Alan A Mathews

Array ( [id] => 5775193 [patent_doc_number] => 20060103833 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2006-05-18 [patent_title] => 'Aligning apparatus and its control method, and exposure apparatus' [patent_app_type] => utility [patent_app_number] => 11/330182 [patent_app_country] => US [patent_app_date] => 2006-01-12 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 7 [patent_figures_cnt] => 7 [patent_no_of_words] => 4138 [patent_no_of_claims] => 7 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0103/20060103833.pdf [firstpage_image] =>[orig_patent_app_number] => 11330182 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 4536157 [patent_doc_number] => 07924403 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2011-04-12 [patent_title] => 'Lithographic apparatus and device and device manufacturing method' [patent_app_type] => utility [patent_app_number] => 11/330401 [patent_app_country] => US [patent_app_date] => 2006-01-12 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 4 [patent_figures_cnt] => 13 [patent_no_of_words] => 6292 [patent_no_of_claims] => 25 [patent_no_of_ind_claims] => 4 [patent_words_short_claim] => 112 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/07/924/07924403.pdf [firstpage_image] =>[orig_patent_app_number] => 11330401 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 5758343 [patent_doc_number] => 20060209288 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2006-09-21 [patent_title] => 'Proximity type exposure apparatus' [patent_app_type] => utility [patent_app_number] => 11/319387 [patent_app_country] => US [patent_app_date] => 2005-12-29 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 5 [patent_figures_cnt] => 5 [patent_no_of_words] => 5446 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0209/20060209288.pdf [firstpage_image] =>[orig_patent_app_number] => 11319387 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 844570 [patent_doc_number] => 07388650 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2008-06-17 [patent_title] => 'Lithographic apparatus and device manufacturing method' [patent_app_type] => utility [patent_app_number] => 11/320405 [patent_app_country] => US [patent_app_date] => 2005-12-29 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 2 [patent_figures_cnt] => 3 [patent_no_of_words] => 4516 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 47 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/07/388/07388650.pdf [firstpage_image] =>[orig_patent_app_number] => 11320405 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 7592458 [patent_doc_number] => 07652746 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2010-01-26 [patent_title] => 'Lithographic apparatus and device manufacturing method' [patent_app_type] => utility [patent_app_number] => 11/319217 [patent_app_country] => US [patent_app_date] => 2005-12-28 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 6 [patent_figures_cnt] => 12 [patent_no_of_words] => 8256 [patent_no_of_claims] => 50 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 88 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/07/652/07652746.pdf [firstpage_image] =>[orig_patent_app_number] => 11319217 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 5020713 [patent_doc_number] => 20070146679 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2007-06-28 [patent_title] => 'Lithographic apparatus and method' [patent_app_type] => utility [patent_app_number] => 11/319192 [patent_app_country] => US [patent_app_date] => 2005-12-28 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 5 [patent_figures_cnt] => 5 [patent_no_of_words] => 5509 [patent_no_of_claims] => 23 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0146/20070146679.pdf [firstpage_image] =>[orig_patent_app_number] => 11319192 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 909447 [patent_doc_number] => 07333174 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2008-02-19 [patent_title] => 'Lithographic apparatus and method for determining Z position errors/variations and substrate table flatness' [patent_app_type] => utility [patent_app_number] => 11/317230 [patent_app_country] => US [patent_app_date] => 2005-12-27 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 8 [patent_figures_cnt] => 13 [patent_no_of_words] => 8550 [patent_no_of_claims] => 25 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 173 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/07/333/07333174.pdf [firstpage_image] =>[orig_patent_app_number] => 11317230 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 5020690 [patent_doc_number] => 20070146656 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2007-06-28 [patent_title] => 'Lithographic apparatus and device manufacturing method incorporationg a pressure shield' [patent_app_type] => utility [patent_app_number] => 11/314156 [patent_app_country] => US [patent_app_date] => 2005-12-22 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 5 [patent_figures_cnt] => 5 [patent_no_of_words] => 4827 [patent_no_of_claims] => 21 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0146/20070146656.pdf [firstpage_image] =>[orig_patent_app_number] => 11314156 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 870383 [patent_doc_number] => 07365826 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2008-04-29 [patent_title] => 'Projection optical system, exposure apparatus and method using the same' [patent_app_type] => utility [patent_app_number] => 11/302155 [patent_app_country] => US [patent_app_date] => 2005-12-14 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 8 [patent_figures_cnt] => 10 [patent_no_of_words] => 4855 [patent_no_of_claims] => 5 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 158 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/07/365/07365826.pdf [firstpage_image] =>[orig_patent_app_number] => 11302155 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 289685 [patent_doc_number] => 07548304 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2009-06-16 [patent_title] => 'Chuck plate assembly with cooling means' [patent_app_type] => utility [patent_app_number] => 11/298566 [patent_app_country] => US [patent_app_date] => 2005-12-12 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 6 [patent_figures_cnt] => 12 [patent_no_of_words] => 2879 [patent_no_of_claims] => 17 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 63 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/07/548/07548304.pdf [firstpage_image] =>[orig_patent_app_number] => 11298566 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 5647016 [patent_doc_number] => 20060132748 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2006-06-22 [patent_title] => 'Exposure system, exposure method and method for manufacturing a semiconductor device' [patent_app_type] => utility [patent_app_number] => 11/298706 [patent_app_country] => US [patent_app_date] => 2005-12-12 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 15 [patent_figures_cnt] => 15 [patent_no_of_words] => 8563 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0132/20060132748.pdf [firstpage_image] =>[orig_patent_app_number] => 11298706 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 5811877 [patent_doc_number] => 20060082755 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2006-04-20 [patent_title] => 'Stage system, exposure apparatus, and device manufacturing method' [patent_app_type] => utility [patent_app_number] => 11/289472 [patent_app_country] => US [patent_app_date] => 2005-11-30 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 15 [patent_figures_cnt] => 15 [patent_no_of_words] => 8044 [patent_no_of_claims] => 2 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0082/20060082755.pdf [firstpage_image] =>[orig_patent_app_number] => 11289472 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 5811850 [patent_doc_number] => 20060082744 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2006-04-20 [patent_title] => 'Exposure method, exposure apparatus, and method for producing device' [patent_app_type] => utility [patent_app_number] => 11/287317 [patent_app_country] => US [patent_app_date] => 2005-11-28 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 16 [patent_figures_cnt] => 16 [patent_no_of_words] => 22387 [patent_no_of_claims] => 77 [patent_no_of_ind_claims] => 11 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0082/20060082744.pdf [firstpage_image] =>[orig_patent_app_number] => 11287317 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 834372 [patent_doc_number] => 07397534 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2008-07-08 [patent_title] => 'Exposure apparatus and device manufacturing method' [patent_app_type] => utility [patent_app_number] => 11/285604 [patent_app_country] => US [patent_app_date] => 2005-11-23 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 4 [patent_figures_cnt] => 4 [patent_no_of_words] => 8213 [patent_no_of_claims] => 14 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 98 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/07/397/07397534.pdf [firstpage_image] =>[orig_patent_app_number] => 11285604 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 264573 [patent_doc_number] => 07570343 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2009-08-04 [patent_title] => 'Microlithographic projection exposure apparatus' [patent_app_type] => utility [patent_app_number] => 11/285283 [patent_app_country] => US [patent_app_date] => 2005-11-23 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 18 [patent_figures_cnt] => 22 [patent_no_of_words] => 14468 [patent_no_of_claims] => 8 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 90 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/07/570/07570343.pdf [firstpage_image] =>[orig_patent_app_number] => 11285283 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 459011 [patent_doc_number] => 07245356 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2007-07-17 [patent_title] => 'Lithographic apparatus and method for optimizing illumination using a photolithographic simulation' [patent_app_type] => utility [patent_app_number] => 11/280985 [patent_app_country] => US [patent_app_date] => 2005-11-17 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 60 [patent_figures_cnt] => 99 [patent_no_of_words] => 30483 [patent_no_of_claims] => 30 [patent_no_of_ind_claims] => 4 [patent_words_short_claim] => 126 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/07/245/07245356.pdf [firstpage_image] =>[orig_patent_app_number] => 11280985 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 543150 [patent_doc_number] => 07173687 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2007-02-06 [patent_title] => 'Lithographic apparatus, device manufacturing method, and device manufactured thereby' [patent_app_type] => utility [patent_app_number] => 11/273436 [patent_app_country] => US [patent_app_date] => 2005-11-15 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 4 [patent_figures_cnt] => 5 [patent_no_of_words] => 5416 [patent_no_of_claims] => 21 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 127 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/07/173/07173687.pdf [firstpage_image] =>[orig_patent_app_number] => 11273436 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 515741 [patent_doc_number] => 07199862 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2007-04-03 [patent_title] => 'Beam-splitter optics design that maintains an unflipped (unmirrored) image for a catadioptric lithographic system' [patent_app_type] => utility [patent_app_number] => 11/272147 [patent_app_country] => US [patent_app_date] => 2005-11-14 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 6 [patent_figures_cnt] => 6 [patent_no_of_words] => 6214 [patent_no_of_claims] => 14 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 46 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/07/199/07199862.pdf [firstpage_image] =>[orig_patent_app_number] => 11272147 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 5745144 [patent_doc_number] => 20060108068 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2006-05-25 [patent_title] => 'Substrate processing apparatus and substrate processing method' [patent_app_type] => utility [patent_app_number] => 11/273440 [patent_app_country] => US [patent_app_date] => 2005-11-10 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 15 [patent_figures_cnt] => 15 [patent_no_of_words] => 15454 [patent_no_of_claims] => 28 [patent_no_of_ind_claims] => 4 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0108/20060108068.pdf [firstpage_image] =>[orig_patent_app_number] => 11273440 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 5629834 [patent_doc_number] => 20060146302 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2006-07-06 [patent_title] => 'Method and exposure apparatus for performing a tilted focus and a device manufactured accordingly' [patent_app_type] => utility [patent_app_number] => 11/270826 [patent_app_country] => US [patent_app_date] => 2005-11-10 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 9 [patent_figures_cnt] => 9 [patent_no_of_words] => 9408 [patent_no_of_claims] => 21 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0146/20060146302.pdf [firstpage_image] =>[orig_patent_app_number] => 11270826 [rel_patent_id] =>[rel_patent_doc_number] =>)