Search

Alexander S Thomas

Examiner (ID: 6457, Phone: (571)272-1502 , Office: P/1783 )

Most Active Art Unit
1783
Art Unit(s)
1772, 1783, 1315, 1721, 1504, 2899, 1508, 1794, 1773, 1506
Total Applications
4004
Issued Applications
3000
Pending Applications
169
Abandoned Applications
835

Applications

Application numberTitle of the applicationFiling DateStatus
Array ( [id] => 5178598 [patent_doc_number] => 20070179658 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2007-08-02 [patent_title] => 'SUBSTRATE PROCESSING SYSTEM CAPABLE OF MONITORING OPERATION OF SUBSTRATE PROCESSING APPARATUS' [patent_app_type] => utility [patent_app_number] => 11/670018 [patent_app_country] => US [patent_app_date] => 2007-02-01 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 9 [patent_figures_cnt] => 9 [patent_no_of_words] => 13106 [patent_no_of_claims] => 8 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0179/20070179658.pdf [firstpage_image] =>[orig_patent_app_number] => 11670018 [rel_patent_id] =>[rel_patent_doc_number] =>)
11/670018
SUBSTRATE PROCESSING SYSTEM CAPABLE OF MONITORING OPERATION OF SUBSTRATE PROCESSING APPARATUS Jan 31, 2007 Abandoned
Array ( [id] => 177387 [patent_doc_number] => 07655093 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2010-02-02 [patent_title] => 'Wafer support system' [patent_app_type] => utility [patent_app_number] => 11/668409 [patent_app_country] => US [patent_app_date] => 2007-01-29 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 14 [patent_figures_cnt] => 19 [patent_no_of_words] => 8606 [patent_no_of_claims] => 17 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 190 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/07/655/07655093.pdf [firstpage_image] =>[orig_patent_app_number] => 11668409 [rel_patent_id] =>[rel_patent_doc_number] =>)
11/668409
Wafer support system Jan 28, 2007 Issued
Array ( [id] => 5076321 [patent_doc_number] => 20070119545 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2007-05-31 [patent_title] => 'METHOD TO IMPROVE PROFILE CONTROL AND N/P LOADING IN DUAL DOPED GATE APPLICATIONS' [patent_app_type] => utility [patent_app_number] => 11/627025 [patent_app_country] => US [patent_app_date] => 2007-01-25 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 8 [patent_figures_cnt] => 8 [patent_no_of_words] => 6059 [patent_no_of_claims] => 7 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0119/20070119545.pdf [firstpage_image] =>[orig_patent_app_number] => 11627025 [rel_patent_id] =>[rel_patent_doc_number] =>)
11/627025
METHOD TO IMPROVE PROFILE CONTROL AND N/P LOADING IN DUAL DOPED GATE APPLICATIONS Jan 24, 2007 Abandoned
Array ( [id] => 4971336 [patent_doc_number] => 20070111338 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2007-05-17 [patent_title] => 'Method of controlling trimming of a gate electrode structure' [patent_app_type] => utility [patent_app_number] => 11/652074 [patent_app_country] => US [patent_app_date] => 2007-01-11 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 11 [patent_figures_cnt] => 11 [patent_no_of_words] => 6462 [patent_no_of_claims] => 33 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0111/20070111338.pdf [firstpage_image] =>[orig_patent_app_number] => 11652074 [rel_patent_id] =>[rel_patent_doc_number] =>)
11/652074
Method of controlling trimming of a gate electrode structure Jan 10, 2007 Abandoned
Array ( [id] => 4967844 [patent_doc_number] => 20070107846 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2007-05-17 [patent_title] => 'METHOD AND APPARATUS FOR AN IMPROVED BAFFLE PLATE IN A PLASMA PROCESSING SYSTEM' [patent_app_type] => utility [patent_app_number] => 11/620334 [patent_app_country] => US [patent_app_date] => 2007-01-05 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 10 [patent_figures_cnt] => 10 [patent_no_of_words] => 4799 [patent_no_of_claims] => 1 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0107/20070107846.pdf [firstpage_image] =>[orig_patent_app_number] => 11620334 [rel_patent_id] =>[rel_patent_doc_number] =>)
11/620334
Method and apparatus for an improved baffle plate in a plasma processing system Jan 4, 2007 Issued
Array ( [id] => 4752097 [patent_doc_number] => 20080160170 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2008-07-03 [patent_title] => 'TECHNIQUE FOR USING AN IMPROVED SHIELD RING IN PLASMA-BASED ION IMPLANTATION' [patent_app_type] => utility [patent_app_number] => 11/617348 [patent_app_country] => US [patent_app_date] => 2006-12-28 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 10 [patent_figures_cnt] => 10 [patent_no_of_words] => 4802 [patent_no_of_claims] => 24 [patent_no_of_ind_claims] => 6 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0160/20080160170.pdf [firstpage_image] =>[orig_patent_app_number] => 11617348 [rel_patent_id] =>[rel_patent_doc_number] =>)
11/617348
TECHNIQUE FOR USING AN IMPROVED SHIELD RING IN PLASMA-BASED ION IMPLANTATION Dec 27, 2006 Abandoned
Array ( [id] => 5022938 [patent_doc_number] => 20070148904 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2007-06-28 [patent_title] => 'DEVICE AND METHOD FOR CONTROLLING HIGH DENSITY PLASMA CHEMICAL VAPOR DEPOSITION APPARATUS' [patent_app_type] => utility [patent_app_number] => 11/616711 [patent_app_country] => US [patent_app_date] => 2006-12-27 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 6 [patent_figures_cnt] => 6 [patent_no_of_words] => 1478 [patent_no_of_claims] => 8 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0148/20070148904.pdf [firstpage_image] =>[orig_patent_app_number] => 11616711 [rel_patent_id] =>[rel_patent_doc_number] =>)
11/616711
DEVICE AND METHOD FOR CONTROLLING HIGH DENSITY PLASMA CHEMICAL VAPOR DEPOSITION APPARATUS Dec 26, 2006 Abandoned
Array ( [id] => 5040364 [patent_doc_number] => 20070092646 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2007-04-26 [patent_title] => 'SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD' [patent_app_type] => utility [patent_app_number] => 11/614310 [patent_app_country] => US [patent_app_date] => 2006-12-21 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 58 [patent_figures_cnt] => 58 [patent_no_of_words] => 29373 [patent_no_of_claims] => 16 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0092/20070092646.pdf [firstpage_image] =>[orig_patent_app_number] => 11614310 [rel_patent_id] =>[rel_patent_doc_number] =>)
11/614310
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD Dec 20, 2006 Abandoned
Array ( [id] => 337640 [patent_doc_number] => 07503980 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2009-03-17 [patent_title] => 'Substrate supporting apparatus' [patent_app_type] => utility [patent_app_number] => 11/642155 [patent_app_country] => US [patent_app_date] => 2006-12-20 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 6 [patent_figures_cnt] => 9 [patent_no_of_words] => 3559 [patent_no_of_claims] => 3 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 330 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/07/503/07503980.pdf [firstpage_image] =>[orig_patent_app_number] => 11642155 [rel_patent_id] =>[rel_patent_doc_number] =>)
11/642155
Substrate supporting apparatus Dec 19, 2006 Issued
Array ( [id] => 4443572 [patent_doc_number] => 07862736 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2011-01-04 [patent_title] => 'Method of cleaning plasma etching apparatus, and thus-cleanable plasma etching apparatus' [patent_app_type] => utility [patent_app_number] => 11/633530 [patent_app_country] => US [patent_app_date] => 2006-12-05 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 8 [patent_figures_cnt] => 8 [patent_no_of_words] => 7543 [patent_no_of_claims] => 5 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 164 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/07/862/07862736.pdf [firstpage_image] =>[orig_patent_app_number] => 11633530 [rel_patent_id] =>[rel_patent_doc_number] =>)
11/633530
Method of cleaning plasma etching apparatus, and thus-cleanable plasma etching apparatus Dec 4, 2006 Issued
Array ( [id] => 51908 [patent_doc_number] => 07771561 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2010-08-10 [patent_title] => 'Apparatus and method for surface treatment to substrate' [patent_app_type] => utility [patent_app_number] => 11/598067 [patent_app_country] => US [patent_app_date] => 2006-11-13 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 4 [patent_figures_cnt] => 5 [patent_no_of_words] => 6005 [patent_no_of_claims] => 10 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 175 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/07/771/07771561.pdf [firstpage_image] =>[orig_patent_app_number] => 11598067 [rel_patent_id] =>[rel_patent_doc_number] =>)
11/598067
Apparatus and method for surface treatment to substrate Nov 12, 2006 Issued
Array ( [id] => 5092180 [patent_doc_number] => 20070113789 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2007-05-24 [patent_title] => 'METHOD AND SYSTEM FOR DEPOSITING MATERIAL ON A SUBSTRATE USING A SOLID PRECURSOR' [patent_app_type] => utility [patent_app_number] => 11/557462 [patent_app_country] => US [patent_app_date] => 2006-11-07 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 8 [patent_figures_cnt] => 8 [patent_no_of_words] => 6484 [patent_no_of_claims] => 15 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0113/20070113789.pdf [firstpage_image] =>[orig_patent_app_number] => 11557462 [rel_patent_id] =>[rel_patent_doc_number] =>)
11/557462
METHOD AND SYSTEM FOR DEPOSITING MATERIAL ON A SUBSTRATE USING A SOLID PRECURSOR Nov 6, 2006 Abandoned
Array ( [id] => 4890341 [patent_doc_number] => 20080099437 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2008-05-01 [patent_title] => 'Plasma reactor for processing a transparent workpiece with backside process endpoint detection' [patent_app_type] => utility [patent_app_number] => 11/589476 [patent_app_country] => US [patent_app_date] => 2006-10-30 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 20 [patent_figures_cnt] => 20 [patent_no_of_words] => 7660 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0099/20080099437.pdf [firstpage_image] =>[orig_patent_app_number] => 11589476 [rel_patent_id] =>[rel_patent_doc_number] =>)
11/589476
Plasma reactor for processing a transparent workpiece with backside process endpoint detection Oct 29, 2006 Abandoned
Array ( [id] => 4890354 [patent_doc_number] => 20080099450 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2008-05-01 [patent_title] => 'Mask etch plasma reactor with backside optical sensors and multiple frequency control of etch distribution' [patent_app_type] => utility [patent_app_number] => 11/589343 [patent_app_country] => US [patent_app_date] => 2006-10-30 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 50 [patent_figures_cnt] => 50 [patent_no_of_words] => 20623 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0099/20080099450.pdf [firstpage_image] =>[orig_patent_app_number] => 11589343 [rel_patent_id] =>[rel_patent_doc_number] =>)
11/589343
Mask etch plasma reactor with backside optical sensors and multiple frequency control of etch distribution Oct 29, 2006 Abandoned
Array ( [id] => 4893101 [patent_doc_number] => 20080102199 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2008-05-01 [patent_title] => 'Multi-wafer rotating disc reactor with wafer planetary motion induced by vibration' [patent_app_type] => utility [patent_app_number] => 11/588440 [patent_app_country] => US [patent_app_date] => 2006-10-26 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 6 [patent_figures_cnt] => 6 [patent_no_of_words] => 2122 [patent_no_of_claims] => 14 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0102/20080102199.pdf [firstpage_image] =>[orig_patent_app_number] => 11588440 [rel_patent_id] =>[rel_patent_doc_number] =>)
11/588440
Multi-wafer rotating disc reactor with wafer planetary motion induced by vibration Oct 25, 2006 Abandoned
Array ( [id] => 4660197 [patent_doc_number] => 20080251104 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2008-10-16 [patent_title] => 'Systems and Methods for Determination of Endpoint of Chamber Cleaning Processes' [patent_app_type] => utility [patent_app_number] => 12/088825 [patent_app_country] => US [patent_app_date] => 2006-10-03 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 16 [patent_figures_cnt] => 16 [patent_no_of_words] => 16011 [patent_no_of_claims] => 33 [patent_no_of_ind_claims] => 5 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0251/20080251104.pdf [firstpage_image] =>[orig_patent_app_number] => 12088825 [rel_patent_id] =>[rel_patent_doc_number] =>)
12/088825
Systems and Methods for Determination of Endpoint of Chamber Cleaning Processes Oct 2, 2006 Abandoned
Array ( [id] => 72835 [patent_doc_number] => 07749353 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2010-07-06 [patent_title] => 'High aspect ratio etch using modulation of RF powers of various frequencies' [patent_app_type] => utility [patent_app_number] => 11/525602 [patent_app_country] => US [patent_app_date] => 2006-09-21 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 11 [patent_figures_cnt] => 19 [patent_no_of_words] => 11657 [patent_no_of_claims] => 16 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 354 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/07/749/07749353.pdf [firstpage_image] =>[orig_patent_app_number] => 11525602 [rel_patent_id] =>[rel_patent_doc_number] =>)
11/525602
High aspect ratio etch using modulation of RF powers of various frequencies Sep 20, 2006 Issued
Array ( [id] => 4980008 [patent_doc_number] => 20070084562 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2007-04-19 [patent_title] => 'Plasma processing chamber' [patent_app_type] => utility [patent_app_number] => 11/518228 [patent_app_country] => US [patent_app_date] => 2006-09-11 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 12 [patent_figures_cnt] => 12 [patent_no_of_words] => 8361 [patent_no_of_claims] => 7 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0084/20070084562.pdf [firstpage_image] =>[orig_patent_app_number] => 11518228 [rel_patent_id] =>[rel_patent_doc_number] =>)
11/518228
Plasma processing chamber Sep 10, 2006 Abandoned
Array ( [id] => 5103927 [patent_doc_number] => 20070062802 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2007-03-22 [patent_title] => 'System and method for managing a plasma process and method for manufacturing an electronic device' [patent_app_type] => utility [patent_app_number] => 11/516773 [patent_app_country] => US [patent_app_date] => 2006-09-07 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 9 [patent_figures_cnt] => 9 [patent_no_of_words] => 5786 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0062/20070062802.pdf [firstpage_image] =>[orig_patent_app_number] => 11516773 [rel_patent_id] =>[rel_patent_doc_number] =>)
11/516773
System and method for managing a plasma process and method for manufacturing an electronic device Sep 6, 2006 Abandoned
Array ( [id] => 190427 [patent_doc_number] => 07641737 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2010-01-05 [patent_title] => 'Evaporation source for evaporating an organic' [patent_app_type] => utility [patent_app_number] => 11/514266 [patent_app_country] => US [patent_app_date] => 2006-09-01 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 6 [patent_figures_cnt] => 12 [patent_no_of_words] => 5000 [patent_no_of_claims] => 9 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 224 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/07/641/07641737.pdf [firstpage_image] =>[orig_patent_app_number] => 11514266 [rel_patent_id] =>[rel_patent_doc_number] =>)
11/514266
Evaporation source for evaporating an organic Aug 31, 2006 Issued
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