Search

Alexander S Thomas

Examiner (ID: 6457, Phone: (571)272-1502 , Office: P/1783 )

Most Active Art Unit
1783
Art Unit(s)
1772, 1783, 1315, 1721, 1504, 2899, 1508, 1794, 1773, 1506
Total Applications
4004
Issued Applications
3000
Pending Applications
169
Abandoned Applications
835

Applications

Application numberTitle of the applicationFiling DateStatus
Array ( [id] => 1315549 [patent_doc_number] => 06605177 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2003-08-12 [patent_title] => 'Substrate support with gas feed-through and method' [patent_app_type] => B2 [patent_app_number] => 10/256441 [patent_app_country] => US [patent_app_date] => 2002-09-27 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 5 [patent_figures_cnt] => 12 [patent_no_of_words] => 5974 [patent_no_of_claims] => 11 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 98 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/06/605/06605177.pdf [firstpage_image] =>[orig_patent_app_number] => 10256441 [rel_patent_id] =>[rel_patent_doc_number] =>)
10/256441
Substrate support with gas feed-through and method Sep 26, 2002 Issued
Array ( [id] => 7185697 [patent_doc_number] => 20040083976 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2004-05-06 [patent_title] => 'Modified deposition ring to eliminate backside and wafer edge coating' [patent_app_type] => new [patent_app_number] => 10/255545 [patent_app_country] => US [patent_app_date] => 2002-09-25 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 2 [patent_figures_cnt] => 2 [patent_no_of_words] => 2462 [patent_no_of_claims] => 17 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 152 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0083/20040083976.pdf [firstpage_image] =>[orig_patent_app_number] => 10255545 [rel_patent_id] =>[rel_patent_doc_number] =>)
10/255545
Modified deposition ring to eliminate backside and wafer edge coating Sep 24, 2002 Abandoned
Array ( [id] => 7267123 [patent_doc_number] => 20040055708 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2004-03-25 [patent_title] => 'Apparatus and method for in-situ cleaning of borosilicate (BSG) and borophosphosilicate (BPSG) films from CVD chambers' [patent_app_type] => new [patent_app_number] => 10/253206 [patent_app_country] => US [patent_app_date] => 2002-09-24 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 7 [patent_figures_cnt] => 7 [patent_no_of_words] => 4019 [patent_no_of_claims] => 18 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 44 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0055/20040055708.pdf [firstpage_image] =>[orig_patent_app_number] => 10253206 [rel_patent_id] =>[rel_patent_doc_number] =>)
10/253206
Apparatus and method for in-situ cleaning of borosilicate (BSG) and borophosphosilicate (BPSG) films from CVD chambers Sep 23, 2002 Abandoned
Array ( [id] => 435543 [patent_doc_number] => 07261796 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2007-08-28 [patent_title] => 'Method and apparatus for aligning a machine tool' [patent_app_type] => utility [patent_app_number] => 10/252910 [patent_app_country] => US [patent_app_date] => 2002-09-23 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 6 [patent_figures_cnt] => 7 [patent_no_of_words] => 2953 [patent_no_of_claims] => 10 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 136 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/07/261/07261796.pdf [firstpage_image] =>[orig_patent_app_number] => 10252910 [rel_patent_id] =>[rel_patent_doc_number] =>)
10/252910
Method and apparatus for aligning a machine tool Sep 22, 2002 Issued
Array ( [id] => 445001 [patent_doc_number] => 07252738 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2007-08-07 [patent_title] => 'Apparatus for reducing polymer deposition on a substrate and substrate support' [patent_app_type] => utility [patent_app_number] => 10/251179 [patent_app_country] => US [patent_app_date] => 2002-09-20 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 4 [patent_figures_cnt] => 6 [patent_no_of_words] => 3163 [patent_no_of_claims] => 17 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 95 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/07/252/07252738.pdf [firstpage_image] =>[orig_patent_app_number] => 10251179 [rel_patent_id] =>[rel_patent_doc_number] =>)
10/251179
Apparatus for reducing polymer deposition on a substrate and substrate support Sep 19, 2002 Issued
Array ( [id] => 7267124 [patent_doc_number] => 20040055709 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2004-03-25 [patent_title] => 'Electrostatic chuck having a low level of particle generation and method of fabricating same' [patent_app_type] => new [patent_app_number] => 10/247499 [patent_app_country] => US [patent_app_date] => 2002-09-19 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 6 [patent_figures_cnt] => 6 [patent_no_of_words] => 3879 [patent_no_of_claims] => 38 [patent_no_of_ind_claims] => 6 [patent_words_short_claim] => 32 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0055/20040055709.pdf [firstpage_image] =>[orig_patent_app_number] => 10247499 [rel_patent_id] =>[rel_patent_doc_number] =>)
10/247499
Electrostatic chuck having a low level of particle generation and method of fabricating same Sep 18, 2002 Abandoned
Array ( [id] => 6718127 [patent_doc_number] => 20030051814 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2003-03-20 [patent_title] => 'Manufacturing apparatus of a semiconductor device having a sensing system' [patent_app_type] => new [patent_app_number] => 10/246254 [patent_app_country] => US [patent_app_date] => 2002-09-17 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 4 [patent_figures_cnt] => 4 [patent_no_of_words] => 3274 [patent_no_of_claims] => 14 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 97 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0051/20030051814.pdf [firstpage_image] =>[orig_patent_app_number] => 10246254 [rel_patent_id] =>[rel_patent_doc_number] =>)
10/246254
Manufacturing apparatus of a semiconductor device having a sensing system Sep 16, 2002 Abandoned
Array ( [id] => 6771956 [patent_doc_number] => 20030015294 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2003-01-23 [patent_title] => 'Rapid heating and cooling of workpiece chucks' [patent_app_type] => new [patent_app_number] => 10/244713 [patent_app_country] => US [patent_app_date] => 2002-09-16 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 3 [patent_figures_cnt] => 3 [patent_no_of_words] => 6280 [patent_no_of_claims] => 16 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 81 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0015/20030015294.pdf [firstpage_image] =>[orig_patent_app_number] => 10244713 [rel_patent_id] =>[rel_patent_doc_number] =>)
10/244713
Rapid heating and cooling of workpiece chucks Sep 15, 2002 Abandoned
Array ( [id] => 6838942 [patent_doc_number] => 20030036282 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2003-02-20 [patent_title] => 'Etching end point judging device' [patent_app_type] => new [patent_app_number] => 10/242425 [patent_app_country] => US [patent_app_date] => 2002-09-13 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 20 [patent_figures_cnt] => 20 [patent_no_of_words] => 11836 [patent_no_of_claims] => 4 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 73 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0036/20030036282.pdf [firstpage_image] =>[orig_patent_app_number] => 10242425 [rel_patent_id] =>[rel_patent_doc_number] =>)
10/242425
Etching end point judging device Sep 12, 2002 Abandoned
Array ( [id] => 1020533 [patent_doc_number] => 06887317 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2005-05-03 [patent_title] => 'Reduced friction lift pin' [patent_app_type] => utility [patent_app_number] => 10/241005 [patent_app_country] => US [patent_app_date] => 2002-09-10 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 5 [patent_figures_cnt] => 6 [patent_no_of_words] => 2279 [patent_no_of_claims] => 12 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 76 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/06/887/06887317.pdf [firstpage_image] =>[orig_patent_app_number] => 10241005 [rel_patent_id] =>[rel_patent_doc_number] =>)
10/241005
Reduced friction lift pin Sep 9, 2002 Issued
Array ( [id] => 6671121 [patent_doc_number] => 20030056724 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2003-03-27 [patent_title] => 'Manufacturing device for substrate with transparent conductive film' [patent_app_type] => new [patent_app_number] => 10/149728 [patent_app_country] => US [patent_app_date] => 2002-09-06 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 11 [patent_figures_cnt] => 11 [patent_no_of_words] => 5696 [patent_no_of_claims] => 12 [patent_no_of_ind_claims] => 5 [patent_words_short_claim] => 23 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0056/20030056724.pdf [firstpage_image] =>[orig_patent_app_number] => 10149728 [rel_patent_id] =>[rel_patent_doc_number] =>)
10/149728
Manufacturing device for substrate with transparent conductive film Sep 5, 2002 Abandoned
Array ( [id] => 978482 [patent_doc_number] => 06929712 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2005-08-16 [patent_title] => 'Plasma processing apparatus capable of evaluating process performance' [patent_app_type] => utility [patent_app_number] => 10/235783 [patent_app_country] => US [patent_app_date] => 2002-09-06 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 27 [patent_figures_cnt] => 30 [patent_no_of_words] => 14219 [patent_no_of_claims] => 7 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 141 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/06/929/06929712.pdf [firstpage_image] =>[orig_patent_app_number] => 10235783 [rel_patent_id] =>[rel_patent_doc_number] =>)
10/235783
Plasma processing apparatus capable of evaluating process performance Sep 5, 2002 Issued
Array ( [id] => 6752872 [patent_doc_number] => 20030000648 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2003-01-02 [patent_title] => ' Process chamber used in manufacture of semiconductor device, capable of reducing contamination by particulates ' [patent_app_type] => new [patent_app_number] => 10/234135 [patent_app_country] => US [patent_app_date] => 2002-09-05 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 11 [patent_figures_cnt] => 11 [patent_no_of_words] => 7051 [patent_no_of_claims] => 42 [patent_no_of_ind_claims] => 8 [patent_words_short_claim] => 64 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0000/20030000648.pdf [firstpage_image] =>[orig_patent_app_number] => 10234135 [rel_patent_id] =>[rel_patent_doc_number] =>)
10/234135
Process chamber used in manufacture of semiconductor device, capable of reducing contamination by particulates Sep 4, 2002 Abandoned
Array ( [id] => 7129272 [patent_doc_number] => 20040040510 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2004-03-04 [patent_title] => 'Semiconductor wafer susceptor' [patent_app_type] => new [patent_app_number] => 10/233483 [patent_app_country] => US [patent_app_date] => 2002-09-04 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 13 [patent_figures_cnt] => 13 [patent_no_of_words] => 3082 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 47 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0040/20040040510.pdf [firstpage_image] =>[orig_patent_app_number] => 10233483 [rel_patent_id] =>[rel_patent_doc_number] =>)
10/233483
Semiconductor wafer susceptor Sep 3, 2002 Issued
Array ( [id] => 6778856 [patent_doc_number] => 20030049937 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2003-03-13 [patent_title] => 'Apparatus and method for surface treatment to substrate' [patent_app_type] => new [patent_app_number] => 10/233440 [patent_app_country] => US [patent_app_date] => 2002-09-04 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 5 [patent_figures_cnt] => 5 [patent_no_of_words] => 6043 [patent_no_of_claims] => 15 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 111 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0049/20030049937.pdf [firstpage_image] =>[orig_patent_app_number] => 10233440 [rel_patent_id] =>[rel_patent_doc_number] =>)
10/233440
Apparatus and method for surface treatment to substrate Sep 3, 2002 Abandoned
Array ( [id] => 7129271 [patent_doc_number] => 20040040509 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2004-03-04 [patent_title] => 'Apparatus and method for preventing etchant condensation on wafer in a cooling chamber' [patent_app_type] => new [patent_app_number] => 10/235120 [patent_app_country] => US [patent_app_date] => 2002-09-04 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 4 [patent_figures_cnt] => 4 [patent_no_of_words] => 3062 [patent_no_of_claims] => 18 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 111 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0040/20040040509.pdf [firstpage_image] =>[orig_patent_app_number] => 10235120 [rel_patent_id] =>[rel_patent_doc_number] =>)
10/235120
Apparatus and method for preventing etchant condensation on wafer in a cooling chamber Sep 3, 2002 Abandoned
Array ( [id] => 6686110 [patent_doc_number] => 20030029833 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2003-02-13 [patent_title] => 'High speed photoresist stripping chamber' [patent_app_type] => new [patent_app_number] => 10/204448 [patent_app_country] => US [patent_app_date] => 2002-09-03 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 9 [patent_figures_cnt] => 9 [patent_no_of_words] => 3178 [patent_no_of_claims] => 8 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 36 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0029/20030029833.pdf [firstpage_image] =>[orig_patent_app_number] => 10204448 [rel_patent_id] =>[rel_patent_doc_number] =>)
10/204448
High speed photoresist stripping chamber Sep 2, 2002 Abandoned
Array ( [id] => 7129546 [patent_doc_number] => 20040040663 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2004-03-04 [patent_title] => 'Plasma processing apparatus' [patent_app_type] => new [patent_app_number] => 10/230299 [patent_app_country] => US [patent_app_date] => 2002-08-29 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 9 [patent_figures_cnt] => 9 [patent_no_of_words] => 4220 [patent_no_of_claims] => 6 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 176 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0040/20040040663.pdf [firstpage_image] =>[orig_patent_app_number] => 10230299 [rel_patent_id] =>[rel_patent_doc_number] =>)
10/230299
Plasma processing apparatus Aug 28, 2002 Abandoned
Array ( [id] => 7129538 [patent_doc_number] => 20040040658 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2004-03-04 [patent_title] => 'Semiconductor fabricating apparatus and method and apparatus for determining state of semiconductor fabricating process' [patent_app_type] => new [patent_app_number] => 10/230309 [patent_app_country] => US [patent_app_date] => 2002-08-29 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 8 [patent_figures_cnt] => 8 [patent_no_of_words] => 8668 [patent_no_of_claims] => 5 [patent_no_of_ind_claims] => 5 [patent_words_short_claim] => 90 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0040/20040040658.pdf [firstpage_image] =>[orig_patent_app_number] => 10230309 [rel_patent_id] =>[rel_patent_doc_number] =>)
10/230309
Semiconductor fabricating apparatus and method and apparatus for determining state of semiconductor fabricating process Aug 28, 2002 Abandoned
Array ( [id] => 7129270 [patent_doc_number] => 20040040508 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2004-03-04 [patent_title] => 'Segmented cold plate for rapid thermal processing (RTP) tool for conduction cooling' [patent_app_type] => new [patent_app_number] => 10/228788 [patent_app_country] => US [patent_app_date] => 2002-08-27 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 11 [patent_figures_cnt] => 11 [patent_no_of_words] => 7155 [patent_no_of_claims] => 69 [patent_no_of_ind_claims] => 4 [patent_words_short_claim] => 54 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0040/20040040508.pdf [firstpage_image] =>[orig_patent_app_number] => 10228788 [rel_patent_id] =>[rel_patent_doc_number] =>)
10/228788
Segmented cold plate for rapid thermal processing (RTP) tool for conduction cooling Aug 26, 2002 Issued
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