
Alan A. Mathews
Examiner (ID: 10466)
| Most Active Art Unit | 2101 |
| Art Unit(s) | 2101, 2882, 2851, 2203 |
| Total Applications | 2349 |
| Issued Applications | 2176 |
| Pending Applications | 25 |
| Abandoned Applications | 148 |
Applications
| Application number | Title of the application | Filing Date | Status |
|---|---|---|---|
Array
(
[id] => 5708999
[patent_doc_number] => 20060050343
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2006-03-09
[patent_title] => 'Apparatus and method of exposing light to a semiconductor device having a curved surface'
[patent_app_type] => utility
[patent_app_number] => 10/538980
[patent_app_country] => US
[patent_app_date] => 2003-01-09
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 6
[patent_figures_cnt] => 6
[patent_no_of_words] => 4552
[patent_no_of_claims] => 34
[patent_no_of_ind_claims] => 4
[patent_words_short_claim] => 0
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => publication
[pdf_file] => publications/A1/0050/20060050343.pdf
[firstpage_image] =>[orig_patent_app_number] => 10538980
[rel_patent_id] =>[rel_patent_doc_number] =>) 10/538980 | Apparatus and method of exposing light to a semiconductor device having a curved surface | Jan 8, 2003 | Issued |
Array
(
[id] => 5710634
[patent_doc_number] => 20060051979
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2006-03-09
[patent_title] => 'Apparatus and method of exposing a semiconductor device having a curved surface to light'
[patent_app_type] => utility
[patent_app_number] => 10/538979
[patent_app_country] => US
[patent_app_date] => 2003-01-09
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 3
[patent_figures_cnt] => 3
[patent_no_of_words] => 4950
[patent_no_of_claims] => 34
[patent_no_of_ind_claims] => 6
[patent_words_short_claim] => 0
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => publication
[pdf_file] => publications/A1/0051/20060051979.pdf
[firstpage_image] =>[orig_patent_app_number] => 10538979
[rel_patent_id] =>[rel_patent_doc_number] =>) 10/538979 | Apparatus and method of exposing a semiconductor device having a curved surface to light | Jan 8, 2003 | Issued |
Array
(
[id] => 1197896
[patent_doc_number] => 06722798
[patent_country] => US
[patent_kind] => B2
[patent_issue_date] => 2004-04-20
[patent_title] => 'Substrate processing apparatus and substrate processing method'
[patent_app_type] => B2
[patent_app_number] => 10/337831
[patent_app_country] => US
[patent_app_date] => 2003-01-08
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 11
[patent_figures_cnt] => 0
[patent_no_of_words] => 11686
[patent_no_of_claims] => 14
[patent_no_of_ind_claims] => 5
[patent_words_short_claim] => 169
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => patent
[pdf_file] => patents/06/722/06722798.pdf
[firstpage_image] =>[orig_patent_app_number] => 10337831
[rel_patent_id] =>[rel_patent_doc_number] =>) 10/337831 | Substrate processing apparatus and substrate processing method | Jan 7, 2003 | Issued |
Array
(
[id] => 1074456
[patent_doc_number] => 06839124
[patent_country] => US
[patent_kind] => B2
[patent_issue_date] => 2005-01-04
[patent_title] => 'Projection aligner'
[patent_app_type] => utility
[patent_app_number] => 10/327947
[patent_app_country] => US
[patent_app_date] => 2002-12-26
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 10
[patent_figures_cnt] => 12
[patent_no_of_words] => 6683
[patent_no_of_claims] => 9
[patent_no_of_ind_claims] => 2
[patent_words_short_claim] => 241
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => patent
[pdf_file] => patents/06/839/06839124.pdf
[firstpage_image] =>[orig_patent_app_number] => 10327947
[rel_patent_id] =>[rel_patent_doc_number] =>) 10/327947 | Projection aligner | Dec 25, 2002 | Issued |
Array
(
[id] => 6761110
[patent_doc_number] => 20030124471
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2003-07-03
[patent_title] => 'Producing history managing method and system for photosensitive sheet package'
[patent_app_type] => new
[patent_app_number] => 10/325901
[patent_app_country] => US
[patent_app_date] => 2002-12-23
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 16
[patent_figures_cnt] => 16
[patent_no_of_words] => 10550
[patent_no_of_claims] => 28
[patent_no_of_ind_claims] => 2
[patent_words_short_claim] => 127
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => publication
[pdf_file] => publications/A1/0124/20030124471.pdf
[firstpage_image] =>[orig_patent_app_number] => 10325901
[rel_patent_id] =>[rel_patent_doc_number] =>) 10/325901 | Producing history managing method and system for photosensitive sheet package | Dec 22, 2002 | Issued |
Array
(
[id] => 701276
[patent_doc_number] => 07068347
[patent_country] => US
[patent_kind] => B2
[patent_issue_date] => 2006-06-27
[patent_title] => 'Apparatus for reducing pellicle darkening'
[patent_app_type] => utility
[patent_app_number] => 10/327251
[patent_app_country] => US
[patent_app_date] => 2002-12-20
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 3
[patent_figures_cnt] => 3
[patent_no_of_words] => 1311
[patent_no_of_claims] => 21
[patent_no_of_ind_claims] => 3
[patent_words_short_claim] => 48
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => patent
[pdf_file] => patents/07/068/07068347.pdf
[firstpage_image] =>[orig_patent_app_number] => 10327251
[rel_patent_id] =>[rel_patent_doc_number] =>) 10/327251 | Apparatus for reducing pellicle darkening | Dec 19, 2002 | Issued |
Array
(
[id] => 1223072
[patent_doc_number] => 06704088
[patent_country] => US
[patent_kind] => B2
[patent_issue_date] => 2004-03-09
[patent_title] => 'Environmental-control method and apparatus for an exposure system'
[patent_app_type] => B2
[patent_app_number] => 10/323742
[patent_app_country] => US
[patent_app_date] => 2002-12-20
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 4
[patent_figures_cnt] => 6
[patent_no_of_words] => 4029
[patent_no_of_claims] => 50
[patent_no_of_ind_claims] => 14
[patent_words_short_claim] => 81
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => patent
[pdf_file] => patents/06/704/06704088.pdf
[firstpage_image] =>[orig_patent_app_number] => 10323742
[rel_patent_id] =>[rel_patent_doc_number] =>) 10/323742 | Environmental-control method and apparatus for an exposure system | Dec 19, 2002 | Issued |
Array
(
[id] => 7109411
[patent_doc_number] => 20050206865
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2005-09-22
[patent_title] => 'Balanced positioning system for use in lithographic apparatus'
[patent_app_type] => utility
[patent_app_number] => 10/322800
[patent_app_country] => US
[patent_app_date] => 2002-12-19
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 7
[patent_figures_cnt] => 7
[patent_no_of_words] => 9240
[patent_no_of_claims] => 33
[patent_no_of_ind_claims] => 4
[patent_words_short_claim] => 0
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => publication
[pdf_file] => publications/A1/0206/20050206865.pdf
[firstpage_image] =>[orig_patent_app_number] => 10322800
[rel_patent_id] =>[rel_patent_doc_number] =>) 10/322800 | Balanced positioning system for use in lithographic apparatus | Dec 18, 2002 | Issued |
Array
(
[id] => 6808848
[patent_doc_number] => 20030198787
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2003-10-23
[patent_title] => 'Device manufacturing method, device manufactured thereby and lithographic apparatus therefor'
[patent_app_type] => new
[patent_app_number] => 10/321847
[patent_app_country] => US
[patent_app_date] => 2002-12-18
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 3
[patent_figures_cnt] => 3
[patent_no_of_words] => 5212
[patent_no_of_claims] => 30
[patent_no_of_ind_claims] => 5
[patent_words_short_claim] => 96
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => publication
[pdf_file] => publications/A1/0198/20030198787.pdf
[firstpage_image] =>[orig_patent_app_number] => 10321847
[rel_patent_id] =>[rel_patent_doc_number] =>) 10/321847 | Device manufacturing method, device manufactured thereby and lithographic apparatus therefor | Dec 17, 2002 | Issued |
Array
(
[id] => 7462275
[patent_doc_number] => 20040119964
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2004-06-24
[patent_title] => 'Double isolation fine stage'
[patent_app_type] => new
[patent_app_number] => 10/325391
[patent_app_country] => US
[patent_app_date] => 2002-12-18
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 6
[patent_figures_cnt] => 6
[patent_no_of_words] => 5132
[patent_no_of_claims] => 14
[patent_no_of_ind_claims] => 2
[patent_words_short_claim] => 82
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => publication
[pdf_file] => publications/A1/0119/20040119964.pdf
[firstpage_image] =>[orig_patent_app_number] => 10325391
[rel_patent_id] =>[rel_patent_doc_number] =>) 10/325391 | Double isolation fine stage | Dec 17, 2002 | Abandoned |
Array
(
[id] => 7224739
[patent_doc_number] => 20050078294
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2005-04-14
[patent_title] => 'Method of forming optical images, diffration element for use with this method, apparatus for carrying out this method'
[patent_app_type] => utility
[patent_app_number] => 10/499257
[patent_app_country] => US
[patent_app_date] => 2002-12-11
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 8
[patent_figures_cnt] => 8
[patent_no_of_words] => 9470
[patent_no_of_claims] => 27
[patent_no_of_ind_claims] => 2
[patent_words_short_claim] => 0
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => publication
[pdf_file] => publications/A1/0078/20050078294.pdf
[firstpage_image] =>[orig_patent_app_number] => 10499257
[rel_patent_id] =>[rel_patent_doc_number] =>) 10/499257 | Method of forming optical images, diffration element for use with this method, apparatus for carrying out this method | Dec 10, 2002 | Abandoned |
Array
(
[id] => 1003385
[patent_doc_number] => 06909490
[patent_country] => US
[patent_kind] => B2
[patent_issue_date] => 2005-06-21
[patent_title] => 'Reticle chambers and reticle cassettes providing temperature control and ready exchange of reticles for exposure'
[patent_app_type] => utility
[patent_app_number] => 10/313663
[patent_app_country] => US
[patent_app_date] => 2002-12-06
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 3
[patent_figures_cnt] => 6
[patent_no_of_words] => 4379
[patent_no_of_claims] => 26
[patent_no_of_ind_claims] => 4
[patent_words_short_claim] => 81
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => patent
[pdf_file] => patents/06/909/06909490.pdf
[firstpage_image] =>[orig_patent_app_number] => 10313663
[rel_patent_id] =>[rel_patent_doc_number] =>) 10/313663 | Reticle chambers and reticle cassettes providing temperature control and ready exchange of reticles for exposure | Dec 5, 2002 | Issued |
Array
(
[id] => 7351367
[patent_doc_number] => 20040012766
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2004-01-22
[patent_title] => 'Illumination optical apparatus and exposure apparatus'
[patent_app_type] => new
[patent_app_number] => 10/305961
[patent_app_country] => US
[patent_app_date] => 2002-11-29
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 5
[patent_figures_cnt] => 5
[patent_no_of_words] => 5837
[patent_no_of_claims] => 19
[patent_no_of_ind_claims] => 4
[patent_words_short_claim] => 130
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => publication
[pdf_file] => publications/A1/0012/20040012766.pdf
[firstpage_image] =>[orig_patent_app_number] => 10305961
[rel_patent_id] =>[rel_patent_doc_number] =>) 10/305961 | Illumination optical apparatus and exposure apparatus | Nov 28, 2002 | Abandoned |
Array
(
[id] => 7424550
[patent_doc_number] => 20040001192
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2004-01-01
[patent_title] => 'System and method for automated focus measuring of a lithography tool'
[patent_app_type] => new
[patent_app_number] => 10/301627
[patent_app_country] => US
[patent_app_date] => 2002-11-22
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 14
[patent_figures_cnt] => 14
[patent_no_of_words] => 4118
[patent_no_of_claims] => 26
[patent_no_of_ind_claims] => 3
[patent_words_short_claim] => 68
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => publication
[pdf_file] => publications/A1/0001/20040001192.pdf
[firstpage_image] =>[orig_patent_app_number] => 10301627
[rel_patent_id] =>[rel_patent_doc_number] =>) 10/301627 | System and method for automated focus measuring of a lithography tool | Nov 21, 2002 | Issued |
Array
(
[id] => 6681734
[patent_doc_number] => 20030117598
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2003-06-26
[patent_title] => 'Method and apparatus for exposing photoresists using programmable masks'
[patent_app_type] => new
[patent_app_number] => 10/298224
[patent_app_country] => US
[patent_app_date] => 2002-11-18
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 13
[patent_figures_cnt] => 13
[patent_no_of_words] => 5946
[patent_no_of_claims] => 17
[patent_no_of_ind_claims] => 6
[patent_words_short_claim] => 77
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => publication
[pdf_file] => publications/A1/0117/20030117598.pdf
[firstpage_image] =>[orig_patent_app_number] => 10298224
[rel_patent_id] =>[rel_patent_doc_number] =>) 10/298224 | Method and apparatus for exposing photoresists using programmable masks | Nov 17, 2002 | Issued |
Array
(
[id] => 6634624
[patent_doc_number] => 20030103195
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2003-06-05
[patent_title] => 'Mask for proximity field optical exposure, exposure apparatus and method therefor'
[patent_app_type] => new
[patent_app_number] => 10/295893
[patent_app_country] => US
[patent_app_date] => 2002-11-18
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 14
[patent_figures_cnt] => 14
[patent_no_of_words] => 7306
[patent_no_of_claims] => 13
[patent_no_of_ind_claims] => 4
[patent_words_short_claim] => 31
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => publication
[pdf_file] => publications/A1/0103/20030103195.pdf
[firstpage_image] =>[orig_patent_app_number] => 10295893
[rel_patent_id] =>[rel_patent_doc_number] =>) 10/295893 | Mask for proximity field optical exposure, exposure apparatus and method therefor | Nov 17, 2002 | Abandoned |
Array
(
[id] => 1035847
[patent_doc_number] => 06876436
[patent_country] => US
[patent_kind] => B2
[patent_issue_date] => 2005-04-05
[patent_title] => 'Interferometric alignment system for use in vacuum-based lithographic apparatus'
[patent_app_type] => utility
[patent_app_number] => 10/294817
[patent_app_country] => US
[patent_app_date] => 2002-11-15
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 3
[patent_figures_cnt] => 6
[patent_no_of_words] => 5587
[patent_no_of_claims] => 53
[patent_no_of_ind_claims] => 4
[patent_words_short_claim] => 86
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => patent
[pdf_file] => patents/06/876/06876436.pdf
[firstpage_image] =>[orig_patent_app_number] => 10294817
[rel_patent_id] =>[rel_patent_doc_number] =>) 10/294817 | Interferometric alignment system for use in vacuum-based lithographic apparatus | Nov 14, 2002 | Issued |
Array
(
[id] => 1090894
[patent_doc_number] => 06829035
[patent_country] => US
[patent_kind] => B2
[patent_issue_date] => 2004-12-07
[patent_title] => 'Advanced mask cleaning and handling'
[patent_app_type] => B2
[patent_app_number] => 10/293591
[patent_app_country] => US
[patent_app_date] => 2002-11-12
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 5
[patent_figures_cnt] => 6
[patent_no_of_words] => 5477
[patent_no_of_claims] => 17
[patent_no_of_ind_claims] => 1
[patent_words_short_claim] => 163
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => patent
[pdf_file] => patents/06/829/06829035.pdf
[firstpage_image] =>[orig_patent_app_number] => 10293591
[rel_patent_id] =>[rel_patent_doc_number] =>) 10/293591 | Advanced mask cleaning and handling | Nov 11, 2002 | Issued |
Array
(
[id] => 7614588
[patent_doc_number] => 06897941
[patent_country] => US
[patent_kind] => B2
[patent_issue_date] => 2005-05-24
[patent_title] => 'Optical spot grid array printer'
[patent_app_type] => utility
[patent_app_number] => 10/289201
[patent_app_country] => US
[patent_app_date] => 2002-11-07
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 9
[patent_figures_cnt] => 12
[patent_no_of_words] => 7639
[patent_no_of_claims] => 44
[patent_no_of_ind_claims] => 13
[patent_words_short_claim] => 67
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => patent
[pdf_file] => patents/06/897/06897941.pdf
[firstpage_image] =>[orig_patent_app_number] => 10289201
[rel_patent_id] =>[rel_patent_doc_number] =>) 10/289201 | Optical spot grid array printer | Nov 6, 2002 | Issued |
Array
(
[id] => 6859635
[patent_doc_number] => 20030090643
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2003-05-15
[patent_title] => 'Light source, light source generation control method, exposure apparatus and maintenance method therefor, and semiconductor device manufacturing method and semiconductor production facility'
[patent_app_type] => new
[patent_app_number] => 10/286813
[patent_app_country] => US
[patent_app_date] => 2002-11-04
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 10
[patent_figures_cnt] => 10
[patent_no_of_words] => 5599
[patent_no_of_claims] => 18
[patent_no_of_ind_claims] => 4
[patent_words_short_claim] => 48
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => publication
[pdf_file] => publications/A1/0090/20030090643.pdf
[firstpage_image] =>[orig_patent_app_number] => 10286813
[rel_patent_id] =>[rel_patent_doc_number] =>) 10/286813 | Light source, light source generation control method, exposure apparatus and maintenance method therefor, and semiconductor device manufacturing method and semiconductor production facility | Nov 3, 2002 | Issued |