| Application number | Title of the application | Filing Date | Status |
|---|
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Array
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Array
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| 09/715840 | Apparatus and method for forming a membrane with nanometer scale pores | Nov 16, 2000 | Abandoned |
| 09/715916 | New wafer bonding techniques to minimize built-in stress of silicon microstructures and micro-mirrors | Nov 15, 2000 | Abandoned |
| 09/700520 | Etching method and workpiece worked by the method | Nov 14, 2000 | Abandoned |
Array
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| 09/697035 | Method for improving the polysilicon structures of a mems device by masking to inhibit anodic etching of the mems polysilicon structures | Oct 24, 2000 | Abandoned |
Array
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