Search

Alan A Mathews

Examiner (ID: 11510)

Most Active Art Unit
2101
Art Unit(s)
2203, 2101, 2851, 2882
Total Applications
2349
Issued Applications
2176
Pending Applications
25
Abandoned Applications
148

Applications

Application numberTitle of the applicationFiling DateStatus
Array ( [id] => 173181 [patent_doc_number] => 07658560 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2010-02-09 [patent_title] => 'Substrate processing apparatus' [patent_app_type] => utility [patent_app_number] => 11/273441 [patent_app_country] => US [patent_app_date] => 2005-11-10 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 6 [patent_figures_cnt] => 6 [patent_no_of_words] => 8604 [patent_no_of_claims] => 10 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 137 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/07/658/07658560.pdf [firstpage_image] =>[orig_patent_app_number] => 11273441 [rel_patent_id] =>[rel_patent_doc_number] =>)
11/273441
Substrate processing apparatus Nov 9, 2005 Issued
Array ( [id] => 5775995 [patent_doc_number] => 20060104635 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2006-05-18 [patent_title] => 'Substrate processing apparatus and substrate processing method' [patent_app_type] => utility [patent_app_number] => 11/273439 [patent_app_country] => US [patent_app_date] => 2005-11-10 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 14 [patent_figures_cnt] => 14 [patent_no_of_words] => 13095 [patent_no_of_claims] => 12 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0104/20060104635.pdf [firstpage_image] =>[orig_patent_app_number] => 11273439 [rel_patent_id] =>[rel_patent_doc_number] =>)
11/273439
Substrate processing apparatus and substrate processing method Nov 9, 2005 Issued
Array ( [id] => 5214586 [patent_doc_number] => 20070103666 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2007-05-10 [patent_title] => 'Lithographic apparatus and device manufacturing method' [patent_app_type] => utility [patent_app_number] => 11/268777 [patent_app_country] => US [patent_app_date] => 2005-11-08 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 10 [patent_figures_cnt] => 10 [patent_no_of_words] => 9746 [patent_no_of_claims] => 47 [patent_no_of_ind_claims] => 5 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0103/20070103666.pdf [firstpage_image] =>[orig_patent_app_number] => 11268777 [rel_patent_id] =>[rel_patent_doc_number] =>)
11/268777
Lithographic apparatus and device manufacturing method Nov 7, 2005 Issued
Array ( [id] => 410507 [patent_doc_number] => 07281868 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2007-10-16 [patent_title] => 'Heat developing apparatus and heat developing method' [patent_app_type] => utility [patent_app_number] => 11/263868 [patent_app_country] => US [patent_app_date] => 2005-11-02 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 10 [patent_figures_cnt] => 14 [patent_no_of_words] => 10350 [patent_no_of_claims] => 5 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 132 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/07/281/07281868.pdf [firstpage_image] =>[orig_patent_app_number] => 11263868 [rel_patent_id] =>[rel_patent_doc_number] =>)
11/263868
Heat developing apparatus and heat developing method Nov 1, 2005 Issued
Array ( [id] => 441309 [patent_doc_number] => 07255500 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2007-08-14 [patent_title] => 'Heat developing method and heat developing apparatus' [patent_app_type] => utility [patent_app_number] => 11/264932 [patent_app_country] => US [patent_app_date] => 2005-11-01 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 13 [patent_figures_cnt] => 18 [patent_no_of_words] => 14844 [patent_no_of_claims] => 7 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 152 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/07/255/07255500.pdf [firstpage_image] =>[orig_patent_app_number] => 11264932 [rel_patent_id] =>[rel_patent_doc_number] =>)
11/264932
Heat developing method and heat developing apparatus Oct 31, 2005 Issued
Array ( [id] => 5797429 [patent_doc_number] => 20060033894 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2006-02-16 [patent_title] => 'Apparatus and method for maintaining immersion fluid in the gap under the projection lens during wafer exchange in an immersion lithography machine' [patent_app_type] => utility [patent_app_number] => 11/259061 [patent_app_country] => US [patent_app_date] => 2005-10-27 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 10 [patent_figures_cnt] => 10 [patent_no_of_words] => 6349 [patent_no_of_claims] => 17 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0033/20060033894.pdf [firstpage_image] =>[orig_patent_app_number] => 11259061 [rel_patent_id] =>[rel_patent_doc_number] =>)
11/259061
Apparatus and method for maintaining immersion fluid in the gap under the projection lens during wafer exchange in an immersion lithography machine Oct 26, 2005 Issued
Array ( [id] => 448388 [patent_doc_number] => 07253877 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2007-08-07 [patent_title] => 'Exposure apparatus, and device manufacturing method' [patent_app_type] => utility [patent_app_number] => 11/251837 [patent_app_country] => US [patent_app_date] => 2005-10-18 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 6 [patent_figures_cnt] => 6 [patent_no_of_words] => 2455 [patent_no_of_claims] => 7 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 117 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/07/253/07253877.pdf [firstpage_image] =>[orig_patent_app_number] => 11251837 [rel_patent_id] =>[rel_patent_doc_number] =>)
11/251837
Exposure apparatus, and device manufacturing method Oct 17, 2005 Issued
Array ( [id] => 673995 [patent_doc_number] => 07092071 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2006-08-15 [patent_title] => 'Exposure apparatus and method, and device fabricating method using the same' [patent_app_type] => utility [patent_app_number] => 11/253339 [patent_app_country] => US [patent_app_date] => 2005-10-18 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 11 [patent_figures_cnt] => 12 [patent_no_of_words] => 7343 [patent_no_of_claims] => 5 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 132 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/07/092/07092071.pdf [firstpage_image] =>[orig_patent_app_number] => 11253339 [rel_patent_id] =>[rel_patent_doc_number] =>)
11/253339
Exposure apparatus and method, and device fabricating method using the same Oct 17, 2005 Issued
Array ( [id] => 4981434 [patent_doc_number] => 20070085991 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2007-04-19 [patent_title] => 'DENSITY-AWARE DYNAMIC LEVELING IN SCANNING EXPOSURE SYSTEMS' [patent_app_type] => utility [patent_app_number] => 11/163409 [patent_app_country] => US [patent_app_date] => 2005-10-18 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 5 [patent_figures_cnt] => 5 [patent_no_of_words] => 4636 [patent_no_of_claims] => 13 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0085/20070085991.pdf [firstpage_image] =>[orig_patent_app_number] => 11163409 [rel_patent_id] =>[rel_patent_doc_number] =>)
11/163409
Density-aware dynamic leveling in scanning exposure systems Oct 17, 2005 Issued
Array ( [id] => 481703 [patent_doc_number] => 07224434 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2007-05-29 [patent_title] => 'Exposure method' [patent_app_type] => utility [patent_app_number] => 11/252440 [patent_app_country] => US [patent_app_date] => 2005-10-17 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 8 [patent_figures_cnt] => 14 [patent_no_of_words] => 5456 [patent_no_of_claims] => 2 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 102 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/07/224/07224434.pdf [firstpage_image] =>[orig_patent_app_number] => 11252440 [rel_patent_id] =>[rel_patent_doc_number] =>)
11/252440
Exposure method Oct 16, 2005 Issued
Array ( [id] => 920723 [patent_doc_number] => 07321418 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2008-01-22 [patent_title] => 'Stage apparatus, exposure apparatus, and device manufacturing method' [patent_app_type] => utility [patent_app_number] => 11/249700 [patent_app_country] => US [patent_app_date] => 2005-10-13 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 9 [patent_figures_cnt] => 16 [patent_no_of_words] => 5070 [patent_no_of_claims] => 8 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 105 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/07/321/07321418.pdf [firstpage_image] =>[orig_patent_app_number] => 11249700 [rel_patent_id] =>[rel_patent_doc_number] =>)
11/249700
Stage apparatus, exposure apparatus, and device manufacturing method Oct 12, 2005 Issued
Array ( [id] => 5746514 [patent_doc_number] => 20060109444 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2006-05-25 [patent_title] => 'Exposure apparatus' [patent_app_type] => utility [patent_app_number] => 11/249783 [patent_app_country] => US [patent_app_date] => 2005-10-13 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 3 [patent_figures_cnt] => 3 [patent_no_of_words] => 1992 [patent_no_of_claims] => 8 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0109/20060109444.pdf [firstpage_image] =>[orig_patent_app_number] => 11249783 [rel_patent_id] =>[rel_patent_doc_number] =>)
11/249783
Exposure apparatus Oct 12, 2005 Issued
Array ( [id] => 5806041 [patent_doc_number] => 20060092394 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2006-05-04 [patent_title] => 'Lithographic tool with dual isolation system and method for configuring the same' [patent_app_type] => utility [patent_app_number] => 11/248141 [patent_app_country] => US [patent_app_date] => 2005-10-13 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 13 [patent_figures_cnt] => 13 [patent_no_of_words] => 15501 [patent_no_of_claims] => 30 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0092/20060092394.pdf [firstpage_image] =>[orig_patent_app_number] => 11248141 [rel_patent_id] =>[rel_patent_doc_number] =>)
11/248141
Lithographic tool with dual isolation system and method for configuring the same Oct 12, 2005 Issued
Array ( [id] => 5879408 [patent_doc_number] => 20060028629 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2006-02-09 [patent_title] => 'Exposure apparatus' [patent_app_type] => utility [patent_app_number] => 11/245242 [patent_app_country] => US [patent_app_date] => 2005-10-07 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 16 [patent_figures_cnt] => 16 [patent_no_of_words] => 9084 [patent_no_of_claims] => 6 [patent_no_of_ind_claims] => 5 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0028/20060028629.pdf [firstpage_image] =>[orig_patent_app_number] => 11245242 [rel_patent_id] =>[rel_patent_doc_number] =>)
11/245242
Exposure apparatus Oct 6, 2005 Issued
Array ( [id] => 232067 [patent_doc_number] => 07597491 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2009-10-06 [patent_title] => 'Apparatus for and method of processing substrate' [patent_app_type] => utility [patent_app_number] => 11/245347 [patent_app_country] => US [patent_app_date] => 2005-10-06 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 9 [patent_figures_cnt] => 12 [patent_no_of_words] => 6888 [patent_no_of_claims] => 6 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 147 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/07/597/07597491.pdf [firstpage_image] =>[orig_patent_app_number] => 11245347 [rel_patent_id] =>[rel_patent_doc_number] =>)
11/245347
Apparatus for and method of processing substrate Oct 5, 2005 Issued
Array ( [id] => 862159 [patent_doc_number] => 07372538 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2008-05-13 [patent_title] => 'Apparatus and method for maintaining immerison fluid in the gap under the projection lens during wafer exchange in an immersion lithography machine' [patent_app_type] => utility [patent_app_number] => 11/237721 [patent_app_country] => US [patent_app_date] => 2005-09-29 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 9 [patent_figures_cnt] => 15 [patent_no_of_words] => 6324 [patent_no_of_claims] => 106 [patent_no_of_ind_claims] => 8 [patent_words_short_claim] => 92 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/07/372/07372538.pdf [firstpage_image] =>[orig_patent_app_number] => 11237721 [rel_patent_id] =>[rel_patent_doc_number] =>)
11/237721
Apparatus and method for maintaining immerison fluid in the gap under the projection lens during wafer exchange in an immersion lithography machine Sep 28, 2005 Issued
Array ( [id] => 594895 [patent_doc_number] => 07440076 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2008-10-21 [patent_title] => 'Lithographic apparatus, device manufacturing method and device manufactured thereby' [patent_app_type] => utility [patent_app_number] => 11/238157 [patent_app_country] => US [patent_app_date] => 2005-09-29 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 3 [patent_figures_cnt] => 3 [patent_no_of_words] => 7296 [patent_no_of_claims] => 35 [patent_no_of_ind_claims] => 5 [patent_words_short_claim] => 66 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/07/440/07440076.pdf [firstpage_image] =>[orig_patent_app_number] => 11238157 [rel_patent_id] =>[rel_patent_doc_number] =>)
11/238157
Lithographic apparatus, device manufacturing method and device manufactured thereby Sep 28, 2005 Issued
Array ( [id] => 592643 [patent_doc_number] => 07443482 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2008-10-28 [patent_title] => 'Liquid jet and recovery system for immersion lithography' [patent_app_type] => utility [patent_app_number] => 11/236759 [patent_app_country] => US [patent_app_date] => 2005-09-28 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 7 [patent_figures_cnt] => 13 [patent_no_of_words] => 4200 [patent_no_of_claims] => 68 [patent_no_of_ind_claims] => 10 [patent_words_short_claim] => 93 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/07/443/07443482.pdf [firstpage_image] =>[orig_patent_app_number] => 11236759 [rel_patent_id] =>[rel_patent_doc_number] =>)
11/236759
Liquid jet and recovery system for immersion lithography Sep 27, 2005 Issued
Array ( [id] => 5719321 [patent_doc_number] => 20060072094 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2006-04-06 [patent_title] => 'Exposure apparatus and device manufacturing method' [patent_app_type] => utility [patent_app_number] => 11/237486 [patent_app_country] => US [patent_app_date] => 2005-09-27 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 11 [patent_figures_cnt] => 11 [patent_no_of_words] => 3734 [patent_no_of_claims] => 6 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0072/20060072094.pdf [firstpage_image] =>[orig_patent_app_number] => 11237486 [rel_patent_id] =>[rel_patent_doc_number] =>)
11/237486
Exposure apparatus and device manufacturing method Sep 26, 2005 Issued
Array ( [id] => 5635852 [patent_doc_number] => 20060066825 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2006-03-30 [patent_title] => 'Exposure apparatus, and device manufacturing method' [patent_app_type] => utility [patent_app_number] => 11/233034 [patent_app_country] => US [patent_app_date] => 2005-09-23 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 6 [patent_figures_cnt] => 6 [patent_no_of_words] => 3069 [patent_no_of_claims] => 6 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0066/20060066825.pdf [firstpage_image] =>[orig_patent_app_number] => 11233034 [rel_patent_id] =>[rel_patent_doc_number] =>)
11/233034
Exposure apparatus, and device manufacturing method Sep 22, 2005 Issued
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