Search

Anita Karen Alanko

Examiner (ID: 11515)

Most Active Art Unit
1713
Art Unit(s)
1746, 1792, 1765, 1763, 1713, 1109
Total Applications
1476
Issued Applications
1053
Pending Applications
139
Abandoned Applications
312

Applications

Application numberTitle of the applicationFiling DateStatus
Array ( [id] => 18456175 [patent_doc_number] => 20230197457 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2023-06-22 [patent_title] => Plasma Etching [patent_app_type] => utility [patent_app_number] => 18/075128 [patent_app_country] => US [patent_app_date] => 2022-12-05 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 5567 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -18 [patent_words_short_claim] => 106 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18075128 [rel_patent_id] =>[rel_patent_doc_number] =>)
18/075128
Plasma Etching Dec 4, 2022 Pending
Array ( [id] => 18812451 [patent_doc_number] => 20230386788 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2023-11-30 [patent_title] => ETCHING APPARATUS AND ETCHING METHOD USING THE SAME [patent_app_type] => utility [patent_app_number] => 18/058931 [patent_app_country] => US [patent_app_date] => 2022-11-28 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 6009 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 108 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18058931 [rel_patent_id] =>[rel_patent_doc_number] =>)
18/058931
ETCHING APPARATUS AND ETCHING METHOD USING THE SAME Nov 27, 2022 Pending
Array ( [id] => 18812451 [patent_doc_number] => 20230386788 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2023-11-30 [patent_title] => ETCHING APPARATUS AND ETCHING METHOD USING THE SAME [patent_app_type] => utility [patent_app_number] => 18/058931 [patent_app_country] => US [patent_app_date] => 2022-11-28 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 6009 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 108 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18058931 [rel_patent_id] =>[rel_patent_doc_number] =>)
18/058931
ETCHING APPARATUS AND ETCHING METHOD USING THE SAME Nov 27, 2022 Pending
Array ( [id] => 20189742 [patent_doc_number] => 12400865 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2025-08-26 [patent_title] => Pulsed capacitively coupled plasma processes [patent_app_type] => utility [patent_app_number] => 17/991527 [patent_app_country] => US [patent_app_date] => 2022-11-21 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 9 [patent_figures_cnt] => 16 [patent_no_of_words] => 6893 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 149 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17991527 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/991527
Pulsed capacitively coupled plasma processes Nov 20, 2022 Issued
Array ( [id] => 20189742 [patent_doc_number] => 12400865 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2025-08-26 [patent_title] => Pulsed capacitively coupled plasma processes [patent_app_type] => utility [patent_app_number] => 17/991527 [patent_app_country] => US [patent_app_date] => 2022-11-21 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 9 [patent_figures_cnt] => 16 [patent_no_of_words] => 6893 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 149 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17991527 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/991527
Pulsed capacitively coupled plasma processes Nov 20, 2022 Issued
Array ( [id] => 18497587 [patent_doc_number] => 20230220241 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2023-07-13 [patent_title] => CMP SLURRY COMPOSITION FOR POLISHING TUNGSTEN PATTERN WAFER AND METHOD OF POLISHING TUNGSTEN PATTERN WAFER USING THE SAME [patent_app_type] => utility [patent_app_number] => 17/981795 [patent_app_country] => US [patent_app_date] => 2022-11-07 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 7494 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -11 [patent_words_short_claim] => 41 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17981795 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/981795
CMP SLURRY COMPOSITION FOR POLISHING TUNGSTEN PATTERN WAFER AND METHOD OF POLISHING TUNGSTEN PATTERN WAFER USING THE SAME Nov 6, 2022 Pending
Array ( [id] => 20375196 [patent_doc_number] => 12482640 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2025-11-25 [patent_title] => Cleaning method, substrate processing method and plasma processing apparatus [patent_app_type] => utility [patent_app_number] => 17/978601 [patent_app_country] => US [patent_app_date] => 2022-11-01 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 18 [patent_figures_cnt] => 18 [patent_no_of_words] => 4608 [patent_no_of_claims] => 13 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 119 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17978601 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/978601
Cleaning method, substrate processing method and plasma processing apparatus Oct 31, 2022 Issued
Array ( [id] => 20418371 [patent_doc_number] => 12501676 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2025-12-16 [patent_title] => Silicon carbide substrate or substrate processing method [patent_app_type] => utility [patent_app_number] => 17/975646 [patent_app_country] => US [patent_app_date] => 2022-10-28 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 7 [patent_figures_cnt] => 12 [patent_no_of_words] => 0 [patent_no_of_claims] => 18 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 110 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17975646 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/975646
SILICON CARBIDE SUBSTRATE OR SUBSTRATE PROCESSING METHOD Oct 27, 2022 Issued
Array ( [id] => 18346326 [patent_doc_number] => 20230134436 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2023-05-04 [patent_title] => PLASMA PROCESSING METHOD AND PLASMA PROCESSING APPARATUS [patent_app_type] => utility [patent_app_number] => 17/975704 [patent_app_country] => US [patent_app_date] => 2022-10-28 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 11717 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -16 [patent_words_short_claim] => 150 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17975704 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/975704
Plasma processing method and plasma processing apparatus Oct 27, 2022 Issued
Array ( [id] => 20111423 [patent_doc_number] => 12362158 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2025-07-15 [patent_title] => Method for OES data collection and endpoint detection [patent_app_type] => utility [patent_app_number] => 17/972958 [patent_app_country] => US [patent_app_date] => 2022-10-25 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 8 [patent_figures_cnt] => 13 [patent_no_of_words] => 1250 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 141 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17972958 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/972958
Method for OES data collection and endpoint detection Oct 24, 2022 Issued
Array ( [id] => 20111423 [patent_doc_number] => 12362158 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2025-07-15 [patent_title] => Method for OES data collection and endpoint detection [patent_app_type] => utility [patent_app_number] => 17/972958 [patent_app_country] => US [patent_app_date] => 2022-10-25 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 8 [patent_figures_cnt] => 13 [patent_no_of_words] => 1250 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 141 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17972958 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/972958
Method for OES data collection and endpoint detection Oct 24, 2022 Issued
Array ( [id] => 20161302 [patent_doc_number] => 12387936 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2025-08-12 [patent_title] => Plasma processing method and plasma processing system [patent_app_type] => utility [patent_app_number] => 17/970609 [patent_app_country] => US [patent_app_date] => 2022-10-21 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 8 [patent_figures_cnt] => 8 [patent_no_of_words] => 4639 [patent_no_of_claims] => 21 [patent_no_of_ind_claims] => 4 [patent_words_short_claim] => 162 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17970609 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/970609
Plasma processing method and plasma processing system Oct 20, 2022 Issued
Array ( [id] => 19305581 [patent_doc_number] => 20240234161 [patent_country] => US [patent_kind] => A9 [patent_issue_date] => 2024-07-11 [patent_title] => MODIFYING PATTERNED FEATURES USING A DIRECTIONAL ETCH [patent_app_type] => utility [patent_app_number] => 17/969368 [patent_app_country] => US [patent_app_date] => 2022-10-19 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 4635 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 90 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17969368 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/969368
Modifying patterned features using a directional etch Oct 18, 2022 Issued
Array ( [id] => 19305581 [patent_doc_number] => 20240234161 [patent_country] => US [patent_kind] => A9 [patent_issue_date] => 2024-07-11 [patent_title] => MODIFYING PATTERNED FEATURES USING A DIRECTIONAL ETCH [patent_app_type] => utility [patent_app_number] => 17/969368 [patent_app_country] => US [patent_app_date] => 2022-10-19 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 4635 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 90 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17969368 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/969368
Modifying patterned features using a directional etch Oct 18, 2022 Issued
Array ( [id] => 18284140 [patent_doc_number] => 20230099612 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2023-03-30 [patent_title] => TREATMENT LIQUID, CHEMICAL MECHANICAL POLISHING METHOD, AND METHOD FOR TREATING SEMICONDUCTOR SUBSTRATE [patent_app_type] => utility [patent_app_number] => 17/965554 [patent_app_country] => US [patent_app_date] => 2022-10-13 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 25806 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -19 [patent_words_short_claim] => 37 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17965554 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/965554
TREATMENT LIQUID, CHEMICAL MECHANICAL POLISHING METHOD, AND METHOD FOR TREATING SEMICONDUCTOR SUBSTRATE Oct 12, 2022 Pending
Array ( [id] => 19886831 [patent_doc_number] => 12272558 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2025-04-08 [patent_title] => Selective and isotropic etch of silicon over silicon-germanium alloys and dielectrics; via new chemistry and surface modification [patent_app_type] => utility [patent_app_number] => 17/964601 [patent_app_country] => US [patent_app_date] => 2022-10-12 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 7 [patent_figures_cnt] => 12 [patent_no_of_words] => 11329 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 141 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17964601 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/964601
Selective and isotropic etch of silicon over silicon-germanium alloys and dielectrics; via new chemistry and surface modification Oct 11, 2022 Issued
Array ( [id] => 18310800 [patent_doc_number] => 20230114700 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2023-04-13 [patent_title] => HARD MASK LIFTOFF PROCESSES [patent_app_type] => utility [patent_app_number] => 17/962144 [patent_app_country] => US [patent_app_date] => 2022-10-07 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 8837 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -37 [patent_words_short_claim] => 84 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17962144 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/962144
HARD MASK LIFTOFF PROCESSES Oct 6, 2022 Pending
Array ( [id] => 18298431 [patent_doc_number] => 20230108117 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2023-04-06 [patent_title] => Method for Etching of Metal [patent_app_type] => utility [patent_app_number] => 17/937922 [patent_app_country] => US [patent_app_date] => 2022-10-04 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 9820 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 79 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17937922 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/937922
Method for Etching of Metal Oct 3, 2022 Issued
Array ( [id] => 19749440 [patent_doc_number] => 20250038005 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2025-01-30 [patent_title] => SEMICONDUCTOR DEVICE MANUFACTURING METHOD AND SEMICONDUCTOR MANUFACTURING APPARATUS [patent_app_type] => utility [patent_app_number] => 18/280578 [patent_app_country] => US [patent_app_date] => 2022-08-23 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 16646 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -10 [patent_words_short_claim] => 134 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18280578 [rel_patent_id] =>[rel_patent_doc_number] =>)
18/280578
SEMICONDUCTOR DEVICE MANUFACTURING METHOD AND SEMICONDUCTOR MANUFACTURING APPARATUS Aug 22, 2022 Pending
Array ( [id] => 19548438 [patent_doc_number] => 20240365474 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2024-10-31 [patent_title] => SENSING DEVICE AND PREPARATION METHOD THEREFOR [patent_app_type] => utility [patent_app_number] => 18/291913 [patent_app_country] => US [patent_app_date] => 2022-08-10 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 17723 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -19 [patent_words_short_claim] => 102 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18291913 [rel_patent_id] =>[rel_patent_doc_number] =>)
18/291913
SENSING DEVICE AND PREPARATION METHOD THEREFOR Aug 9, 2022 Pending
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