Search

Alan A. Mathews

Examiner (ID: 10466)

Most Active Art Unit
2101
Art Unit(s)
2101, 2882, 2851, 2203
Total Applications
2349
Issued Applications
2176
Pending Applications
25
Abandoned Applications
148

Applications

Application numberTitle of the applicationFiling DateStatus
Array ( [id] => 808094 [patent_doc_number] => 07420653 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2008-09-02 [patent_title] => 'Lithographic projection apparatus, mirror, method of supplying a protective cap layer, device manufacturing method and device manufactured accordingly' [patent_app_type] => utility [patent_app_number] => 10/953510 [patent_app_country] => US [patent_app_date] => 2004-09-30 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 2 [patent_figures_cnt] => 3 [patent_no_of_words] => 5096 [patent_no_of_claims] => 14 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 48 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/07/420/07420653.pdf [firstpage_image] =>[orig_patent_app_number] => 10953510 [rel_patent_id] =>[rel_patent_doc_number] =>)
10/953510
Lithographic projection apparatus, mirror, method of supplying a protective cap layer, device manufacturing method and device manufactured accordingly Sep 29, 2004 Issued
Array ( [id] => 5635853 [patent_doc_number] => 20060066826 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2006-03-30 [patent_title] => 'Lithographic apparatus and device manufacturing method' [patent_app_type] => utility [patent_app_number] => 10/948749 [patent_app_country] => US [patent_app_date] => 2004-09-24 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 6 [patent_figures_cnt] => 6 [patent_no_of_words] => 5080 [patent_no_of_claims] => 26 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0066/20060066826.pdf [firstpage_image] =>[orig_patent_app_number] => 10948749 [rel_patent_id] =>[rel_patent_doc_number] =>)
10/948749
Lithographic apparatus and device manufacturing method Sep 23, 2004 Issued
Array ( [id] => 678020 [patent_doc_number] => 07088429 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2006-08-08 [patent_title] => 'Stage device for positioning an object, in which a static pressure bearing and a pressurizing magnet suspend a slider' [patent_app_type] => utility [patent_app_number] => 10/947288 [patent_app_country] => US [patent_app_date] => 2004-09-23 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 8 [patent_figures_cnt] => 8 [patent_no_of_words] => 5076 [patent_no_of_claims] => 5 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 125 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/07/088/07088429.pdf [firstpage_image] =>[orig_patent_app_number] => 10947288 [rel_patent_id] =>[rel_patent_doc_number] =>)
10/947288
Stage device for positioning an object, in which a static pressure bearing and a pressurizing magnet suspend a slider Sep 22, 2004 Issued
Array ( [id] => 570090 [patent_doc_number] => 07158211 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2007-01-02 [patent_title] => 'Lithographic apparatus and device manufacturing method' [patent_app_type] => utility [patent_app_number] => 10/946340 [patent_app_country] => US [patent_app_date] => 2004-09-22 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 4 [patent_figures_cnt] => 8 [patent_no_of_words] => 5479 [patent_no_of_claims] => 22 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 84 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/07/158/07158211.pdf [firstpage_image] =>[orig_patent_app_number] => 10946340 [rel_patent_id] =>[rel_patent_doc_number] =>)
10/946340
Lithographic apparatus and device manufacturing method Sep 21, 2004 Issued
Array ( [id] => 6989598 [patent_doc_number] => 20050088635 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2005-04-28 [patent_title] => 'Lithographic apparatus and device manufacturing method' [patent_app_type] => utility [patent_app_number] => 10/946344 [patent_app_country] => US [patent_app_date] => 2004-09-22 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 5 [patent_figures_cnt] => 5 [patent_no_of_words] => 5110 [patent_no_of_claims] => 23 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0088/20050088635.pdf [firstpage_image] =>[orig_patent_app_number] => 10946344 [rel_patent_id] =>[rel_patent_doc_number] =>)
10/946344
Lithographic apparatus and device manufacturing method Sep 21, 2004 Issued
Array ( [id] => 7210355 [patent_doc_number] => 20050053874 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2005-03-10 [patent_title] => 'Method for developing processing and apparatus for supplying developing solution' [patent_app_type] => utility [patent_app_number] => 10/943840 [patent_app_country] => US [patent_app_date] => 2004-09-20 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 19 [patent_figures_cnt] => 19 [patent_no_of_words] => 14177 [patent_no_of_claims] => 5 [patent_no_of_ind_claims] => 4 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0053/20050053874.pdf [firstpage_image] =>[orig_patent_app_number] => 10943840 [rel_patent_id] =>[rel_patent_doc_number] =>)
10/943840
Method for developing processing and apparatus for supplying developing solution Sep 19, 2004 Issued
Array ( [id] => 944657 [patent_doc_number] => 06967713 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2005-11-22 [patent_title] => 'Use of multiple reticles in lithographic printing tools' [patent_app_type] => utility [patent_app_number] => 10/939328 [patent_app_country] => US [patent_app_date] => 2004-09-14 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 3 [patent_figures_cnt] => 5 [patent_no_of_words] => 2721 [patent_no_of_claims] => 12 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 73 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/06/967/06967713.pdf [firstpage_image] =>[orig_patent_app_number] => 10939328 [rel_patent_id] =>[rel_patent_doc_number] =>)
10/939328
Use of multiple reticles in lithographic printing tools Sep 13, 2004 Issued
Array ( [id] => 5792088 [patent_doc_number] => 20060012769 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2006-01-19 [patent_title] => 'Illumination optical system and exposure apparatus using the same' [patent_app_type] => utility [patent_app_number] => 10/538230 [patent_app_country] => US [patent_app_date] => 2004-09-10 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 16 [patent_figures_cnt] => 16 [patent_no_of_words] => 6722 [patent_no_of_claims] => 21 [patent_no_of_ind_claims] => 4 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0012/20060012769.pdf [firstpage_image] =>[orig_patent_app_number] => 10538230 [rel_patent_id] =>[rel_patent_doc_number] =>)
10/538230
Illumination optical system and exposure apparatus using the same Sep 9, 2004 Issued
Array ( [id] => 5903084 [patent_doc_number] => 20060046211 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2006-03-02 [patent_title] => 'Effectively water-free immersion lithography' [patent_app_type] => utility [patent_app_number] => 10/928455 [patent_app_country] => US [patent_app_date] => 2004-08-27 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 3 [patent_figures_cnt] => 3 [patent_no_of_words] => 1895 [patent_no_of_claims] => 26 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0046/20060046211.pdf [firstpage_image] =>[orig_patent_app_number] => 10928455 [rel_patent_id] =>[rel_patent_doc_number] =>)
10/928455
Effectively water-free immersion lithography Aug 26, 2004 Abandoned
Array ( [id] => 912324 [patent_doc_number] => 07330236 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2008-02-12 [patent_title] => 'Exposure apparatus, and device manufacturing method using the same' [patent_app_type] => utility [patent_app_number] => 10/928527 [patent_app_country] => US [patent_app_date] => 2004-08-27 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 10 [patent_figures_cnt] => 10 [patent_no_of_words] => 9136 [patent_no_of_claims] => 10 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 199 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/07/330/07330236.pdf [firstpage_image] =>[orig_patent_app_number] => 10928527 [rel_patent_id] =>[rel_patent_doc_number] =>)
10/928527
Exposure apparatus, and device manufacturing method using the same Aug 26, 2004 Issued
Array ( [id] => 7150029 [patent_doc_number] => 20050024617 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2005-02-03 [patent_title] => 'Projection optical system and exposure apparatus having the projection optical system' [patent_app_type] => utility [patent_app_number] => 10/925965 [patent_app_country] => US [patent_app_date] => 2004-08-26 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 10 [patent_figures_cnt] => 10 [patent_no_of_words] => 9885 [patent_no_of_claims] => 18 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0024/20050024617.pdf [firstpage_image] =>[orig_patent_app_number] => 10925965 [rel_patent_id] =>[rel_patent_doc_number] =>)
10/925965
Projection optical system and exposure apparatus having the projection optical system Aug 25, 2004 Abandoned
Array ( [id] => 308231 [patent_doc_number] => 07532306 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2009-05-12 [patent_title] => 'Microlithographic projection exposure apparatus' [patent_app_type] => utility [patent_app_number] => 10/917371 [patent_app_country] => US [patent_app_date] => 2004-08-13 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 12 [patent_figures_cnt] => 16 [patent_no_of_words] => 12416 [patent_no_of_claims] => 10 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 79 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/07/532/07532306.pdf [firstpage_image] =>[orig_patent_app_number] => 10917371 [rel_patent_id] =>[rel_patent_doc_number] =>)
10/917371
Microlithographic projection exposure apparatus Aug 12, 2004 Issued
Array ( [id] => 824332 [patent_doc_number] => 07405807 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2008-07-29 [patent_title] => 'Method of forming optical images, apparatus for carrying out said method and process for manufacturing a device using said method' [patent_app_type] => utility [patent_app_number] => 10/569186 [patent_app_country] => US [patent_app_date] => 2004-08-10 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 3 [patent_figures_cnt] => 4 [patent_no_of_words] => 6228 [patent_no_of_claims] => 14 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 259 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/07/405/07405807.pdf [firstpage_image] =>[orig_patent_app_number] => 10569186 [rel_patent_id] =>[rel_patent_doc_number] =>)
10/569186
Method of forming optical images, apparatus for carrying out said method and process for manufacturing a device using said method Aug 9, 2004 Issued
Array ( [id] => 6970417 [patent_doc_number] => 20050036127 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2005-02-17 [patent_title] => 'Aligning apparatus and its control method, and exposure apparatus' [patent_app_type] => utility [patent_app_number] => 10/911729 [patent_app_country] => US [patent_app_date] => 2004-08-05 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 7 [patent_figures_cnt] => 7 [patent_no_of_words] => 4274 [patent_no_of_claims] => 7 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0036/20050036127.pdf [firstpage_image] =>[orig_patent_app_number] => 10911729 [rel_patent_id] =>[rel_patent_doc_number] =>)
10/911729
Aligning apparatus and its control method, and exposure apparatus Aug 4, 2004 Abandoned
Array ( [id] => 736055 [patent_doc_number] => 07038762 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2006-05-02 [patent_title] => 'Method and apparatus for irradiating a microlithographic substrate' [patent_app_type] => utility [patent_app_number] => 10/901852 [patent_app_country] => US [patent_app_date] => 2004-07-28 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 5 [patent_figures_cnt] => 10 [patent_no_of_words] => 4747 [patent_no_of_claims] => 22 [patent_no_of_ind_claims] => 4 [patent_words_short_claim] => 119 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/07/038/07038762.pdf [firstpage_image] =>[orig_patent_app_number] => 10901852 [rel_patent_id] =>[rel_patent_doc_number] =>)
10/901852
Method and apparatus for irradiating a microlithographic substrate Jul 27, 2004 Issued
Array ( [id] => 621302 [patent_doc_number] => 07142286 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2006-11-28 [patent_title] => 'Lithographic apparatus and device manufacturing method' [patent_app_type] => utility [patent_app_number] => 10/899302 [patent_app_country] => US [patent_app_date] => 2004-07-27 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 4 [patent_figures_cnt] => 12 [patent_no_of_words] => 6291 [patent_no_of_claims] => 17 [patent_no_of_ind_claims] => 5 [patent_words_short_claim] => 127 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/07/142/07142286.pdf [firstpage_image] =>[orig_patent_app_number] => 10899302 [rel_patent_id] =>[rel_patent_doc_number] =>)
10/899302
Lithographic apparatus and device manufacturing method Jul 26, 2004 Issued
Array ( [id] => 7195074 [patent_doc_number] => 20050041230 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2005-02-24 [patent_title] => 'Projection exposure device' [patent_app_type] => utility [patent_app_number] => 10/899816 [patent_app_country] => US [patent_app_date] => 2004-07-27 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 6 [patent_figures_cnt] => 6 [patent_no_of_words] => 2843 [patent_no_of_claims] => 8 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0041/20050041230.pdf [firstpage_image] =>[orig_patent_app_number] => 10899816 [rel_patent_id] =>[rel_patent_doc_number] =>)
10/899816
Projection exposure device Jul 26, 2004 Issued
Array ( [id] => 7059642 [patent_doc_number] => 20050002002 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2005-01-06 [patent_title] => 'Pattern writing apparatus and pattern writing method' [patent_app_type] => utility [patent_app_number] => 10/898197 [patent_app_country] => US [patent_app_date] => 2004-07-26 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 25 [patent_figures_cnt] => 25 [patent_no_of_words] => 12571 [patent_no_of_claims] => 18 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0002/20050002002.pdf [firstpage_image] =>[orig_patent_app_number] => 10898197 [rel_patent_id] =>[rel_patent_doc_number] =>)
10/898197
Pattern writing apparatus and pattern writing method Jul 25, 2004 Issued
Array ( [id] => 744702 [patent_doc_number] => 07030959 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2006-04-18 [patent_title] => 'Extreme ultraviolet reticle protection using gas flow thermophoresis' [patent_app_type] => utility [patent_app_number] => 10/898475 [patent_app_country] => US [patent_app_date] => 2004-07-23 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 10 [patent_figures_cnt] => 16 [patent_no_of_words] => 6298 [patent_no_of_claims] => 38 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 129 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/07/030/07030959.pdf [firstpage_image] =>[orig_patent_app_number] => 10898475 [rel_patent_id] =>[rel_patent_doc_number] =>)
10/898475
Extreme ultraviolet reticle protection using gas flow thermophoresis Jul 22, 2004 Issued
Array ( [id] => 740887 [patent_doc_number] => 07034921 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2006-04-25 [patent_title] => 'Light receiving apparatus, mark detecting apparatus using light receiving apparatus, exposing apparatus, maintenance method of exposing apparatus, manufacturing method of semiconductor device using exposing apparatus and semiconductor manufacturing plant' [patent_app_type] => utility [patent_app_number] => 10/895094 [patent_app_country] => US [patent_app_date] => 2004-07-21 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 12 [patent_figures_cnt] => 12 [patent_no_of_words] => 8444 [patent_no_of_claims] => 9 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 203 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/07/034/07034921.pdf [firstpage_image] =>[orig_patent_app_number] => 10895094 [rel_patent_id] =>[rel_patent_doc_number] =>)
10/895094
Light receiving apparatus, mark detecting apparatus using light receiving apparatus, exposing apparatus, maintenance method of exposing apparatus, manufacturing method of semiconductor device using exposing apparatus and semiconductor manufacturing plant Jul 20, 2004 Issued
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