Search

Alexander S Thomas

Examiner (ID: 6457, Phone: (571)272-1502 , Office: P/1783 )

Most Active Art Unit
1783
Art Unit(s)
1772, 1783, 1315, 1721, 1504, 2899, 1508, 1794, 1773, 1506
Total Applications
4004
Issued Applications
3000
Pending Applications
169
Abandoned Applications
835

Applications

Application numberTitle of the applicationFiling DateStatus
Array ( [id] => 16896204 [patent_doc_number] => 11037766 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2021-06-15 [patent_title] => Substrate support apparatus and plasma processing apparatus having the same [patent_app_type] => utility [patent_app_number] => 16/268790 [patent_app_country] => US [patent_app_date] => 2019-02-06 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 7 [patent_figures_cnt] => 11 [patent_no_of_words] => 5784 [patent_no_of_claims] => 18 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 157 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16268790 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/268790
Substrate support apparatus and plasma processing apparatus having the same Feb 5, 2019 Issued
Array ( [id] => 16224471 [patent_doc_number] => 20200249588 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2020-08-06 [patent_title] => ADHESIVE RESIDUE REMOVAL APPARATUS AND ADHESIVE RESIDUE REMOVAL METHOD [patent_app_type] => utility [patent_app_number] => 16/265039 [patent_app_country] => US [patent_app_date] => 2019-02-01 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 5656 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -16 [patent_words_short_claim] => 70 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16265039 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/265039
ADHESIVE RESIDUE REMOVAL APPARATUS AND ADHESIVE RESIDUE REMOVAL METHOD Jan 31, 2019 Abandoned
Array ( [id] => 16897958 [patent_doc_number] => 11039527 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2021-06-15 [patent_title] => Air leak detection in plasma processing apparatus with separation grid [patent_app_type] => utility [patent_app_number] => 16/258744 [patent_app_country] => US [patent_app_date] => 2019-01-28 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 9 [patent_figures_cnt] => 9 [patent_no_of_words] => 5985 [patent_no_of_claims] => 17 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 168 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16258744 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/258744
Air leak detection in plasma processing apparatus with separation grid Jan 27, 2019 Issued
Array ( [id] => 14676381 [patent_doc_number] => 20190237305 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2019-08-01 [patent_title] => METHOD FOR APPLYING DC VOLTAGE AND PLASMA PROCESSING APPARATUS [patent_app_type] => utility [patent_app_number] => 16/257205 [patent_app_country] => US [patent_app_date] => 2019-01-25 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 5451 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -6 [patent_words_short_claim] => 145 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16257205 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/257205
METHOD FOR APPLYING DC VOLTAGE AND PLASMA PROCESSING APPARATUS Jan 24, 2019 Abandoned
Array ( [id] => 14631245 [patent_doc_number] => 20190228992 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2019-07-25 [patent_title] => SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING SYSTEM [patent_app_type] => utility [patent_app_number] => 16/251958 [patent_app_country] => US [patent_app_date] => 2019-01-18 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 5775 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -9 [patent_words_short_claim] => 62 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16251958 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/251958
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING SYSTEM Jan 17, 2019 Abandoned
Array ( [id] => 14542163 [patent_doc_number] => 20190206703 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2019-07-04 [patent_title] => PLASMA REACTOR HAVING A FUNCTION OF TUNING LOW FREQUENCY RF POWER DISTRIBUTION [patent_app_type] => utility [patent_app_number] => 16/228407 [patent_app_country] => US [patent_app_date] => 2018-12-20 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 6082 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -11 [patent_words_short_claim] => 237 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16228407 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/228407
Plasma reactor having a function of tuning low frequency RF power distribution Dec 19, 2018 Issued
Array ( [id] => 14509287 [patent_doc_number] => 20190198298 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2019-06-27 [patent_title] => PLASMA ETCHING APPARATUS AND PLASMA ETCHING METHOD [patent_app_type] => utility [patent_app_number] => 16/225326 [patent_app_country] => US [patent_app_date] => 2018-12-19 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 7269 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -5 [patent_words_short_claim] => 143 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16225326 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/225326
PLASMA ETCHING APPARATUS AND PLASMA ETCHING METHOD Dec 18, 2018 Abandoned
Array ( [id] => 14468743 [patent_doc_number] => 20190186014 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2019-06-20 [patent_title] => Vertical Heat Treatment Apparatus [patent_app_type] => utility [patent_app_number] => 16/223327 [patent_app_country] => US [patent_app_date] => 2018-12-18 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 8178 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -8 [patent_words_short_claim] => 142 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16223327 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/223327
Vertical heat treatment apparatus Dec 17, 2018 Issued
Array ( [id] => 15864017 [patent_doc_number] => 20200139412 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2020-05-07 [patent_title] => PLASMA GENERATING DEVICE AND PLASMA CLEANING DEVICE [patent_app_type] => utility [patent_app_number] => 16/332791 [patent_app_country] => US [patent_app_date] => 2018-12-15 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 2535 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -12 [patent_words_short_claim] => 115 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16332791 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/332791
PLASMA GENERATING DEVICE AND PLASMA CLEANING DEVICE Dec 14, 2018 Abandoned
Array ( [id] => 14587591 [patent_doc_number] => 20190221404 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2019-07-18 [patent_title] => PLASMA SOURCE AND PLASMA GENERATION APPARATUS USING THE SAME [patent_app_type] => utility [patent_app_number] => 16/220792 [patent_app_country] => US [patent_app_date] => 2018-12-14 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 5984 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -12 [patent_words_short_claim] => 50 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16220792 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/220792
Plasma source and plasma generation apparatus using the same Dec 13, 2018 Issued
Array ( [id] => 15532327 [patent_doc_number] => 20200058469 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2020-02-20 [patent_title] => SYSTEMS AND METHODS OF CONTROL FOR PLASMA PROCESSING [patent_app_type] => utility [patent_app_number] => 16/219535 [patent_app_country] => US [patent_app_date] => 2018-12-13 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 11847 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 86 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16219535 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/219535
SYSTEMS AND METHODS OF CONTROL FOR PLASMA PROCESSING Dec 12, 2018 Pending
Array ( [id] => 14475501 [patent_doc_number] => 20190189398 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2019-06-20 [patent_title] => MICROWAVE PLASMA PROCESSING APPARATUS [patent_app_type] => utility [patent_app_number] => 16/214613 [patent_app_country] => US [patent_app_date] => 2018-12-10 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 7244 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -8 [patent_words_short_claim] => 128 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16214613 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/214613
MICROWAVE PLASMA PROCESSING APPARATUS Dec 9, 2018 Abandoned
Array ( [id] => 16020719 [patent_doc_number] => 20200185203 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2020-06-11 [patent_title] => CORROSION RESISTANT GROUND SHIELD OF PROCESSING CHAMBER [patent_app_type] => utility [patent_app_number] => 16/212580 [patent_app_country] => US [patent_app_date] => 2018-12-06 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 11495 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 67 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16212580 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/212580
Corrosion resistant ground shield of processing chamber Dec 5, 2018 Issued
Array ( [id] => 18029218 [patent_doc_number] => 11512393 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2022-11-29 [patent_title] => Dynamic sheath control with edge ring lift [patent_app_type] => utility [patent_app_number] => 16/205028 [patent_app_country] => US [patent_app_date] => 2018-11-29 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 19 [patent_figures_cnt] => 23 [patent_no_of_words] => 16683 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 242 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16205028 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/205028
Dynamic sheath control with edge ring lift Nov 28, 2018 Issued
Array ( [id] => 17060405 [patent_doc_number] => 11104996 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2021-08-31 [patent_title] => Heating stage and apparatus having the same [patent_app_type] => utility [patent_app_number] => 16/200650 [patent_app_country] => US [patent_app_date] => 2018-11-27 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 5 [patent_figures_cnt] => 7 [patent_no_of_words] => 5171 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 201 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16200650 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/200650
Heating stage and apparatus having the same Nov 26, 2018 Issued
Array ( [id] => 14381627 [patent_doc_number] => 20190164726 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2019-05-30 [patent_title] => PLASMA PROCESSING APPARATUS [patent_app_type] => utility [patent_app_number] => 16/201659 [patent_app_country] => US [patent_app_date] => 2018-11-27 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 7048 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -6 [patent_words_short_claim] => 71 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16201659 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/201659
PLASMA PROCESSING APPARATUS Nov 26, 2018 Abandoned
Array ( [id] => 15092949 [patent_doc_number] => 20190341286 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2019-11-07 [patent_title] => BATCH SUBSTRATE SUPPORT WITH WARPED SUBSTRATE CAPABILITY [patent_app_type] => utility [patent_app_number] => 16/198417 [patent_app_country] => US [patent_app_date] => 2018-11-21 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 6469 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 67 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16198417 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/198417
Batch substrate support with warped substrate capability Nov 20, 2018 Issued
Array ( [id] => 15905809 [patent_doc_number] => 20200152425 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2020-05-14 [patent_title] => SUBSTRATE PROCESSING CHAMBER COMPONENT ASSEMBLY WITH PLASMA RESISTANT SEAL [patent_app_type] => utility [patent_app_number] => 16/189451 [patent_app_country] => US [patent_app_date] => 2018-11-13 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 2494 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -13 [patent_words_short_claim] => 146 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16189451 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/189451
SUBSTRATE PROCESSING CHAMBER COMPONENT ASSEMBLY WITH PLASMA RESISTANT SEAL Nov 12, 2018 Abandoned
Array ( [id] => 16566766 [patent_doc_number] => 10892142 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2021-01-12 [patent_title] => System for fabricating a semiconductor device [patent_app_type] => utility [patent_app_number] => 16/182737 [patent_app_country] => US [patent_app_date] => 2018-11-07 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 12 [patent_figures_cnt] => 13 [patent_no_of_words] => 7136 [patent_no_of_claims] => 6 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 356 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16182737 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/182737
System for fabricating a semiconductor device Nov 6, 2018 Issued
Array ( [id] => 14237885 [patent_doc_number] => 20190131115 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2019-05-02 [patent_title] => SUPPORT UNIT AND SUBSTRATE TREATING APPARATUS INCLUDING THE SAME [patent_app_type] => utility [patent_app_number] => 16/174679 [patent_app_country] => US [patent_app_date] => 2018-10-30 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 5587 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -15 [patent_words_short_claim] => 120 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16174679 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/174679
SUPPORT UNIT AND SUBSTRATE TREATING APPARATUS INCLUDING THE SAME Oct 29, 2018 Abandoned
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