A. Mathews

Examiner (ID: 11510)

Most Active Art Unit
2101
Art Unit(s)
2203, 2101, 2851, 2882
Total Applications
2349
Issued Applications
2176
Pending Applications
25
Abandoned Applications
148

Applications

Application numberTitle of the applicationFiling DateStatus
Array ( [id] => 5655640 [patent_doc_number] => 20060141375 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2006-06-29 [patent_title] => 'Exposure apparatus, a tilting device method for performing a tilted focus test, and a device manufactured accordingly' [patent_app_type] => utility [patent_app_number] => 11/020557 [patent_app_country] => US [patent_app_date] => 2004-12-27 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 6 [patent_figures_cnt] => 6 [patent_no_of_words] => 9418 [patent_no_of_claims] => 14 [patent_no_of_ind_claims] => 4 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0141/20060141375.pdf [firstpage_image] =>[orig_patent_app_number] => 11020557 [rel_patent_id] =>[rel_patent_doc_number] =>)
11/020557
Exposure apparatus, a tilting device method for performing a tilted focus test, and a device manufactured accordingly Dec 26, 2004 Issued
Array ( [id] => 545106 [patent_doc_number] => 07177006 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2007-02-13 [patent_title] => 'Exposure apparatus and method' [patent_app_type] => utility [patent_app_number] => 11/022033 [patent_app_country] => US [patent_app_date] => 2004-12-23 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 15 [patent_figures_cnt] => 26 [patent_no_of_words] => 9238 [patent_no_of_claims] => 13 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 168 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/07/177/07177006.pdf [firstpage_image] =>[orig_patent_app_number] => 11022033 [rel_patent_id] =>[rel_patent_doc_number] =>)
11/022033
Exposure apparatus and method Dec 22, 2004 Issued
Array ( [id] => 4850703 [patent_doc_number] => 20080316445 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2008-12-25 [patent_title] => 'Fluid Pressure Compensation for Immersion Lithography Lens' [patent_app_type] => utility [patent_app_number] => 11/628942 [patent_app_country] => US [patent_app_date] => 2004-12-20 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 8 [patent_figures_cnt] => 8 [patent_no_of_words] => 4161 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0316/20080316445.pdf [firstpage_image] =>[orig_patent_app_number] => 11628942 [rel_patent_id] =>[rel_patent_doc_number] =>)
11/628942
Fluid pressure compensation for immersion lithography lens Dec 19, 2004 Issued
Array ( [id] => 7243352 [patent_doc_number] => 20050140943 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2005-06-30 [patent_title] => 'Concentration measuring mechanism, exposure apparatus, and device production method' [patent_app_type] => utility [patent_app_number] => 11/015411 [patent_app_country] => US [patent_app_date] => 2004-12-17 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 12 [patent_figures_cnt] => 12 [patent_no_of_words] => 6583 [patent_no_of_claims] => 18 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0140/20050140943.pdf [firstpage_image] =>[orig_patent_app_number] => 11015411 [rel_patent_id] =>[rel_patent_doc_number] =>)
11/015411
Concentration measuring mechanism, exposure apparatus, and device production method Dec 16, 2004 Issued
Array ( [id] => 166136 [patent_doc_number] => 07665916 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2010-02-23 [patent_title] => 'Coater/developer and coating/developing method' [patent_app_type] => utility [patent_app_number] => 10/590314 [patent_app_country] => US [patent_app_date] => 2004-12-16 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 15 [patent_figures_cnt] => 22 [patent_no_of_words] => 10034 [patent_no_of_claims] => 17 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 155 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/07/665/07665916.pdf [firstpage_image] =>[orig_patent_app_number] => 10590314 [rel_patent_id] =>[rel_patent_doc_number] =>)
10/590314
Coater/developer and coating/developing method Dec 15, 2004 Issued
Array ( [id] => 824333 [patent_doc_number] => 07405808 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2008-07-29 [patent_title] => 'Optical system, in particular illumination system, of a microlithographic projection exposure apparatus' [patent_app_type] => utility [patent_app_number] => 11/014199 [patent_app_country] => US [patent_app_date] => 2004-12-16 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 4 [patent_figures_cnt] => 7 [patent_no_of_words] => 5000 [patent_no_of_claims] => 13 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 72 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/07/405/07405808.pdf [firstpage_image] =>[orig_patent_app_number] => 11014199 [rel_patent_id] =>[rel_patent_doc_number] =>)
11/014199
Optical system, in particular illumination system, of a microlithographic projection exposure apparatus Dec 15, 2004 Issued
Array ( [id] => 6924253 [patent_doc_number] => 20050237508 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2005-10-27 [patent_title] => 'Process and apparatus for achieving single exposure pattern transfer using maskless optical direct write lithography' [patent_app_type] => utility [patent_app_number] => 11/012003 [patent_app_country] => US [patent_app_date] => 2004-12-14 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 9 [patent_figures_cnt] => 9 [patent_no_of_words] => 9672 [patent_no_of_claims] => 40 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0237/20050237508.pdf [firstpage_image] =>[orig_patent_app_number] => 11012003 [rel_patent_id] =>[rel_patent_doc_number] =>)
11/012003
Process and apparatus for achieving single exposure pattern transfer using maskless optical direct write lithography Dec 13, 2004 Issued
Array ( [id] => 523746 [patent_doc_number] => 07193685 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2007-03-20 [patent_title] => 'Exposure apparatus' [patent_app_type] => utility [patent_app_number] => 11/011570 [patent_app_country] => US [patent_app_date] => 2004-12-14 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 13 [patent_figures_cnt] => 18 [patent_no_of_words] => 5285 [patent_no_of_claims] => 13 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 122 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/07/193/07193685.pdf [firstpage_image] =>[orig_patent_app_number] => 11011570 [rel_patent_id] =>[rel_patent_doc_number] =>)
11/011570
Exposure apparatus Dec 13, 2004 Issued
Array ( [id] => 709689 [patent_doc_number] => 07061575 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2006-06-13 [patent_title] => 'Projection exposure apparatus and method' [patent_app_type] => utility [patent_app_number] => 11/008166 [patent_app_country] => US [patent_app_date] => 2004-12-10 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 20 [patent_figures_cnt] => 33 [patent_no_of_words] => 25278 [patent_no_of_claims] => 22 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 75 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/07/061/07061575.pdf [firstpage_image] =>[orig_patent_app_number] => 11008166 [rel_patent_id] =>[rel_patent_doc_number] =>)
11/008166
Projection exposure apparatus and method Dec 9, 2004 Issued
Array ( [id] => 486083 [patent_doc_number] => 07221431 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2007-05-22 [patent_title] => 'Exposure apparatus' [patent_app_type] => utility [patent_app_number] => 11/008379 [patent_app_country] => US [patent_app_date] => 2004-12-09 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 14 [patent_figures_cnt] => 14 [patent_no_of_words] => 8615 [patent_no_of_claims] => 6 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 126 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/07/221/07221431.pdf [firstpage_image] =>[orig_patent_app_number] => 11008379 [rel_patent_id] =>[rel_patent_doc_number] =>)
11/008379
Exposure apparatus Dec 8, 2004 Issued
Array ( [id] => 7095988 [patent_doc_number] => 20050128446 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2005-06-16 [patent_title] => 'Exposure apparatus and device manufacturing method' [patent_app_type] => utility [patent_app_number] => 11/006759 [patent_app_country] => US [patent_app_date] => 2004-12-08 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 19 [patent_figures_cnt] => 19 [patent_no_of_words] => 7933 [patent_no_of_claims] => 17 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0128/20050128446.pdf [firstpage_image] =>[orig_patent_app_number] => 11006759 [rel_patent_id] =>[rel_patent_doc_number] =>)
11/006759
Exposure apparatus and device manufacturing method Dec 7, 2004 Abandoned
Array ( [id] => 7243489 [patent_doc_number] => 20050140961 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2005-06-30 [patent_title] => 'Anti-vibration system, method of controlling the same, exposure apparatus, and device manufacturing method' [patent_app_type] => utility [patent_app_number] => 11/006778 [patent_app_country] => US [patent_app_date] => 2004-12-08 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 7 [patent_figures_cnt] => 7 [patent_no_of_words] => 7636 [patent_no_of_claims] => 13 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0140/20050140961.pdf [firstpage_image] =>[orig_patent_app_number] => 11006778 [rel_patent_id] =>[rel_patent_doc_number] =>)
11/006778
Anti-vibration system, method of controlling the same, exposure apparatus, and device manufacturing method Dec 7, 2004 Abandoned
Array ( [id] => 454957 [patent_doc_number] => 07248334 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2007-07-24 [patent_title] => 'Sensor shield' [patent_app_type] => utility [patent_app_number] => 11/005500 [patent_app_country] => US [patent_app_date] => 2004-12-07 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 7 [patent_figures_cnt] => 12 [patent_no_of_words] => 6153 [patent_no_of_claims] => 30 [patent_no_of_ind_claims] => 6 [patent_words_short_claim] => 92 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/07/248/07248334.pdf [firstpage_image] =>[orig_patent_app_number] => 11005500 [rel_patent_id] =>[rel_patent_doc_number] =>)
11/005500
Sensor shield Dec 6, 2004 Issued
Array ( [id] => 5839849 [patent_doc_number] => 20060119813 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2006-06-08 [patent_title] => 'Lithographic apparatus and device manufacturing method' [patent_app_type] => utility [patent_app_number] => 11/002454 [patent_app_country] => US [patent_app_date] => 2004-12-03 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 7 [patent_figures_cnt] => 7 [patent_no_of_words] => 5053 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0119/20060119813.pdf [firstpage_image] =>[orig_patent_app_number] => 11002454 [rel_patent_id] =>[rel_patent_doc_number] =>)
11/002454
Lithographic apparatus and device manufacturing method Dec 2, 2004 Issued
Array ( [id] => 306686 [patent_doc_number] => 07530749 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2009-05-12 [patent_title] => 'Coater/developer and coating/developing method' [patent_app_type] => utility [patent_app_number] => 10/581713 [patent_app_country] => US [patent_app_date] => 2004-12-03 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 13 [patent_figures_cnt] => 17 [patent_no_of_words] => 8538 [patent_no_of_claims] => 6 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 271 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/07/530/07530749.pdf [firstpage_image] =>[orig_patent_app_number] => 10581713 [rel_patent_id] =>[rel_patent_doc_number] =>)
10/581713
Coater/developer and coating/developing method Dec 2, 2004 Issued
Array ( [id] => 412800 [patent_doc_number] => 07283198 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2007-10-16 [patent_title] => 'Reticle thermal detector' [patent_app_type] => utility [patent_app_number] => 10/999624 [patent_app_country] => US [patent_app_date] => 2004-11-30 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 3 [patent_figures_cnt] => 5 [patent_no_of_words] => 4405 [patent_no_of_claims] => 30 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 47 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/07/283/07283198.pdf [firstpage_image] =>[orig_patent_app_number] => 10999624 [rel_patent_id] =>[rel_patent_doc_number] =>)
10/999624
Reticle thermal detector Nov 29, 2004 Issued
Array ( [id] => 7115211 [patent_doc_number] => 20050068512 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2005-03-31 [patent_title] => 'Optical unit, exposure apparatus, and device manufacturing method' [patent_app_type] => utility [patent_app_number] => 10/997940 [patent_app_country] => US [patent_app_date] => 2004-11-29 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 8 [patent_figures_cnt] => 8 [patent_no_of_words] => 16085 [patent_no_of_claims] => 36 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0068/20050068512.pdf [firstpage_image] =>[orig_patent_app_number] => 10997940 [rel_patent_id] =>[rel_patent_doc_number] =>)
10/997940
Optical unit, exposure apparatus, and device manufacturing method Nov 28, 2004 Issued
Array ( [id] => 5746518 [patent_doc_number] => 20060109448 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2006-05-25 [patent_title] => 'Method for bonding a pellicle to a patterning device and patterning device comprising a pellicle' [patent_app_type] => utility [patent_app_number] => 10/995077 [patent_app_country] => US [patent_app_date] => 2004-11-23 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 5 [patent_figures_cnt] => 5 [patent_no_of_words] => 5846 [patent_no_of_claims] => 16 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0109/20060109448.pdf [firstpage_image] =>[orig_patent_app_number] => 10995077 [rel_patent_id] =>[rel_patent_doc_number] =>)
10/995077
Method for bonding a pellicle to a patterning device and patterning device comprising a pellicle Nov 22, 2004 Issued
Array ( [id] => 874391 [patent_doc_number] => 07362412 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2008-04-22 [patent_title] => 'Method and apparatus for cleaning a semiconductor substrate in an immersion lithography system' [patent_app_type] => utility [patent_app_number] => 10/904601 [patent_app_country] => US [patent_app_date] => 2004-11-18 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 10 [patent_figures_cnt] => 12 [patent_no_of_words] => 5489 [patent_no_of_claims] => 26 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 99 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/07/362/07362412.pdf [firstpage_image] =>[orig_patent_app_number] => 10904601 [rel_patent_id] =>[rel_patent_doc_number] =>)
10/904601
Method and apparatus for cleaning a semiconductor substrate in an immersion lithography system Nov 17, 2004 Issued
Array ( [id] => 6916561 [patent_doc_number] => 20050094122 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2005-05-05 [patent_title] => 'Exposure method and exposure apparatus, light source unit and adjustment method of light source unit, and device manufacturing method' [patent_app_type] => utility [patent_app_number] => 10/989340 [patent_app_country] => US [patent_app_date] => 2004-11-17 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 10 [patent_figures_cnt] => 10 [patent_no_of_words] => 22635 [patent_no_of_claims] => 12 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0094/20050094122.pdf [firstpage_image] =>[orig_patent_app_number] => 10989340 [rel_patent_id] =>[rel_patent_doc_number] =>)
10/989340
Exposure method and exposure apparatus, light source unit and adjustment method of light source unit, and device manufacturing method Nov 16, 2004 Abandoned
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