Anna M. Crowell

Array ( [id] => 11852145 [patent_doc_number] => 20170226637 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2017-08-10 [patent_title] => 'PROCESS CHAMBER FOR DIELECTRIC GAPFILL' [patent_app_type] => utility [patent_app_number] => 15/581324 [patent_app_country] => US [patent_app_date] => 2017-04-28 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 28 [patent_figures_cnt] => 28 [patent_no_of_words] => 10548 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15581324 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 12005300 [patent_doc_number] => 20170309455 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2017-10-26 [patent_title] => 'PLASMA APPARATUS' [patent_app_type] => utility [patent_app_number] => 15/491350 [patent_app_country] => US [patent_app_date] => 2017-04-19 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 18 [patent_figures_cnt] => 18 [patent_no_of_words] => 13468 [patent_no_of_claims] => 8 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15491350 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 11840000 [patent_doc_number] => 20170221720 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2017-08-03 [patent_title] => 'APPARATUS AND METHOD FOR TREATING SUBSTRATES' [patent_app_type] => utility [patent_app_number] => 15/490033 [patent_app_country] => US [patent_app_date] => 2017-04-18 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 9 [patent_figures_cnt] => 9 [patent_no_of_words] => 7645 [patent_no_of_claims] => 12 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15490033 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 12823387 [patent_doc_number] => 20180166301 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2018-06-14 [patent_title] => SEMICONDUCTOR MANUFACTURING SYSTEM [patent_app_type] => utility [patent_app_number] => 15/471258 [patent_app_country] => US [patent_app_date] => 2017-03-28 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 4817 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 49 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15471258 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 17134086 [patent_doc_number] => 11135626 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2021-10-05 [patent_title] => Contamination removal apparatus and method [patent_app_type] => utility [patent_app_number] => 15/453283 [patent_app_country] => US [patent_app_date] => 2017-03-08 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 14 [patent_figures_cnt] => 32 [patent_no_of_words] => 13163 [patent_no_of_claims] => 6 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 151 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15453283 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 12208434 [patent_doc_number] => 20180053661 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2018-02-22 [patent_title] => 'PLASMA ETCHING APPARATUS AND METHOD OF MANUFACTURING A SEMICONDUCTOR DEVICE USING THE SAME' [patent_app_type] => utility [patent_app_number] => 15/443378 [patent_app_country] => US [patent_app_date] => 2017-02-27 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 10 [patent_figures_cnt] => 10 [patent_no_of_words] => 8107 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15443378 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 11694279 [patent_doc_number] => 20170169996 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2017-06-15 [patent_title] => 'PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHDO' [patent_app_type] => utility [patent_app_number] => 15/441781 [patent_app_country] => US [patent_app_date] => 2017-02-24 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 20 [patent_figures_cnt] => 20 [patent_no_of_words] => 13473 [patent_no_of_claims] => 17 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15441781 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 11952230 [patent_doc_number] => 20170256381 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2017-09-07 [patent_title] => 'SUBSTRATE PROCESSING APPARATUS' [patent_app_type] => utility [patent_app_number] => 15/441324 [patent_app_country] => US [patent_app_date] => 2017-02-24 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 14 [patent_figures_cnt] => 14 [patent_no_of_words] => 7282 [patent_no_of_claims] => 7 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15441324 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 12129183 [patent_doc_number] => 20180012768 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2018-01-11 [patent_title] => 'Plasma Processing Apparatus and Plasma Processing Method' [patent_app_type] => utility [patent_app_number] => 15/440043 [patent_app_country] => US [patent_app_date] => 2017-02-23 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 12 [patent_figures_cnt] => 12 [patent_no_of_words] => 8219 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 4 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15440043 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 11743805 [patent_doc_number] => 20170197877 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2017-07-13 [patent_title] => 'METHOD OF STRENGTHENING GLASS USING PLASMA TORCHES AND/OR ARC JETS, AND ARTICLES MADE ACCORDING TO THE SAME' [patent_app_type] => utility [patent_app_number] => 15/439972 [patent_app_country] => US [patent_app_date] => 2017-02-23 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 11 [patent_figures_cnt] => 11 [patent_no_of_words] => 11861 [patent_no_of_claims] => 3 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15439972 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 11694319 [patent_doc_number] => 20170170036 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2017-06-15 [patent_title] => 'ADJUSTMENT OF VUV EMISSION OF A PLASMA VIA COLLISIONAL RESONANT ENERGY TRANSFER TO AN ENERGY ABSORBER GAS' [patent_app_type] => utility [patent_app_number] => 15/432689 [patent_app_country] => US [patent_app_date] => 2017-02-14 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 11 [patent_figures_cnt] => 11 [patent_no_of_words] => 15994 [patent_no_of_claims] => 21 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15432689 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 11824765 [patent_doc_number] => 20170213702 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2017-07-27 [patent_title] => 'Dual-Feed Tunable Plasma Source' [patent_app_type] => utility [patent_app_number] => 15/413910 [patent_app_country] => US [patent_app_date] => 2017-01-24 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 10 [patent_figures_cnt] => 10 [patent_no_of_words] => 8229 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15413910 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 11604512 [patent_doc_number] => 20170121813 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2017-05-04 [patent_title] => 'METHOD AND APPARATUS FOR CLEANING A CVD CHAMBER' [patent_app_type] => utility [patent_app_number] => 15/408065 [patent_app_country] => US [patent_app_date] => 2017-01-17 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 4 [patent_figures_cnt] => 4 [patent_no_of_words] => 5006 [patent_no_of_claims] => 17 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15408065 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 15703267 [patent_doc_number] => 10607820 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2020-03-31 [patent_title] => Monitoring units, plasma treatment devices including the same, and methods of fabricating semiconductor devices using the same [patent_app_type] => utility [patent_app_number] => 15/400126 [patent_app_country] => US [patent_app_date] => 2017-01-06 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 11 [patent_figures_cnt] => 11 [patent_no_of_words] => 6468 [patent_no_of_claims] => 16 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 134 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15400126 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 11746513 [patent_doc_number] => 20170200587 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2017-07-13 [patent_title] => 'ATOMIC LAYER ETCHING SYSTEM WITH REMOTE PLASMA SOURCE AND DC ELECTRODE' [patent_app_type] => utility [patent_app_number] => 15/399084 [patent_app_country] => US [patent_app_date] => 2017-01-05 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 3 [patent_figures_cnt] => 3 [patent_no_of_words] => 4853 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15399084 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 11718091 [patent_doc_number] => 20170186590 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2017-06-29 [patent_title] => 'TEMPERATURE ADJUSTING APPARATUS AND METHOD FOR A FOCUS RING' [patent_app_type] => utility [patent_app_number] => 15/385806 [patent_app_country] => US [patent_app_date] => 2016-12-20 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 3 [patent_figures_cnt] => 3 [patent_no_of_words] => 2971 [patent_no_of_claims] => 10 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15385806 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 12614970 [patent_doc_number] => 20180096820 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2018-04-05 [patent_title] => PLASMA SYSTEM [patent_app_type] => utility [patent_app_number] => 15/378471 [patent_app_country] => US [patent_app_date] => 2016-12-14 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 1757 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 179 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15378471 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 12800620 [patent_doc_number] => 20180158709 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2018-06-07 [patent_title] => SUBSTRATE TREATMENT APPARATUS [patent_app_type] => utility [patent_app_number] => 15/370834 [patent_app_country] => US [patent_app_date] => 2016-12-06 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 3454 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -6 [patent_words_short_claim] => 165 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15370834 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 11710369 [patent_doc_number] => 20170178868 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2017-06-22 [patent_title] => 'UPPER ELECTRODE FOR PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING APPARATUS HAVING THE SAME' [patent_app_type] => utility [patent_app_number] => 15/248326 [patent_app_country] => US [patent_app_date] => 2016-08-26 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 7 [patent_figures_cnt] => 7 [patent_no_of_words] => 4366 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15248326 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 11328172 [patent_doc_number] => 20160358784 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2016-12-08 [patent_title] => 'PLASMA-ENHANCED ETCHING IN AN AUGMENTED PLASMA PROCESSING SYSTEM' [patent_app_type] => utility [patent_app_number] => 15/237521 [patent_app_country] => US [patent_app_date] => 2016-08-15 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 4 [patent_figures_cnt] => 4 [patent_no_of_words] => 6787 [patent_no_of_claims] => 15 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15237521 [rel_patent_id] =>[rel_patent_doc_number] =>)