
Alan A. Mathews
Examiner (ID: 10466)
| Most Active Art Unit | 2101 |
| Art Unit(s) | 2101, 2882, 2851, 2203 |
| Total Applications | 2349 |
| Issued Applications | 2176 |
| Pending Applications | 25 |
| Abandoned Applications | 148 |
Applications
| Application number | Title of the application | Filing Date | Status |
|---|---|---|---|
Array
(
[id] => 7419799
[patent_doc_number] => 20040160591
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2004-08-19
[patent_title] => 'Diaphragm for an integrator unit'
[patent_app_type] => new
[patent_app_number] => 10/777109
[patent_app_country] => US
[patent_app_date] => 2004-02-13
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 4
[patent_figures_cnt] => 4
[patent_no_of_words] => 6010
[patent_no_of_claims] => 19
[patent_no_of_ind_claims] => 4
[patent_words_short_claim] => 120
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => publication
[pdf_file] => publications/A1/0160/20040160591.pdf
[firstpage_image] =>[orig_patent_app_number] => 10777109
[rel_patent_id] =>[rel_patent_doc_number] =>) 10/777109 | Diaphragm for an integrator unit | Feb 12, 2004 | Issued |
Array
(
[id] => 7411892
[patent_doc_number] => 20040227913
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2004-11-18
[patent_title] => 'Cooling apparatus, optical element having the same, and exposure apparatus'
[patent_app_type] => new
[patent_app_number] => 10/776717
[patent_app_country] => US
[patent_app_date] => 2004-02-11
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 14
[patent_figures_cnt] => 14
[patent_no_of_words] => 5278
[patent_no_of_claims] => 18
[patent_no_of_ind_claims] => 7
[patent_words_short_claim] => 23
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => publication
[pdf_file] => publications/A1/0227/20040227913.pdf
[firstpage_image] =>[orig_patent_app_number] => 10776717
[rel_patent_id] =>[rel_patent_doc_number] =>) 10/776717 | Cooling apparatus, optical element having the same, and exposure apparatus | Feb 10, 2004 | Issued |
Array
(
[id] => 744725
[patent_doc_number] => 07030966
[patent_country] => US
[patent_kind] => B2
[patent_issue_date] => 2006-04-18
[patent_title] => 'Lithographic apparatus and method for optimizing an illumination source using photolithographic simulations'
[patent_app_type] => utility
[patent_app_number] => 10/773397
[patent_app_country] => US
[patent_app_date] => 2004-02-09
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 48
[patent_figures_cnt] => 74
[patent_no_of_words] => 23982
[patent_no_of_claims] => 59
[patent_no_of_ind_claims] => 4
[patent_words_short_claim] => 89
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => patent
[pdf_file] => patents/07/030/07030966.pdf
[firstpage_image] =>[orig_patent_app_number] => 10773397
[rel_patent_id] =>[rel_patent_doc_number] =>) 10/773397 | Lithographic apparatus and method for optimizing an illumination source using photolithographic simulations | Feb 8, 2004 | Issued |
Array
(
[id] => 744697
[patent_doc_number] => 07030957
[patent_country] => US
[patent_kind] => B2
[patent_issue_date] => 2006-04-18
[patent_title] => 'Monitoring apparatus and method particularly useful in photolithographically processing substrates'
[patent_app_type] => utility
[patent_app_number] => 10/763383
[patent_app_country] => US
[patent_app_date] => 2004-01-26
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 15
[patent_figures_cnt] => 22
[patent_no_of_words] => 11041
[patent_no_of_claims] => 44
[patent_no_of_ind_claims] => 2
[patent_words_short_claim] => 181
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => patent
[pdf_file] => patents/07/030/07030957.pdf
[firstpage_image] =>[orig_patent_app_number] => 10763383
[rel_patent_id] =>[rel_patent_doc_number] =>) 10/763383 | Monitoring apparatus and method particularly useful in photolithographically processing substrates | Jan 25, 2004 | Issued |
Array
(
[id] => 7273960
[patent_doc_number] => 20040233411
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2004-11-25
[patent_title] => 'Projection exposure apparatus and method'
[patent_app_type] => new
[patent_app_number] => 10/759603
[patent_app_country] => US
[patent_app_date] => 2004-01-20
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 47
[patent_figures_cnt] => 47
[patent_no_of_words] => 59652
[patent_no_of_claims] => 19
[patent_no_of_ind_claims] => 2
[patent_words_short_claim] => 3
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => publication
[pdf_file] => publications/A1/0233/20040233411.pdf
[firstpage_image] =>[orig_patent_app_number] => 10759603
[rel_patent_id] =>[rel_patent_doc_number] =>) 10/759603 | Projection exposure apparatus and method | Jan 19, 2004 | Issued |
Array
(
[id] => 1026242
[patent_doc_number] => 06885433
[patent_country] => US
[patent_kind] => B2
[patent_issue_date] => 2005-04-26
[patent_title] => 'Projection exposure apparatus and method'
[patent_app_type] => utility
[patent_app_number] => 10/759604
[patent_app_country] => US
[patent_app_date] => 2004-01-20
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 46
[patent_figures_cnt] => 89
[patent_no_of_words] => 59446
[patent_no_of_claims] => 20
[patent_no_of_ind_claims] => 1
[patent_words_short_claim] => 207
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => patent
[pdf_file] => patents/06/885/06885433.pdf
[firstpage_image] =>[orig_patent_app_number] => 10759604
[rel_patent_id] =>[rel_patent_doc_number] =>) 10/759604 | Projection exposure apparatus and method | Jan 19, 2004 | Issued |
Array
(
[id] => 944654
[patent_doc_number] => 06967710
[patent_country] => US
[patent_kind] => B2
[patent_issue_date] => 2005-11-22
[patent_title] => 'Projection exposure apparatus and method'
[patent_app_type] => utility
[patent_app_number] => 10/759598
[patent_app_country] => US
[patent_app_date] => 2004-01-20
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 46
[patent_figures_cnt] => 89
[patent_no_of_words] => 59442
[patent_no_of_claims] => 87
[patent_no_of_ind_claims] => 8
[patent_words_short_claim] => 200
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => patent
[pdf_file] => patents/06/967/06967710.pdf
[firstpage_image] =>[orig_patent_app_number] => 10759598
[rel_patent_id] =>[rel_patent_doc_number] =>) 10/759598 | Projection exposure apparatus and method | Jan 19, 2004 | Issued |
Array
(
[id] => 7330335
[patent_doc_number] => 20040130688
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2004-07-08
[patent_title] => 'Temperature adjustment apparatus, exposure apparatus having the temperature adjustment apparatus, and semiconductor device manufacturing method'
[patent_app_type] => new
[patent_app_number] => 10/738031
[patent_app_country] => US
[patent_app_date] => 2003-12-18
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 15
[patent_figures_cnt] => 15
[patent_no_of_words] => 15059
[patent_no_of_claims] => 48
[patent_no_of_ind_claims] => 5
[patent_words_short_claim] => 68
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => publication
[pdf_file] => publications/A1/0130/20040130688.pdf
[firstpage_image] =>[orig_patent_app_number] => 10738031
[rel_patent_id] =>[rel_patent_doc_number] =>) 10/738031 | Temperature adjustment apparatus, exposure apparatus having the temperature adjustment apparatus, and semiconductor device manufacturing method | Dec 17, 2003 | Issued |
Array
(
[id] => 5698456
[patent_doc_number] => 20060215140
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2006-09-28
[patent_title] => 'Method of measuring the performance of an illumination system'
[patent_app_type] => utility
[patent_app_number] => 10/540067
[patent_app_country] => US
[patent_app_date] => 2003-12-18
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 8
[patent_figures_cnt] => 8
[patent_no_of_words] => 9975
[patent_no_of_claims] => 41
[patent_no_of_ind_claims] => 1
[patent_words_short_claim] => 0
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => publication
[pdf_file] => publications/A1/0215/20060215140.pdf
[firstpage_image] =>[orig_patent_app_number] => 10540067
[rel_patent_id] =>[rel_patent_doc_number] =>) 10/540067 | Method of measuring the performance of an illumination system | Dec 17, 2003 | Abandoned |
Array
(
[id] => 7096005
[patent_doc_number] => 20050128463
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2005-06-16
[patent_title] => 'LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD'
[patent_app_type] => utility
[patent_app_number] => 10/734641
[patent_app_country] => US
[patent_app_date] => 2003-12-15
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 6
[patent_figures_cnt] => 6
[patent_no_of_words] => 5605
[patent_no_of_claims] => 14
[patent_no_of_ind_claims] => 4
[patent_words_short_claim] => 0
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => publication
[pdf_file] => publications/A1/0128/20050128463.pdf
[firstpage_image] =>[orig_patent_app_number] => 10734641
[rel_patent_id] =>[rel_patent_doc_number] =>) 10/734641 | Lithographic apparatus and device manufacturing method | Dec 14, 2003 | Issued |
Array
(
[id] => 7455014
[patent_doc_number] => 20040165168
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2004-08-26
[patent_title] => 'Lithographic apparatus and device manufacturing method'
[patent_app_type] => new
[patent_app_number] => 10/734639
[patent_app_country] => US
[patent_app_date] => 2003-12-15
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 3
[patent_figures_cnt] => 3
[patent_no_of_words] => 7336
[patent_no_of_claims] => 18
[patent_no_of_ind_claims] => 3
[patent_words_short_claim] => 154
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => publication
[pdf_file] => publications/A1/0165/20040165168.pdf
[firstpage_image] =>[orig_patent_app_number] => 10734639
[rel_patent_id] =>[rel_patent_doc_number] =>) 10/734639 | Lithographic apparatus and device manufacturing method | Dec 14, 2003 | Issued |
Array
(
[id] => 7454945
[patent_doc_number] => 20040165160
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2004-08-26
[patent_title] => 'Lithographic apparatus and device manufacturing method'
[patent_app_type] => new
[patent_app_number] => 10/733771
[patent_app_country] => US
[patent_app_date] => 2003-12-12
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 6
[patent_figures_cnt] => 6
[patent_no_of_words] => 6015
[patent_no_of_claims] => 20
[patent_no_of_ind_claims] => 3
[patent_words_short_claim] => 61
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => publication
[pdf_file] => publications/A1/0165/20040165160.pdf
[firstpage_image] =>[orig_patent_app_number] => 10733771
[rel_patent_id] =>[rel_patent_doc_number] =>) 10/733771 | Lithographic apparatus and device manufacturing method | Dec 11, 2003 | Issued |
Array
(
[id] => 7096006
[patent_doc_number] => 20050128464
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2005-06-16
[patent_title] => 'Integrated lithographic fabrication cluster'
[patent_app_type] => utility
[patent_app_number] => 10/731430
[patent_app_country] => US
[patent_app_date] => 2003-12-10
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 5
[patent_figures_cnt] => 5
[patent_no_of_words] => 6497
[patent_no_of_claims] => 27
[patent_no_of_ind_claims] => 3
[patent_words_short_claim] => 0
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => publication
[pdf_file] => publications/A1/0128/20050128464.pdf
[firstpage_image] =>[orig_patent_app_number] => 10731430
[rel_patent_id] =>[rel_patent_doc_number] =>) 10/731430 | Integrated lithographic fabrication cluster | Dec 9, 2003 | Issued |
Array
(
[id] => 786329
[patent_doc_number] => 06989885
[patent_country] => US
[patent_kind] => B2
[patent_issue_date] => 2006-01-24
[patent_title] => 'Scanning exposure apparatus and method'
[patent_app_type] => utility
[patent_app_number] => 10/726541
[patent_app_country] => US
[patent_app_date] => 2003-12-04
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 13
[patent_figures_cnt] => 21
[patent_no_of_words] => 10402
[patent_no_of_claims] => 6
[patent_no_of_ind_claims] => 1
[patent_words_short_claim] => 148
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => patent
[pdf_file] => patents/06/989/06989885.pdf
[firstpage_image] =>[orig_patent_app_number] => 10726541
[rel_patent_id] =>[rel_patent_doc_number] =>) 10/726541 | Scanning exposure apparatus and method | Dec 3, 2003 | Issued |
Array
(
[id] => 7609028
[patent_doc_number] => 06999161
[patent_country] => US
[patent_kind] => B2
[patent_issue_date] => 2006-02-14
[patent_title] => 'Lithographic apparatus, device manufacturing method, and device manufactured thereby'
[patent_app_type] => utility
[patent_app_number] => 10/721791
[patent_app_country] => US
[patent_app_date] => 2003-11-26
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 4
[patent_figures_cnt] => 5
[patent_no_of_words] => 5384
[patent_no_of_claims] => 21
[patent_no_of_ind_claims] => 4
[patent_words_short_claim] => 108
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => patent
[pdf_file] => patents/06/999/06999161.pdf
[firstpage_image] =>[orig_patent_app_number] => 10721791
[rel_patent_id] =>[rel_patent_doc_number] =>) 10/721791 | Lithographic apparatus, device manufacturing method, and device manufactured thereby | Nov 25, 2003 | Issued |
Array
(
[id] => 954389
[patent_doc_number] => 06958806
[patent_country] => US
[patent_kind] => B2
[patent_issue_date] => 2005-10-25
[patent_title] => 'Lithographic apparatus and device manufacturing method'
[patent_app_type] => utility
[patent_app_number] => 10/717971
[patent_app_country] => US
[patent_app_date] => 2003-11-21
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 3
[patent_figures_cnt] => 4
[patent_no_of_words] => 7023
[patent_no_of_claims] => 19
[patent_no_of_ind_claims] => 3
[patent_words_short_claim] => 113
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => patent
[pdf_file] => patents/06/958/06958806.pdf
[firstpage_image] =>[orig_patent_app_number] => 10717971
[rel_patent_id] =>[rel_patent_doc_number] =>) 10/717971 | Lithographic apparatus and device manufacturing method | Nov 20, 2003 | Issued |
Array
(
[id] => 830424
[patent_doc_number] => 07399978
[patent_country] => US
[patent_kind] => B2
[patent_issue_date] => 2008-07-15
[patent_title] => 'Method and device for irradiating spots on a layer'
[patent_app_type] => utility
[patent_app_number] => 10/539351
[patent_app_country] => US
[patent_app_date] => 2003-11-20
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 4
[patent_figures_cnt] => 6
[patent_no_of_words] => 6467
[patent_no_of_claims] => 8
[patent_no_of_ind_claims] => 2
[patent_words_short_claim] => 191
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => patent
[pdf_file] => patents/07/399/07399978.pdf
[firstpage_image] =>[orig_patent_app_number] => 10539351
[rel_patent_id] =>[rel_patent_doc_number] =>) 10/539351 | Method and device for irradiating spots on a layer | Nov 19, 2003 | Issued |
Array
(
[id] => 761266
[patent_doc_number] => 07016017
[patent_country] => US
[patent_kind] => B2
[patent_issue_date] => 2006-03-21
[patent_title] => 'Lithographic apparatus and method for optimizing an illumination source using isofocal compensation'
[patent_app_type] => utility
[patent_app_number] => 10/716439
[patent_app_country] => US
[patent_app_date] => 2003-11-20
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 21
[patent_figures_cnt] => 35
[patent_no_of_words] => 10825
[patent_no_of_claims] => 25
[patent_no_of_ind_claims] => 3
[patent_words_short_claim] => 103
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => patent
[pdf_file] => patents/07/016/07016017.pdf
[firstpage_image] =>[orig_patent_app_number] => 10716439
[rel_patent_id] =>[rel_patent_doc_number] =>) 10/716439 | Lithographic apparatus and method for optimizing an illumination source using isofocal compensation | Nov 19, 2003 | Issued |
Array
(
[id] => 7324177
[patent_doc_number] => 20040137677
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2004-07-15
[patent_title] => 'Device manufacturing method and computer program'
[patent_app_type] => new
[patent_app_number] => 10/716939
[patent_app_country] => US
[patent_app_date] => 2003-11-20
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 11
[patent_figures_cnt] => 11
[patent_no_of_words] => 6836
[patent_no_of_claims] => 21
[patent_no_of_ind_claims] => 3
[patent_words_short_claim] => 43
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => publication
[pdf_file] => publications/A1/0137/20040137677.pdf
[firstpage_image] =>[orig_patent_app_number] => 10716939
[rel_patent_id] =>[rel_patent_doc_number] =>) 10/716939 | Device manufacturing method and computer program | Nov 19, 2003 | Issued |
Array
(
[id] => 326927
[patent_doc_number] => 07514699
[patent_country] => US
[patent_kind] => B2
[patent_issue_date] => 2009-04-07
[patent_title] => 'Method and device for irradiating spots on a layer'
[patent_app_type] => utility
[patent_app_number] => 10/539313
[patent_app_country] => US
[patent_app_date] => 2003-11-20
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 5
[patent_figures_cnt] => 9
[patent_no_of_words] => 8287
[patent_no_of_claims] => 13
[patent_no_of_ind_claims] => 3
[patent_words_short_claim] => 121
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => patent
[pdf_file] => patents/07/514/07514699.pdf
[firstpage_image] =>[orig_patent_app_number] => 10539313
[rel_patent_id] =>[rel_patent_doc_number] =>) 10/539313 | Method and device for irradiating spots on a layer | Nov 19, 2003 | Issued |