Anna M. Crowell

Array ( [id] => 16347981 [patent_doc_number] => 20200312632 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2020-10-01 [patent_title] => SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, AND RECORDING MEDIUM [patent_app_type] => utility [patent_app_number] => 16/815284 [patent_app_country] => US [patent_app_date] => 2020-03-11 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 9367 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -11 [patent_words_short_claim] => 126 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16815284 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 16624842 [patent_doc_number] => 20210043495 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2021-02-11 [patent_title] => PLASMA PROCESSING DEVICE AND PLASMA PROCESSING METHOD [patent_app_type] => utility [patent_app_number] => 16/810935 [patent_app_country] => US [patent_app_date] => 2020-03-06 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 4686 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -9 [patent_words_short_claim] => 101 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16810935 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 17470079 [patent_doc_number] => 11276562 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2022-03-15 [patent_title] => Plasma processing using multiple radio frequency power feeds for improved uniformity [patent_app_type] => utility [patent_app_number] => 16/807156 [patent_app_country] => US [patent_app_date] => 2020-03-02 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 12 [patent_figures_cnt] => 12 [patent_no_of_words] => 8390 [patent_no_of_claims] => 17 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 225 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16807156 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 16162937 [patent_doc_number] => 20200219701 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2020-07-09 [patent_title] => PLASMA PROCESSING APPARATUS [patent_app_type] => utility [patent_app_number] => 16/737335 [patent_app_country] => US [patent_app_date] => 2020-01-08 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 9116 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 129 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16737335 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 15807243 [patent_doc_number] => 20200126764 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2020-04-23 [patent_title] => PLASMA PROCESSING APPARATUS [patent_app_type] => utility [patent_app_number] => 16/720173 [patent_app_country] => US [patent_app_date] => 2019-12-19 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 7038 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -19 [patent_words_short_claim] => 107 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16720173 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 15807241 [patent_doc_number] => 20200126763 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2020-04-23 [patent_title] => PLASMA PROCESSING APPARATUS [patent_app_type] => utility [patent_app_number] => 16/720087 [patent_app_country] => US [patent_app_date] => 2019-12-19 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 3059 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -10 [patent_words_short_claim] => 156 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16720087 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 17152401 [patent_doc_number] => 11145490 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2021-10-12 [patent_title] => Plasma processing method [patent_app_type] => utility [patent_app_number] => 16/719325 [patent_app_country] => US [patent_app_date] => 2019-12-18 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 10 [patent_figures_cnt] => 11 [patent_no_of_words] => 10549 [patent_no_of_claims] => 11 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 289 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16719325 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 18415969 [patent_doc_number] => 11670515 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2023-06-06 [patent_title] => Capacitively coupled plasma etching apparatus [patent_app_type] => utility [patent_app_number] => 16/716397 [patent_app_country] => US [patent_app_date] => 2019-12-16 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 1 [patent_figures_cnt] => 1 [patent_no_of_words] => 3999 [patent_no_of_claims] => 9 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 215 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16716397 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 16080579 [patent_doc_number] => 20200194276 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2020-06-18 [patent_title] => Capacitively Coupled Plasma Etching Apparatus [patent_app_type] => utility [patent_app_number] => 16/716431 [patent_app_country] => US [patent_app_date] => 2019-12-16 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 4389 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -9 [patent_words_short_claim] => 180 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16716431 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 15717475 [patent_doc_number] => 20200105505 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2020-04-02 [patent_title] => PLASMA PROCESSING APPARATUS AND CLEANING METHOD [patent_app_type] => utility [patent_app_number] => 16/700383 [patent_app_country] => US [patent_app_date] => 2019-12-02 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 7605 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 208 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16700383 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 20389230 [patent_doc_number] => 12488964 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2025-12-02 [patent_title] => Plasma processing apparatus and plasma processing method [patent_app_type] => utility [patent_app_number] => 17/298119 [patent_app_country] => US [patent_app_date] => 2019-11-26 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 7 [patent_figures_cnt] => 7 [patent_no_of_words] => 5813 [patent_no_of_claims] => 11 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 204 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17298119 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 17359778 [patent_doc_number] => 20220020574 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2022-01-20 [patent_title] => PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD [patent_app_type] => utility [patent_app_number] => 17/299626 [patent_app_country] => US [patent_app_date] => 2019-11-26 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 13773 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 105 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17299626 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 16858362 [patent_doc_number] => 20210159107 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2021-05-27 [patent_title] => EDGE UNIFORMITY TUNABILITY ON BIPOLAR ELECTROSTATIC CHUCK [patent_app_type] => utility [patent_app_number] => 16/690562 [patent_app_country] => US [patent_app_date] => 2019-11-21 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 7209 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 87 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16690562 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 16858362 [patent_doc_number] => 20210159107 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2021-05-27 [patent_title] => EDGE UNIFORMITY TUNABILITY ON BIPOLAR ELECTROSTATIC CHUCK [patent_app_type] => utility [patent_app_number] => 16/690562 [patent_app_country] => US [patent_app_date] => 2019-11-21 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 7209 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 87 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16690562 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 17339409 [patent_doc_number] => 20220005740 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2022-01-06 [patent_title] => ATOMIC LAYER ETCH SYSTEMS FOR SELECTIVELY ETCHING WITH HALOGEN-BASED COMPOUNDS [patent_app_type] => utility [patent_app_number] => 17/291488 [patent_app_country] => US [patent_app_date] => 2019-11-07 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 13043 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -38 [patent_words_short_claim] => 2 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17291488 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 17339409 [patent_doc_number] => 20220005740 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2022-01-06 [patent_title] => ATOMIC LAYER ETCH SYSTEMS FOR SELECTIVELY ETCHING WITH HALOGEN-BASED COMPOUNDS [patent_app_type] => utility [patent_app_number] => 17/291488 [patent_app_country] => US [patent_app_date] => 2019-11-07 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 13043 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -38 [patent_words_short_claim] => 2 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17291488 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 19842650 [patent_doc_number] => 12255049 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2025-03-18 [patent_title] => Plasma processing apparatus and plasma processing method [patent_app_type] => utility [patent_app_number] => 16/674506 [patent_app_country] => US [patent_app_date] => 2019-11-05 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 3 [patent_figures_cnt] => 3 [patent_no_of_words] => 7394 [patent_no_of_claims] => 22 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 296 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16674506 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 18205362 [patent_doc_number] => 11587764 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2023-02-21 [patent_title] => Magnetic housing systems [patent_app_type] => utility [patent_app_number] => 16/671330 [patent_app_country] => US [patent_app_date] => 2019-11-01 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 7 [patent_figures_cnt] => 8 [patent_no_of_words] => 7031 [patent_no_of_claims] => 12 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 155 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16671330 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 17615329 [patent_doc_number] => 20220157609 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2022-05-19 [patent_title] => PRECISE ETCHING APPARATUS FOR PREPARING RECESSED-GATE ENHANCEMENT DEVICE AND ETCHING METHOD FOR THE SAME [patent_app_type] => utility [patent_app_number] => 17/598891 [patent_app_country] => US [patent_app_date] => 2019-10-27 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 3437 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 88 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17598891 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 15807253 [patent_doc_number] => 20200126769 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2020-04-23 [patent_title] => PLASMA ASHING OF COATED SUBSTRATES [patent_app_type] => utility [patent_app_number] => 16/662014 [patent_app_country] => US [patent_app_date] => 2019-10-23 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 7588 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 64 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16662014 [rel_patent_id] =>[rel_patent_doc_number] =>)