Search

Alexander S Thomas

Examiner (ID: 6457, Phone: (571)272-1502 , Office: P/1783 )

Most Active Art Unit
1783
Art Unit(s)
1772, 1783, 1315, 1721, 1504, 2899, 1508, 1794, 1773, 1506
Total Applications
4004
Issued Applications
3000
Pending Applications
169
Abandoned Applications
835

Applications

Application numberTitle of the applicationFiling DateStatus
Array ( [id] => 4802775 [patent_doc_number] => 20080014363 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2008-01-17 [patent_title] => 'Electro-Static Chucking Mechanism and Surface Processing Apparatus' [patent_app_type] => utility [patent_app_number] => 11/779169 [patent_app_country] => US [patent_app_date] => 2007-07-17 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 6 [patent_figures_cnt] => 6 [patent_no_of_words] => 4775 [patent_no_of_claims] => 7 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0014/20080014363.pdf [firstpage_image] =>[orig_patent_app_number] => 11779169 [rel_patent_id] =>[rel_patent_doc_number] =>)
11/779169
Electro-Static Chucking Mechanism and Surface Processing Apparatus Jul 16, 2007 Abandoned
Array ( [id] => 4654284 [patent_doc_number] => 20080023144 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2008-01-31 [patent_title] => 'DIELECTRIC ETCH TOOL CONFIGURED FOR HIGH DENSITY AND LOW BOMBARDMENT ENERGY PLASMA PROVIDING HIGH ETCH RATES' [patent_app_type] => utility [patent_app_number] => 11/778058 [patent_app_country] => US [patent_app_date] => 2007-07-15 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 15 [patent_figures_cnt] => 15 [patent_no_of_words] => 17550 [patent_no_of_claims] => 21 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0023/20080023144.pdf [firstpage_image] =>[orig_patent_app_number] => 11778058 [rel_patent_id] =>[rel_patent_doc_number] =>)
11/778058
DIELECTRIC ETCH TOOL CONFIGURED FOR HIGH DENSITY AND LOW BOMBARDMENT ENERGY PLASMA PROVIDING HIGH ETCH RATES Jul 14, 2007 Abandoned
Array ( [id] => 5349512 [patent_doc_number] => 20090004873 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2009-01-01 [patent_title] => 'HYBRID ETCH CHAMBER WITH DECOUPLED PLASMA CONTROLS' [patent_app_type] => utility [patent_app_number] => 11/749069 [patent_app_country] => US [patent_app_date] => 2007-06-26 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 5 [patent_figures_cnt] => 5 [patent_no_of_words] => 4340 [patent_no_of_claims] => 23 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0004/20090004873.pdf [firstpage_image] =>[orig_patent_app_number] => 11749069 [rel_patent_id] =>[rel_patent_doc_number] =>)
11/749069
HYBRID ETCH CHAMBER WITH DECOUPLED PLASMA CONTROLS Jun 25, 2007 Abandoned
Array ( [id] => 5244591 [patent_doc_number] => 20070240825 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2007-10-18 [patent_title] => 'Wafer processing apparatus capable of controlling wafer temperature' [patent_app_type] => utility [patent_app_number] => 11/812289 [patent_app_country] => US [patent_app_date] => 2007-06-18 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 12 [patent_figures_cnt] => 12 [patent_no_of_words] => 7905 [patent_no_of_claims] => 3 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0240/20070240825.pdf [firstpage_image] =>[orig_patent_app_number] => 11812289 [rel_patent_id] =>[rel_patent_doc_number] =>)
11/812289
Wafer processing apparatus capable of controlling wafer temperature Jun 17, 2007 Abandoned
Array ( [id] => 5059622 [patent_doc_number] => 20070221258 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2007-09-27 [patent_title] => 'ETCHING METHOD AND APPARATUS' [patent_app_type] => utility [patent_app_number] => 11/755385 [patent_app_country] => US [patent_app_date] => 2007-05-30 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 4 [patent_figures_cnt] => 4 [patent_no_of_words] => 5491 [patent_no_of_claims] => 7 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0221/20070221258.pdf [firstpage_image] =>[orig_patent_app_number] => 11755385 [rel_patent_id] =>[rel_patent_doc_number] =>)
11/755385
ETCHING METHOD AND APPARATUS May 29, 2007 Abandoned
Array ( [id] => 8212924 [patent_doc_number] => 08192576 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2012-06-05 [patent_title] => 'Methods of and apparatus for measuring and controlling wafer potential in pulsed RF bias processing' [patent_app_type] => utility [patent_app_number] => 11/805607 [patent_app_country] => US [patent_app_date] => 2007-05-23 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 17 [patent_figures_cnt] => 19 [patent_no_of_words] => 14262 [patent_no_of_claims] => 22 [patent_no_of_ind_claims] => 4 [patent_words_short_claim] => 215 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/08/192/08192576.pdf [firstpage_image] =>[orig_patent_app_number] => 11805607 [rel_patent_id] =>[rel_patent_doc_number] =>)
11/805607
Methods of and apparatus for measuring and controlling wafer potential in pulsed RF bias processing May 22, 2007 Issued
Array ( [id] => 4472720 [patent_doc_number] => 07867356 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2011-01-11 [patent_title] => 'Apparatus for reducing polymer deposition on a substrate and substrate support' [patent_app_type] => utility [patent_app_number] => 11/802212 [patent_app_country] => US [patent_app_date] => 2007-05-21 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 4 [patent_figures_cnt] => 6 [patent_no_of_words] => 3211 [patent_no_of_claims] => 18 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 115 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/07/867/07867356.pdf [firstpage_image] =>[orig_patent_app_number] => 11802212 [rel_patent_id] =>[rel_patent_doc_number] =>)
11/802212
Apparatus for reducing polymer deposition on a substrate and substrate support May 20, 2007 Issued
Array ( [id] => 5043285 [patent_doc_number] => 20070261956 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2007-11-15 [patent_title] => 'COATING INSTALLATION WITH CARRIER FOR SUBSTRATE COATING' [patent_app_type] => utility [patent_app_number] => 11/746749 [patent_app_country] => US [patent_app_date] => 2007-05-10 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 3 [patent_figures_cnt] => 3 [patent_no_of_words] => 2228 [patent_no_of_claims] => 17 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0261/20070261956.pdf [firstpage_image] =>[orig_patent_app_number] => 11746749 [rel_patent_id] =>[rel_patent_doc_number] =>)
11/746749
COATING INSTALLATION WITH CARRIER FOR SUBSTRATE COATING May 9, 2007 Abandoned
Array ( [id] => 5109604 [patent_doc_number] => 20070193519 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2007-08-23 [patent_title] => 'Large area deposition in high vacuum with high thickness uniformity' [patent_app_type] => utility [patent_app_number] => 11/785141 [patent_app_country] => US [patent_app_date] => 2007-04-16 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 6 [patent_figures_cnt] => 6 [patent_no_of_words] => 5111 [patent_no_of_claims] => 6 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0193/20070193519.pdf [firstpage_image] =>[orig_patent_app_number] => 11785141 [rel_patent_id] =>[rel_patent_doc_number] =>)
11/785141
Large area deposition in high vacuum with high thickness uniformity Apr 15, 2007 Abandoned
Array ( [id] => 4842603 [patent_doc_number] => 20080179011 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2008-07-31 [patent_title] => 'PLASMA REACTOR WITH WIDE PROCESS WINDOW EMPLOYING PLURAL VHF SOURCES' [patent_app_type] => utility [patent_app_number] => 11/734040 [patent_app_country] => US [patent_app_date] => 2007-04-11 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 15 [patent_figures_cnt] => 15 [patent_no_of_words] => 10855 [patent_no_of_claims] => 24 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0179/20080179011.pdf [firstpage_image] =>[orig_patent_app_number] => 11734040 [rel_patent_id] =>[rel_patent_doc_number] =>)
11/734040
PLASMA REACTOR WITH WIDE PROCESS WINDOW EMPLOYING PLURAL VHF SOURCES Apr 10, 2007 Abandoned
Array ( [id] => 4842395 [patent_doc_number] => 20080178803 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2008-07-31 [patent_title] => 'PLASMA REACTOR WITH ION DISTRIBUTION UNIFORMITY CONTROLLER EMPLOYING PLURAL VHF SOURCES' [patent_app_type] => utility [patent_app_number] => 11/733913 [patent_app_country] => US [patent_app_date] => 2007-04-11 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 15 [patent_figures_cnt] => 15 [patent_no_of_words] => 10949 [patent_no_of_claims] => 21 [patent_no_of_ind_claims] => 4 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0178/20080178803.pdf [firstpage_image] =>[orig_patent_app_number] => 11733913 [rel_patent_id] =>[rel_patent_doc_number] =>)
11/733913
PLASMA REACTOR WITH ION DISTRIBUTION UNIFORMITY CONTROLLER EMPLOYING PLURAL VHF SOURCES Apr 10, 2007 Abandoned
Array ( [id] => 5088019 [patent_doc_number] => 20070227658 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2007-10-04 [patent_title] => 'CONTROL DEVICE FOR CONTROLLING SUBSTRATE PROCESSING APPARATUS AND METHOD THEREFOR' [patent_app_type] => utility [patent_app_number] => 11/692426 [patent_app_country] => US [patent_app_date] => 2007-03-28 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 16 [patent_figures_cnt] => 16 [patent_no_of_words] => 11261 [patent_no_of_claims] => 14 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0227/20070227658.pdf [firstpage_image] =>[orig_patent_app_number] => 11692426 [rel_patent_id] =>[rel_patent_doc_number] =>)
11/692426
CONTROL DEVICE FOR CONTROLLING SUBSTRATE PROCESSING APPARATUS AND METHOD THEREFOR Mar 27, 2007 Abandoned
Array ( [id] => 5088028 [patent_doc_number] => 20070227667 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2007-10-04 [patent_title] => 'PLASMA PROCESSING APPARATUS AND METHOD OF MEASURING AMOUNT OF RADIO-FREQUENCY CURRENT IN PLASMA' [patent_app_type] => utility [patent_app_number] => 11/692340 [patent_app_country] => US [patent_app_date] => 2007-03-28 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 8 [patent_figures_cnt] => 8 [patent_no_of_words] => 7083 [patent_no_of_claims] => 16 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0227/20070227667.pdf [firstpage_image] =>[orig_patent_app_number] => 11692340 [rel_patent_id] =>[rel_patent_doc_number] =>)
11/692340
Plasma processing apparatus and method of measuring amount of radio-frequency current in plasma Mar 27, 2007 Issued
Array ( [id] => 5063069 [patent_doc_number] => 20070224709 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2007-09-27 [patent_title] => 'PLASMA PROCESSING METHOD AND APPARATUS, CONTROL PROGRAM AND STORAGE MEDIUM' [patent_app_type] => utility [patent_app_number] => 11/689840 [patent_app_country] => US [patent_app_date] => 2007-03-22 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 9 [patent_figures_cnt] => 9 [patent_no_of_words] => 7986 [patent_no_of_claims] => 16 [patent_no_of_ind_claims] => 11 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0224/20070224709.pdf [firstpage_image] =>[orig_patent_app_number] => 11689840 [rel_patent_id] =>[rel_patent_doc_number] =>)
11/689840
PLASMA PROCESSING METHOD AND APPARATUS, CONTROL PROGRAM AND STORAGE MEDIUM Mar 21, 2007 Abandoned
Array ( [id] => 5002091 [patent_doc_number] => 20070199655 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2007-08-30 [patent_title] => 'SUBSTRATE PROCESSING APPARATUS, METHOD FOR MODIFYING SUBSTRATE PROCESSING CONDITIONS AND STORAGE MEDIUM' [patent_app_type] => utility [patent_app_number] => 11/679363 [patent_app_country] => US [patent_app_date] => 2007-02-27 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 15 [patent_figures_cnt] => 15 [patent_no_of_words] => 11396 [patent_no_of_claims] => 9 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0199/20070199655.pdf [firstpage_image] =>[orig_patent_app_number] => 11679363 [rel_patent_id] =>[rel_patent_doc_number] =>)
11/679363
SUBSTRATE PROCESSING APPARATUS, METHOD FOR MODIFYING SUBSTRATE PROCESSING CONDITIONS AND STORAGE MEDIUM Feb 26, 2007 Abandoned
Array ( [id] => 5061360 [patent_doc_number] => 20070222999 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2007-09-27 [patent_title] => 'Apparatus for monitoring a density profile of impurities' [patent_app_type] => utility [patent_app_number] => 11/710579 [patent_app_country] => US [patent_app_date] => 2007-02-26 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 6 [patent_figures_cnt] => 6 [patent_no_of_words] => 4553 [patent_no_of_claims] => 19 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0222/20070222999.pdf [firstpage_image] =>[orig_patent_app_number] => 11710579 [rel_patent_id] =>[rel_patent_doc_number] =>)
11/710579
Apparatus for monitoring a density profile of impurities Feb 25, 2007 Abandoned
Array ( [id] => 5259169 [patent_doc_number] => 20070212801 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2007-09-13 [patent_title] => 'System for adjusting manufacturing equipment, method for adjusting manufacturing equipment, and method for manufacturing semiconductor device' [patent_app_type] => utility [patent_app_number] => 11/708344 [patent_app_country] => US [patent_app_date] => 2007-02-21 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 11 [patent_figures_cnt] => 11 [patent_no_of_words] => 9751 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0212/20070212801.pdf [firstpage_image] =>[orig_patent_app_number] => 11708344 [rel_patent_id] =>[rel_patent_doc_number] =>)
11/708344
System for adjusting manufacturing equipment, method for adjusting manufacturing equipment, and method for manufacturing semiconductor device Feb 20, 2007 Abandoned
Array ( [id] => 5357160 [patent_doc_number] => 20090031954 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2009-02-05 [patent_title] => 'SUSCEPTOR AND APPARATUS FOR MANUFACTURING EPITAXIAL WAFER' [patent_app_type] => utility [patent_app_number] => 12/278650 [patent_app_country] => US [patent_app_date] => 2007-02-08 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 18 [patent_figures_cnt] => 18 [patent_no_of_words] => 14094 [patent_no_of_claims] => 14 [patent_no_of_ind_claims] => 4 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0031/20090031954.pdf [firstpage_image] =>[orig_patent_app_number] => 12278650 [rel_patent_id] =>[rel_patent_doc_number] =>)
12/278650
SUSCEPTOR AND APPARATUS FOR MANUFACTURING EPITAXIAL WAFER Feb 7, 2007 Abandoned
Array ( [id] => 150818 [patent_doc_number] => 07678226 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2010-03-16 [patent_title] => 'Method and apparatus for an improved bellows shield in a plasma processing system' [patent_app_type] => utility [patent_app_number] => 11/671282 [patent_app_country] => US [patent_app_date] => 2007-02-05 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 8 [patent_figures_cnt] => 8 [patent_no_of_words] => 4221 [patent_no_of_claims] => 35 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 350 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/07/678/07678226.pdf [firstpage_image] =>[orig_patent_app_number] => 11671282 [rel_patent_id] =>[rel_patent_doc_number] =>)
11/671282
Method and apparatus for an improved bellows shield in a plasma processing system Feb 4, 2007 Issued
Array ( [id] => 5097802 [patent_doc_number] => 20070181062 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2007-08-09 [patent_title] => 'SEMICONDUCTOR DEVICE MANUFACTURING APPARATUS INCLUDING TEMPERATURE MEASURING UNIT' [patent_app_type] => utility [patent_app_number] => 11/670596 [patent_app_country] => US [patent_app_date] => 2007-02-02 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 8 [patent_figures_cnt] => 8 [patent_no_of_words] => 6458 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0181/20070181062.pdf [firstpage_image] =>[orig_patent_app_number] => 11670596 [rel_patent_id] =>[rel_patent_doc_number] =>)
11/670596
SEMICONDUCTOR DEVICE MANUFACTURING APPARATUS INCLUDING TEMPERATURE MEASURING UNIT Feb 1, 2007 Abandoned
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