Benjamin R. Kendall

Array ( [id] => 18348596 [patent_doc_number] => 20230136707 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2023-05-04 [patent_title] => APPARATUS FOR TREATING SUBSTRATE AND METHOD FOR TREATING SUBSTRATE [patent_app_type] => utility [patent_app_number] => 17/977440 [patent_app_country] => US [patent_app_date] => 2022-10-31 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 11159 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -15 [patent_words_short_claim] => 2 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17977440 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 18193700 [patent_doc_number] => 20230047219 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2023-02-16 [patent_title] => PLASMA PROCESSING APPARATUS [patent_app_type] => utility [patent_app_number] => 17/975012 [patent_app_country] => US [patent_app_date] => 2022-10-27 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 5456 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 134 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17975012 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 18472960 [patent_doc_number] => 20230207248 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2023-06-29 [patent_title] => SUBSTRATE TREATING APPARATUS AND SUBSTRATE TREATING METHOD [patent_app_type] => utility [patent_app_number] => 17/973985 [patent_app_country] => US [patent_app_date] => 2022-10-26 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 8896 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -12 [patent_words_short_claim] => 2 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17973985 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 18346916 [patent_doc_number] => 20230135026 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2023-05-04 [patent_title] => SUBSTRATE PROCESSING APPARATUS [patent_app_type] => utility [patent_app_number] => 17/971613 [patent_app_country] => US [patent_app_date] => 2022-10-23 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 6941 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -18 [patent_words_short_claim] => 116 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17971613 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 18346916 [patent_doc_number] => 20230135026 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2023-05-04 [patent_title] => SUBSTRATE PROCESSING APPARATUS [patent_app_type] => utility [patent_app_number] => 17/971613 [patent_app_country] => US [patent_app_date] => 2022-10-23 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 6941 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -18 [patent_words_short_claim] => 116 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17971613 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 19098261 [patent_doc_number] => 20240117489 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2024-04-11 [patent_title] => HALOGEN-RESISTANT THERMAL BARRIER COATING FOR PROCESSING CHAMBERS [patent_app_type] => utility [patent_app_number] => 17/961553 [patent_app_country] => US [patent_app_date] => 2022-10-06 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 7406 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 44 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17961553 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 18653023 [patent_doc_number] => 20230298863 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2023-09-21 [patent_title] => SEMICONDUCTOR MANUFACTURING APPARATUS AND SEMICONDUCTOR DEVICE MANUFACTURING METHOD [patent_app_type] => utility [patent_app_number] => 17/931230 [patent_app_country] => US [patent_app_date] => 2022-09-12 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 4867 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -15 [patent_words_short_claim] => 89 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17931230 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 18229107 [patent_doc_number] => 20230068101 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2023-03-02 [patent_title] => SUBSTRATE PROCESSING APPARATUS INCLUDING IMPEDANCE ADJUSTER [patent_app_type] => utility [patent_app_number] => 17/897461 [patent_app_country] => US [patent_app_date] => 2022-08-29 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 2519 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -9 [patent_words_short_claim] => 66 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17897461 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 18040003 [patent_doc_number] => 20220384220 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2022-12-01 [patent_title] => SEMICONDUCTOR PROCESSING STATION AND SEMICONDUCTOR PROCESS USING THE SAME [patent_app_type] => utility [patent_app_number] => 17/885488 [patent_app_country] => US [patent_app_date] => 2022-08-10 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 4908 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 145 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17885488 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 18473004 [patent_doc_number] => 20230207292 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2023-06-29 [patent_title] => PLASMA PROCESSING APPARATUS AND SEMICONDUCTOR DEVICE MANUFACTURING METHOD [patent_app_type] => utility [patent_app_number] => 17/817338 [patent_app_country] => US [patent_app_date] => 2022-08-03 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 8405 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 2 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17817338 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 18473004 [patent_doc_number] => 20230207292 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2023-06-29 [patent_title] => PLASMA PROCESSING APPARATUS AND SEMICONDUCTOR DEVICE MANUFACTURING METHOD [patent_app_type] => utility [patent_app_number] => 17/817338 [patent_app_country] => US [patent_app_date] => 2022-08-03 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 8405 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 2 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17817338 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 19071006 [patent_doc_number] => 20240105432 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2024-03-28 [patent_title] => PROFILE TWISTING CONTROL IN DIELECTRIC ETCH [patent_app_type] => utility [patent_app_number] => 18/013493 [patent_app_country] => US [patent_app_date] => 2022-06-16 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 10719 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -18 [patent_words_short_claim] => 149 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18013493 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 18080959 [patent_doc_number] => 20220406571 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2022-12-22 [patent_title] => SUBSTRATE TREATING APPARATUS AND SUBSTRATE TREATING METHOD [patent_app_type] => utility [patent_app_number] => 17/842222 [patent_app_country] => US [patent_app_date] => 2022-06-16 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 7253 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -9 [patent_words_short_claim] => 2 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17842222 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 17886355 [patent_doc_number] => 20220301833 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2022-09-22 [patent_title] => SUBSTRATE SUPPORT AND PLASMA PROCESSING APPARATUS [patent_app_type] => utility [patent_app_number] => 17/834758 [patent_app_country] => US [patent_app_date] => 2022-06-07 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 8509 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -16 [patent_words_short_claim] => 98 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17834758 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 18816471 [patent_doc_number] => 20230390811 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2023-12-07 [patent_title] => THROTTLE VALVE AND FORELINE CLEANING USING A MICROWAVE SOURCE [patent_app_type] => utility [patent_app_number] => 17/833408 [patent_app_country] => US [patent_app_date] => 2022-06-06 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 5912 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 49 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17833408 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 18816471 [patent_doc_number] => 20230390811 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2023-12-07 [patent_title] => THROTTLE VALVE AND FORELINE CLEANING USING A MICROWAVE SOURCE [patent_app_type] => utility [patent_app_number] => 17/833408 [patent_app_country] => US [patent_app_date] => 2022-06-06 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 5912 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 49 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17833408 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 18024231 [patent_doc_number] => 20220375730 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2022-11-24 [patent_title] => PLASMA PROCESSING APPARATUS [patent_app_type] => utility [patent_app_number] => 17/747861 [patent_app_country] => US [patent_app_date] => 2022-05-18 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 5830 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -16 [patent_words_short_claim] => 63 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17747861 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 18774191 [patent_doc_number] => 20230369022 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2023-11-16 [patent_title] => RECOMBINATION CHANNELS FOR ANGLE CONTROL OF NEUTRAL REACTIVE SPECIES [patent_app_type] => utility [patent_app_number] => 17/744000 [patent_app_country] => US [patent_app_date] => 2022-05-13 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 4922 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 68 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17744000 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 17810768 [patent_doc_number] => 20220262603 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2022-08-18 [patent_title] => PLASMA PROCESSING APPARATUS AND METHOD THEREFOR [patent_app_type] => utility [patent_app_number] => 17/737224 [patent_app_country] => US [patent_app_date] => 2022-05-05 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 5443 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -11 [patent_words_short_claim] => 2 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17737224 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 20416775 [patent_doc_number] => 12500067 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2025-12-16 [patent_title] => Apparatus for edge control during plasma processing [patent_app_type] => utility [patent_app_number] => 17/661848 [patent_app_country] => US [patent_app_date] => 2022-05-03 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 8 [patent_figures_cnt] => 11 [patent_no_of_words] => 4677 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 98 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17661848 [rel_patent_id] =>[rel_patent_doc_number] =>)