| Application number | Title of the application | Filing Date | Status |
|---|
Array
(
[id] => 12108943
[patent_doc_number] => 09865431
[patent_country] => US
[patent_kind] => B2
[patent_issue_date] => 2018-01-09
[patent_title] => 'Apparatus and method for tuning a plasma profile using a tuning electrode in a processing chamber'
[patent_app_type] => utility
[patent_app_number] => 14/771169
[patent_app_country] => US
[patent_app_date] => 2014-02-12
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 4
[patent_figures_cnt] => 9
[patent_no_of_words] => 2549
[patent_no_of_claims] => 10
[patent_no_of_ind_claims] => 2
[patent_words_short_claim] => 136
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => patent
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 14771169
[rel_patent_id] =>[rel_patent_doc_number] =>) 14/771169 | Apparatus and method for tuning a plasma profile using a tuning electrode in a processing chamber | Feb 11, 2014 | Issued |
Array
(
[id] => 10671349
[patent_doc_number] => 20160017494
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2016-01-21
[patent_title] => 'APPARATUS AND METHOD FOR TUNING A PLASMA PROFILE USING A TUNING RING IN A PROCESSING CHAMBER'
[patent_app_type] => utility
[patent_app_number] => 14/772228
[patent_app_country] => US
[patent_app_date] => 2014-02-12
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 5
[patent_figures_cnt] => 5
[patent_no_of_words] => 2962
[patent_no_of_claims] => 21
[patent_no_of_ind_claims] => 4
[patent_words_short_claim] => 0
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => publication
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 14772228
[rel_patent_id] =>[rel_patent_doc_number] =>) 14/772228 | APPARATUS AND METHOD FOR TUNING A PLASMA PROFILE USING A TUNING RING IN A PROCESSING CHAMBER | Feb 11, 2014 | Abandoned |
Array
(
[id] => 9653169
[patent_doc_number] => 20140224174
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2014-08-14
[patent_title] => 'LINER ASSEMBLIES FOR SUBSTRATE PROCESSING SYSTEMS'
[patent_app_type] => utility
[patent_app_number] => 14/176263
[patent_app_country] => US
[patent_app_date] => 2014-02-10
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 11
[patent_figures_cnt] => 11
[patent_no_of_words] => 4528
[patent_no_of_claims] => 21
[patent_no_of_ind_claims] => 3
[patent_words_short_claim] => 0
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => publication
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 14176263
[rel_patent_id] =>[rel_patent_doc_number] =>) 14/176263 | Liner assemblies for substrate processing systems | Feb 9, 2014 | Issued |
Array
(
[id] => 9513754
[patent_doc_number] => 20140150246
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2014-06-05
[patent_title] => 'Apparatus and Method for Carrying Substrates'
[patent_app_type] => utility
[patent_app_number] => 14/172405
[patent_app_country] => US
[patent_app_date] => 2014-02-04
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 7
[patent_figures_cnt] => 7
[patent_no_of_words] => 4695
[patent_no_of_claims] => 31
[patent_no_of_ind_claims] => 15
[patent_words_short_claim] => 0
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => publication
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 14172405
[rel_patent_id] =>[rel_patent_doc_number] =>) 14/172405 | Apparatus and Method for Carrying Substrates | Feb 3, 2014 | Abandoned |
Array
(
[id] => 9631135
[patent_doc_number] => 20140209243
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2014-07-31
[patent_title] => 'Plasma Equipment and Method of Dry-Cleaning the Same'
[patent_app_type] => utility
[patent_app_number] => 14/163208
[patent_app_country] => US
[patent_app_date] => 2014-01-24
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 8
[patent_figures_cnt] => 8
[patent_no_of_words] => 5459
[patent_no_of_claims] => 18
[patent_no_of_ind_claims] => 3
[patent_words_short_claim] => 0
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => publication
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 14163208
[rel_patent_id] =>[rel_patent_doc_number] =>) 14/163208 | Plasma Equipment and Method of Dry-Cleaning the Same | Jan 23, 2014 | Abandoned |
Array
(
[id] => 15580463
[patent_doc_number] => 10580624
[patent_country] => US
[patent_kind] => B2
[patent_issue_date] => 2020-03-03
[patent_title] => Plasma source and methods for depositing thin film coatings using plasma enhanced chemical vapor deposition
[patent_app_type] => utility
[patent_app_number] => 14/148606
[patent_app_country] => US
[patent_app_date] => 2014-01-06
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 11
[patent_figures_cnt] => 11
[patent_no_of_words] => 10848
[patent_no_of_claims] => 87
[patent_no_of_ind_claims] => 4
[patent_words_short_claim] => 324
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => patent
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 14148606
[rel_patent_id] =>[rel_patent_doc_number] =>) 14/148606 | Plasma source and methods for depositing thin film coatings using plasma enhanced chemical vapor deposition | Jan 5, 2014 | Issued |
Array
(
[id] => 15580463
[patent_doc_number] => 10580624
[patent_country] => US
[patent_kind] => B2
[patent_issue_date] => 2020-03-03
[patent_title] => Plasma source and methods for depositing thin film coatings using plasma enhanced chemical vapor deposition
[patent_app_type] => utility
[patent_app_number] => 14/148606
[patent_app_country] => US
[patent_app_date] => 2014-01-06
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 11
[patent_figures_cnt] => 11
[patent_no_of_words] => 10848
[patent_no_of_claims] => 87
[patent_no_of_ind_claims] => 4
[patent_words_short_claim] => 324
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => patent
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 14148606
[rel_patent_id] =>[rel_patent_doc_number] =>) 14/148606 | Plasma source and methods for depositing thin film coatings using plasma enhanced chemical vapor deposition | Jan 5, 2014 | Issued |
Array
(
[id] => 15580463
[patent_doc_number] => 10580624
[patent_country] => US
[patent_kind] => B2
[patent_issue_date] => 2020-03-03
[patent_title] => Plasma source and methods for depositing thin film coatings using plasma enhanced chemical vapor deposition
[patent_app_type] => utility
[patent_app_number] => 14/148606
[patent_app_country] => US
[patent_app_date] => 2014-01-06
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 11
[patent_figures_cnt] => 11
[patent_no_of_words] => 10848
[patent_no_of_claims] => 87
[patent_no_of_ind_claims] => 4
[patent_words_short_claim] => 324
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => patent
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 14148606
[rel_patent_id] =>[rel_patent_doc_number] =>) 14/148606 | Plasma source and methods for depositing thin film coatings using plasma enhanced chemical vapor deposition | Jan 5, 2014 | Issued |
Array
(
[id] => 15580463
[patent_doc_number] => 10580624
[patent_country] => US
[patent_kind] => B2
[patent_issue_date] => 2020-03-03
[patent_title] => Plasma source and methods for depositing thin film coatings using plasma enhanced chemical vapor deposition
[patent_app_type] => utility
[patent_app_number] => 14/148606
[patent_app_country] => US
[patent_app_date] => 2014-01-06
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 11
[patent_figures_cnt] => 11
[patent_no_of_words] => 10848
[patent_no_of_claims] => 87
[patent_no_of_ind_claims] => 4
[patent_words_short_claim] => 324
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => patent
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 14148606
[rel_patent_id] =>[rel_patent_doc_number] =>) 14/148606 | Plasma source and methods for depositing thin film coatings using plasma enhanced chemical vapor deposition | Jan 5, 2014 | Issued |
Array
(
[id] => 15580463
[patent_doc_number] => 10580624
[patent_country] => US
[patent_kind] => B2
[patent_issue_date] => 2020-03-03
[patent_title] => Plasma source and methods for depositing thin film coatings using plasma enhanced chemical vapor deposition
[patent_app_type] => utility
[patent_app_number] => 14/148606
[patent_app_country] => US
[patent_app_date] => 2014-01-06
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 11
[patent_figures_cnt] => 11
[patent_no_of_words] => 10848
[patent_no_of_claims] => 87
[patent_no_of_ind_claims] => 4
[patent_words_short_claim] => 324
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => patent
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 14148606
[rel_patent_id] =>[rel_patent_doc_number] =>) 14/148606 | Plasma source and methods for depositing thin film coatings using plasma enhanced chemical vapor deposition | Jan 5, 2014 | Issued |
Array
(
[id] => 15580463
[patent_doc_number] => 10580624
[patent_country] => US
[patent_kind] => B2
[patent_issue_date] => 2020-03-03
[patent_title] => Plasma source and methods for depositing thin film coatings using plasma enhanced chemical vapor deposition
[patent_app_type] => utility
[patent_app_number] => 14/148606
[patent_app_country] => US
[patent_app_date] => 2014-01-06
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 11
[patent_figures_cnt] => 11
[patent_no_of_words] => 10848
[patent_no_of_claims] => 87
[patent_no_of_ind_claims] => 4
[patent_words_short_claim] => 324
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => patent
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 14148606
[rel_patent_id] =>[rel_patent_doc_number] =>) 14/148606 | Plasma source and methods for depositing thin film coatings using plasma enhanced chemical vapor deposition | Jan 5, 2014 | Issued |
Array
(
[id] => 15580463
[patent_doc_number] => 10580624
[patent_country] => US
[patent_kind] => B2
[patent_issue_date] => 2020-03-03
[patent_title] => Plasma source and methods for depositing thin film coatings using plasma enhanced chemical vapor deposition
[patent_app_type] => utility
[patent_app_number] => 14/148606
[patent_app_country] => US
[patent_app_date] => 2014-01-06
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 11
[patent_figures_cnt] => 11
[patent_no_of_words] => 10848
[patent_no_of_claims] => 87
[patent_no_of_ind_claims] => 4
[patent_words_short_claim] => 324
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => patent
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 14148606
[rel_patent_id] =>[rel_patent_doc_number] =>) 14/148606 | Plasma source and methods for depositing thin film coatings using plasma enhanced chemical vapor deposition | Jan 5, 2014 | Issued |
Array
(
[id] => 15580463
[patent_doc_number] => 10580624
[patent_country] => US
[patent_kind] => B2
[patent_issue_date] => 2020-03-03
[patent_title] => Plasma source and methods for depositing thin film coatings using plasma enhanced chemical vapor deposition
[patent_app_type] => utility
[patent_app_number] => 14/148606
[patent_app_country] => US
[patent_app_date] => 2014-01-06
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 11
[patent_figures_cnt] => 11
[patent_no_of_words] => 10848
[patent_no_of_claims] => 87
[patent_no_of_ind_claims] => 4
[patent_words_short_claim] => 324
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => patent
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 14148606
[rel_patent_id] =>[rel_patent_doc_number] =>) 14/148606 | Plasma source and methods for depositing thin film coatings using plasma enhanced chemical vapor deposition | Jan 5, 2014 | Issued |
Array
(
[id] => 15580463
[patent_doc_number] => 10580624
[patent_country] => US
[patent_kind] => B2
[patent_issue_date] => 2020-03-03
[patent_title] => Plasma source and methods for depositing thin film coatings using plasma enhanced chemical vapor deposition
[patent_app_type] => utility
[patent_app_number] => 14/148606
[patent_app_country] => US
[patent_app_date] => 2014-01-06
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 11
[patent_figures_cnt] => 11
[patent_no_of_words] => 10848
[patent_no_of_claims] => 87
[patent_no_of_ind_claims] => 4
[patent_words_short_claim] => 324
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => patent
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 14148606
[rel_patent_id] =>[rel_patent_doc_number] =>) 14/148606 | Plasma source and methods for depositing thin film coatings using plasma enhanced chemical vapor deposition | Jan 5, 2014 | Issued |
Array
(
[id] => 15580463
[patent_doc_number] => 10580624
[patent_country] => US
[patent_kind] => B2
[patent_issue_date] => 2020-03-03
[patent_title] => Plasma source and methods for depositing thin film coatings using plasma enhanced chemical vapor deposition
[patent_app_type] => utility
[patent_app_number] => 14/148606
[patent_app_country] => US
[patent_app_date] => 2014-01-06
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 11
[patent_figures_cnt] => 11
[patent_no_of_words] => 10848
[patent_no_of_claims] => 87
[patent_no_of_ind_claims] => 4
[patent_words_short_claim] => 324
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => patent
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 14148606
[rel_patent_id] =>[rel_patent_doc_number] =>) 14/148606 | Plasma source and methods for depositing thin film coatings using plasma enhanced chemical vapor deposition | Jan 5, 2014 | Issued |
Array
(
[id] => 15580463
[patent_doc_number] => 10580624
[patent_country] => US
[patent_kind] => B2
[patent_issue_date] => 2020-03-03
[patent_title] => Plasma source and methods for depositing thin film coatings using plasma enhanced chemical vapor deposition
[patent_app_type] => utility
[patent_app_number] => 14/148606
[patent_app_country] => US
[patent_app_date] => 2014-01-06
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 11
[patent_figures_cnt] => 11
[patent_no_of_words] => 10848
[patent_no_of_claims] => 87
[patent_no_of_ind_claims] => 4
[patent_words_short_claim] => 324
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => patent
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 14148606
[rel_patent_id] =>[rel_patent_doc_number] =>) 14/148606 | Plasma source and methods for depositing thin film coatings using plasma enhanced chemical vapor deposition | Jan 5, 2014 | Issued |
Array
(
[id] => 15580463
[patent_doc_number] => 10580624
[patent_country] => US
[patent_kind] => B2
[patent_issue_date] => 2020-03-03
[patent_title] => Plasma source and methods for depositing thin film coatings using plasma enhanced chemical vapor deposition
[patent_app_type] => utility
[patent_app_number] => 14/148606
[patent_app_country] => US
[patent_app_date] => 2014-01-06
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 11
[patent_figures_cnt] => 11
[patent_no_of_words] => 10848
[patent_no_of_claims] => 87
[patent_no_of_ind_claims] => 4
[patent_words_short_claim] => 324
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => patent
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 14148606
[rel_patent_id] =>[rel_patent_doc_number] =>) 14/148606 | Plasma source and methods for depositing thin film coatings using plasma enhanced chemical vapor deposition | Jan 5, 2014 | Issued |
Array
(
[id] => 15580463
[patent_doc_number] => 10580624
[patent_country] => US
[patent_kind] => B2
[patent_issue_date] => 2020-03-03
[patent_title] => Plasma source and methods for depositing thin film coatings using plasma enhanced chemical vapor deposition
[patent_app_type] => utility
[patent_app_number] => 14/148606
[patent_app_country] => US
[patent_app_date] => 2014-01-06
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 11
[patent_figures_cnt] => 11
[patent_no_of_words] => 10848
[patent_no_of_claims] => 87
[patent_no_of_ind_claims] => 4
[patent_words_short_claim] => 324
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => patent
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 14148606
[rel_patent_id] =>[rel_patent_doc_number] =>) 14/148606 | Plasma source and methods for depositing thin film coatings using plasma enhanced chemical vapor deposition | Jan 5, 2014 | Issued |
Array
(
[id] => 15580463
[patent_doc_number] => 10580624
[patent_country] => US
[patent_kind] => B2
[patent_issue_date] => 2020-03-03
[patent_title] => Plasma source and methods for depositing thin film coatings using plasma enhanced chemical vapor deposition
[patent_app_type] => utility
[patent_app_number] => 14/148606
[patent_app_country] => US
[patent_app_date] => 2014-01-06
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 11
[patent_figures_cnt] => 11
[patent_no_of_words] => 10848
[patent_no_of_claims] => 87
[patent_no_of_ind_claims] => 4
[patent_words_short_claim] => 324
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => patent
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 14148606
[rel_patent_id] =>[rel_patent_doc_number] =>) 14/148606 | Plasma source and methods for depositing thin film coatings using plasma enhanced chemical vapor deposition | Jan 5, 2014 | Issued |
Array
(
[id] => 15580463
[patent_doc_number] => 10580624
[patent_country] => US
[patent_kind] => B2
[patent_issue_date] => 2020-03-03
[patent_title] => Plasma source and methods for depositing thin film coatings using plasma enhanced chemical vapor deposition
[patent_app_type] => utility
[patent_app_number] => 14/148606
[patent_app_country] => US
[patent_app_date] => 2014-01-06
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 11
[patent_figures_cnt] => 11
[patent_no_of_words] => 10848
[patent_no_of_claims] => 87
[patent_no_of_ind_claims] => 4
[patent_words_short_claim] => 324
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => patent
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 14148606
[rel_patent_id] =>[rel_patent_doc_number] =>) 14/148606 | Plasma source and methods for depositing thin film coatings using plasma enhanced chemical vapor deposition | Jan 5, 2014 | Issued |