Search

Anh T. N. Vo

Examiner (ID: 9654, Phone: (571)272-2262 , Office: P/2853 )

Most Active Art Unit
2853
Art Unit(s)
2861, 2853
Total Applications
3529
Issued Applications
3210
Pending Applications
125
Abandoned Applications
242

Applications

Application numberTitle of the applicationFiling DateStatus
Array ( [id] => 17431616 [patent_doc_number] => 20220059325 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2022-02-24 [patent_title] => METHOD AND APPARATUS FOR ATOMIC LAYER ETCHING [patent_app_type] => utility [patent_app_number] => 17/367100 [patent_app_country] => US [patent_app_date] => 2021-07-02 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 4330 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -10 [patent_words_short_claim] => 49 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17367100 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/367100
Method and apparatus for atomic layer etching Jul 1, 2021 Issued
Array ( [id] => 17200310 [patent_doc_number] => 20210340405 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2021-11-04 [patent_title] => CHEMICAL-MECHANICAL POLISHING PARTICLE AND POLISHING SLURRY COMPOSITION COMPRISING SAME [patent_app_type] => utility [patent_app_number] => 17/363105 [patent_app_country] => US [patent_app_date] => 2021-06-30 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 7321 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -9 [patent_words_short_claim] => 58 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17363105 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/363105
Chemical-mechanical polishing particle and polishing slurry composition comprising same Jun 29, 2021 Issued
Array ( [id] => 17314709 [patent_doc_number] => 20210403757 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2021-12-30 [patent_title] => POLISHING MATERIAL AND POLISHING METHOD [patent_app_type] => utility [patent_app_number] => 17/358623 [patent_app_country] => US [patent_app_date] => 2021-06-25 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 6893 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -12 [patent_words_short_claim] => 101 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17358623 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/358623
POLISHING MATERIAL AND POLISHING METHOD Jun 24, 2021 Abandoned
Array ( [id] => 18538988 [patent_doc_number] => 20230244095 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2023-08-03 [patent_title] => METHOD FOR MANUFACTURING A THERMO-OPTIC COMPONENT [patent_app_type] => utility [patent_app_number] => 18/003387 [patent_app_country] => US [patent_app_date] => 2021-06-22 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 3333 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -18 [patent_words_short_claim] => 159 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18003387 [rel_patent_id] =>[rel_patent_doc_number] =>)
18/003387
METHOD FOR MANUFACTURING A THERMO-OPTIC COMPONENT Jun 21, 2021 Pending
Array ( [id] => 17810814 [patent_doc_number] => 20220262649 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2022-08-18 [patent_title] => Semiconductor Device and Method [patent_app_type] => utility [patent_app_number] => 17/350206 [patent_app_country] => US [patent_app_date] => 2021-06-17 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 13566 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 65 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17350206 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/350206
Semiconductor device and method Jun 16, 2021 Issued
Array ( [id] => 17870676 [patent_doc_number] => 20220293413 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2022-09-15 [patent_title] => Pattern Formation Through Mask Stress Management and Resulting Structures [patent_app_type] => utility [patent_app_number] => 17/341332 [patent_app_country] => US [patent_app_date] => 2021-06-07 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 6165 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 49 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17341332 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/341332
Pattern formation through mask stress management and resulting structures Jun 6, 2021 Issued
Array ( [id] => 18039991 [patent_doc_number] => 20220384208 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2022-12-01 [patent_title] => MANUFACTURING METHOD FOR MANUFACTURING A PACKAGE STRUCTURE [patent_app_type] => utility [patent_app_number] => 17/332854 [patent_app_country] => US [patent_app_date] => 2021-05-27 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 11718 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -18 [patent_words_short_claim] => 72 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17332854 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/332854
Manufacturing method for manufacturing a package structure May 26, 2021 Issued
Array ( [id] => 17292394 [patent_doc_number] => 20210388233 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2021-12-16 [patent_title] => PREPARING METHOD OF POLISHING COMPOSITION [patent_app_type] => utility [patent_app_number] => 17/330494 [patent_app_country] => US [patent_app_date] => 2021-05-26 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 6305 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -12 [patent_words_short_claim] => 25 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17330494 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/330494
Preparing method of polishing composition May 25, 2021 Issued
Array ( [id] => 18497586 [patent_doc_number] => 20230220240 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2023-07-13 [patent_title] => METHOD FOR MANUFACTURING ABRASIVE GRAINS, COMPOSITION FOR CHEMICAL MECHANICAL POLISHING, AND METHOD FOR CHEMICAL MECHANICAL POLISHING [patent_app_type] => utility [patent_app_number] => 17/928279 [patent_app_country] => US [patent_app_date] => 2021-05-25 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 9974 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -14 [patent_words_short_claim] => 42 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17928279 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/928279
METHOD FOR MANUFACTURING ABRASIVE GRAINS, COMPOSITION FOR CHEMICAL MECHANICAL POLISHING, AND METHOD FOR CHEMICAL MECHANICAL POLISHING May 24, 2021 Pending
Array ( [id] => 17389300 [patent_doc_number] => 20220037152 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2022-02-03 [patent_title] => Plasma Pre-Treatment Method To Improve Etch Selectivity And Defectivity Margin [patent_app_type] => utility [patent_app_number] => 17/328284 [patent_app_country] => US [patent_app_date] => 2021-05-24 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 6391 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 119 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17328284 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/328284
Plasma Pre-Treatment Method To Improve Etch Selectivity And Defectivity Margin May 23, 2021 Abandoned
Array ( [id] => 17246982 [patent_doc_number] => 20210366727 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2021-11-25 [patent_title] => Processing of Workpieces Using Ozone Gas and Hydrogen Radicals [patent_app_type] => utility [patent_app_number] => 17/326945 [patent_app_country] => US [patent_app_date] => 2021-05-21 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 7640 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -18 [patent_words_short_claim] => 113 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17326945 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/326945
Processing of workpieces using ozone gas and hydrogen radicals May 20, 2021 Issued
Array ( [id] => 18469060 [patent_doc_number] => 20230203344 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2023-06-29 [patent_title] => COMPOSITION FOR CHEMICAL MECHANICAL POLISHING AND METHOD FOR POLISHING [patent_app_type] => utility [patent_app_number] => 17/927899 [patent_app_country] => US [patent_app_date] => 2021-05-21 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 10228 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -11 [patent_words_short_claim] => 47 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17927899 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/927899
COMPOSITION FOR CHEMICAL MECHANICAL POLISHING AND METHOD FOR POLISHING May 20, 2021 Pending
Array ( [id] => 17262650 [patent_doc_number] => 20210375635 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2021-12-02 [patent_title] => ETCHING METHOD AND PLASMA PROCESSING APPARATUS [patent_app_type] => utility [patent_app_number] => 17/326598 [patent_app_country] => US [patent_app_date] => 2021-05-21 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 8756 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -16 [patent_words_short_claim] => 63 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17326598 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/326598
Etching method and plasma processing apparatus May 20, 2021 Issued
Array ( [id] => 17055739 [patent_doc_number] => 20210265173 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2021-08-26 [patent_title] => TIN OXIDE MANDRELS IN PATTERNING [patent_app_type] => utility [patent_app_number] => 17/302847 [patent_app_country] => US [patent_app_date] => 2021-05-13 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 16845 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -19 [patent_words_short_claim] => 155 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17302847 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/302847
Tin oxide mandrels in patterning May 12, 2021 Issued
Array ( [id] => 17993180 [patent_doc_number] => 20220359217 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2022-11-10 [patent_title] => Angled Etch For Surface Smoothing [patent_app_type] => utility [patent_app_number] => 17/307813 [patent_app_country] => US [patent_app_date] => 2021-05-04 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 5064 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -18 [patent_words_short_claim] => 84 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17307813 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/307813
Angled etch for surface smoothing May 3, 2021 Issued
Array ( [id] => 17023676 [patent_doc_number] => 20210247547 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2021-08-12 [patent_title] => SCALE AND MANUFACTURING METHOD OF THE SAME [patent_app_type] => utility [patent_app_number] => 17/244243 [patent_app_country] => US [patent_app_date] => 2021-04-29 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 2197 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -4 [patent_words_short_claim] => 2 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17244243 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/244243
Scale and manufacturing method of the same Apr 28, 2021 Issued
Array ( [id] => 17010858 [patent_doc_number] => 20210242019 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2021-08-05 [patent_title] => TIN OXIDE THIN FILM SPACERS IN SEMICONDUCTOR DEVICE MANUFACTURING [patent_app_type] => utility [patent_app_number] => 17/302044 [patent_app_country] => US [patent_app_date] => 2021-04-22 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 12249 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -18 [patent_words_short_claim] => 89 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17302044 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/302044
Tin oxide thin film spacers in semiconductor device manufacturing Apr 21, 2021 Issued
Array ( [id] => 17246966 [patent_doc_number] => 20210366711 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2021-11-25 [patent_title] => METHOD OF MANUFACTURING SEMICONDUCTOR DEVICES AND PATTERN FORMATION METHOD [patent_app_type] => utility [patent_app_number] => 17/226872 [patent_app_country] => US [patent_app_date] => 2021-04-09 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 11524 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 77 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17226872 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/226872
Method of manufacturing semiconductor devices and pattern formation method Apr 8, 2021 Issued
Array ( [id] => 17917442 [patent_doc_number] => 20220319838 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2022-10-06 [patent_title] => Method of Line Roughness Reduction and Self-Aligned Multi-Patterning Formation Using Tone Inversion [patent_app_type] => utility [patent_app_number] => 17/220025 [patent_app_country] => US [patent_app_date] => 2021-04-01 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 6591 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -18 [patent_words_short_claim] => 162 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17220025 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/220025
Method of Line Roughness Reduction and Self-Aligned Multi-Patterning Formation Using Tone Inversion Mar 31, 2021 Abandoned
Array ( [id] => 18456174 [patent_doc_number] => 20230197456 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2023-06-22 [patent_title] => SILICON CARBIDE SUBSTRATE MANUFACTURING METHOD, SILICON CARBIDE SUBSTRATE, AND METHOD OF REMOVING STRAIN LAYER INTRODUCED INTO SILICON CARBIDE SUBSTRATE BY LASER PROCESSING [patent_app_type] => utility [patent_app_number] => 17/996193 [patent_app_country] => US [patent_app_date] => 2021-03-30 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 4760 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -18 [patent_words_short_claim] => 32 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17996193 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/996193
Silicon carbide substrate manufacturing method, silicon carbide substrate, and method of removing strain layer introduced into silicon carbide substrate by laser processing Mar 29, 2021 Issued
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