Search

Alan A. Mathews

Examiner (ID: 10466)

Most Active Art Unit
2101
Art Unit(s)
2101, 2882, 2851, 2203
Total Applications
2349
Issued Applications
2176
Pending Applications
25
Abandoned Applications
148

Applications

Application numberTitle of the applicationFiling DateStatus
Array ( [id] => 7101241 [patent_doc_number] => 20050103967 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2005-05-19 [patent_title] => 'Flexure-supported split reaction mass' [patent_app_type] => utility [patent_app_number] => 10/713055 [patent_app_country] => US [patent_app_date] => 2003-11-17 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 10 [patent_figures_cnt] => 10 [patent_no_of_words] => 4473 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 4 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0103/20050103967.pdf [firstpage_image] =>[orig_patent_app_number] => 10713055 [rel_patent_id] =>[rel_patent_doc_number] =>)
10/713055
Flexure-supported split reaction mass Nov 16, 2003 Issued
Array ( [id] => 444870 [patent_doc_number] => 07256865 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2007-08-14 [patent_title] => 'Methods and apparatuses for applying wafer-alignment marks' [patent_app_type] => utility [patent_app_number] => 10/692494 [patent_app_country] => US [patent_app_date] => 2003-10-24 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 4 [patent_figures_cnt] => 4 [patent_no_of_words] => 3301 [patent_no_of_claims] => 10 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 71 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/07/256/07256865.pdf [firstpage_image] =>[orig_patent_app_number] => 10692494 [rel_patent_id] =>[rel_patent_doc_number] =>)
10/692494
Methods and apparatuses for applying wafer-alignment marks Oct 23, 2003 Issued
Array ( [id] => 7330361 [patent_doc_number] => 20040130693 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2004-07-08 [patent_title] => 'Lithographic apparatus, optical element and device manufacturing method' [patent_app_type] => new [patent_app_number] => 10/691969 [patent_app_country] => US [patent_app_date] => 2003-10-24 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 4 [patent_figures_cnt] => 4 [patent_no_of_words] => 4194 [patent_no_of_claims] => 26 [patent_no_of_ind_claims] => 4 [patent_words_short_claim] => 36 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0130/20040130693.pdf [firstpage_image] =>[orig_patent_app_number] => 10691969 [rel_patent_id] =>[rel_patent_doc_number] =>)
10/691969
Lithographic apparatus, optical element and device manufacturing method Oct 23, 2003 Abandoned
Array ( [id] => 7375311 [patent_doc_number] => 20040080733 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2004-04-29 [patent_title] => 'Projection exposure method with luminous flux distribution' [patent_app_type] => new [patent_app_number] => 10/679151 [patent_app_country] => US [patent_app_date] => 2003-10-06 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 25 [patent_figures_cnt] => 25 [patent_no_of_words] => 30501 [patent_no_of_claims] => 41 [patent_no_of_ind_claims] => 14 [patent_words_short_claim] => 121 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0080/20040080733.pdf [firstpage_image] =>[orig_patent_app_number] => 10679151 [rel_patent_id] =>[rel_patent_doc_number] =>)
10/679151
Projection exposure method with luminous flux distribution Oct 5, 2003 Abandoned
Array ( [id] => 7375269 [patent_doc_number] => 20040080727 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2004-04-29 [patent_title] => 'EUV exposure apparatus with cooling device to prevent overheat of electromagnetic motor in vacuum' [patent_app_type] => new [patent_app_number] => 10/674359 [patent_app_country] => US [patent_app_date] => 2003-10-01 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 6 [patent_figures_cnt] => 6 [patent_no_of_words] => 3856 [patent_no_of_claims] => 10 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 34 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0080/20040080727.pdf [firstpage_image] =>[orig_patent_app_number] => 10674359 [rel_patent_id] =>[rel_patent_doc_number] =>)
10/674359
EUV exposure apparatus with cooling device to prevent overheat of electromagnetic motor in vacuum Sep 30, 2003 Abandoned
Array ( [id] => 7224663 [patent_doc_number] => 20050078284 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2005-04-14 [patent_title] => 'Lithographic apparatus and device manufacturing method' [patent_app_type] => utility [patent_app_number] => 10/671588 [patent_app_country] => US [patent_app_date] => 2003-09-29 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 10 [patent_figures_cnt] => 10 [patent_no_of_words] => 5080 [patent_no_of_claims] => 11 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0078/20050078284.pdf [firstpage_image] =>[orig_patent_app_number] => 10671588 [rel_patent_id] =>[rel_patent_doc_number] =>)
10/671588
Lithographic apparatus and device manufacturing method Sep 28, 2003 Issued
Array ( [id] => 466512 [patent_doc_number] => 07239369 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2007-07-03 [patent_title] => 'Lithographic apparatus and device manufacturing method' [patent_app_type] => utility [patent_app_number] => 10/670791 [patent_app_country] => US [patent_app_date] => 2003-09-26 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 9 [patent_figures_cnt] => 17 [patent_no_of_words] => 8256 [patent_no_of_claims] => 21 [patent_no_of_ind_claims] => 8 [patent_words_short_claim] => 168 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/07/239/07239369.pdf [firstpage_image] =>[orig_patent_app_number] => 10670791 [rel_patent_id] =>[rel_patent_doc_number] =>)
10/670791
Lithographic apparatus and device manufacturing method Sep 25, 2003 Issued
Array ( [id] => 729689 [patent_doc_number] => 07037006 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2006-05-02 [patent_title] => 'Camera crane' [patent_app_type] => utility [patent_app_number] => 10/668120 [patent_app_country] => US [patent_app_date] => 2003-09-23 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 19 [patent_figures_cnt] => 37 [patent_no_of_words] => 12058 [patent_no_of_claims] => 16 [patent_no_of_ind_claims] => 7 [patent_words_short_claim] => 60 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/07/037/07037006.pdf [firstpage_image] =>[orig_patent_app_number] => 10668120 [rel_patent_id] =>[rel_patent_doc_number] =>)
10/668120
Camera crane Sep 22, 2003 Issued
Array ( [id] => 1098809 [patent_doc_number] => 06822728 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2004-11-23 [patent_title] => 'Illumination system with spatially controllable partial coherence compensation for line width variances in a photolithographic system' [patent_app_type] => B2 [patent_app_number] => 10/667387 [patent_app_country] => US [patent_app_date] => 2003-09-23 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 12 [patent_figures_cnt] => 23 [patent_no_of_words] => 5798 [patent_no_of_claims] => 31 [patent_no_of_ind_claims] => 8 [patent_words_short_claim] => 59 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/06/822/06822728.pdf [firstpage_image] =>[orig_patent_app_number] => 10667387 [rel_patent_id] =>[rel_patent_doc_number] =>)
10/667387
Illumination system with spatially controllable partial coherence compensation for line width variances in a photolithographic system Sep 22, 2003 Issued
Array ( [id] => 973502 [patent_doc_number] => 06937318 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2005-08-30 [patent_title] => 'Lithographic apparatus, computer program, device manufacturing method, and device manufactured thereby' [patent_app_type] => utility [patent_app_number] => 10/665351 [patent_app_country] => US [patent_app_date] => 2003-09-22 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 1 [patent_figures_cnt] => 2 [patent_no_of_words] => 5391 [patent_no_of_claims] => 16 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 193 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/06/937/06937318.pdf [firstpage_image] =>[orig_patent_app_number] => 10665351 [rel_patent_id] =>[rel_patent_doc_number] =>)
10/665351
Lithographic apparatus, computer program, device manufacturing method, and device manufactured thereby Sep 21, 2003 Issued
Array ( [id] => 7126702 [patent_doc_number] => 20050058446 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2005-03-17 [patent_title] => 'Method, apparatus and computer product for substrate processing' [patent_app_type] => utility [patent_app_number] => 10/662881 [patent_app_country] => US [patent_app_date] => 2003-09-16 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 5 [patent_figures_cnt] => 5 [patent_no_of_words] => 9032 [patent_no_of_claims] => 26 [patent_no_of_ind_claims] => 4 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0058/20050058446.pdf [firstpage_image] =>[orig_patent_app_number] => 10662881 [rel_patent_id] =>[rel_patent_doc_number] =>)
10/662881
Method, apparatus and computer product for substrate processing Sep 15, 2003 Issued
Array ( [id] => 669712 [patent_doc_number] => 07095481 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2006-08-22 [patent_title] => 'Exposure method and apparatus' [patent_app_type] => utility [patent_app_number] => 10/660681 [patent_app_country] => US [patent_app_date] => 2003-09-12 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 20 [patent_figures_cnt] => 20 [patent_no_of_words] => 8417 [patent_no_of_claims] => 8 [patent_no_of_ind_claims] => 5 [patent_words_short_claim] => 96 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/07/095/07095481.pdf [firstpage_image] =>[orig_patent_app_number] => 10660681 [rel_patent_id] =>[rel_patent_doc_number] =>)
10/660681
Exposure method and apparatus Sep 11, 2003 Issued
Array ( [id] => 969504 [patent_doc_number] => 06940585 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2005-09-06 [patent_title] => 'Evaluation mask, focus measuring method and aberration measuring method' [patent_app_type] => utility [patent_app_number] => 10/657251 [patent_app_country] => US [patent_app_date] => 2003-09-09 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 14 [patent_figures_cnt] => 48 [patent_no_of_words] => 6675 [patent_no_of_claims] => 21 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 186 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/06/940/06940585.pdf [firstpage_image] =>[orig_patent_app_number] => 10657251 [rel_patent_id] =>[rel_patent_doc_number] =>)
10/657251
Evaluation mask, focus measuring method and aberration measuring method Sep 8, 2003 Issued
Array ( [id] => 7245999 [patent_doc_number] => 20050073663 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2005-04-07 [patent_title] => 'Reflection mirror apparatus, exposure apparatus and device manufacturing method' [patent_app_type] => utility [patent_app_number] => 10/647376 [patent_app_country] => US [patent_app_date] => 2003-08-26 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 14 [patent_figures_cnt] => 14 [patent_no_of_words] => 5585 [patent_no_of_claims] => 16 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0073/20050073663.pdf [firstpage_image] =>[orig_patent_app_number] => 10647376 [rel_patent_id] =>[rel_patent_doc_number] =>)
10/647376
Reflection mirror apparatus, exposure apparatus and device manufacturing method Aug 25, 2003 Issued
Array ( [id] => 1072970 [patent_doc_number] => 06837632 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2005-01-04 [patent_title] => 'Substrate treating apparatus' [patent_app_type] => utility [patent_app_number] => 10/646902 [patent_app_country] => US [patent_app_date] => 2003-08-22 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 13 [patent_figures_cnt] => 17 [patent_no_of_words] => 20002 [patent_no_of_claims] => 31 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 110 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/06/837/06837632.pdf [firstpage_image] =>[orig_patent_app_number] => 10646902 [rel_patent_id] =>[rel_patent_doc_number] =>)
10/646902
Substrate treating apparatus Aug 21, 2003 Issued
Array ( [id] => 7310897 [patent_doc_number] => 20040032574 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2004-02-19 [patent_title] => 'Lithographic projection apparatus, device manufacturing method, and device manufacturing thereby' [patent_app_type] => new [patent_app_number] => 10/641306 [patent_app_country] => US [patent_app_date] => 2003-08-15 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 3 [patent_figures_cnt] => 3 [patent_no_of_words] => 4721 [patent_no_of_claims] => 1 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 109 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0032/20040032574.pdf [firstpage_image] =>[orig_patent_app_number] => 10641306 [rel_patent_id] =>[rel_patent_doc_number] =>)
10/641306
Lithographic projection apparatus, device manufacturing method, and device manufacturing thereby Aug 14, 2003 Issued
Array ( [id] => 1069896 [patent_doc_number] => 06844919 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2005-01-18 [patent_title] => 'Projection optical system and exposure apparatus having the projection optical system' [patent_app_type] => utility [patent_app_number] => 10/628744 [patent_app_country] => US [patent_app_date] => 2003-07-30 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 9 [patent_figures_cnt] => 9 [patent_no_of_words] => 9917 [patent_no_of_claims] => 139 [patent_no_of_ind_claims] => 4 [patent_words_short_claim] => 177 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/06/844/06844919.pdf [firstpage_image] =>[orig_patent_app_number] => 10628744 [rel_patent_id] =>[rel_patent_doc_number] =>)
10/628744
Projection optical system and exposure apparatus having the projection optical system Jul 29, 2003 Issued
Array ( [id] => 7150030 [patent_doc_number] => 20050024618 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2005-02-03 [patent_title] => 'METHOD AND APPARATUS FOR AMPLITUDE FILTERING IN THE FREQUENCY PLANE OF A LITHOGRAPHIC PROJECTION SYSTEM' [patent_app_type] => utility [patent_app_number] => 10/604519 [patent_app_country] => US [patent_app_date] => 2003-07-28 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 5 [patent_figures_cnt] => 5 [patent_no_of_words] => 2798 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0024/20050024618.pdf [firstpage_image] =>[orig_patent_app_number] => 10604519 [rel_patent_id] =>[rel_patent_doc_number] =>)
10/604519
Method and apparatus for amplitude filtering in the frequency plane of a lithographic projection system Jul 27, 2003 Issued
Array ( [id] => 771445 [patent_doc_number] => 07006195 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2006-02-28 [patent_title] => 'Method and system for improving exposure uniformity in a step and repeat process' [patent_app_type] => utility [patent_app_number] => 10/625451 [patent_app_country] => US [patent_app_date] => 2003-07-23 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 2 [patent_figures_cnt] => 2 [patent_no_of_words] => 6463 [patent_no_of_claims] => 2 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 128 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/07/006/07006195.pdf [firstpage_image] =>[orig_patent_app_number] => 10625451 [rel_patent_id] =>[rel_patent_doc_number] =>)
10/625451
Method and system for improving exposure uniformity in a step and repeat process Jul 22, 2003 Issued
Array ( [id] => 7357106 [patent_doc_number] => 20040090608 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2004-05-13 [patent_title] => 'Illumination optical apparatus and exposure apparatus' [patent_app_type] => new [patent_app_number] => 10/609557 [patent_app_country] => US [patent_app_date] => 2003-07-01 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 5 [patent_figures_cnt] => 5 [patent_no_of_words] => 5851 [patent_no_of_claims] => 73 [patent_no_of_ind_claims] => 20 [patent_words_short_claim] => 78 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0090/20040090608.pdf [firstpage_image] =>[orig_patent_app_number] => 10609557 [rel_patent_id] =>[rel_patent_doc_number] =>)
10/609557
Illumination optical apparatus and exposure apparatus Jun 30, 2003 Abandoned
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