Benjamin R. Kendall

Array ( [id] => 19500284 [patent_doc_number] => 20240339302 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2024-10-10 [patent_title] => ELECTRICAL BREAK FOR SUBSTRATE PROCESSING SYSTEMS [patent_app_type] => utility [patent_app_number] => 18/206456 [patent_app_country] => US [patent_app_date] => 2023-06-06 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 12830 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 87 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18206456 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 19500284 [patent_doc_number] => 20240339302 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2024-10-10 [patent_title] => ELECTRICAL BREAK FOR SUBSTRATE PROCESSING SYSTEMS [patent_app_type] => utility [patent_app_number] => 18/206456 [patent_app_country] => US [patent_app_date] => 2023-06-06 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 12830 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 87 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18206456 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 18585896 [patent_doc_number] => 20230268160 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2023-08-24 [patent_title] => ANTENNA UNIT FOR INDUCTIVELY COUPLED PLASMA, INDUCTIVELY COUPLED PLASMA PROCESSING APPARATUS AND METHOD THEREFOR [patent_app_type] => utility [patent_app_number] => 18/142066 [patent_app_country] => US [patent_app_date] => 2023-05-02 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 8100 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -1 [patent_words_short_claim] => 2 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18142066 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 18696286 [patent_doc_number] => 20230326722 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2023-10-12 [patent_title] => GAS-DELIVERY ASSEMBLY AND REACTOR SYSTEM INCLUDING SAME [patent_app_type] => utility [patent_app_number] => 18/129932 [patent_app_country] => US [patent_app_date] => 2023-04-03 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 3667 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 88 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18129932 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 18696286 [patent_doc_number] => 20230326722 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2023-10-12 [patent_title] => GAS-DELIVERY ASSEMBLY AND REACTOR SYSTEM INCLUDING SAME [patent_app_type] => utility [patent_app_number] => 18/129932 [patent_app_country] => US [patent_app_date] => 2023-04-03 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 3667 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 88 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18129932 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 18679769 [patent_doc_number] => 20230317426 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2023-10-05 [patent_title] => FOCUS RING UNIT AND SUBSTRATE PROCESSING APPARATUS [patent_app_type] => utility [patent_app_number] => 18/105274 [patent_app_country] => US [patent_app_date] => 2023-02-03 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 6303 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -18 [patent_words_short_claim] => 35 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18105274 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 18679769 [patent_doc_number] => 20230317426 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2023-10-05 [patent_title] => FOCUS RING UNIT AND SUBSTRATE PROCESSING APPARATUS [patent_app_type] => utility [patent_app_number] => 18/105274 [patent_app_country] => US [patent_app_date] => 2023-02-03 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 6303 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -18 [patent_words_short_claim] => 35 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18105274 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 19332943 [patent_doc_number] => 20240247373 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2024-07-25 [patent_title] => ADJUSTABLE CROSS-FLOW PROCESS CHAMBER LID [patent_app_type] => utility [patent_app_number] => 18/100326 [patent_app_country] => US [patent_app_date] => 2023-01-23 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 4788 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 74 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18100326 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 19332943 [patent_doc_number] => 20240247373 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2024-07-25 [patent_title] => ADJUSTABLE CROSS-FLOW PROCESS CHAMBER LID [patent_app_type] => utility [patent_app_number] => 18/100326 [patent_app_country] => US [patent_app_date] => 2023-01-23 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 4788 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 74 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18100326 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 18848713 [patent_doc_number] => 20230411117 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2023-12-21 [patent_title] => ANTENNA MEMBER AND APPARATUS AND METHOD FOR TREATING SUBSTRATE [patent_app_type] => utility [patent_app_number] => 18/097232 [patent_app_country] => US [patent_app_date] => 2023-01-14 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 5269 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -18 [patent_words_short_claim] => 199 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18097232 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 18488361 [patent_doc_number] => 20230215709 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2023-07-06 [patent_title] => REMOTE PLASMA UNIT AND SUBSTRATE PROCESSING APPARATUS INCLUDING REMOTE PLASMA [patent_app_type] => utility [patent_app_number] => 18/149125 [patent_app_country] => US [patent_app_date] => 2023-01-02 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 2513 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -9 [patent_words_short_claim] => 79 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18149125 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 20229268 [patent_doc_number] => 12417923 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2025-09-16 [patent_title] => Techniques and apparatus for selective shaping of mask features using angled beams [patent_app_type] => utility [patent_app_number] => 18/088828 [patent_app_country] => US [patent_app_date] => 2022-12-27 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 13 [patent_figures_cnt] => 32 [patent_no_of_words] => 3305 [patent_no_of_claims] => 14 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 130 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18088828 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 19130806 [patent_doc_number] => 20240136159 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2024-04-25 [patent_title] => Metallic Shield For Stable Tape-Frame Substrate Processing [patent_app_type] => utility [patent_app_number] => 18/088417 [patent_app_country] => US [patent_app_date] => 2022-12-23 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 2917 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 76 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18088417 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 18540758 [patent_doc_number] => 20230245869 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2023-08-03 [patent_title] => SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE AND NON-TRANSITORY COMPUTER-READABLE RECORDING MEDIUM [patent_app_type] => utility [patent_app_number] => 18/087216 [patent_app_country] => US [patent_app_date] => 2022-12-22 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 11336 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -16 [patent_words_short_claim] => 85 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18087216 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 19146262 [patent_doc_number] => 20240145291 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2024-05-02 [patent_title] => Hermetic Tubular Linear Motor Based Wafer Lift Actuator [patent_app_type] => utility [patent_app_number] => 18/087187 [patent_app_country] => US [patent_app_date] => 2022-12-22 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 2871 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 47 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18087187 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 19146262 [patent_doc_number] => 20240145291 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2024-05-02 [patent_title] => Hermetic Tubular Linear Motor Based Wafer Lift Actuator [patent_app_type] => utility [patent_app_number] => 18/087187 [patent_app_country] => US [patent_app_date] => 2022-12-22 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 2871 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 47 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18087187 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 20175840 [patent_doc_number] => 12394595 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2025-08-19 [patent_title] => Multi-antenna unit for large area inductively coupled plasma processing apparatus [patent_app_type] => utility [patent_app_number] => 17/987259 [patent_app_country] => US [patent_app_date] => 2022-11-15 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 7 [patent_figures_cnt] => 7 [patent_no_of_words] => 0 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 78 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17987259 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 18211169 [patent_doc_number] => 20230057432 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2023-02-23 [patent_title] => CERAMIC COATED QUARTZ LID FOR PROCESSING CHAMBER [patent_app_type] => utility [patent_app_number] => 17/981575 [patent_app_country] => US [patent_app_date] => 2022-11-07 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 5410 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 132 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17981575 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 18198552 [patent_doc_number] => 20230052071 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2023-02-16 [patent_title] => TO AN INDUCTIVELY COUPLED PLASMA SOURCE [patent_app_type] => utility [patent_app_number] => 17/980527 [patent_app_country] => US [patent_app_date] => 2022-11-03 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 4293 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 134 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17980527 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 18360097 [patent_doc_number] => 20230141688 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2023-05-11 [patent_title] => PLASMA SOURCE AND PLASMA PROCESSING APPARATUS [patent_app_type] => utility [patent_app_number] => 17/979291 [patent_app_country] => US [patent_app_date] => 2022-11-02 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 5066 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -10 [patent_words_short_claim] => 103 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17979291 [rel_patent_id] =>[rel_patent_doc_number] =>)