Search

Alexander S Thomas

Examiner (ID: 6457, Phone: (571)272-1502 , Office: P/1783 )

Most Active Art Unit
1783
Art Unit(s)
1772, 1783, 1315, 1721, 1504, 2899, 1508, 1794, 1773, 1506
Total Applications
4004
Issued Applications
3000
Pending Applications
169
Abandoned Applications
835

Applications

Application numberTitle of the applicationFiling DateStatus
Array ( [id] => 6603667 [patent_doc_number] => 20030209321 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2003-11-13 [patent_title] => 'Scanning type etcher design for precision process control' [patent_app_type] => new [patent_app_number] => 10/144015 [patent_app_country] => US [patent_app_date] => 2002-05-13 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 7 [patent_figures_cnt] => 7 [patent_no_of_words] => 3631 [patent_no_of_claims] => 28 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 65 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0209/20030209321.pdf [firstpage_image] =>[orig_patent_app_number] => 10144015 [rel_patent_id] =>[rel_patent_doc_number] =>)
10/144015
Scanning type etcher design for precision process control May 12, 2002 Abandoned
Array ( [id] => 6423928 [patent_doc_number] => 20020174953 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2002-11-28 [patent_title] => 'Wafer chuck having refrigerating plate serving as chucking plate' [patent_app_type] => new [patent_app_number] => 10/141824 [patent_app_country] => US [patent_app_date] => 2002-05-10 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 6 [patent_figures_cnt] => 6 [patent_no_of_words] => 4111 [patent_no_of_claims] => 14 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 84 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0174/20020174953.pdf [firstpage_image] =>[orig_patent_app_number] => 10141824 [rel_patent_id] =>[rel_patent_doc_number] =>)
10/141824
Wafer chuck having refrigerating plate serving as chucking plate May 9, 2002 Abandoned
Array ( [id] => 1153234 [patent_doc_number] => 06761772 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2004-07-13 [patent_title] => 'Workpiece support' [patent_app_type] => B2 [patent_app_number] => 10/141432 [patent_app_country] => US [patent_app_date] => 2002-05-08 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 1 [patent_figures_cnt] => 0 [patent_no_of_words] => 2484 [patent_no_of_claims] => 16 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 204 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/06/761/06761772.pdf [firstpage_image] =>[orig_patent_app_number] => 10141432 [rel_patent_id] =>[rel_patent_doc_number] =>)
10/141432
Workpiece support May 7, 2002 Issued
Array ( [id] => 6603731 [patent_doc_number] => 20030209326 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2003-11-13 [patent_title] => 'Process and system for heating semiconductor substrates in a processing chamber containing a susceptor' [patent_app_type] => new [patent_app_number] => 10/141515 [patent_app_country] => US [patent_app_date] => 2002-05-07 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 8 [patent_figures_cnt] => 8 [patent_no_of_words] => 4600 [patent_no_of_claims] => 41 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 105 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0209/20030209326.pdf [firstpage_image] =>[orig_patent_app_number] => 10141515 [rel_patent_id] =>[rel_patent_doc_number] =>)
10/141515
Process and system for heating semiconductor substrates in a processing chamber containing a susceptor May 6, 2002 Abandoned
Array ( [id] => 1148743 [patent_doc_number] => 06767407 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2004-07-27 [patent_title] => 'Auto-centering device for mechanical clamp' [patent_app_type] => B2 [patent_app_number] => 10/140733 [patent_app_country] => US [patent_app_date] => 2002-05-07 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 2 [patent_figures_cnt] => 11 [patent_no_of_words] => 3053 [patent_no_of_claims] => 10 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 200 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/06/767/06767407.pdf [firstpage_image] =>[orig_patent_app_number] => 10140733 [rel_patent_id] =>[rel_patent_doc_number] =>)
10/140733
Auto-centering device for mechanical clamp May 6, 2002 Issued
Array ( [id] => 6723012 [patent_doc_number] => 20030205324 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2003-11-06 [patent_title] => 'Wafer holder with stiffening rib' [patent_app_type] => new [patent_app_number] => 10/139098 [patent_app_country] => US [patent_app_date] => 2002-05-03 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 5 [patent_figures_cnt] => 5 [patent_no_of_words] => 6134 [patent_no_of_claims] => 34 [patent_no_of_ind_claims] => 5 [patent_words_short_claim] => 41 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0205/20030205324.pdf [firstpage_image] =>[orig_patent_app_number] => 10139098 [rel_patent_id] =>[rel_patent_doc_number] =>)
10/139098
Wafer holder with stiffening rib May 2, 2002 Issued
Array ( [id] => 989833 [patent_doc_number] => 06918351 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2005-07-19 [patent_title] => 'Apparatus for ion beam implantation' [patent_app_type] => utility [patent_app_number] => 10/133140 [patent_app_country] => US [patent_app_date] => 2002-04-26 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 3 [patent_figures_cnt] => 4 [patent_no_of_words] => 4840 [patent_no_of_claims] => 32 [patent_no_of_ind_claims] => 6 [patent_words_short_claim] => 92 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/06/918/06918351.pdf [firstpage_image] =>[orig_patent_app_number] => 10133140 [rel_patent_id] =>[rel_patent_doc_number] =>)
10/133140
Apparatus for ion beam implantation Apr 25, 2002 Issued
Array ( [id] => 6806665 [patent_doc_number] => 20030196604 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2003-10-23 [patent_title] => 'Padded clamp ring with edge exclusion for deposition of thick AlCu/AlSiCu/Cu metal alloy layers' [patent_app_type] => new [patent_app_number] => 10/131455 [patent_app_country] => US [patent_app_date] => 2002-04-22 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 7 [patent_figures_cnt] => 7 [patent_no_of_words] => 3159 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 6 [patent_words_short_claim] => 66 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0196/20030196604.pdf [firstpage_image] =>[orig_patent_app_number] => 10131455 [rel_patent_id] =>[rel_patent_doc_number] =>)
10/131455
Padded clamp ring with edge exclusion for deposition of thick AlCu/AlSiCu/Cu metal alloy layers Apr 21, 2002 Issued
Array ( [id] => 1343114 [patent_doc_number] => 06579408 [patent_country] => US [patent_kind] => B1 [patent_issue_date] => 2003-06-17 [patent_title] => 'Apparatus and method for etching wafer backside' [patent_app_type] => B1 [patent_app_number] => 10/127389 [patent_app_country] => US [patent_app_date] => 2002-04-22 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 2 [patent_figures_cnt] => 4 [patent_no_of_words] => 3553 [patent_no_of_claims] => 10 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 304 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/06/579/06579408.pdf [firstpage_image] =>[orig_patent_app_number] => 10127389 [rel_patent_id] =>[rel_patent_doc_number] =>)
10/127389
Apparatus and method for etching wafer backside Apr 21, 2002 Issued
Array ( [id] => 6168848 [patent_doc_number] => 20020153104 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2002-10-24 [patent_title] => 'Plasma etching chamber and method for manufacturing photomask using the same' [patent_app_type] => new [patent_app_number] => 10/124578 [patent_app_country] => US [patent_app_date] => 2002-04-18 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 6 [patent_figures_cnt] => 6 [patent_no_of_words] => 3939 [patent_no_of_claims] => 23 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 49 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0153/20020153104.pdf [firstpage_image] =>[orig_patent_app_number] => 10124578 [rel_patent_id] =>[rel_patent_doc_number] =>)
10/124578
Plasma etching chamber and method for manufacturing photomask using the same Apr 17, 2002 Abandoned
Array ( [id] => 491584 [patent_doc_number] => 07211153 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2007-05-01 [patent_title] => 'Ceramic joined body, substrate holding structure and substrate processing apparatus' [patent_app_type] => utility [patent_app_number] => 10/276394 [patent_app_country] => US [patent_app_date] => 2002-04-11 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 2 [patent_figures_cnt] => 4 [patent_no_of_words] => 12951 [patent_no_of_claims] => 22 [patent_no_of_ind_claims] => 4 [patent_words_short_claim] => 179 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/07/211/07211153.pdf [firstpage_image] =>[orig_patent_app_number] => 10276394 [rel_patent_id] =>[rel_patent_doc_number] =>)
10/276394
Ceramic joined body, substrate holding structure and substrate processing apparatus Apr 10, 2002 Issued
Array ( [id] => 6685847 [patent_doc_number] => 20030029569 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2003-02-13 [patent_title] => 'Substrate processing apparatus' [patent_app_type] => new [patent_app_number] => 10/119955 [patent_app_country] => US [patent_app_date] => 2002-04-09 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 8 [patent_figures_cnt] => 8 [patent_no_of_words] => 8595 [patent_no_of_claims] => 18 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 70 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0029/20030029569.pdf [firstpage_image] =>[orig_patent_app_number] => 10119955 [rel_patent_id] =>[rel_patent_doc_number] =>)
10/119955
Substrate processing apparatus Apr 8, 2002 Issued
Array ( [id] => 6863161 [patent_doc_number] => 20030188687 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2003-10-09 [patent_title] => 'Gas driven planetary rotation apparatus and methods for forming silicon carbide layers' [patent_app_type] => new [patent_app_number] => 10/117858 [patent_app_country] => US [patent_app_date] => 2002-04-08 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 10 [patent_figures_cnt] => 10 [patent_no_of_words] => 6088 [patent_no_of_claims] => 39 [patent_no_of_ind_claims] => 5 [patent_words_short_claim] => 114 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0188/20030188687.pdf [firstpage_image] =>[orig_patent_app_number] => 10117858 [rel_patent_id] =>[rel_patent_doc_number] =>)
10/117858
Gas driven planetary rotation apparatus and methods for forming silicon carbide layers Apr 7, 2002 Issued
Array ( [id] => 6863304 [patent_doc_number] => 20030188830 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2003-10-09 [patent_title] => 'Substrate support having barrier capable of detecting fluid leakage' [patent_app_type] => new [patent_app_number] => 10/118758 [patent_app_country] => US [patent_app_date] => 2002-04-08 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 7 [patent_figures_cnt] => 7 [patent_no_of_words] => 4547 [patent_no_of_claims] => 11 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 52 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0188/20030188830.pdf [firstpage_image] =>[orig_patent_app_number] => 10118758 [rel_patent_id] =>[rel_patent_doc_number] =>)
10/118758
Substrate support having barrier capable of detecting fluid leakage Apr 7, 2002 Issued
Array ( [id] => 5899418 [patent_doc_number] => 20020139304 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2002-10-03 [patent_title] => 'Semiconductor manufacturing apparatus' [patent_app_type] => new [patent_app_number] => 10/105437 [patent_app_country] => US [patent_app_date] => 2002-03-26 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 8 [patent_figures_cnt] => 8 [patent_no_of_words] => 5953 [patent_no_of_claims] => 2 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 200 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0139/20020139304.pdf [firstpage_image] =>[orig_patent_app_number] => 10105437 [rel_patent_id] =>[rel_patent_doc_number] =>)
10/105437
Semiconductor manufacturing apparatus Mar 25, 2002 Abandoned
Array ( [id] => 6152817 [patent_doc_number] => 20020144787 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2002-10-10 [patent_title] => 'Supporting structure for a ceramic susceptor' [patent_app_type] => new [patent_app_number] => 10/105881 [patent_app_country] => US [patent_app_date] => 2002-03-25 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 9 [patent_figures_cnt] => 9 [patent_no_of_words] => 3537 [patent_no_of_claims] => 9 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 102 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0144/20020144787.pdf [firstpage_image] =>[orig_patent_app_number] => 10105881 [rel_patent_id] =>[rel_patent_doc_number] =>)
10/105881
Supporting structure for a ceramic susceptor Mar 24, 2002 Issued
Array ( [id] => 6827087 [patent_doc_number] => 20030178145 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2003-09-25 [patent_title] => 'Closed hole edge lift pin and susceptor for wafer process chambers' [patent_app_type] => new [patent_app_number] => 10/106666 [patent_app_country] => US [patent_app_date] => 2002-03-25 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 19 [patent_figures_cnt] => 19 [patent_no_of_words] => 5274 [patent_no_of_claims] => 33 [patent_no_of_ind_claims] => 4 [patent_words_short_claim] => 56 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0178/20030178145.pdf [firstpage_image] =>[orig_patent_app_number] => 10106666 [rel_patent_id] =>[rel_patent_doc_number] =>)
10/106666
Closed hole edge lift pin and susceptor for wafer process chambers Mar 24, 2002 Abandoned
Array ( [id] => 6694452 [patent_doc_number] => 20030106646 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2003-06-12 [patent_title] => 'Plasma chamber insert ring' [patent_app_type] => new [patent_app_number] => 10/106008 [patent_app_country] => US [patent_app_date] => 2002-03-21 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 8 [patent_figures_cnt] => 8 [patent_no_of_words] => 5789 [patent_no_of_claims] => 76 [patent_no_of_ind_claims] => 12 [patent_words_short_claim] => 73 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0106/20030106646.pdf [firstpage_image] =>[orig_patent_app_number] => 10106008 [rel_patent_id] =>[rel_patent_doc_number] =>)
10/106008
Plasma chamber insert ring Mar 20, 2002 Abandoned
Array ( [id] => 6829404 [patent_doc_number] => 20030180462 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2003-09-25 [patent_title] => 'Planetary lift-off vapor deposition system' [patent_app_type] => new [patent_app_number] => 10/102351 [patent_app_country] => US [patent_app_date] => 2002-03-19 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 8 [patent_figures_cnt] => 8 [patent_no_of_words] => 3818 [patent_no_of_claims] => 17 [patent_no_of_ind_claims] => 4 [patent_words_short_claim] => 66 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0180/20030180462.pdf [firstpage_image] =>[orig_patent_app_number] => 10102351 [rel_patent_id] =>[rel_patent_doc_number] =>)
10/102351
Planetary lift-off vapor deposition system Mar 18, 2002 Abandoned
Array ( [id] => 6826923 [patent_doc_number] => 20030177981 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2003-09-25 [patent_title] => 'Anti-binding deposition ring' [patent_app_type] => new [patent_app_number] => 10/106128 [patent_app_country] => US [patent_app_date] => 2002-03-19 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 3 [patent_figures_cnt] => 3 [patent_no_of_words] => 2291 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 103 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0177/20030177981.pdf [firstpage_image] =>[orig_patent_app_number] => 10106128 [rel_patent_id] =>[rel_patent_doc_number] =>)
10/106128
Anti-binding deposition ring Mar 18, 2002 Issued
Menu