Benjamin R. Kendall

Array ( [id] => 18812520 [patent_doc_number] => 20230386857 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2023-11-30 [patent_title] => METHOD FOR IMPROVED POLYSILICON ETCH DIMENSIONAL CONTROL [patent_app_type] => utility [patent_app_number] => 18/447810 [patent_app_country] => US [patent_app_date] => 2023-08-10 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 8942 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 123 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18447810 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 19038112 [patent_doc_number] => 20240087927 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2024-03-14 [patent_title] => SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE AND NON-TRANSITORY COMPUTER-READABLE RECORDING MEDIUM [patent_app_type] => utility [patent_app_number] => 18/447533 [patent_app_country] => US [patent_app_date] => 2023-08-10 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 14330 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -12 [patent_words_short_claim] => 137 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18447533 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 18812457 [patent_doc_number] => 20230386794 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2023-11-30 [patent_title] => SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS [patent_app_type] => utility [patent_app_number] => 18/231278 [patent_app_country] => US [patent_app_date] => 2023-08-08 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 8867 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 120 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18231278 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 21030138 [patent_doc_number] => 12753501 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2026-10-06 [patent_title] => Substrate processing apparatus and substrate processing method [patent_app_type] => utility [patent_app_number] => 18/366829 [patent_app_country] => US [patent_app_date] => 2023-08-08 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 20 [patent_figures_cnt] => 20 [patent_no_of_words] => 9509 [patent_no_of_claims] => 16 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 379 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18366829 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 19770484 [patent_doc_number] => 20250051910 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2025-02-13 [patent_title] => CHAMBER COMPONENT FOR IMPROVED CLEANING EFFICIENCY [patent_app_type] => utility [patent_app_number] => 18/366433 [patent_app_country] => US [patent_app_date] => 2023-08-07 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 6818 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -18 [patent_words_short_claim] => 68 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18366433 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 18905945 [patent_doc_number] => 20240021430 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2024-01-18 [patent_title] => BY-SITE-COMENSATED ETCH BACK FOR LOCAL PLANARIZATION/TOPOGRAPHY ADJUSTMENT [patent_app_type] => utility [patent_app_number] => 18/366074 [patent_app_country] => US [patent_app_date] => 2023-08-07 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 6575 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 2 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18366074 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 19007712 [patent_doc_number] => 20240071783 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2024-02-29 [patent_title] => APPARATUS FOR TREATING SUBSTRATE [patent_app_type] => utility [patent_app_number] => 18/364626 [patent_app_country] => US [patent_app_date] => 2023-08-03 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 7990 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 120 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18364626 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 20933229 [patent_doc_number] => 12727439 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2026-09-01 [patent_title] => Substrate processing apparatus [patent_app_type] => utility [patent_app_number] => 18/363993 [patent_app_country] => US [patent_app_date] => 2023-08-02 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 5 [patent_figures_cnt] => 6 [patent_no_of_words] => 1144 [patent_no_of_claims] => 6 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 249 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18363993 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 19004030 [patent_doc_number] => 20240068101 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2024-02-29 [patent_title] => SUBSTRATE PROCESSING APPARATUS [patent_app_type] => utility [patent_app_number] => 18/364010 [patent_app_country] => US [patent_app_date] => 2023-08-02 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 8663 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -6 [patent_words_short_claim] => 117 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18364010 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 19749412 [patent_doc_number] => 20250037977 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2025-01-30 [patent_title] => APPARATUS AND METHOD FOR PLASMA PROCESSING [patent_app_type] => utility [patent_app_number] => 18/359783 [patent_app_country] => US [patent_app_date] => 2023-07-26 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 13305 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 172 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18359783 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 20551556 [patent_doc_number] => 12562354 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2026-02-24 [patent_title] => Plasma processing apparatus and temperature controlling method [patent_app_type] => utility [patent_app_number] => 18/224070 [patent_app_country] => US [patent_app_date] => 2023-07-20 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 15 [patent_figures_cnt] => 15 [patent_no_of_words] => 8449 [patent_no_of_claims] => 12 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 134 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18224070 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 18943364 [patent_doc_number] => 20240038503 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2024-02-01 [patent_title] => FOCUS RING AND METHOD FOR MANUFACTURING THE SAME [patent_app_type] => utility [patent_app_number] => 18/354022 [patent_app_country] => US [patent_app_date] => 2023-07-18 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 9184 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -18 [patent_words_short_claim] => 99 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18354022 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 18903171 [patent_doc_number] => 20240018656 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2024-01-18 [patent_title] => FLOW CONTROL ARRANGEMENTS WITH ENCLOSED FLOW SWITCHES AND ISOLATION VALVES, SEMICONDUCTOR PROCESSING SYSTEMS, AND FLOW CONTROL METHODS [patent_app_type] => utility [patent_app_number] => 18/351227 [patent_app_country] => US [patent_app_date] => 2023-07-12 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 14385 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -20 [patent_words_short_claim] => 86 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18351227 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 18905979 [patent_doc_number] => 20240021464 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2024-01-18 [patent_title] => SEMICONDUCTOR WAFER MANUFACTURING APPARATUS [patent_app_type] => utility [patent_app_number] => 18/350251 [patent_app_country] => US [patent_app_date] => 2023-07-11 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 6423 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -5 [patent_words_short_claim] => 334 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18350251 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 18927003 [patent_doc_number] => 20240030007 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2024-01-25 [patent_title] => FOCUS RING AND PLASMA ETCHING DEVICE INCLUDING SAME [patent_app_type] => utility [patent_app_number] => 18/349557 [patent_app_country] => US [patent_app_date] => 2023-07-10 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 6867 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -14 [patent_words_short_claim] => 189 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18349557 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 21032566 [patent_doc_number] => 12755942 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2026-10-06 [patent_title] => Apparatus for conducting plasma surface treatment, board treatment system having the same, and method of manufacturing semiconductor devices using the same [patent_app_type] => utility [patent_app_number] => 18/217043 [patent_app_country] => US [patent_app_date] => 2023-06-30 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 9 [patent_figures_cnt] => 12 [patent_no_of_words] => 6188 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 238 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18217043 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 20912965 [patent_doc_number] => 12709806 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2026-08-18 [patent_title] => Cold-sprayed tantalum coatings and related methods [patent_app_type] => utility [patent_app_number] => 18/211350 [patent_app_country] => US [patent_app_date] => 2023-06-19 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 13 [patent_figures_cnt] => 21 [patent_no_of_words] => 869 [patent_no_of_claims] => 18 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 140 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18211350 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 18862483 [patent_doc_number] => 20230416919 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2023-12-28 [patent_title] => SUBSTRATE PROCESSING APPARATUS AND TEMPERATURE REGULATION METHOD [patent_app_type] => utility [patent_app_number] => 18/210318 [patent_app_country] => US [patent_app_date] => 2023-06-15 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 9825 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -6 [patent_words_short_claim] => 231 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18210318 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 20538671 [patent_doc_number] => 12555750 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2026-02-17 [patent_title] => Micro-capillary high voltage isolator for gas delivery to vacuum [patent_app_type] => utility [patent_app_number] => 18/206659 [patent_app_country] => US [patent_app_date] => 2023-06-07 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 8 [patent_figures_cnt] => 12 [patent_no_of_words] => 0 [patent_no_of_claims] => 24 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 88 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18206659 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 19527153 [patent_doc_number] => 20240351055 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2024-10-24 [patent_title] => ICP SOURCE GAS DELIVERY HUB AND NOZZLE [patent_app_type] => utility [patent_app_number] => 18/206852 [patent_app_country] => US [patent_app_date] => 2023-06-07 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 9834 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 142 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18206852 [rel_patent_id] =>[rel_patent_doc_number] =>)