Alan A Mathews

Array ( [id] => 166137 [patent_doc_number] => 07665917 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2010-02-23 [patent_title] => 'Heat treatment apparatus and methods for thermally processing a substrate using a pressurized gaseous environment' [patent_app_type] => utility [patent_app_number] => 11/693827 [patent_app_country] => US [patent_app_date] => 2007-03-30 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 3 [patent_figures_cnt] => 7 [patent_no_of_words] => 5026 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 98 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/07/665/07665917.pdf [firstpage_image] =>[orig_patent_app_number] => 11693827 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 4563106 [patent_doc_number] => 07821617 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2010-10-26 [patent_title] => 'Exposure apparatus and device manufacturing method' [patent_app_type] => utility [patent_app_number] => 11/688370 [patent_app_country] => US [patent_app_date] => 2007-03-20 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 7 [patent_figures_cnt] => 7 [patent_no_of_words] => 3985 [patent_no_of_claims] => 25 [patent_no_of_ind_claims] => 6 [patent_words_short_claim] => 103 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/07/821/07821617.pdf [firstpage_image] =>[orig_patent_app_number] => 11688370 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 153460 [patent_doc_number] => 07684011 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2010-03-23 [patent_title] => 'Calibration method for a lithographic apparatus' [patent_app_type] => utility [patent_app_number] => 11/713086 [patent_app_country] => US [patent_app_date] => 2007-03-02 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 7 [patent_figures_cnt] => 7 [patent_no_of_words] => 6221 [patent_no_of_claims] => 31 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 171 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/07/684/07684011.pdf [firstpage_image] =>[orig_patent_app_number] => 11713086 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 238885 [patent_doc_number] => 07591600 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2009-09-22 [patent_title] => 'Method and system for monitoring photolithography processing based on a batch change in light sensitive material' [patent_app_type] => utility [patent_app_number] => 11/678410 [patent_app_country] => US [patent_app_date] => 2007-02-23 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 6 [patent_figures_cnt] => 8 [patent_no_of_words] => 7344 [patent_no_of_claims] => 31 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 90 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/07/591/07591600.pdf [firstpage_image] =>[orig_patent_app_number] => 11678410 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 5020711 [patent_doc_number] => 20070146677 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2007-06-28 [patent_title] => 'ILLUMINATION OPTICAL SYSTEM AND EXPOSURE APPARATUS USING THE SAME' [patent_app_type] => utility [patent_app_number] => 11/676891 [patent_app_country] => US [patent_app_date] => 2007-02-20 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 16 [patent_figures_cnt] => 16 [patent_no_of_words] => 7069 [patent_no_of_claims] => 3 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0146/20070146677.pdf [firstpage_image] =>[orig_patent_app_number] => 11676891 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 55110 [patent_doc_number] => 07773196 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2010-08-10 [patent_title] => 'Projection-optical systems and exposure apparatus comprising same' [patent_app_type] => utility [patent_app_number] => 11/704427 [patent_app_country] => US [patent_app_date] => 2007-02-08 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 6 [patent_figures_cnt] => 12 [patent_no_of_words] => 8911 [patent_no_of_claims] => 78 [patent_no_of_ind_claims] => 5 [patent_words_short_claim] => 69 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/07/773/07773196.pdf [firstpage_image] =>[orig_patent_app_number] => 11704427 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 5160054 [patent_doc_number] => 20070173098 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2007-07-26 [patent_title] => 'TOP PLATE, POSITIONING APPARATUS, EXPOSURE APPARATUS, AND DEVICE MANUFACTURING METHOD' [patent_app_type] => utility [patent_app_number] => 11/627517 [patent_app_country] => US [patent_app_date] => 2007-01-26 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 19 [patent_figures_cnt] => 19 [patent_no_of_words] => 6677 [patent_no_of_claims] => 22 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0173/20070173098.pdf [firstpage_image] =>[orig_patent_app_number] => 11627517 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 4845800 [patent_doc_number] => 20080182208 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2008-07-31 [patent_title] => 'Method and System for Closing Plate Take-Over in Immersion Lithography' [patent_app_type] => utility [patent_app_number] => 11/627247 [patent_app_country] => US [patent_app_date] => 2007-01-25 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 18 [patent_figures_cnt] => 18 [patent_no_of_words] => 3554 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0182/20080182208.pdf [firstpage_image] =>[orig_patent_app_number] => 11627247 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 5159190 [patent_doc_number] => 20070172234 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2007-07-26 [patent_title] => 'APPARATUS FOR AND METHOD OF PROCESSING SUBSTRATE' [patent_app_type] => utility [patent_app_number] => 11/626593 [patent_app_country] => US [patent_app_date] => 2007-01-24 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 15 [patent_figures_cnt] => 15 [patent_no_of_words] => 20025 [patent_no_of_claims] => 13 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0172/20070172234.pdf [firstpage_image] =>[orig_patent_app_number] => 11626593 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 5093839 [patent_doc_number] => 20070115448 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2007-05-24 [patent_title] => 'Exposure apparatus and device manufacturing method' [patent_app_type] => utility [patent_app_number] => 11/656550 [patent_app_country] => US [patent_app_date] => 2007-01-23 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 18 [patent_figures_cnt] => 18 [patent_no_of_words] => 33264 [patent_no_of_claims] => 23 [patent_no_of_ind_claims] => 4 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0115/20070115448.pdf [firstpage_image] =>[orig_patent_app_number] => 11656550 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 55114 [patent_doc_number] => 07773198 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2010-08-10 [patent_title] => 'Filtered device container assembly with shield for a reticle' [patent_app_type] => utility [patent_app_number] => 11/655674 [patent_app_country] => US [patent_app_date] => 2007-01-19 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 5 [patent_figures_cnt] => 9 [patent_no_of_words] => 5553 [patent_no_of_claims] => 19 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 78 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/07/773/07773198.pdf [firstpage_image] =>[orig_patent_app_number] => 11655674 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 5093838 [patent_doc_number] => 20070115447 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2007-05-24 [patent_title] => 'Exposure apparatus and device manufacturing method' [patent_app_type] => utility [patent_app_number] => 11/655083 [patent_app_country] => US [patent_app_date] => 2007-01-19 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 18 [patent_figures_cnt] => 18 [patent_no_of_words] => 33258 [patent_no_of_claims] => 55 [patent_no_of_ind_claims] => 8 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0115/20070115447.pdf [firstpage_image] =>[orig_patent_app_number] => 11655083 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 5101130 [patent_doc_number] => 20070184392 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2007-08-09 [patent_title] => 'COATING AND DEVELOPING METHOD, COATING AND DEVELOPING SYSTEM AND STORAGE MEDIUM' [patent_app_type] => utility [patent_app_number] => 11/623481 [patent_app_country] => US [patent_app_date] => 2007-01-16 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 10 [patent_figures_cnt] => 10 [patent_no_of_words] => 7366 [patent_no_of_claims] => 14 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0184/20070184392.pdf [firstpage_image] =>[orig_patent_app_number] => 11623481 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 140157 [patent_doc_number] => 07690853 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2010-04-06 [patent_title] => 'Substrate processing apparatus' [patent_app_type] => utility [patent_app_number] => 11/623231 [patent_app_country] => US [patent_app_date] => 2007-01-15 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 14 [patent_figures_cnt] => 14 [patent_no_of_words] => 14133 [patent_no_of_claims] => 6 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 188 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/07/690/07690853.pdf [firstpage_image] =>[orig_patent_app_number] => 11623231 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 4969523 [patent_doc_number] => 20070109525 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2007-05-17 [patent_title] => 'EXPOSURE APPARATUS AND METHOD' [patent_app_type] => utility [patent_app_number] => 11/622977 [patent_app_country] => US [patent_app_date] => 2007-01-12 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 16 [patent_figures_cnt] => 16 [patent_no_of_words] => 9267 [patent_no_of_claims] => 16 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0109/20070109525.pdf [firstpage_image] =>[orig_patent_app_number] => 11622977 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 34530 [patent_doc_number] => 07791708 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2010-09-07 [patent_title] => 'Lithographic apparatus, substrate table, and method for enhancing substrate release properties' [patent_app_type] => utility [patent_app_number] => 11/645812 [patent_app_country] => US [patent_app_date] => 2006-12-27 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 5 [patent_figures_cnt] => 9 [patent_no_of_words] => 4901 [patent_no_of_claims] => 25 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 97 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/07/791/07791708.pdf [firstpage_image] =>[orig_patent_app_number] => 11645812 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 5021866 [patent_doc_number] => 20070147832 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2007-06-28 [patent_title] => 'METHOD OF PROCESSING SUBSTRATE, SUBSTRATE PROCESSING SYSTEM AND SUBSTRATE PROCESSING APPARATUS' [patent_app_type] => utility [patent_app_number] => 11/615513 [patent_app_country] => US [patent_app_date] => 2006-12-22 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 14 [patent_figures_cnt] => 14 [patent_no_of_words] => 18573 [patent_no_of_claims] => 17 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0147/20070147832.pdf [firstpage_image] =>[orig_patent_app_number] => 11615513 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 5251517 [patent_doc_number] => 20070132973 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2007-06-14 [patent_title] => 'Lithographic apparatus, device manufacturing method, and device manufactured thereby' [patent_app_type] => utility [patent_app_number] => 11/642988 [patent_app_country] => US [patent_app_date] => 2006-12-21 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 5 [patent_figures_cnt] => 5 [patent_no_of_words] => 5442 [patent_no_of_claims] => 25 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0132/20070132973.pdf [firstpage_image] =>[orig_patent_app_number] => 11642988 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 4828416 [patent_doc_number] => 20080128303 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2008-06-05 [patent_title] => 'Device container assembly with adjustable retainers for a reticle' [patent_app_type] => utility [patent_app_number] => 11/634786 [patent_app_country] => US [patent_app_date] => 2006-12-05 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 11 [patent_figures_cnt] => 11 [patent_no_of_words] => 10833 [patent_no_of_claims] => 34 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0128/20080128303.pdf [firstpage_image] =>[orig_patent_app_number] => 11634786 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 4582838 [patent_doc_number] => 07826031 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2010-11-02 [patent_title] => 'Liquid recovery apparatus, exposure apparatus, exposure method, and device manufacturing method' [patent_app_type] => utility [patent_app_number] => 11/606935 [patent_app_country] => US [patent_app_date] => 2006-12-01 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 9 [patent_figures_cnt] => 14 [patent_no_of_words] => 16872 [patent_no_of_claims] => 17 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 111 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/07/826/07826031.pdf [firstpage_image] =>[orig_patent_app_number] => 11606935 [rel_patent_id] =>[rel_patent_doc_number] =>)