Search

Alan A. Mathews

Examiner (ID: 10466)

Most Active Art Unit
2101
Art Unit(s)
2101, 2882, 2851, 2203
Total Applications
2349
Issued Applications
2176
Pending Applications
25
Abandoned Applications
148

Applications

Application numberTitle of the applicationFiling DateStatus
Array ( [id] => 5708999 [patent_doc_number] => 20060050343 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2006-03-09 [patent_title] => 'Apparatus and method of exposing light to a semiconductor device having a curved surface' [patent_app_type] => utility [patent_app_number] => 10/538980 [patent_app_country] => US [patent_app_date] => 2003-01-09 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 6 [patent_figures_cnt] => 6 [patent_no_of_words] => 4552 [patent_no_of_claims] => 34 [patent_no_of_ind_claims] => 4 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0050/20060050343.pdf [firstpage_image] =>[orig_patent_app_number] => 10538980 [rel_patent_id] =>[rel_patent_doc_number] =>)
10/538980
Apparatus and method of exposing light to a semiconductor device having a curved surface Jan 8, 2003 Issued
Array ( [id] => 5710634 [patent_doc_number] => 20060051979 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2006-03-09 [patent_title] => 'Apparatus and method of exposing a semiconductor device having a curved surface to light' [patent_app_type] => utility [patent_app_number] => 10/538979 [patent_app_country] => US [patent_app_date] => 2003-01-09 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 3 [patent_figures_cnt] => 3 [patent_no_of_words] => 4950 [patent_no_of_claims] => 34 [patent_no_of_ind_claims] => 6 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0051/20060051979.pdf [firstpage_image] =>[orig_patent_app_number] => 10538979 [rel_patent_id] =>[rel_patent_doc_number] =>)
10/538979
Apparatus and method of exposing a semiconductor device having a curved surface to light Jan 8, 2003 Issued
Array ( [id] => 1197896 [patent_doc_number] => 06722798 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2004-04-20 [patent_title] => 'Substrate processing apparatus and substrate processing method' [patent_app_type] => B2 [patent_app_number] => 10/337831 [patent_app_country] => US [patent_app_date] => 2003-01-08 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 11 [patent_figures_cnt] => 0 [patent_no_of_words] => 11686 [patent_no_of_claims] => 14 [patent_no_of_ind_claims] => 5 [patent_words_short_claim] => 169 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/06/722/06722798.pdf [firstpage_image] =>[orig_patent_app_number] => 10337831 [rel_patent_id] =>[rel_patent_doc_number] =>)
10/337831
Substrate processing apparatus and substrate processing method Jan 7, 2003 Issued
Array ( [id] => 1074456 [patent_doc_number] => 06839124 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2005-01-04 [patent_title] => 'Projection aligner' [patent_app_type] => utility [patent_app_number] => 10/327947 [patent_app_country] => US [patent_app_date] => 2002-12-26 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 10 [patent_figures_cnt] => 12 [patent_no_of_words] => 6683 [patent_no_of_claims] => 9 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 241 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/06/839/06839124.pdf [firstpage_image] =>[orig_patent_app_number] => 10327947 [rel_patent_id] =>[rel_patent_doc_number] =>)
10/327947
Projection aligner Dec 25, 2002 Issued
Array ( [id] => 6761110 [patent_doc_number] => 20030124471 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2003-07-03 [patent_title] => 'Producing history managing method and system for photosensitive sheet package' [patent_app_type] => new [patent_app_number] => 10/325901 [patent_app_country] => US [patent_app_date] => 2002-12-23 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 16 [patent_figures_cnt] => 16 [patent_no_of_words] => 10550 [patent_no_of_claims] => 28 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 127 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0124/20030124471.pdf [firstpage_image] =>[orig_patent_app_number] => 10325901 [rel_patent_id] =>[rel_patent_doc_number] =>)
10/325901
Producing history managing method and system for photosensitive sheet package Dec 22, 2002 Issued
Array ( [id] => 701276 [patent_doc_number] => 07068347 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2006-06-27 [patent_title] => 'Apparatus for reducing pellicle darkening' [patent_app_type] => utility [patent_app_number] => 10/327251 [patent_app_country] => US [patent_app_date] => 2002-12-20 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 3 [patent_figures_cnt] => 3 [patent_no_of_words] => 1311 [patent_no_of_claims] => 21 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 48 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/07/068/07068347.pdf [firstpage_image] =>[orig_patent_app_number] => 10327251 [rel_patent_id] =>[rel_patent_doc_number] =>)
10/327251
Apparatus for reducing pellicle darkening Dec 19, 2002 Issued
Array ( [id] => 1223072 [patent_doc_number] => 06704088 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2004-03-09 [patent_title] => 'Environmental-control method and apparatus for an exposure system' [patent_app_type] => B2 [patent_app_number] => 10/323742 [patent_app_country] => US [patent_app_date] => 2002-12-20 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 4 [patent_figures_cnt] => 6 [patent_no_of_words] => 4029 [patent_no_of_claims] => 50 [patent_no_of_ind_claims] => 14 [patent_words_short_claim] => 81 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/06/704/06704088.pdf [firstpage_image] =>[orig_patent_app_number] => 10323742 [rel_patent_id] =>[rel_patent_doc_number] =>)
10/323742
Environmental-control method and apparatus for an exposure system Dec 19, 2002 Issued
Array ( [id] => 7109411 [patent_doc_number] => 20050206865 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2005-09-22 [patent_title] => 'Balanced positioning system for use in lithographic apparatus' [patent_app_type] => utility [patent_app_number] => 10/322800 [patent_app_country] => US [patent_app_date] => 2002-12-19 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 7 [patent_figures_cnt] => 7 [patent_no_of_words] => 9240 [patent_no_of_claims] => 33 [patent_no_of_ind_claims] => 4 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0206/20050206865.pdf [firstpage_image] =>[orig_patent_app_number] => 10322800 [rel_patent_id] =>[rel_patent_doc_number] =>)
10/322800
Balanced positioning system for use in lithographic apparatus Dec 18, 2002 Issued
Array ( [id] => 6808848 [patent_doc_number] => 20030198787 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2003-10-23 [patent_title] => 'Device manufacturing method, device manufactured thereby and lithographic apparatus therefor' [patent_app_type] => new [patent_app_number] => 10/321847 [patent_app_country] => US [patent_app_date] => 2002-12-18 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 3 [patent_figures_cnt] => 3 [patent_no_of_words] => 5212 [patent_no_of_claims] => 30 [patent_no_of_ind_claims] => 5 [patent_words_short_claim] => 96 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0198/20030198787.pdf [firstpage_image] =>[orig_patent_app_number] => 10321847 [rel_patent_id] =>[rel_patent_doc_number] =>)
10/321847
Device manufacturing method, device manufactured thereby and lithographic apparatus therefor Dec 17, 2002 Issued
Array ( [id] => 7462275 [patent_doc_number] => 20040119964 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2004-06-24 [patent_title] => 'Double isolation fine stage' [patent_app_type] => new [patent_app_number] => 10/325391 [patent_app_country] => US [patent_app_date] => 2002-12-18 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 6 [patent_figures_cnt] => 6 [patent_no_of_words] => 5132 [patent_no_of_claims] => 14 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 82 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0119/20040119964.pdf [firstpage_image] =>[orig_patent_app_number] => 10325391 [rel_patent_id] =>[rel_patent_doc_number] =>)
10/325391
Double isolation fine stage Dec 17, 2002 Abandoned
Array ( [id] => 7224739 [patent_doc_number] => 20050078294 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2005-04-14 [patent_title] => 'Method of forming optical images, diffration element for use with this method, apparatus for carrying out this method' [patent_app_type] => utility [patent_app_number] => 10/499257 [patent_app_country] => US [patent_app_date] => 2002-12-11 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 8 [patent_figures_cnt] => 8 [patent_no_of_words] => 9470 [patent_no_of_claims] => 27 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0078/20050078294.pdf [firstpage_image] =>[orig_patent_app_number] => 10499257 [rel_patent_id] =>[rel_patent_doc_number] =>)
10/499257
Method of forming optical images, diffration element for use with this method, apparatus for carrying out this method Dec 10, 2002 Abandoned
Array ( [id] => 1003385 [patent_doc_number] => 06909490 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2005-06-21 [patent_title] => 'Reticle chambers and reticle cassettes providing temperature control and ready exchange of reticles for exposure' [patent_app_type] => utility [patent_app_number] => 10/313663 [patent_app_country] => US [patent_app_date] => 2002-12-06 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 3 [patent_figures_cnt] => 6 [patent_no_of_words] => 4379 [patent_no_of_claims] => 26 [patent_no_of_ind_claims] => 4 [patent_words_short_claim] => 81 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/06/909/06909490.pdf [firstpage_image] =>[orig_patent_app_number] => 10313663 [rel_patent_id] =>[rel_patent_doc_number] =>)
10/313663
Reticle chambers and reticle cassettes providing temperature control and ready exchange of reticles for exposure Dec 5, 2002 Issued
Array ( [id] => 7351367 [patent_doc_number] => 20040012766 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2004-01-22 [patent_title] => 'Illumination optical apparatus and exposure apparatus' [patent_app_type] => new [patent_app_number] => 10/305961 [patent_app_country] => US [patent_app_date] => 2002-11-29 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 5 [patent_figures_cnt] => 5 [patent_no_of_words] => 5837 [patent_no_of_claims] => 19 [patent_no_of_ind_claims] => 4 [patent_words_short_claim] => 130 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0012/20040012766.pdf [firstpage_image] =>[orig_patent_app_number] => 10305961 [rel_patent_id] =>[rel_patent_doc_number] =>)
10/305961
Illumination optical apparatus and exposure apparatus Nov 28, 2002 Abandoned
Array ( [id] => 7424550 [patent_doc_number] => 20040001192 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2004-01-01 [patent_title] => 'System and method for automated focus measuring of a lithography tool' [patent_app_type] => new [patent_app_number] => 10/301627 [patent_app_country] => US [patent_app_date] => 2002-11-22 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 14 [patent_figures_cnt] => 14 [patent_no_of_words] => 4118 [patent_no_of_claims] => 26 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 68 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0001/20040001192.pdf [firstpage_image] =>[orig_patent_app_number] => 10301627 [rel_patent_id] =>[rel_patent_doc_number] =>)
10/301627
System and method for automated focus measuring of a lithography tool Nov 21, 2002 Issued
Array ( [id] => 6681734 [patent_doc_number] => 20030117598 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2003-06-26 [patent_title] => 'Method and apparatus for exposing photoresists using programmable masks' [patent_app_type] => new [patent_app_number] => 10/298224 [patent_app_country] => US [patent_app_date] => 2002-11-18 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 13 [patent_figures_cnt] => 13 [patent_no_of_words] => 5946 [patent_no_of_claims] => 17 [patent_no_of_ind_claims] => 6 [patent_words_short_claim] => 77 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0117/20030117598.pdf [firstpage_image] =>[orig_patent_app_number] => 10298224 [rel_patent_id] =>[rel_patent_doc_number] =>)
10/298224
Method and apparatus for exposing photoresists using programmable masks Nov 17, 2002 Issued
Array ( [id] => 6634624 [patent_doc_number] => 20030103195 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2003-06-05 [patent_title] => 'Mask for proximity field optical exposure, exposure apparatus and method therefor' [patent_app_type] => new [patent_app_number] => 10/295893 [patent_app_country] => US [patent_app_date] => 2002-11-18 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 14 [patent_figures_cnt] => 14 [patent_no_of_words] => 7306 [patent_no_of_claims] => 13 [patent_no_of_ind_claims] => 4 [patent_words_short_claim] => 31 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0103/20030103195.pdf [firstpage_image] =>[orig_patent_app_number] => 10295893 [rel_patent_id] =>[rel_patent_doc_number] =>)
10/295893
Mask for proximity field optical exposure, exposure apparatus and method therefor Nov 17, 2002 Abandoned
Array ( [id] => 1035847 [patent_doc_number] => 06876436 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2005-04-05 [patent_title] => 'Interferometric alignment system for use in vacuum-based lithographic apparatus' [patent_app_type] => utility [patent_app_number] => 10/294817 [patent_app_country] => US [patent_app_date] => 2002-11-15 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 3 [patent_figures_cnt] => 6 [patent_no_of_words] => 5587 [patent_no_of_claims] => 53 [patent_no_of_ind_claims] => 4 [patent_words_short_claim] => 86 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/06/876/06876436.pdf [firstpage_image] =>[orig_patent_app_number] => 10294817 [rel_patent_id] =>[rel_patent_doc_number] =>)
10/294817
Interferometric alignment system for use in vacuum-based lithographic apparatus Nov 14, 2002 Issued
Array ( [id] => 1090894 [patent_doc_number] => 06829035 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2004-12-07 [patent_title] => 'Advanced mask cleaning and handling' [patent_app_type] => B2 [patent_app_number] => 10/293591 [patent_app_country] => US [patent_app_date] => 2002-11-12 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 5 [patent_figures_cnt] => 6 [patent_no_of_words] => 5477 [patent_no_of_claims] => 17 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 163 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/06/829/06829035.pdf [firstpage_image] =>[orig_patent_app_number] => 10293591 [rel_patent_id] =>[rel_patent_doc_number] =>)
10/293591
Advanced mask cleaning and handling Nov 11, 2002 Issued
Array ( [id] => 7614588 [patent_doc_number] => 06897941 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2005-05-24 [patent_title] => 'Optical spot grid array printer' [patent_app_type] => utility [patent_app_number] => 10/289201 [patent_app_country] => US [patent_app_date] => 2002-11-07 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 9 [patent_figures_cnt] => 12 [patent_no_of_words] => 7639 [patent_no_of_claims] => 44 [patent_no_of_ind_claims] => 13 [patent_words_short_claim] => 67 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/06/897/06897941.pdf [firstpage_image] =>[orig_patent_app_number] => 10289201 [rel_patent_id] =>[rel_patent_doc_number] =>)
10/289201
Optical spot grid array printer Nov 6, 2002 Issued
Array ( [id] => 6859635 [patent_doc_number] => 20030090643 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2003-05-15 [patent_title] => 'Light source, light source generation control method, exposure apparatus and maintenance method therefor, and semiconductor device manufacturing method and semiconductor production facility' [patent_app_type] => new [patent_app_number] => 10/286813 [patent_app_country] => US [patent_app_date] => 2002-11-04 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 10 [patent_figures_cnt] => 10 [patent_no_of_words] => 5599 [patent_no_of_claims] => 18 [patent_no_of_ind_claims] => 4 [patent_words_short_claim] => 48 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0090/20030090643.pdf [firstpage_image] =>[orig_patent_app_number] => 10286813 [rel_patent_id] =>[rel_patent_doc_number] =>)
10/286813
Light source, light source generation control method, exposure apparatus and maintenance method therefor, and semiconductor device manufacturing method and semiconductor production facility Nov 3, 2002 Issued
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