Search

Alexander S Thomas

Examiner (ID: 6457, Phone: (571)272-1502 , Office: P/1783 )

Most Active Art Unit
1783
Art Unit(s)
1772, 1783, 1315, 1721, 1504, 2899, 1508, 1794, 1773, 1506
Total Applications
4004
Issued Applications
3000
Pending Applications
169
Abandoned Applications
835

Applications

Application numberTitle of the applicationFiling DateStatus
11/324123 Method and apparatus to control the formation of layers useful in integrated circuits Dec 29, 2005 Abandoned
Array ( [id] => 5776937 [patent_doc_number] => 20060105577 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2006-05-18 [patent_title] => 'Aspect ratio controlled etch selectivity using time modulated DC bias voltage' [patent_app_type] => utility [patent_app_number] => 11/319402 [patent_app_country] => US [patent_app_date] => 2005-12-29 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 8 [patent_figures_cnt] => 8 [patent_no_of_words] => 4581 [patent_no_of_claims] => 30 [patent_no_of_ind_claims] => 5 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0105/20060105577.pdf [firstpage_image] =>[orig_patent_app_number] => 11319402 [rel_patent_id] =>[rel_patent_doc_number] =>)
11/319402
Aspect ratio controlled etch selectivity using time modulated DC bias voltage Dec 28, 2005 Abandoned
Array ( [id] => 5645141 [patent_doc_number] => 20060130873 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2006-06-22 [patent_title] => 'Plasma cleaning of deposition chamber residues using duo-step wafer-less auto clean method' [patent_app_type] => utility [patent_app_number] => 11/318122 [patent_app_country] => US [patent_app_date] => 2005-12-23 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 8 [patent_figures_cnt] => 8 [patent_no_of_words] => 7261 [patent_no_of_claims] => 10 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0130/20060130873.pdf [firstpage_image] =>[orig_patent_app_number] => 11318122 [rel_patent_id] =>[rel_patent_doc_number] =>)
11/318122
Plasma cleaning of deposition chamber residues using duo-step wafer-less auto clean method Dec 22, 2005 Abandoned
Array ( [id] => 4965006 [patent_doc_number] => 20080107826 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2008-05-08 [patent_title] => 'Method and apparatus for fabricating nanostructure multi-element compound' [patent_app_type] => utility [patent_app_number] => 11/299930 [patent_app_country] => US [patent_app_date] => 2005-12-12 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 4 [patent_figures_cnt] => 4 [patent_no_of_words] => 2898 [patent_no_of_claims] => 2 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0107/20080107826.pdf [firstpage_image] =>[orig_patent_app_number] => 11299930 [rel_patent_id] =>[rel_patent_doc_number] =>)
11/299930
Method and apparatus for fabricating nanostructure multi-element compound Dec 11, 2005 Abandoned
Array ( [id] => 4785664 [patent_doc_number] => 20080138993 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2008-06-12 [patent_title] => 'Plasma Processing Apparatus' [patent_app_type] => utility [patent_app_number] => 11/794306 [patent_app_country] => US [patent_app_date] => 2005-12-06 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 12 [patent_figures_cnt] => 12 [patent_no_of_words] => 7252 [patent_no_of_claims] => 15 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0138/20080138993.pdf [firstpage_image] =>[orig_patent_app_number] => 11794306 [rel_patent_id] =>[rel_patent_doc_number] =>)
11/794306
Plasma Processing Apparatus Dec 5, 2005 Abandoned
Array ( [id] => 5720844 [patent_doc_number] => 20060073619 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2006-04-06 [patent_title] => 'Semiconductor fabricating apparatus and method and apparatus for determining state of semiconductor fabricating process' [patent_app_type] => utility [patent_app_number] => 11/293213 [patent_app_country] => US [patent_app_date] => 2005-12-05 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 8 [patent_figures_cnt] => 8 [patent_no_of_words] => 8625 [patent_no_of_claims] => 16 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0073/20060073619.pdf [firstpage_image] =>[orig_patent_app_number] => 11293213 [rel_patent_id] =>[rel_patent_doc_number] =>)
11/293213
Semiconductor fabricating apparatus and method and apparatus for determining state of semiconductor fabricating process Dec 4, 2005 Abandoned
Array ( [id] => 5907002 [patent_doc_number] => 20060124055 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2006-06-15 [patent_title] => 'Mask-retaining device' [patent_app_type] => utility [patent_app_number] => 11/286170 [patent_app_country] => US [patent_app_date] => 2005-11-23 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 5 [patent_figures_cnt] => 5 [patent_no_of_words] => 2165 [patent_no_of_claims] => 8 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0124/20060124055.pdf [firstpage_image] =>[orig_patent_app_number] => 11286170 [rel_patent_id] =>[rel_patent_doc_number] =>)
11/286170
Mask-retaining device Nov 22, 2005 Abandoned
Array ( [id] => 5669483 [patent_doc_number] => 20060174836 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2006-08-10 [patent_title] => 'Apparatus for heating wafer' [patent_app_type] => utility [patent_app_number] => 11/267406 [patent_app_country] => US [patent_app_date] => 2005-11-07 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 4 [patent_figures_cnt] => 4 [patent_no_of_words] => 3700 [patent_no_of_claims] => 25 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0174/20060174836.pdf [firstpage_image] =>[orig_patent_app_number] => 11267406 [rel_patent_id] =>[rel_patent_doc_number] =>)
11/267406
Apparatus for heating wafer Nov 6, 2005 Abandoned
Array ( [id] => 5862412 [patent_doc_number] => 20060096542 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2006-05-11 [patent_title] => 'Heating crucible and deposition apparatus including the same' [patent_app_type] => utility [patent_app_number] => 11/266397 [patent_app_country] => US [patent_app_date] => 2005-11-04 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 9 [patent_figures_cnt] => 9 [patent_no_of_words] => 2944 [patent_no_of_claims] => 18 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0096/20060096542.pdf [firstpage_image] =>[orig_patent_app_number] => 11266397 [rel_patent_id] =>[rel_patent_doc_number] =>)
11/266397
Heating crucible and deposition apparatus including the same Nov 3, 2005 Issued
Array ( [id] => 5710621 [patent_doc_number] => 20060051966 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2006-03-09 [patent_title] => 'In-situ chamber clean process to remove by-product deposits from chemical vapor etch chamber' [patent_app_type] => utility [patent_app_number] => 11/266167 [patent_app_country] => US [patent_app_date] => 2005-11-03 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 12 [patent_figures_cnt] => 12 [patent_no_of_words] => 13165 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0051/20060051966.pdf [firstpage_image] =>[orig_patent_app_number] => 11266167 [rel_patent_id] =>[rel_patent_doc_number] =>)
11/266167
In-situ chamber clean process to remove by-product deposits from chemical vapor etch chamber Nov 2, 2005 Abandoned
Array ( [id] => 5804502 [patent_doc_number] => 20060090854 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2006-05-04 [patent_title] => 'RF supply system and plasma processing apparatus' [patent_app_type] => utility [patent_app_number] => 11/262747 [patent_app_country] => US [patent_app_date] => 2005-11-01 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 2 [patent_figures_cnt] => 2 [patent_no_of_words] => 4530 [patent_no_of_claims] => 17 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0090/20060090854.pdf [firstpage_image] =>[orig_patent_app_number] => 11262747 [rel_patent_id] =>[rel_patent_doc_number] =>)
11/262747
RF supply system and plasma processing apparatus Oct 31, 2005 Issued
Array ( [id] => 5608175 [patent_doc_number] => 20060269691 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2006-11-30 [patent_title] => 'Plasma treatment apparatus and plasma treatment method' [patent_app_type] => utility [patent_app_number] => 11/259050 [patent_app_country] => US [patent_app_date] => 2005-10-27 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 8 [patent_figures_cnt] => 8 [patent_no_of_words] => 4386 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0269/20060269691.pdf [firstpage_image] =>[orig_patent_app_number] => 11259050 [rel_patent_id] =>[rel_patent_doc_number] =>)
11/259050
Plasma treatment apparatus and plasma treatment method Oct 26, 2005 Abandoned
Array ( [id] => 5710605 [patent_doc_number] => 20060051950 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2006-03-09 [patent_title] => 'Apparatus and a method for forming an alloy layer over a substrate' [patent_app_type] => utility [patent_app_number] => 11/259961 [patent_app_country] => US [patent_app_date] => 2005-10-26 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 5 [patent_figures_cnt] => 5 [patent_no_of_words] => 3792 [patent_no_of_claims] => 14 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0051/20060051950.pdf [firstpage_image] =>[orig_patent_app_number] => 11259961 [rel_patent_id] =>[rel_patent_doc_number] =>)
11/259961
Apparatus and a method for forming an alloy layer over a substrate Oct 25, 2005 Abandoned
Array ( [id] => 5712609 [patent_doc_number] => 20060075972 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2006-04-13 [patent_title] => 'Substrate processing apparatus and substrate processing method' [patent_app_type] => utility [patent_app_number] => 11/258670 [patent_app_country] => US [patent_app_date] => 2005-10-25 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 18 [patent_figures_cnt] => 18 [patent_no_of_words] => 13777 [patent_no_of_claims] => 12 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0075/20060075972.pdf [firstpage_image] =>[orig_patent_app_number] => 11258670 [rel_patent_id] =>[rel_patent_doc_number] =>)
11/258670
Substrate processing apparatus and substrate processing method Oct 24, 2005 Abandoned
Array ( [id] => 5590963 [patent_doc_number] => 20060040415 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2006-02-23 [patent_title] => 'Method and apparatus for nitride spacer etch process implementing in situ interferometry endpoint detection and non-interferometry endpoint monitoring' [patent_app_type] => utility [patent_app_number] => 11/258658 [patent_app_country] => US [patent_app_date] => 2005-10-25 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 11 [patent_figures_cnt] => 11 [patent_no_of_words] => 8674 [patent_no_of_claims] => 4 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0040/20060040415.pdf [firstpage_image] =>[orig_patent_app_number] => 11258658 [rel_patent_id] =>[rel_patent_doc_number] =>)
11/258658
Method and apparatus for nitride spacer etch process implementing in situ interferometry endpoint detection and non-interferometry endpoint monitoring Oct 24, 2005 Abandoned
Array ( [id] => 5645033 [patent_doc_number] => 20060130765 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2006-06-22 [patent_title] => 'Arrangement for coating a substrate' [patent_app_type] => utility [patent_app_number] => 11/254425 [patent_app_country] => US [patent_app_date] => 2005-10-20 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 4 [patent_figures_cnt] => 4 [patent_no_of_words] => 1812 [patent_no_of_claims] => 15 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0130/20060130765.pdf [firstpage_image] =>[orig_patent_app_number] => 11254425 [rel_patent_id] =>[rel_patent_doc_number] =>)
11/254425
Arrangement for coating a substrate Oct 19, 2005 Issued
Array ( [id] => 5796171 [patent_doc_number] => 20060032848 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2006-02-16 [patent_title] => 'Process and system for heating semiconductor substrates in a processing chamber containing a susceptor' [patent_app_type] => utility [patent_app_number] => 11/253271 [patent_app_country] => US [patent_app_date] => 2005-10-18 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 8 [patent_figures_cnt] => 8 [patent_no_of_words] => 4523 [patent_no_of_claims] => 14 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0032/20060032848.pdf [firstpage_image] =>[orig_patent_app_number] => 11253271 [rel_patent_id] =>[rel_patent_doc_number] =>)
11/253271
Process and system for heating semiconductor substrates in a processing chamber containing a susceptor Oct 17, 2005 Abandoned
Array ( [id] => 4917056 [patent_doc_number] => 20080097657 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2008-04-24 [patent_title] => 'Method and System for Wafer Temperature Control' [patent_app_type] => utility [patent_app_number] => 11/664550 [patent_app_country] => US [patent_app_date] => 2005-10-13 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 8 [patent_figures_cnt] => 8 [patent_no_of_words] => 5156 [patent_no_of_claims] => 52 [patent_no_of_ind_claims] => 6 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0097/20080097657.pdf [firstpage_image] =>[orig_patent_app_number] => 11664550 [rel_patent_id] =>[rel_patent_doc_number] =>)
11/664550
Method and System for Wafer Temperature Control Oct 12, 2005 Abandoned
Array ( [id] => 5877037 [patent_doc_number] => 20060027325 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2006-02-09 [patent_title] => 'Method and apparatus for photomask fabrication' [patent_app_type] => utility [patent_app_number] => 11/243548 [patent_app_country] => US [patent_app_date] => 2005-10-04 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 6 [patent_figures_cnt] => 6 [patent_no_of_words] => 5089 [patent_no_of_claims] => 23 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0027/20060027325.pdf [firstpage_image] =>[orig_patent_app_number] => 11243548 [rel_patent_id] =>[rel_patent_doc_number] =>)
11/243548
Method and apparatus for photomask fabrication Oct 3, 2005 Abandoned
Array ( [id] => 5210167 [patent_doc_number] => 20070248751 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2007-10-25 [patent_title] => 'Dynamic film thickness control system/method and its utilization' [patent_app_type] => utility [patent_app_number] => 11/240451 [patent_app_country] => US [patent_app_date] => 2005-10-03 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 18 [patent_figures_cnt] => 18 [patent_no_of_words] => 5340 [patent_no_of_claims] => 11 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0248/20070248751.pdf [firstpage_image] =>[orig_patent_app_number] => 11240451 [rel_patent_id] =>[rel_patent_doc_number] =>)
11/240451
Dynamic film thickness control system/method and its utilization Oct 2, 2005 Abandoned
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