Alexander S Thomas

Array ( [id] => 5133183 [patent_doc_number] => 20070074811 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2007-04-05 [patent_title] => 'Method and apparatus for measuring plasma density in processing reactors using a long dielectric tube' [patent_app_type] => utility [patent_app_number] => 11/239471 [patent_app_country] => US [patent_app_date] => 2005-09-30 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 11 [patent_figures_cnt] => 11 [patent_no_of_words] => 3571 [patent_no_of_claims] => 69 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0074/20070074811.pdf [firstpage_image] =>[orig_patent_app_number] => 11239471 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 5133184 [patent_doc_number] => 20070074812 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2007-04-05 [patent_title] => 'Temperature control of plasma density probe' [patent_app_type] => utility [patent_app_number] => 11/239478 [patent_app_country] => US [patent_app_date] => 2005-09-30 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 5 [patent_figures_cnt] => 5 [patent_no_of_words] => 4270 [patent_no_of_claims] => 48 [patent_no_of_ind_claims] => 4 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0074/20070074812.pdf [firstpage_image] =>[orig_patent_app_number] => 11239478 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 563572 [patent_doc_number] => 07462243 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2008-12-09 [patent_title] => 'Chemical processing system and method' [patent_app_type] => utility [patent_app_number] => 11/233077 [patent_app_country] => US [patent_app_date] => 2005-09-23 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 19 [patent_figures_cnt] => 19 [patent_no_of_words] => 7308 [patent_no_of_claims] => 44 [patent_no_of_ind_claims] => 4 [patent_words_short_claim] => 184 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/07/462/07462243.pdf [firstpage_image] =>[orig_patent_app_number] => 11233077 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 5828245 [patent_doc_number] => 20060063280 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2006-03-23 [patent_title] => 'Lamp heating apparatus and method for producing semiconductor device' [patent_app_type] => utility [patent_app_number] => 11/228459 [patent_app_country] => US [patent_app_date] => 2005-09-19 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 4 [patent_figures_cnt] => 4 [patent_no_of_words] => 5420 [patent_no_of_claims] => 13 [patent_no_of_ind_claims] => 4 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0063/20060063280.pdf [firstpage_image] =>[orig_patent_app_number] => 11228459 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 5723328 [patent_doc_number] => 20060054088 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2006-03-16 [patent_title] => 'Vapor phase epitaxial growth apparatus and semiconductor wafer production method' [patent_app_type] => utility [patent_app_number] => 11/224054 [patent_app_country] => US [patent_app_date] => 2005-09-13 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 7 [patent_figures_cnt] => 7 [patent_no_of_words] => 5838 [patent_no_of_claims] => 16 [patent_no_of_ind_claims] => 4 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0054/20060054088.pdf [firstpage_image] =>[orig_patent_app_number] => 11224054 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 5735540 [patent_doc_number] => 20060005930 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2006-01-12 [patent_title] => 'Substrate supporting structure for semiconductor processing, and plasma processing device' [patent_app_type] => utility [patent_app_number] => 11/221704 [patent_app_country] => US [patent_app_date] => 2005-09-09 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 10 [patent_figures_cnt] => 10 [patent_no_of_words] => 11471 [patent_no_of_claims] => 25 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0005/20060005930.pdf [firstpage_image] =>[orig_patent_app_number] => 11221704 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 6974859 [patent_doc_number] => 20050284574 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2005-12-29 [patent_title] => 'Plasma processing apparatus and processing method' [patent_app_type] => utility [patent_app_number] => 11/217287 [patent_app_country] => US [patent_app_date] => 2005-09-02 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 14 [patent_figures_cnt] => 14 [patent_no_of_words] => 6343 [patent_no_of_claims] => 2 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0284/20050284574.pdf [firstpage_image] =>[orig_patent_app_number] => 11217287 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 5144860 [patent_doc_number] => 20070044914 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2007-03-01 [patent_title] => 'Vacuum processing apparatus' [patent_app_type] => utility [patent_app_number] => 11/213735 [patent_app_country] => US [patent_app_date] => 2005-08-30 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 4 [patent_figures_cnt] => 4 [patent_no_of_words] => 5740 [patent_no_of_claims] => 11 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0044/20070044914.pdf [firstpage_image] =>[orig_patent_app_number] => 11213735 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 5915471 [patent_doc_number] => 20060237391 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2006-10-26 [patent_title] => 'Vacuum processing apparatus and vacuum processing method of sample' [patent_app_type] => utility [patent_app_number] => 11/213736 [patent_app_country] => US [patent_app_date] => 2005-08-30 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 12 [patent_figures_cnt] => 12 [patent_no_of_words] => 8146 [patent_no_of_claims] => 10 [patent_no_of_ind_claims] => 4 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0237/20060237391.pdf [firstpage_image] =>[orig_patent_app_number] => 11213736 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 5892094 [patent_doc_number] => 20060000800 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2006-01-05 [patent_title] => 'Process monitoring methods in a plasma processing apparatus, monitoring units, and a sample processing method using the monitoring units' [patent_app_type] => utility [patent_app_number] => 11/213770 [patent_app_country] => US [patent_app_date] => 2005-08-30 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 18 [patent_figures_cnt] => 18 [patent_no_of_words] => 11382 [patent_no_of_claims] => 4 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0000/20060000800.pdf [firstpage_image] =>[orig_patent_app_number] => 11213770 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 5891350 [patent_doc_number] => 20060000414 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2006-01-05 [patent_title] => 'Semiconductor processing equipment for forming films of uniform properties on semiconductor substrates' [patent_app_type] => utility [patent_app_number] => 11/214608 [patent_app_country] => US [patent_app_date] => 2005-08-29 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 10 [patent_figures_cnt] => 10 [patent_no_of_words] => 7690 [patent_no_of_claims] => 21 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0000/20060000414.pdf [firstpage_image] =>[orig_patent_app_number] => 11214608 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 5182699 [patent_doc_number] => 20070054045 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2007-03-08 [patent_title] => 'METHOD FOR CONDITIONING CHEMICAL VAPOR DEPOSITION CHAMBER' [patent_app_type] => utility [patent_app_number] => 11/161998 [patent_app_country] => US [patent_app_date] => 2005-08-25 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 3 [patent_figures_cnt] => 3 [patent_no_of_words] => 1833 [patent_no_of_claims] => 15 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0054/20070054045.pdf [firstpage_image] =>[orig_patent_app_number] => 11161998 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 223809 [patent_doc_number] => 07604010 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2009-10-20 [patent_title] => 'Film formation apparatus and method of using the same' [patent_app_type] => utility [patent_app_number] => 11/209741 [patent_app_country] => US [patent_app_date] => 2005-08-24 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 4 [patent_figures_cnt] => 7 [patent_no_of_words] => 8244 [patent_no_of_claims] => 12 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 172 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/07/604/07604010.pdf [firstpage_image] =>[orig_patent_app_number] => 11209741 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 5685234 [patent_doc_number] => 20060283549 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2006-12-21 [patent_title] => 'Plasma processing apparatus and method capable of adjusting temperature within sample table' [patent_app_type] => utility [patent_app_number] => 11/209743 [patent_app_country] => US [patent_app_date] => 2005-08-24 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 7 [patent_figures_cnt] => 7 [patent_no_of_words] => 9722 [patent_no_of_claims] => 16 [patent_no_of_ind_claims] => 4 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0283/20060283549.pdf [firstpage_image] =>[orig_patent_app_number] => 11209743 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 6928252 [patent_doc_number] => 20050279284 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2005-12-22 [patent_title] => 'Temperature control system' [patent_app_type] => utility [patent_app_number] => 11/210986 [patent_app_country] => US [patent_app_date] => 2005-08-24 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 3 [patent_figures_cnt] => 3 [patent_no_of_words] => 5069 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0279/20050279284.pdf [firstpage_image] =>[orig_patent_app_number] => 11210986 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 5735749 [patent_doc_number] => 20060006139 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2006-01-12 [patent_title] => 'Selection of wavelengths for end point in a time division multiplexed process' [patent_app_type] => utility [patent_app_number] => 11/210248 [patent_app_country] => US [patent_app_date] => 2005-08-23 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 26 [patent_figures_cnt] => 26 [patent_no_of_words] => 6421 [patent_no_of_claims] => 28 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0006/20060006139.pdf [firstpage_image] =>[orig_patent_app_number] => 11210248 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 4999497 [patent_doc_number] => 20070042131 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2007-02-22 [patent_title] => 'Non-intrusive plasma monitoring system for arc detection and prevention for blanket CVD films' [patent_app_type] => utility [patent_app_number] => 11/208835 [patent_app_country] => US [patent_app_date] => 2005-08-22 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 11 [patent_figures_cnt] => 11 [patent_no_of_words] => 6632 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0042/20070042131.pdf [firstpage_image] =>[orig_patent_app_number] => 11208835 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 7056114 [patent_doc_number] => 20050277289 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2005-12-15 [patent_title] => 'Line edge roughness reduction for trench etch' [patent_app_type] => utility [patent_app_number] => 11/205372 [patent_app_country] => US [patent_app_date] => 2005-08-16 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 8 [patent_figures_cnt] => 8 [patent_no_of_words] => 5548 [patent_no_of_claims] => 18 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0277/20050277289.pdf [firstpage_image] =>[orig_patent_app_number] => 11205372 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 5723330 [patent_doc_number] => 20060054090 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2006-03-16 [patent_title] => 'PECVD susceptor support construction' [patent_app_type] => utility [patent_app_number] => 11/202654 [patent_app_country] => US [patent_app_date] => 2005-08-12 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 12 [patent_figures_cnt] => 12 [patent_no_of_words] => 6101 [patent_no_of_claims] => 30 [patent_no_of_ind_claims] => 5 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0054/20060054090.pdf [firstpage_image] =>[orig_patent_app_number] => 11202654 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 5622241 [patent_doc_number] => 20060260746 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2006-11-23 [patent_title] => 'Plasma processing apparatus' [patent_app_type] => utility [patent_app_number] => 11/199234 [patent_app_country] => US [patent_app_date] => 2005-08-09 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 23 [patent_figures_cnt] => 23 [patent_no_of_words] => 10345 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0260/20060260746.pdf [firstpage_image] =>[orig_patent_app_number] => 11199234 [rel_patent_id] =>[rel_patent_doc_number] =>)