Benjamin R. Kendall

Array ( [id] => 9383591 [patent_doc_number] => 20140087072 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2014-03-27 [patent_title] => 'VAPOR DEPOSITION SYSTEM AND METHOD' [patent_app_type] => utility [patent_app_number] => 13/653352 [patent_app_country] => US [patent_app_date] => 2012-10-16 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 7 [patent_figures_cnt] => 7 [patent_no_of_words] => 5973 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 4 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 13653352 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 9417991 [patent_doc_number] => 20140102641 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2014-04-17 [patent_title] => 'FIELD ENHANCED INDUCTIVELY COUPLED PLASMA PROCESSING APPARATUS AND PLASMA FORMING METHOD' [patent_app_type] => utility [patent_app_number] => 13/649694 [patent_app_country] => US [patent_app_date] => 2012-10-11 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 6 [patent_figures_cnt] => 6 [patent_no_of_words] => 4187 [patent_no_of_claims] => 13 [patent_no_of_ind_claims] => 4 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 13649694 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 8752794 [patent_doc_number] => 20130087097 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2013-04-11 [patent_title] => 'FILM DEPOSITION APPARATUS AND SUBSTRATE PROCESSING APPARATUS' [patent_app_type] => utility [patent_app_number] => 13/644697 [patent_app_country] => US [patent_app_date] => 2012-10-04 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 22 [patent_figures_cnt] => 22 [patent_no_of_words] => 11196 [patent_no_of_claims] => 14 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 13644697 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 8733247 [patent_doc_number] => 20130078816 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2013-03-28 [patent_title] => 'Substrate Processing Apparatus, Method of Manufacturing Semiconductor Device and Non-Transitory Computer-Readable Recording Medium' [patent_app_type] => utility [patent_app_number] => 13/627085 [patent_app_country] => US [patent_app_date] => 2012-09-26 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 11 [patent_figures_cnt] => 11 [patent_no_of_words] => 10447 [patent_no_of_claims] => 18 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 13627085 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 8705022 [patent_doc_number] => 20130062311 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2013-03-14 [patent_title] => 'INDUCTIVELY COUPLED PLASMA PROCESSING APPARATUS AND METHOD FOR PROCESSING SUBSTRATE WITH THE SAME' [patent_app_type] => utility [patent_app_number] => 13/597785 [patent_app_country] => US [patent_app_date] => 2012-08-29 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 7 [patent_figures_cnt] => 7 [patent_no_of_words] => 7202 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 13597785 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 8776897 [patent_doc_number] => 20130098872 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2013-04-25 [patent_title] => 'SWITCHED ELECTRON BEAM PLASMA SOURCE ARRAY FOR UNIFORM PLASMA PRODUCTION' [patent_app_type] => utility [patent_app_number] => 13/595134 [patent_app_country] => US [patent_app_date] => 2012-08-27 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 11 [patent_figures_cnt] => 11 [patent_no_of_words] => 3728 [patent_no_of_claims] => 15 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 13595134 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 8776577 [patent_doc_number] => 20130098552 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2013-04-25 [patent_title] => 'E-BEAM PLASMA SOURCE WITH PROFILED E-BEAM EXTRACTION GRID FOR UNIFORM PLASMA GENERATION' [patent_app_type] => utility [patent_app_number] => 13/595252 [patent_app_country] => US [patent_app_date] => 2012-08-27 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 8 [patent_figures_cnt] => 8 [patent_no_of_words] => 3152 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 13595252 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 8776578 [patent_doc_number] => 20130098553 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2013-04-25 [patent_title] => 'ELECTRON BEAM PLASMA SOURCE WITH PROFILED CHAMBER WALL FOR UNIFORM PLASMA GENERATION' [patent_app_type] => utility [patent_app_number] => 13/595351 [patent_app_country] => US [patent_app_date] => 2012-08-27 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 10 [patent_figures_cnt] => 10 [patent_no_of_words] => 2833 [patent_no_of_claims] => 18 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 13595351 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 8752981 [patent_doc_number] => 20130087285 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2013-04-11 [patent_title] => 'PLASMA ETCHING APPARATUS' [patent_app_type] => utility [patent_app_number] => 13/592129 [patent_app_country] => US [patent_app_date] => 2012-08-22 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 15 [patent_figures_cnt] => 15 [patent_no_of_words] => 6945 [patent_no_of_claims] => 12 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 13592129 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 9318915 [patent_doc_number] => 20140051253 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2014-02-20 [patent_title] => 'PLASMA BAFFLE RING FOR A PLASMA PROCESSING APPARATUS AND METHOD OF USE' [patent_app_type] => utility [patent_app_number] => 13/584996 [patent_app_country] => US [patent_app_date] => 2012-08-14 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 4 [patent_figures_cnt] => 4 [patent_no_of_words] => 4072 [patent_no_of_claims] => 22 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 13584996 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 8887765 [patent_doc_number] => 20130160949 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2013-06-27 [patent_title] => 'PLASMA PROCESSING APPARATUS' [patent_app_type] => utility [patent_app_number] => 13/570471 [patent_app_country] => US [patent_app_date] => 2012-08-09 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 9 [patent_figures_cnt] => 9 [patent_no_of_words] => 4411 [patent_no_of_claims] => 10 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 13570471 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 9013586 [patent_doc_number] => 20130228550 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2013-09-05 [patent_title] => 'DRY ETCHING APPARATUS AND METHOD' [patent_app_type] => utility [patent_app_number] => 13/571018 [patent_app_country] => US [patent_app_date] => 2012-08-09 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 10 [patent_figures_cnt] => 10 [patent_no_of_words] => 8173 [patent_no_of_claims] => 14 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 13571018 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 8633735 [patent_doc_number] => 20130025538 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2013-01-31 [patent_title] => 'METHODS AND APPARATUS FOR DEPOSITION PROCESSES' [patent_app_type] => utility [patent_app_number] => 13/536575 [patent_app_country] => US [patent_app_date] => 2012-06-28 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 6 [patent_figures_cnt] => 6 [patent_no_of_words] => 4651 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 13536575 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 9262317 [patent_doc_number] => 20130344246 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2013-12-26 [patent_title] => 'Dual-Chamber Reactor for Chemical Vapor Deposition' [patent_app_type] => utility [patent_app_number] => 13/529070 [patent_app_country] => US [patent_app_date] => 2012-06-21 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 8 [patent_figures_cnt] => 8 [patent_no_of_words] => 5184 [patent_no_of_claims] => 22 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 13529070 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 9157711 [patent_doc_number] => 20130305988 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2013-11-21 [patent_title] => 'Inline Capacitive Ignition of Inductively Coupled Plasma Ion Source' [patent_app_type] => utility [patent_app_number] => 13/475006 [patent_app_country] => US [patent_app_date] => 2012-05-18 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 6 [patent_figures_cnt] => 6 [patent_no_of_words] => 4495 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 13475006 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 8489218 [patent_doc_number] => 20120288625 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2012-11-15 [patent_title] => 'GAS SUPPLY APPARATUS, THERMAL TREATMENT APPARATUS, GAS SUPPLY METHOD, AND THERMAL TREATMENT METHOD' [patent_app_type] => utility [patent_app_number] => 13/467184 [patent_app_country] => US [patent_app_date] => 2012-05-09 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 11 [patent_figures_cnt] => 11 [patent_no_of_words] => 8296 [patent_no_of_claims] => 16 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 13467184 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 8480535 [patent_doc_number] => 20120279943 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2012-11-08 [patent_title] => 'PROCESSING CHAMBER WITH COOLED GAS DELIVERY LINE' [patent_app_type] => utility [patent_app_number] => 13/462939 [patent_app_country] => US [patent_app_date] => 2012-05-03 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 7 [patent_figures_cnt] => 7 [patent_no_of_words] => 3548 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 13462939 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 15475045 [patent_doc_number] => 10553406 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2020-02-04 [patent_title] => Plasma generating apparatus and substrate processing apparatus [patent_app_type] => utility [patent_app_number] => 14/004411 [patent_app_country] => US [patent_app_date] => 2012-03-29 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 18 [patent_figures_cnt] => 18 [patent_no_of_words] => 18620 [patent_no_of_claims] => 21 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 318 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 14004411 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 8425796 [patent_doc_number] => 20120247671 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2012-10-04 [patent_title] => 'SUBSTRATE PROCESSING APPARATUS' [patent_app_type] => utility [patent_app_number] => 13/434255 [patent_app_country] => US [patent_app_date] => 2012-03-29 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 21 [patent_figures_cnt] => 21 [patent_no_of_words] => 9787 [patent_no_of_claims] => 8 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 13434255 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 9064127 [patent_doc_number] => 20130255883 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2013-10-03 [patent_title] => 'METHODS AND APPARATUS FOR SUPPLYING PROCESS GAS IN A PLASMA PROCESSING SYSTEM' [patent_app_type] => utility [patent_app_number] => 13/431950 [patent_app_country] => US [patent_app_date] => 2012-03-27 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 7 [patent_figures_cnt] => 7 [patent_no_of_words] => 3916 [patent_no_of_claims] => 22 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 13431950 [rel_patent_id] =>[rel_patent_doc_number] =>)