Search

Allan W. Olsen

Examiner (ID: 12334, Phone: (571)272-1441 , Office: P/1716 )

Most Active Art Unit
1716
Art Unit(s)
1716, 1792, 1746, 1763
Total Applications
1622
Issued Applications
1247
Pending Applications
121
Abandoned Applications
272

Applications

Application numberTitle of the applicationFiling DateStatus
Array ( [id] => 18675381 [patent_doc_number] => 20230312983 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2023-10-05 [patent_title] => POLISHING COMPOSITION, AND POLISHING METHOD USING POLISHING COMPOSITION [patent_app_type] => utility [patent_app_number] => 18/018093 [patent_app_country] => US [patent_app_date] => 2021-07-09 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 8283 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -9 [patent_words_short_claim] => 67 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18018093 [rel_patent_id] =>[rel_patent_doc_number] =>)
18/018093
POLISHING COMPOSITION, AND POLISHING METHOD USING POLISHING COMPOSITION Jul 8, 2021 Pending
Array ( [id] => 18387242 [patent_doc_number] => 11658035 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2023-05-23 [patent_title] => Substrate processing method [patent_app_type] => utility [patent_app_number] => 17/358860 [patent_app_country] => US [patent_app_date] => 2021-06-25 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 8 [patent_figures_cnt] => 13 [patent_no_of_words] => 8390 [patent_no_of_claims] => 22 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 95 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17358860 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/358860
Substrate processing method Jun 24, 2021 Issued
Array ( [id] => 18371789 [patent_doc_number] => 11651971 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2023-05-16 [patent_title] => Etching method, substrate processing apparatus, and substrate processing system [patent_app_type] => utility [patent_app_number] => 17/351549 [patent_app_country] => US [patent_app_date] => 2021-06-18 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 15 [patent_figures_cnt] => 21 [patent_no_of_words] => 13657 [patent_no_of_claims] => 21 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 78 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17351549 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/351549
Etching method, substrate processing apparatus, and substrate processing system Jun 17, 2021 Issued
Array ( [id] => 18608052 [patent_doc_number] => 11749530 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2023-09-05 [patent_title] => Method of removing phosphorus-doped silicon film and system therefor [patent_app_type] => utility [patent_app_number] => 17/304116 [patent_app_country] => US [patent_app_date] => 2021-06-15 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 5 [patent_figures_cnt] => 8 [patent_no_of_words] => 4319 [patent_no_of_claims] => 12 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 118 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17304116 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/304116
Method of removing phosphorus-doped silicon film and system therefor Jun 14, 2021 Issued
Array ( [id] => 17477331 [patent_doc_number] => 20220084835 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2022-03-17 [patent_title] => PLASMA ETCHING METHOD AND PLASMA ETCHING APPARATUS [patent_app_type] => utility [patent_app_number] => 17/346810 [patent_app_country] => US [patent_app_date] => 2021-06-14 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 4575 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 52 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17346810 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/346810
PLASMA ETCHING METHOD AND PLASMA ETCHING APPARATUS Jun 13, 2021 Abandoned
Array ( [id] => 18608083 [patent_doc_number] => 11749561 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2023-09-05 [patent_title] => Self-alignment etching of interconnect layers [patent_app_type] => utility [patent_app_number] => 17/344528 [patent_app_country] => US [patent_app_date] => 2021-06-10 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 21 [patent_figures_cnt] => 32 [patent_no_of_words] => 11370 [patent_no_of_claims] => 13 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 126 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17344528 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/344528
Self-alignment etching of interconnect layers Jun 9, 2021 Issued
Array ( [id] => 18263072 [patent_doc_number] => 11610780 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2023-03-21 [patent_title] => Alternating hardmasks for tight-pitch line formation [patent_app_type] => utility [patent_app_number] => 17/340915 [patent_app_country] => US [patent_app_date] => 2021-06-07 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 10 [patent_figures_cnt] => 18 [patent_no_of_words] => 5503 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 162 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17340915 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/340915
Alternating hardmasks for tight-pitch line formation Jun 6, 2021 Issued
Array ( [id] => 17657316 [patent_doc_number] => 20220177781 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2022-06-09 [patent_title] => WET ANISOTROPIC ETCHING OF SILICON [patent_app_type] => utility [patent_app_number] => 17/339474 [patent_app_country] => US [patent_app_date] => 2021-06-04 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 9424 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 20 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17339474 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/339474
Wet anisotropic etching of silicon Jun 3, 2021 Issued
Array ( [id] => 18051712 [patent_doc_number] => 11525085 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2022-12-13 [patent_title] => Process to manufacture novel inhibited hydrofluoric acid composition [patent_app_type] => utility [patent_app_number] => 17/338865 [patent_app_country] => US [patent_app_date] => 2021-06-04 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 3859 [patent_no_of_claims] => 11 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 105 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17338865 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/338865
Process to manufacture novel inhibited hydrofluoric acid composition Jun 3, 2021 Issued
Array ( [id] => 17277840 [patent_doc_number] => 20210384038 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2021-12-09 [patent_title] => SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS [patent_app_type] => utility [patent_app_number] => 17/303558 [patent_app_country] => US [patent_app_date] => 2021-06-02 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 8954 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -15 [patent_words_short_claim] => 90 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17303558 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/303558
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS Jun 1, 2021 Abandoned
Array ( [id] => 18500507 [patent_doc_number] => 20230223301 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2023-07-13 [patent_title] => METHOD OF REMOVING BARRIER LAYER [patent_app_type] => utility [patent_app_number] => 18/001204 [patent_app_country] => US [patent_app_date] => 2021-05-31 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 5555 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -6 [patent_words_short_claim] => 108 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18001204 [rel_patent_id] =>[rel_patent_doc_number] =>)
18/001204
METHOD OF REMOVING BARRIER LAYER May 30, 2021 Pending
Array ( [id] => 17993177 [patent_doc_number] => 20220359214 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2022-11-10 [patent_title] => METAL ETCH IN HIGH ASPECT-RATIO FEATURES [patent_app_type] => utility [patent_app_number] => 17/307636 [patent_app_country] => US [patent_app_date] => 2021-05-04 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 7421 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -16 [patent_words_short_claim] => 2 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17307636 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/307636
Metal etch in high aspect-ratio features May 3, 2021 Issued
Array ( [id] => 17978598 [patent_doc_number] => 11495470 [patent_country] => US [patent_kind] => B1 [patent_issue_date] => 2022-11-08 [patent_title] => Method of enhancing etching selectivity using a pulsed plasma [patent_app_type] => utility [patent_app_number] => 17/244873 [patent_app_country] => US [patent_app_date] => 2021-04-29 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 13 [patent_figures_cnt] => 15 [patent_no_of_words] => 14182 [patent_no_of_claims] => 17 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 273 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17244873 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/244873
Method of enhancing etching selectivity using a pulsed plasma Apr 28, 2021 Issued
Array ( [id] => 18854034 [patent_doc_number] => 11851597 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2023-12-26 [patent_title] => Etchant composition, tackifier, alkaline solution, method of removing polyimide and etching process [patent_app_type] => utility [patent_app_number] => 17/241086 [patent_app_country] => US [patent_app_date] => 2021-04-27 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 1 [patent_figures_cnt] => 1 [patent_no_of_words] => 7899 [patent_no_of_claims] => 14 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 143 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17241086 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/241086
Etchant composition, tackifier, alkaline solution, method of removing polyimide and etching process Apr 26, 2021 Issued
Array ( [id] => 18406010 [patent_doc_number] => 20230167361 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2023-06-01 [patent_title] => METHOD FOR SUPPLYING COMPOSITION, COMPOSITION AND DRY ETCHING METHOD [patent_app_type] => utility [patent_app_number] => 17/921171 [patent_app_country] => US [patent_app_date] => 2021-04-27 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 3349 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -9 [patent_words_short_claim] => 54 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17921171 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/921171
Method for supplying composition, composition and dry etching method Apr 26, 2021 Issued
Array ( [id] => 17963612 [patent_doc_number] => 20220344193 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2022-10-27 [patent_title] => WAFER CHUCK STRUCTURE WITH HOLES IN UPPER SURFACE TO IMPROVE TEMPERATURE UNIFORMITY [patent_app_type] => utility [patent_app_number] => 17/241666 [patent_app_country] => US [patent_app_date] => 2021-04-27 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 7275 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 170 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17241666 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/241666
Wafer chuck structure with holes in upper surface to improve temperature uniformity Apr 26, 2021 Issued
Array ( [id] => 18420361 [patent_doc_number] => 20230174822 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2023-06-08 [patent_title] => CMP POLISHING LIQUID AND POLISHING METHOD [patent_app_type] => utility [patent_app_number] => 17/925175 [patent_app_country] => US [patent_app_date] => 2021-04-20 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 13159 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -19 [patent_words_short_claim] => 66 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17925175 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/925175
CMP POLISHING LIQUID AND POLISHING METHOD Apr 19, 2021 Pending
Array ( [id] => 17170855 [patent_doc_number] => 20210324525 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2021-10-21 [patent_title] => METHOD AND COMPOSITION FOR ETCHING MOLYBDENUM [patent_app_type] => utility [patent_app_number] => 17/230633 [patent_app_country] => US [patent_app_date] => 2021-04-14 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 4333 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -18 [patent_words_short_claim] => 52 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17230633 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/230633
Method and composition for etching molybdenum Apr 13, 2021 Issued
Array ( [id] => 19935041 [patent_doc_number] => 12308249 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2025-05-20 [patent_title] => Etching liquid for titanium and/or titanium alloy, method for etching titanium and/or titanium alloy with use of said etching liquid, and method for producing substrate with use of said etching liquid [patent_app_type] => utility [patent_app_number] => 17/996170 [patent_app_country] => US [patent_app_date] => 2021-04-07 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 1 [patent_figures_cnt] => 1 [patent_no_of_words] => 4301 [patent_no_of_claims] => 9 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 152 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17996170 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/996170
Etching liquid for titanium and/or titanium alloy, method for etching titanium and/or titanium alloy with use of said etching liquid, and method for producing substrate with use of said etching liquid Apr 6, 2021 Issued
Array ( [id] => 17847857 [patent_doc_number] => 11437241 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2022-09-06 [patent_title] => Apparatus and methods for selectively etching silicon oxide films [patent_app_type] => utility [patent_app_number] => 17/221944 [patent_app_country] => US [patent_app_date] => 2021-04-05 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 5 [patent_figures_cnt] => 7 [patent_no_of_words] => 3921 [patent_no_of_claims] => 15 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 158 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17221944 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/221944
Apparatus and methods for selectively etching silicon oxide films Apr 4, 2021 Issued
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