Search

Alan A. Mathews

Examiner (ID: 10466)

Most Active Art Unit
2101
Art Unit(s)
2101, 2882, 2851, 2203
Total Applications
2349
Issued Applications
2176
Pending Applications
25
Abandoned Applications
148

Applications

Application numberTitle of the applicationFiling DateStatus
Array ( [id] => 7419799 [patent_doc_number] => 20040160591 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2004-08-19 [patent_title] => 'Diaphragm for an integrator unit' [patent_app_type] => new [patent_app_number] => 10/777109 [patent_app_country] => US [patent_app_date] => 2004-02-13 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 4 [patent_figures_cnt] => 4 [patent_no_of_words] => 6010 [patent_no_of_claims] => 19 [patent_no_of_ind_claims] => 4 [patent_words_short_claim] => 120 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0160/20040160591.pdf [firstpage_image] =>[orig_patent_app_number] => 10777109 [rel_patent_id] =>[rel_patent_doc_number] =>)
10/777109
Diaphragm for an integrator unit Feb 12, 2004 Issued
Array ( [id] => 7411892 [patent_doc_number] => 20040227913 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2004-11-18 [patent_title] => 'Cooling apparatus, optical element having the same, and exposure apparatus' [patent_app_type] => new [patent_app_number] => 10/776717 [patent_app_country] => US [patent_app_date] => 2004-02-11 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 14 [patent_figures_cnt] => 14 [patent_no_of_words] => 5278 [patent_no_of_claims] => 18 [patent_no_of_ind_claims] => 7 [patent_words_short_claim] => 23 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0227/20040227913.pdf [firstpage_image] =>[orig_patent_app_number] => 10776717 [rel_patent_id] =>[rel_patent_doc_number] =>)
10/776717
Cooling apparatus, optical element having the same, and exposure apparatus Feb 10, 2004 Issued
Array ( [id] => 744725 [patent_doc_number] => 07030966 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2006-04-18 [patent_title] => 'Lithographic apparatus and method for optimizing an illumination source using photolithographic simulations' [patent_app_type] => utility [patent_app_number] => 10/773397 [patent_app_country] => US [patent_app_date] => 2004-02-09 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 48 [patent_figures_cnt] => 74 [patent_no_of_words] => 23982 [patent_no_of_claims] => 59 [patent_no_of_ind_claims] => 4 [patent_words_short_claim] => 89 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/07/030/07030966.pdf [firstpage_image] =>[orig_patent_app_number] => 10773397 [rel_patent_id] =>[rel_patent_doc_number] =>)
10/773397
Lithographic apparatus and method for optimizing an illumination source using photolithographic simulations Feb 8, 2004 Issued
Array ( [id] => 744697 [patent_doc_number] => 07030957 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2006-04-18 [patent_title] => 'Monitoring apparatus and method particularly useful in photolithographically processing substrates' [patent_app_type] => utility [patent_app_number] => 10/763383 [patent_app_country] => US [patent_app_date] => 2004-01-26 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 15 [patent_figures_cnt] => 22 [patent_no_of_words] => 11041 [patent_no_of_claims] => 44 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 181 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/07/030/07030957.pdf [firstpage_image] =>[orig_patent_app_number] => 10763383 [rel_patent_id] =>[rel_patent_doc_number] =>)
10/763383
Monitoring apparatus and method particularly useful in photolithographically processing substrates Jan 25, 2004 Issued
Array ( [id] => 7273960 [patent_doc_number] => 20040233411 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2004-11-25 [patent_title] => 'Projection exposure apparatus and method' [patent_app_type] => new [patent_app_number] => 10/759603 [patent_app_country] => US [patent_app_date] => 2004-01-20 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 47 [patent_figures_cnt] => 47 [patent_no_of_words] => 59652 [patent_no_of_claims] => 19 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 3 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0233/20040233411.pdf [firstpage_image] =>[orig_patent_app_number] => 10759603 [rel_patent_id] =>[rel_patent_doc_number] =>)
10/759603
Projection exposure apparatus and method Jan 19, 2004 Issued
Array ( [id] => 1026242 [patent_doc_number] => 06885433 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2005-04-26 [patent_title] => 'Projection exposure apparatus and method' [patent_app_type] => utility [patent_app_number] => 10/759604 [patent_app_country] => US [patent_app_date] => 2004-01-20 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 46 [patent_figures_cnt] => 89 [patent_no_of_words] => 59446 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 207 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/06/885/06885433.pdf [firstpage_image] =>[orig_patent_app_number] => 10759604 [rel_patent_id] =>[rel_patent_doc_number] =>)
10/759604
Projection exposure apparatus and method Jan 19, 2004 Issued
Array ( [id] => 944654 [patent_doc_number] => 06967710 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2005-11-22 [patent_title] => 'Projection exposure apparatus and method' [patent_app_type] => utility [patent_app_number] => 10/759598 [patent_app_country] => US [patent_app_date] => 2004-01-20 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 46 [patent_figures_cnt] => 89 [patent_no_of_words] => 59442 [patent_no_of_claims] => 87 [patent_no_of_ind_claims] => 8 [patent_words_short_claim] => 200 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/06/967/06967710.pdf [firstpage_image] =>[orig_patent_app_number] => 10759598 [rel_patent_id] =>[rel_patent_doc_number] =>)
10/759598
Projection exposure apparatus and method Jan 19, 2004 Issued
Array ( [id] => 7330335 [patent_doc_number] => 20040130688 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2004-07-08 [patent_title] => 'Temperature adjustment apparatus, exposure apparatus having the temperature adjustment apparatus, and semiconductor device manufacturing method' [patent_app_type] => new [patent_app_number] => 10/738031 [patent_app_country] => US [patent_app_date] => 2003-12-18 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 15 [patent_figures_cnt] => 15 [patent_no_of_words] => 15059 [patent_no_of_claims] => 48 [patent_no_of_ind_claims] => 5 [patent_words_short_claim] => 68 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0130/20040130688.pdf [firstpage_image] =>[orig_patent_app_number] => 10738031 [rel_patent_id] =>[rel_patent_doc_number] =>)
10/738031
Temperature adjustment apparatus, exposure apparatus having the temperature adjustment apparatus, and semiconductor device manufacturing method Dec 17, 2003 Issued
Array ( [id] => 5698456 [patent_doc_number] => 20060215140 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2006-09-28 [patent_title] => 'Method of measuring the performance of an illumination system' [patent_app_type] => utility [patent_app_number] => 10/540067 [patent_app_country] => US [patent_app_date] => 2003-12-18 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 8 [patent_figures_cnt] => 8 [patent_no_of_words] => 9975 [patent_no_of_claims] => 41 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0215/20060215140.pdf [firstpage_image] =>[orig_patent_app_number] => 10540067 [rel_patent_id] =>[rel_patent_doc_number] =>)
10/540067
Method of measuring the performance of an illumination system Dec 17, 2003 Abandoned
Array ( [id] => 7096005 [patent_doc_number] => 20050128463 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2005-06-16 [patent_title] => 'LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD' [patent_app_type] => utility [patent_app_number] => 10/734641 [patent_app_country] => US [patent_app_date] => 2003-12-15 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 6 [patent_figures_cnt] => 6 [patent_no_of_words] => 5605 [patent_no_of_claims] => 14 [patent_no_of_ind_claims] => 4 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0128/20050128463.pdf [firstpage_image] =>[orig_patent_app_number] => 10734641 [rel_patent_id] =>[rel_patent_doc_number] =>)
10/734641
Lithographic apparatus and device manufacturing method Dec 14, 2003 Issued
Array ( [id] => 7455014 [patent_doc_number] => 20040165168 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2004-08-26 [patent_title] => 'Lithographic apparatus and device manufacturing method' [patent_app_type] => new [patent_app_number] => 10/734639 [patent_app_country] => US [patent_app_date] => 2003-12-15 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 3 [patent_figures_cnt] => 3 [patent_no_of_words] => 7336 [patent_no_of_claims] => 18 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 154 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0165/20040165168.pdf [firstpage_image] =>[orig_patent_app_number] => 10734639 [rel_patent_id] =>[rel_patent_doc_number] =>)
10/734639
Lithographic apparatus and device manufacturing method Dec 14, 2003 Issued
Array ( [id] => 7454945 [patent_doc_number] => 20040165160 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2004-08-26 [patent_title] => 'Lithographic apparatus and device manufacturing method' [patent_app_type] => new [patent_app_number] => 10/733771 [patent_app_country] => US [patent_app_date] => 2003-12-12 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 6 [patent_figures_cnt] => 6 [patent_no_of_words] => 6015 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 61 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0165/20040165160.pdf [firstpage_image] =>[orig_patent_app_number] => 10733771 [rel_patent_id] =>[rel_patent_doc_number] =>)
10/733771
Lithographic apparatus and device manufacturing method Dec 11, 2003 Issued
Array ( [id] => 7096006 [patent_doc_number] => 20050128464 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2005-06-16 [patent_title] => 'Integrated lithographic fabrication cluster' [patent_app_type] => utility [patent_app_number] => 10/731430 [patent_app_country] => US [patent_app_date] => 2003-12-10 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 5 [patent_figures_cnt] => 5 [patent_no_of_words] => 6497 [patent_no_of_claims] => 27 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0128/20050128464.pdf [firstpage_image] =>[orig_patent_app_number] => 10731430 [rel_patent_id] =>[rel_patent_doc_number] =>)
10/731430
Integrated lithographic fabrication cluster Dec 9, 2003 Issued
Array ( [id] => 786329 [patent_doc_number] => 06989885 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2006-01-24 [patent_title] => 'Scanning exposure apparatus and method' [patent_app_type] => utility [patent_app_number] => 10/726541 [patent_app_country] => US [patent_app_date] => 2003-12-04 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 13 [patent_figures_cnt] => 21 [patent_no_of_words] => 10402 [patent_no_of_claims] => 6 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 148 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/06/989/06989885.pdf [firstpage_image] =>[orig_patent_app_number] => 10726541 [rel_patent_id] =>[rel_patent_doc_number] =>)
10/726541
Scanning exposure apparatus and method Dec 3, 2003 Issued
Array ( [id] => 7609028 [patent_doc_number] => 06999161 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2006-02-14 [patent_title] => 'Lithographic apparatus, device manufacturing method, and device manufactured thereby' [patent_app_type] => utility [patent_app_number] => 10/721791 [patent_app_country] => US [patent_app_date] => 2003-11-26 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 4 [patent_figures_cnt] => 5 [patent_no_of_words] => 5384 [patent_no_of_claims] => 21 [patent_no_of_ind_claims] => 4 [patent_words_short_claim] => 108 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/06/999/06999161.pdf [firstpage_image] =>[orig_patent_app_number] => 10721791 [rel_patent_id] =>[rel_patent_doc_number] =>)
10/721791
Lithographic apparatus, device manufacturing method, and device manufactured thereby Nov 25, 2003 Issued
Array ( [id] => 954389 [patent_doc_number] => 06958806 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2005-10-25 [patent_title] => 'Lithographic apparatus and device manufacturing method' [patent_app_type] => utility [patent_app_number] => 10/717971 [patent_app_country] => US [patent_app_date] => 2003-11-21 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 3 [patent_figures_cnt] => 4 [patent_no_of_words] => 7023 [patent_no_of_claims] => 19 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 113 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/06/958/06958806.pdf [firstpage_image] =>[orig_patent_app_number] => 10717971 [rel_patent_id] =>[rel_patent_doc_number] =>)
10/717971
Lithographic apparatus and device manufacturing method Nov 20, 2003 Issued
Array ( [id] => 830424 [patent_doc_number] => 07399978 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2008-07-15 [patent_title] => 'Method and device for irradiating spots on a layer' [patent_app_type] => utility [patent_app_number] => 10/539351 [patent_app_country] => US [patent_app_date] => 2003-11-20 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 4 [patent_figures_cnt] => 6 [patent_no_of_words] => 6467 [patent_no_of_claims] => 8 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 191 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/07/399/07399978.pdf [firstpage_image] =>[orig_patent_app_number] => 10539351 [rel_patent_id] =>[rel_patent_doc_number] =>)
10/539351
Method and device for irradiating spots on a layer Nov 19, 2003 Issued
Array ( [id] => 761266 [patent_doc_number] => 07016017 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2006-03-21 [patent_title] => 'Lithographic apparatus and method for optimizing an illumination source using isofocal compensation' [patent_app_type] => utility [patent_app_number] => 10/716439 [patent_app_country] => US [patent_app_date] => 2003-11-20 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 21 [patent_figures_cnt] => 35 [patent_no_of_words] => 10825 [patent_no_of_claims] => 25 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 103 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/07/016/07016017.pdf [firstpage_image] =>[orig_patent_app_number] => 10716439 [rel_patent_id] =>[rel_patent_doc_number] =>)
10/716439
Lithographic apparatus and method for optimizing an illumination source using isofocal compensation Nov 19, 2003 Issued
Array ( [id] => 7324177 [patent_doc_number] => 20040137677 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2004-07-15 [patent_title] => 'Device manufacturing method and computer program' [patent_app_type] => new [patent_app_number] => 10/716939 [patent_app_country] => US [patent_app_date] => 2003-11-20 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 11 [patent_figures_cnt] => 11 [patent_no_of_words] => 6836 [patent_no_of_claims] => 21 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 43 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0137/20040137677.pdf [firstpage_image] =>[orig_patent_app_number] => 10716939 [rel_patent_id] =>[rel_patent_doc_number] =>)
10/716939
Device manufacturing method and computer program Nov 19, 2003 Issued
Array ( [id] => 326927 [patent_doc_number] => 07514699 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2009-04-07 [patent_title] => 'Method and device for irradiating spots on a layer' [patent_app_type] => utility [patent_app_number] => 10/539313 [patent_app_country] => US [patent_app_date] => 2003-11-20 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 5 [patent_figures_cnt] => 9 [patent_no_of_words] => 8287 [patent_no_of_claims] => 13 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 121 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/07/514/07514699.pdf [firstpage_image] =>[orig_patent_app_number] => 10539313 [rel_patent_id] =>[rel_patent_doc_number] =>)
10/539313
Method and device for irradiating spots on a layer Nov 19, 2003 Issued
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