Anna M. Crowell

Array ( [id] => 4742619 [patent_doc_number] => 20080087220 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2008-04-17 [patent_title] => 'Plasma Processing Apparatus and Multi-Chamber System' [patent_app_type] => utility [patent_app_number] => 10/581522 [patent_app_country] => US [patent_app_date] => 2004-12-02 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 7 [patent_figures_cnt] => 7 [patent_no_of_words] => 4614 [patent_no_of_claims] => 7 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0087/20080087220.pdf [firstpage_image] =>[orig_patent_app_number] => 10581522 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 7007729 [patent_doc_number] => 20050061445 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2005-03-24 [patent_title] => 'Plasma processing apparatus' [patent_app_type] => utility [patent_app_number] => 10/984943 [patent_app_country] => US [patent_app_date] => 2004-11-10 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 13 [patent_figures_cnt] => 13 [patent_no_of_words] => 12648 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0061/20050061445.pdf [firstpage_image] =>[orig_patent_app_number] => 10984943 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 819009 [patent_doc_number] => 07406925 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2008-08-05 [patent_title] => 'Plasma processing method and apparatus' [patent_app_type] => utility [patent_app_number] => 10/983670 [patent_app_country] => US [patent_app_date] => 2004-11-09 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 4 [patent_figures_cnt] => 5 [patent_no_of_words] => 6571 [patent_no_of_claims] => 3 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 202 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/07/406/07406925.pdf [firstpage_image] =>[orig_patent_app_number] => 10983670 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 835321 [patent_doc_number] => 07392759 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2008-07-01 [patent_title] => 'Remote plasma apparatus for processing substrate with two types of gases' [patent_app_type] => utility [patent_app_number] => 10/978150 [patent_app_country] => US [patent_app_date] => 2004-10-29 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 16 [patent_figures_cnt] => 16 [patent_no_of_words] => 4567 [patent_no_of_claims] => 17 [patent_no_of_ind_claims] => 16 [patent_words_short_claim] => 234 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/07/392/07392759.pdf [firstpage_image] =>[orig_patent_app_number] => 10978150 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 6939328 [patent_doc_number] => 20050112891 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2005-05-26 [patent_title] => 'Notch-free etching of high aspect SOI structures using a time division multiplex process and RF bias modulation' [patent_app_type] => utility [patent_app_number] => 10/968823 [patent_app_country] => US [patent_app_date] => 2004-10-18 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 10 [patent_figures_cnt] => 10 [patent_no_of_words] => 4691 [patent_no_of_claims] => 23 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0112/20050112891.pdf [firstpage_image] =>[orig_patent_app_number] => 10968823 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 854704 [patent_doc_number] => 07373899 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2008-05-20 [patent_title] => 'Plasma processing apparatus using active matching' [patent_app_type] => utility [patent_app_number] => 10/954074 [patent_app_country] => US [patent_app_date] => 2004-09-30 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 12 [patent_figures_cnt] => 18 [patent_no_of_words] => 6751 [patent_no_of_claims] => 14 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 159 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/07/373/07373899.pdf [firstpage_image] =>[orig_patent_app_number] => 10954074 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 7113598 [patent_doc_number] => 20050066898 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2005-03-31 [patent_title] => 'Voltage non-uniformity compensation method for high frequency plasma reactor for the treatment of rectangular large area substrates' [patent_app_type] => utility [patent_app_number] => 10/935779 [patent_app_country] => US [patent_app_date] => 2004-09-08 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 11 [patent_figures_cnt] => 11 [patent_no_of_words] => 4717 [patent_no_of_claims] => 13 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0066/20050066898.pdf [firstpage_image] =>[orig_patent_app_number] => 10935779 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 359326 [patent_doc_number] => 07485205 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2009-02-03 [patent_title] => 'Method, arrangement and electrode for generating an atmospheric pressure glow plasma (APG)' [patent_app_type] => utility [patent_app_number] => 10/929721 [patent_app_country] => US [patent_app_date] => 2004-08-31 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 4 [patent_figures_cnt] => 4 [patent_no_of_words] => 4147 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 184 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/07/485/07485205.pdf [firstpage_image] =>[orig_patent_app_number] => 10929721 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 5030937 [patent_doc_number] => 20070095476 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2007-05-03 [patent_title] => 'Plasma discharger' [patent_app_type] => utility [patent_app_number] => 10/596149 [patent_app_country] => US [patent_app_date] => 2004-08-31 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 4 [patent_figures_cnt] => 4 [patent_no_of_words] => 2181 [patent_no_of_claims] => 3 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0095/20070095476.pdf [firstpage_image] =>[orig_patent_app_number] => 10596149 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 7058081 [patent_doc_number] => 20050000440 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2005-01-06 [patent_title] => 'Plasma processing apparatus including a plurality of plasma processing units having reduced variation' [patent_app_type] => utility [patent_app_number] => 10/811034 [patent_app_country] => US [patent_app_date] => 2004-08-27 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 33 [patent_figures_cnt] => 33 [patent_no_of_words] => 31651 [patent_no_of_claims] => 19 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0000/20050000440.pdf [firstpage_image] =>[orig_patent_app_number] => 10811034 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 325351 [patent_doc_number] => 07513214 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2009-04-07 [patent_title] => 'Plasma processing method and apparatus' [patent_app_type] => utility [patent_app_number] => 10/920180 [patent_app_country] => US [patent_app_date] => 2004-08-18 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 18 [patent_figures_cnt] => 31 [patent_no_of_words] => 13361 [patent_no_of_claims] => 15 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 162 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/07/513/07513214.pdf [firstpage_image] =>[orig_patent_app_number] => 10920180 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 302497 [patent_doc_number] => 07533629 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2009-05-19 [patent_title] => 'Arrangement, method and electrode for generating a plasma' [patent_app_type] => utility [patent_app_number] => 10/917515 [patent_app_country] => US [patent_app_date] => 2004-08-13 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 4 [patent_figures_cnt] => 8 [patent_no_of_words] => 4499 [patent_no_of_claims] => 23 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 47 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/07/533/07533629.pdf [firstpage_image] =>[orig_patent_app_number] => 10917515 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 5296224 [patent_doc_number] => 20090011150 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2009-01-08 [patent_title] => 'Remote Plasma Atomic Layer Deposition Apparatus and Method Using Dc Bias' [patent_app_type] => utility [patent_app_number] => 11/658961 [patent_app_country] => US [patent_app_date] => 2004-08-04 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 3 [patent_figures_cnt] => 3 [patent_no_of_words] => 2443 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0011/20090011150.pdf [firstpage_image] =>[orig_patent_app_number] => 11658961 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 7145600 [patent_doc_number] => 20050022740 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2005-02-03 [patent_title] => 'Plasma processing system and cleaning method for the same' [patent_app_type] => utility [patent_app_number] => 10/899030 [patent_app_country] => US [patent_app_date] => 2004-07-27 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 16 [patent_figures_cnt] => 16 [patent_no_of_words] => 16099 [patent_no_of_claims] => 29 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0022/20050022740.pdf [firstpage_image] =>[orig_patent_app_number] => 10899030 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 7245955 [patent_doc_number] => 20040238126 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2004-12-02 [patent_title] => 'Plasma processing apparatus with reduced parasitic capacity and loss in RF power' [patent_app_type] => new [patent_app_number] => 10/882232 [patent_app_country] => US [patent_app_date] => 2004-07-02 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 10 [patent_figures_cnt] => 10 [patent_no_of_words] => 6731 [patent_no_of_claims] => 19 [patent_no_of_ind_claims] => 5 [patent_words_short_claim] => 2 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0238/20040238126.pdf [firstpage_image] =>[orig_patent_app_number] => 10882232 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 7398960 [patent_doc_number] => 20040261715 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2004-12-30 [patent_title] => 'Apparatus and method of fabricating display device' [patent_app_type] => new [patent_app_number] => 10/872306 [patent_app_country] => US [patent_app_date] => 2004-06-18 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 11 [patent_figures_cnt] => 11 [patent_no_of_words] => 6026 [patent_no_of_claims] => 42 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 61 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0261/20040261715.pdf [firstpage_image] =>[orig_patent_app_number] => 10872306 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 4456694 [patent_doc_number] => 07878145 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2011-02-01 [patent_title] => 'Monitoring plasma ion implantation systems for fault detection and process control' [patent_app_type] => utility [patent_app_number] => 10/858582 [patent_app_country] => US [patent_app_date] => 2004-06-02 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 6 [patent_figures_cnt] => 7 [patent_no_of_words] => 4930 [patent_no_of_claims] => 17 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 156 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/07/878/07878145.pdf [firstpage_image] =>[orig_patent_app_number] => 10858582 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 5897312 [patent_doc_number] => 20060042545 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2006-03-02 [patent_title] => 'Plasma treatment apparatus, method of producing reaction vessel for plasma generation, and plasma treatment method' [patent_app_type] => utility [patent_app_number] => 10/529861 [patent_app_country] => US [patent_app_date] => 2004-05-26 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 15 [patent_figures_cnt] => 15 [patent_no_of_words] => 14328 [patent_no_of_claims] => 28 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0042/20060042545.pdf [firstpage_image] =>[orig_patent_app_number] => 10529861 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 7290759 [patent_doc_number] => 20040211518 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2004-10-28 [patent_title] => 'Plasma processing apparatus' [patent_app_type] => new [patent_app_number] => 10/851325 [patent_app_country] => US [patent_app_date] => 2004-05-24 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 8 [patent_figures_cnt] => 8 [patent_no_of_words] => 4136 [patent_no_of_claims] => 7 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 3 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0211/20040211518.pdf [firstpage_image] =>[orig_patent_app_number] => 10851325 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 7146014 [patent_doc_number] => 20050022934 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2005-02-03 [patent_title] => 'Plasma etching apparatus' [patent_app_type] => utility [patent_app_number] => 10/823547 [patent_app_country] => US [patent_app_date] => 2004-04-14 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 5 [patent_figures_cnt] => 5 [patent_no_of_words] => 2399 [patent_no_of_claims] => 17 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0022/20050022934.pdf [firstpage_image] =>[orig_patent_app_number] => 10823547 [rel_patent_id] =>[rel_patent_doc_number] =>)