Anita Karen Alanko

Array ( [id] => 18754244 [patent_doc_number] => 20230357635 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2023-11-09 [patent_title] => SILICON ETCHANT AND SILICON ETCHING METHOD [patent_app_type] => utility [patent_app_number] => 18/191652 [patent_app_country] => US [patent_app_date] => 2023-03-28 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 5292 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -11 [patent_words_short_claim] => 44 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18191652 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 18882790 [patent_doc_number] => 20240006159 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2024-01-04 [patent_title] => Post-processing of Indium-containing Compound Semiconductors [patent_app_type] => utility [patent_app_number] => 18/123954 [patent_app_country] => US [patent_app_date] => 2023-03-20 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 4292 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -15 [patent_words_short_claim] => 135 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18123954 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 19407112 [patent_doc_number] => 20240290623 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2024-08-29 [patent_title] => PROCESSING METHODS TO IMPROVE ETCHED SILICON-AND-GERMANIUM-CONTAINING MATERIAL SURFACE ROUGHNESS [patent_app_type] => utility [patent_app_number] => 18/115269 [patent_app_country] => US [patent_app_date] => 2023-02-28 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 9179 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 86 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18115269 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 19407112 [patent_doc_number] => 20240290623 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2024-08-29 [patent_title] => PROCESSING METHODS TO IMPROVE ETCHED SILICON-AND-GERMANIUM-CONTAINING MATERIAL SURFACE ROUGHNESS [patent_app_type] => utility [patent_app_number] => 18/115269 [patent_app_country] => US [patent_app_date] => 2023-02-28 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 9179 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 86 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18115269 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 19392715 [patent_doc_number] => 20240282585 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2024-08-22 [patent_title] => TREATMENTS TO IMPROVE ETCHED SILICON-AND-GERMANIUM-CONTAINING MATERIAL SURFACE ROUGHNESS [patent_app_type] => utility [patent_app_number] => 18/112252 [patent_app_country] => US [patent_app_date] => 2023-02-21 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 7458 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 100 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18112252 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 19252716 [patent_doc_number] => 20240203713 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2024-06-20 [patent_title] => IN-SITU DIAGNOSIS OF PLASMA SYSTEM [patent_app_type] => utility [patent_app_number] => 18/066078 [patent_app_country] => US [patent_app_date] => 2022-12-14 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 6678 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 140 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18066078 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 19252716 [patent_doc_number] => 20240203713 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2024-06-20 [patent_title] => IN-SITU DIAGNOSIS OF PLASMA SYSTEM [patent_app_type] => utility [patent_app_number] => 18/066078 [patent_app_country] => US [patent_app_date] => 2022-12-14 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 6678 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 140 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18066078 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 18456175 [patent_doc_number] => 20230197457 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2023-06-22 [patent_title] => Plasma Etching [patent_app_type] => utility [patent_app_number] => 18/075128 [patent_app_country] => US [patent_app_date] => 2022-12-05 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 5567 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -18 [patent_words_short_claim] => 106 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18075128 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 18812451 [patent_doc_number] => 20230386788 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2023-11-30 [patent_title] => ETCHING APPARATUS AND ETCHING METHOD USING THE SAME [patent_app_type] => utility [patent_app_number] => 18/058931 [patent_app_country] => US [patent_app_date] => 2022-11-28 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 6009 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 108 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18058931 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 18812451 [patent_doc_number] => 20230386788 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2023-11-30 [patent_title] => ETCHING APPARATUS AND ETCHING METHOD USING THE SAME [patent_app_type] => utility [patent_app_number] => 18/058931 [patent_app_country] => US [patent_app_date] => 2022-11-28 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 6009 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 108 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18058931 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 20189742 [patent_doc_number] => 12400865 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2025-08-26 [patent_title] => Pulsed capacitively coupled plasma processes [patent_app_type] => utility [patent_app_number] => 17/991527 [patent_app_country] => US [patent_app_date] => 2022-11-21 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 9 [patent_figures_cnt] => 16 [patent_no_of_words] => 6893 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 149 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17991527 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 20189742 [patent_doc_number] => 12400865 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2025-08-26 [patent_title] => Pulsed capacitively coupled plasma processes [patent_app_type] => utility [patent_app_number] => 17/991527 [patent_app_country] => US [patent_app_date] => 2022-11-21 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 9 [patent_figures_cnt] => 16 [patent_no_of_words] => 6893 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 149 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17991527 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 18497587 [patent_doc_number] => 20230220241 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2023-07-13 [patent_title] => CMP SLURRY COMPOSITION FOR POLISHING TUNGSTEN PATTERN WAFER AND METHOD OF POLISHING TUNGSTEN PATTERN WAFER USING THE SAME [patent_app_type] => utility [patent_app_number] => 17/981795 [patent_app_country] => US [patent_app_date] => 2022-11-07 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 7494 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -11 [patent_words_short_claim] => 41 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17981795 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 20375196 [patent_doc_number] => 12482640 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2025-11-25 [patent_title] => Cleaning method, substrate processing method and plasma processing apparatus [patent_app_type] => utility [patent_app_number] => 17/978601 [patent_app_country] => US [patent_app_date] => 2022-11-01 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 18 [patent_figures_cnt] => 18 [patent_no_of_words] => 4608 [patent_no_of_claims] => 13 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 119 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17978601 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 18346326 [patent_doc_number] => 20230134436 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2023-05-04 [patent_title] => PLASMA PROCESSING METHOD AND PLASMA PROCESSING APPARATUS [patent_app_type] => utility [patent_app_number] => 17/975704 [patent_app_country] => US [patent_app_date] => 2022-10-28 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 11717 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -16 [patent_words_short_claim] => 150 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17975704 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 20418371 [patent_doc_number] => 12501676 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2025-12-16 [patent_title] => Silicon carbide substrate or substrate processing method [patent_app_type] => utility [patent_app_number] => 17/975646 [patent_app_country] => US [patent_app_date] => 2022-10-28 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 7 [patent_figures_cnt] => 12 [patent_no_of_words] => 0 [patent_no_of_claims] => 18 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 110 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17975646 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 20111423 [patent_doc_number] => 12362158 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2025-07-15 [patent_title] => Method for OES data collection and endpoint detection [patent_app_type] => utility [patent_app_number] => 17/972958 [patent_app_country] => US [patent_app_date] => 2022-10-25 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 8 [patent_figures_cnt] => 13 [patent_no_of_words] => 1250 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 141 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17972958 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 20111423 [patent_doc_number] => 12362158 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2025-07-15 [patent_title] => Method for OES data collection and endpoint detection [patent_app_type] => utility [patent_app_number] => 17/972958 [patent_app_country] => US [patent_app_date] => 2022-10-25 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 8 [patent_figures_cnt] => 13 [patent_no_of_words] => 1250 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 141 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17972958 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 20161302 [patent_doc_number] => 12387936 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2025-08-12 [patent_title] => Plasma processing method and plasma processing system [patent_app_type] => utility [patent_app_number] => 17/970609 [patent_app_country] => US [patent_app_date] => 2022-10-21 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 8 [patent_figures_cnt] => 8 [patent_no_of_words] => 4639 [patent_no_of_claims] => 21 [patent_no_of_ind_claims] => 4 [patent_words_short_claim] => 162 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17970609 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 19305581 [patent_doc_number] => 20240234161 [patent_country] => US [patent_kind] => A9 [patent_issue_date] => 2024-07-11 [patent_title] => MODIFYING PATTERNED FEATURES USING A DIRECTIONAL ETCH [patent_app_type] => utility [patent_app_number] => 17/969368 [patent_app_country] => US [patent_app_date] => 2022-10-19 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 4635 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 90 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17969368 [rel_patent_id] =>[rel_patent_doc_number] =>)