Search

Alan A Mathews

Examiner (ID: 11510)

Most Active Art Unit
2101
Art Unit(s)
2203, 2101, 2851, 2882
Total Applications
2349
Issued Applications
2176
Pending Applications
25
Abandoned Applications
148

Applications

Application numberTitle of the applicationFiling DateStatus
11/438124 PROJECTION EXPOSURE SYSTEM May 18, 2006 Abandoned
Array ( [id] => 441004 [patent_doc_number] => 07259836 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2007-08-21 [patent_title] => 'Stage device for positioning an object, in which a static pressure bearing and a pressurizing magnet suspend a slider' [patent_app_type] => utility [patent_app_number] => 11/434104 [patent_app_country] => US [patent_app_date] => 2006-05-16 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 8 [patent_figures_cnt] => 8 [patent_no_of_words] => 5104 [patent_no_of_claims] => 17 [patent_no_of_ind_claims] => 5 [patent_words_short_claim] => 109 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/07/259/07259836.pdf [firstpage_image] =>[orig_patent_app_number] => 11434104 [rel_patent_id] =>[rel_patent_doc_number] =>)
11/434104
Stage device for positioning an object, in which a static pressure bearing and a pressurizing magnet suspend a slider May 15, 2006 Issued
Array ( [id] => 454962 [patent_doc_number] => 07248336 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2007-07-24 [patent_title] => 'Method and system for improving focus accuracy in a lithography system' [patent_app_type] => utility [patent_app_number] => 11/408956 [patent_app_country] => US [patent_app_date] => 2006-04-24 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 4 [patent_figures_cnt] => 5 [patent_no_of_words] => 6450 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 125 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/07/248/07248336.pdf [firstpage_image] =>[orig_patent_app_number] => 11408956 [rel_patent_id] =>[rel_patent_doc_number] =>)
11/408956
Method and system for improving focus accuracy in a lithography system Apr 23, 2006 Issued
Array ( [id] => 5703887 [patent_doc_number] => 20060192934 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2006-08-31 [patent_title] => 'Exposure apparatus and device fabrication method' [patent_app_type] => utility [patent_app_number] => 11/407251 [patent_app_country] => US [patent_app_date] => 2006-04-20 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 10 [patent_figures_cnt] => 10 [patent_no_of_words] => 4799 [patent_no_of_claims] => 15 [patent_no_of_ind_claims] => 4 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0192/20060192934.pdf [firstpage_image] =>[orig_patent_app_number] => 11407251 [rel_patent_id] =>[rel_patent_doc_number] =>)
11/407251
Exposure apparatus and device fabrication method Apr 19, 2006 Issued
Array ( [id] => 545113 [patent_doc_number] => 07177007 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2007-02-13 [patent_title] => 'Temperature adjustment apparatus, exposure apparatus having the temperature adjustment apparatus, and semiconductor device manufacturing method' [patent_app_type] => utility [patent_app_number] => 11/407059 [patent_app_country] => US [patent_app_date] => 2006-04-20 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 14 [patent_figures_cnt] => 17 [patent_no_of_words] => 15088 [patent_no_of_claims] => 16 [patent_no_of_ind_claims] => 4 [patent_words_short_claim] => 95 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/07/177/07177007.pdf [firstpage_image] =>[orig_patent_app_number] => 11407059 [rel_patent_id] =>[rel_patent_doc_number] =>)
11/407059
Temperature adjustment apparatus, exposure apparatus having the temperature adjustment apparatus, and semiconductor device manufacturing method Apr 19, 2006 Issued
Array ( [id] => 5704582 [patent_doc_number] => 20060193630 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2006-08-31 [patent_title] => 'Monitoring apparatus and method particularly useful in photolithographically' [patent_app_type] => utility [patent_app_number] => 11/402009 [patent_app_country] => US [patent_app_date] => 2006-04-12 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 16 [patent_figures_cnt] => 16 [patent_no_of_words] => 11089 [patent_no_of_claims] => 44 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0193/20060193630.pdf [firstpage_image] =>[orig_patent_app_number] => 11402009 [rel_patent_id] =>[rel_patent_doc_number] =>)
11/402009
Monitoring apparatus and method particularly useful in photolithographically Apr 11, 2006 Issued
Array ( [id] => 5676337 [patent_doc_number] => 20060181692 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2006-08-17 [patent_title] => 'Method and apparatus for controlling radiation beam intensity directed to microlithograhic substrates' [patent_app_type] => utility [patent_app_number] => 11/397176 [patent_app_country] => US [patent_app_date] => 2006-04-04 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 7 [patent_figures_cnt] => 7 [patent_no_of_words] => 5303 [patent_no_of_claims] => 21 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0181/20060181692.pdf [firstpage_image] =>[orig_patent_app_number] => 11397176 [rel_patent_id] =>[rel_patent_doc_number] =>)
11/397176
Method and apparatus for controlling radiation beam intensity directed to microlithographic substrates Apr 3, 2006 Issued
Array ( [id] => 66089 [patent_doc_number] => 07760327 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2010-07-20 [patent_title] => 'Reflecting optical element with eccentric optical passageway' [patent_app_type] => utility [patent_app_number] => 11/395719 [patent_app_country] => US [patent_app_date] => 2006-03-31 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 5 [patent_figures_cnt] => 5 [patent_no_of_words] => 5822 [patent_no_of_claims] => 55 [patent_no_of_ind_claims] => 9 [patent_words_short_claim] => 100 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/07/760/07760327.pdf [firstpage_image] =>[orig_patent_app_number] => 11395719 [rel_patent_id] =>[rel_patent_doc_number] =>)
11/395719
Reflecting optical element with eccentric optical passageway Mar 30, 2006 Issued
Array ( [id] => 5698462 [patent_doc_number] => 20060215146 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2006-09-28 [patent_title] => 'Exposure process and apparatus using glass photomasks' [patent_app_type] => utility [patent_app_number] => 11/384317 [patent_app_country] => US [patent_app_date] => 2006-03-21 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 10 [patent_figures_cnt] => 10 [patent_no_of_words] => 4179 [patent_no_of_claims] => 8 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0215/20060215146.pdf [firstpage_image] =>[orig_patent_app_number] => 11384317 [rel_patent_id] =>[rel_patent_doc_number] =>)
11/384317
Exposure process and apparatus using glass photomasks Mar 20, 2006 Issued
Array ( [id] => 394751 [patent_doc_number] => 07298453 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2007-11-20 [patent_title] => 'Method and apparatus for irradiating a microlithographic substrate' [patent_app_type] => utility [patent_app_number] => 11/378666 [patent_app_country] => US [patent_app_date] => 2006-03-17 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 5 [patent_figures_cnt] => 10 [patent_no_of_words] => 4749 [patent_no_of_claims] => 19 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 190 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/07/298/07298453.pdf [firstpage_image] =>[orig_patent_app_number] => 11378666 [rel_patent_id] =>[rel_patent_doc_number] =>)
11/378666
Method and apparatus for irradiating a microlithographic substrate Mar 16, 2006 Issued
Array ( [id] => 5623908 [patent_doc_number] => 20060262413 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2006-11-23 [patent_title] => 'Exposure apparatus and device fabrication method' [patent_app_type] => utility [patent_app_number] => 11/376995 [patent_app_country] => US [patent_app_date] => 2006-03-15 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 14 [patent_figures_cnt] => 14 [patent_no_of_words] => 5089 [patent_no_of_claims] => 9 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0262/20060262413.pdf [firstpage_image] =>[orig_patent_app_number] => 11376995 [rel_patent_id] =>[rel_patent_doc_number] =>)
11/376995
Exposure apparatus and device fabrication method Mar 14, 2006 Issued
Array ( [id] => 5781600 [patent_doc_number] => 20060203216 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2006-09-14 [patent_title] => 'Balanced positioning system for use in lithographic apparatus' [patent_app_type] => utility [patent_app_number] => 11/363275 [patent_app_country] => US [patent_app_date] => 2006-02-28 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 7 [patent_figures_cnt] => 7 [patent_no_of_words] => 9308 [patent_no_of_claims] => 12 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0203/20060203216.pdf [firstpage_image] =>[orig_patent_app_number] => 11363275 [rel_patent_id] =>[rel_patent_doc_number] =>)
11/363275
Balanced positioning system for use in lithographic apparatus Feb 27, 2006 Issued
Array ( [id] => 5870810 [patent_doc_number] => 20060164615 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2006-07-27 [patent_title] => 'Exposure apparatus and device manufacturing method' [patent_app_type] => utility [patent_app_number] => 11/356000 [patent_app_country] => US [patent_app_date] => 2006-02-17 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 18 [patent_figures_cnt] => 18 [patent_no_of_words] => 33264 [patent_no_of_claims] => 13 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0164/20060164615.pdf [firstpage_image] =>[orig_patent_app_number] => 11356000 [rel_patent_id] =>[rel_patent_doc_number] =>)
11/356000
Exposure apparatus and device manufacturing method Feb 16, 2006 Abandoned
Array ( [id] => 7601032 [patent_doc_number] => 07385677 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2008-06-10 [patent_title] => 'Lithographic apparatus and device manufacturing method that limits a portion of a patterning device used to pattern a beam' [patent_app_type] => utility [patent_app_number] => 11/354027 [patent_app_country] => US [patent_app_date] => 2006-02-15 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 4 [patent_figures_cnt] => 8 [patent_no_of_words] => 7457 [patent_no_of_claims] => 24 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 104 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/07/385/07385677.pdf [firstpage_image] =>[orig_patent_app_number] => 11354027 [rel_patent_id] =>[rel_patent_doc_number] =>)
11/354027
Lithographic apparatus and device manufacturing method that limits a portion of a patterning device used to pattern a beam Feb 14, 2006 Issued
Array ( [id] => 5703888 [patent_doc_number] => 20060192935 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2006-08-31 [patent_title] => 'Correction of optical proximity effects by intensity modulation of an illumination arrangement' [patent_app_type] => utility [patent_app_number] => 11/353234 [patent_app_country] => US [patent_app_date] => 2006-02-14 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 18 [patent_figures_cnt] => 18 [patent_no_of_words] => 14245 [patent_no_of_claims] => 25 [patent_no_of_ind_claims] => 4 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0192/20060192935.pdf [firstpage_image] =>[orig_patent_app_number] => 11353234 [rel_patent_id] =>[rel_patent_doc_number] =>)
11/353234
Correction of optical proximity effects by intensity modulation of an illumination arrangement Feb 13, 2006 Issued
Array ( [id] => 407601 [patent_doc_number] => 07284917 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2007-10-23 [patent_title] => 'Coating and developing system and coating and developing method' [patent_app_type] => utility [patent_app_number] => 11/346430 [patent_app_country] => US [patent_app_date] => 2006-02-03 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 9 [patent_figures_cnt] => 9 [patent_no_of_words] => 7610 [patent_no_of_claims] => 21 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 7 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/07/284/07284917.pdf [firstpage_image] =>[orig_patent_app_number] => 11346430 [rel_patent_id] =>[rel_patent_doc_number] =>)
11/346430
Coating and developing system and coating and developing method Feb 2, 2006 Issued
Array ( [id] => 5665537 [patent_doc_number] => 20060170887 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2006-08-03 [patent_title] => 'Image forming method and apparatus' [patent_app_type] => utility [patent_app_number] => 11/341456 [patent_app_country] => US [patent_app_date] => 2006-01-30 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 6 [patent_figures_cnt] => 6 [patent_no_of_words] => 12368 [patent_no_of_claims] => 18 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0170/20060170887.pdf [firstpage_image] =>[orig_patent_app_number] => 11341456 [rel_patent_id] =>[rel_patent_doc_number] =>)
11/341456
Image forming method and apparatus Jan 29, 2006 Issued
Array ( [id] => 595995 [patent_doc_number] => 07436486 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2008-10-14 [patent_title] => 'Exposure apparatus and device manufacturing method' [patent_app_type] => utility [patent_app_number] => 11/339505 [patent_app_country] => US [patent_app_date] => 2006-01-26 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 17 [patent_figures_cnt] => 32 [patent_no_of_words] => 33251 [patent_no_of_claims] => 14 [patent_no_of_ind_claims] => 4 [patent_words_short_claim] => 97 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/07/436/07436486.pdf [firstpage_image] =>[orig_patent_app_number] => 11339505 [rel_patent_id] =>[rel_patent_doc_number] =>)
11/339505
Exposure apparatus and device manufacturing method Jan 25, 2006 Issued
Array ( [id] => 591441 [patent_doc_number] => 07446851 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2008-11-04 [patent_title] => 'Exposure apparatus and device manufacturing method' [patent_app_type] => utility [patent_app_number] => 11/338826 [patent_app_country] => US [patent_app_date] => 2006-01-25 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 17 [patent_figures_cnt] => 17 [patent_no_of_words] => 33244 [patent_no_of_claims] => 29 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 128 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/07/446/07446851.pdf [firstpage_image] =>[orig_patent_app_number] => 11338826 [rel_patent_id] =>[rel_patent_doc_number] =>)
11/338826
Exposure apparatus and device manufacturing method Jan 24, 2006 Issued
Array ( [id] => 125167 [patent_doc_number] => 07705962 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2010-04-27 [patent_title] => 'Lithographic apparatus and device manufacturing method' [patent_app_type] => utility [patent_app_number] => 11/330394 [patent_app_country] => US [patent_app_date] => 2006-01-12 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 3 [patent_figures_cnt] => 6 [patent_no_of_words] => 5980 [patent_no_of_claims] => 23 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 149 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/07/705/07705962.pdf [firstpage_image] =>[orig_patent_app_number] => 11330394 [rel_patent_id] =>[rel_patent_doc_number] =>)
11/330394
Lithographic apparatus and device manufacturing method Jan 11, 2006 Issued
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