Alexander S Thomas
Examiner (ID: 6457, Phone: (571)272-1502 , Office: P/1783 )
Most Active Art Unit | |
Art Unit(s) | |
Total Applications | |
Issued Applications | |
Pending Applications | |
Abandoned Applications |
Applications
Application number | Title of the application | Filing Date | Status |
---|---|---|---|
09/630154 | Device for mounting a substrate and method for producing an insert for a susceptor | Jul 30, 2000 | Issued |
09/619870 | Method and apparatus for dechucking a substrate | Jul 19, 2000 | Abandoned |
10/030723 | High-speed symmetrical plasma treatment system | Jul 9, 2000 | Issued |
09/607923 | Semiconductor processing equipment having improved particle performance | Jun 29, 2000 | Issued |
09/596854 | Ceramic substrate support | Jun 18, 2000 | Issued |
09/568077 | Apparatus for fabrication of thin films | May 9, 2000 | Issued |
09/959495 | Device for treating silicon wafers | Apr 12, 2000 | Issued |
09/511934 | Thin-Film forming apparatus having an automatic cleaning function for cleaning the inside | Feb 23, 2000 | Abandoned |
09/294367 | PROCESSING APPARATUS, EXHAUST PROCESSING PROCESS AND PLASMA PROCESSING | Apr 19, 1999 | Abandoned |