Alexander S Thomas

Array ( [id] => 6928699 [patent_doc_number] => 20050279731 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2005-12-22 [patent_title] => 'Processing method for conservation of processing gases' [patent_app_type] => utility [patent_app_number] => 11/197434 [patent_app_country] => US [patent_app_date] => 2005-08-05 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 10 [patent_figures_cnt] => 10 [patent_no_of_words] => 10016 [patent_no_of_claims] => 8 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0279/20050279731.pdf [firstpage_image] =>[orig_patent_app_number] => 11197434 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 5048502 [patent_doc_number] => 20070029046 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2007-02-08 [patent_title] => 'Methods and systems for increasing substrate temperature in plasma reactors' [patent_app_type] => utility [patent_app_number] => 11/196850 [patent_app_country] => US [patent_app_date] => 2005-08-04 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 11 [patent_figures_cnt] => 11 [patent_no_of_words] => 7317 [patent_no_of_claims] => 33 [patent_no_of_ind_claims] => 4 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0029/20070029046.pdf [firstpage_image] =>[orig_patent_app_number] => 11196850 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 246636 [patent_doc_number] => 07585386 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2009-09-08 [patent_title] => 'Plasma processing apparatus, electrode plate for plasma processing apparatus, and electrode plate manufacturing method' [patent_app_type] => utility [patent_app_number] => 11/195803 [patent_app_country] => US [patent_app_date] => 2005-08-03 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 30 [patent_figures_cnt] => 82 [patent_no_of_words] => 15273 [patent_no_of_claims] => 12 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 201 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/07/585/07585386.pdf [firstpage_image] =>[orig_patent_app_number] => 11195803 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 7202302 [patent_doc_number] => 20050257747 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2005-11-24 [patent_title] => 'Worktable device, film formation apparatus, and film formation method for semiconductor process' [patent_app_type] => utility [patent_app_number] => 11/192047 [patent_app_country] => US [patent_app_date] => 2005-07-29 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 12 [patent_figures_cnt] => 12 [patent_no_of_words] => 11500 [patent_no_of_claims] => 26 [patent_no_of_ind_claims] => 6 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0257/20050257747.pdf [firstpage_image] =>[orig_patent_app_number] => 11192047 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 5588253 [patent_doc_number] => 20060037704 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2006-02-23 [patent_title] => 'Plasma Processing apparatus and method' [patent_app_type] => utility [patent_app_number] => 11/192041 [patent_app_country] => US [patent_app_date] => 2005-07-29 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 17 [patent_figures_cnt] => 17 [patent_no_of_words] => 8251 [patent_no_of_claims] => 32 [patent_no_of_ind_claims] => 4 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0037/20060037704.pdf [firstpage_image] =>[orig_patent_app_number] => 11192041 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 5680338 [patent_doc_number] => 20060196605 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2006-09-07 [patent_title] => 'Method and apparatus for plasma processing' [patent_app_type] => utility [patent_app_number] => 11/190839 [patent_app_country] => US [patent_app_date] => 2005-07-28 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 6 [patent_figures_cnt] => 6 [patent_no_of_words] => 2774 [patent_no_of_claims] => 14 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0196/20060196605.pdf [firstpage_image] =>[orig_patent_app_number] => 11190839 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 5669938 [patent_doc_number] => 20060175291 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2006-08-10 [patent_title] => 'Control of process gases in specimen surface treatment system' [patent_app_type] => utility [patent_app_number] => 11/192304 [patent_app_country] => US [patent_app_date] => 2005-07-28 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 5 [patent_figures_cnt] => 5 [patent_no_of_words] => 5504 [patent_no_of_claims] => 24 [patent_no_of_ind_claims] => 4 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0175/20060175291.pdf [firstpage_image] =>[orig_patent_app_number] => 11192304 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 7210038 [patent_doc_number] => 20050252453 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2005-11-17 [patent_title] => 'Apparatus and a method for forming an alloy layer over a substrate' [patent_app_type] => utility [patent_app_number] => 11/188068 [patent_app_country] => US [patent_app_date] => 2005-07-22 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 5 [patent_figures_cnt] => 5 [patent_no_of_words] => 3782 [patent_no_of_claims] => 6 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0252/20050252453.pdf [firstpage_image] =>[orig_patent_app_number] => 11188068 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 4935888 [patent_doc_number] => 20080073202 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2008-03-27 [patent_title] => 'Plasma Nozzle Array for Providing Uniform Scalable Microwave Plasma Generation' [patent_app_type] => utility [patent_app_number] => 11/658356 [patent_app_country] => US [patent_app_date] => 2005-07-21 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 16 [patent_figures_cnt] => 16 [patent_no_of_words] => 8558 [patent_no_of_claims] => 82 [patent_no_of_ind_claims] => 7 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0073/20080073202.pdf [firstpage_image] =>[orig_patent_app_number] => 11658356 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 4672541 [patent_doc_number] => 20080210169 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2008-09-04 [patent_title] => 'System for Supporting and Rotating a Susceptor Inside a Treatment Chamber of a Wafer Treating Apparatus' [patent_app_type] => utility [patent_app_number] => 11/995891 [patent_app_country] => US [patent_app_date] => 2005-07-21 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 7 [patent_figures_cnt] => 7 [patent_no_of_words] => 4843 [patent_no_of_claims] => 25 [patent_no_of_ind_claims] => 5 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0210/20080210169.pdf [firstpage_image] =>[orig_patent_app_number] => 11995891 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 5616057 [patent_doc_number] => 20060185589 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2006-08-24 [patent_title] => 'Silicon gas injector and method of making' [patent_app_type] => utility [patent_app_number] => 11/177808 [patent_app_country] => US [patent_app_date] => 2005-07-08 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 5 [patent_figures_cnt] => 5 [patent_no_of_words] => 3007 [patent_no_of_claims] => 24 [patent_no_of_ind_claims] => 4 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0185/20060185589.pdf [firstpage_image] =>[orig_patent_app_number] => 11177808 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 7066093 [patent_doc_number] => 20050241771 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2005-11-03 [patent_title] => 'Substrate carrier for processing substrates' [patent_app_type] => utility [patent_app_number] => 11/175750 [patent_app_country] => US [patent_app_date] => 2005-07-06 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 11 [patent_figures_cnt] => 11 [patent_no_of_words] => 5358 [patent_no_of_claims] => 25 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0241/20050241771.pdf [firstpage_image] =>[orig_patent_app_number] => 11175750 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 4991900 [patent_doc_number] => 20070007244 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2007-01-11 [patent_title] => 'DETECTION OF LOSS OF PLASMA CONFINEMENT' [patent_app_type] => utility [patent_app_number] => 11/160671 [patent_app_country] => US [patent_app_date] => 2005-07-05 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 14 [patent_figures_cnt] => 14 [patent_no_of_words] => 4572 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0007/20070007244.pdf [firstpage_image] =>[orig_patent_app_number] => 11160671 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 5817392 [patent_doc_number] => 20060021705 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2006-02-02 [patent_title] => 'Substrate mounting apparatus and control method of substrate temperature' [patent_app_type] => utility [patent_app_number] => 11/165573 [patent_app_country] => US [patent_app_date] => 2005-06-23 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 9 [patent_figures_cnt] => 9 [patent_no_of_words] => 7075 [patent_no_of_claims] => 14 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0021/20060021705.pdf [firstpage_image] =>[orig_patent_app_number] => 11165573 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 6923109 [patent_doc_number] => 20050236364 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2005-10-27 [patent_title] => 'Etching system and etching method' [patent_app_type] => utility [patent_app_number] => 11/154698 [patent_app_country] => US [patent_app_date] => 2005-06-17 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 12 [patent_figures_cnt] => 12 [patent_no_of_words] => 6429 [patent_no_of_claims] => 22 [patent_no_of_ind_claims] => 4 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0236/20050236364.pdf [firstpage_image] =>[orig_patent_app_number] => 11154698 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 5762619 [patent_doc_number] => 20060016558 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2006-01-26 [patent_title] => 'Endpoint detecting device in semiconductor manufacturing system' [patent_app_type] => utility [patent_app_number] => 11/151236 [patent_app_country] => US [patent_app_date] => 2005-06-14 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 7 [patent_figures_cnt] => 7 [patent_no_of_words] => 2428 [patent_no_of_claims] => 12 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0016/20060016558.pdf [firstpage_image] =>[orig_patent_app_number] => 11151236 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 4849385 [patent_doc_number] => 20080315127 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2008-12-25 [patent_title] => 'Ion Implanter Operating in Pulsed Plasma Mode' [patent_app_type] => utility [patent_app_number] => 11/629690 [patent_app_country] => US [patent_app_date] => 2005-06-14 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 3 [patent_figures_cnt] => 3 [patent_no_of_words] => 3606 [patent_no_of_claims] => 17 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0315/20080315127.pdf [firstpage_image] =>[orig_patent_app_number] => 11629690 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 6928427 [patent_doc_number] => 20050279459 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2005-12-22 [patent_title] => 'Plasma treating apparatus and plasma treating method' [patent_app_type] => utility [patent_app_number] => 11/147882 [patent_app_country] => US [patent_app_date] => 2005-06-08 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 9 [patent_figures_cnt] => 9 [patent_no_of_words] => 4290 [patent_no_of_claims] => 11 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0279/20050279459.pdf [firstpage_image] =>[orig_patent_app_number] => 11147882 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 7042643 [patent_doc_number] => 20050247404 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2005-11-10 [patent_title] => 'Plasma processing apparatus and plasma processing method' [patent_app_type] => utility [patent_app_number] => 11/147925 [patent_app_country] => US [patent_app_date] => 2005-06-08 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 8 [patent_figures_cnt] => 8 [patent_no_of_words] => 6704 [patent_no_of_claims] => 5 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0247/20050247404.pdf [firstpage_image] =>[orig_patent_app_number] => 11147925 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 5610956 [patent_doc_number] => 20060112879 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2006-06-01 [patent_title] => 'Plasma processing apparatus' [patent_app_type] => utility [patent_app_number] => 11/144735 [patent_app_country] => US [patent_app_date] => 2005-06-06 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 5 [patent_figures_cnt] => 5 [patent_no_of_words] => 2749 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0112/20060112879.pdf [firstpage_image] =>[orig_patent_app_number] => 11144735 [rel_patent_id] =>[rel_patent_doc_number] =>)