Search

Charlee Bennett

Examiner (ID: 18642)

Most Active Art Unit
1718
Art Unit(s)
1718, 1714
Total Applications
642
Issued Applications
298
Pending Applications
107
Abandoned Applications
246

Applications

Application numberTitle of the applicationFiling DateStatus
Array ( [id] => 19943564 [patent_doc_number] => 12315700 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2025-05-27 [patent_title] => Plasma processing apparatus and ceiling wall [patent_app_type] => utility [patent_app_number] => 17/766379 [patent_app_country] => US [patent_app_date] => 2020-09-25 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 11 [patent_figures_cnt] => 12 [patent_no_of_words] => 3313 [patent_no_of_claims] => 15 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 125 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17766379 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/766379
Plasma processing apparatus and ceiling wall Sep 24, 2020 Issued
Array ( [id] => 18562891 [patent_doc_number] => 11728143 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2023-08-15 [patent_title] => Process kit with adjustable tuning ring for edge uniformity control [patent_app_type] => utility [patent_app_number] => 17/033177 [patent_app_country] => US [patent_app_date] => 2020-09-25 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 16 [patent_figures_cnt] => 25 [patent_no_of_words] => 10226 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 224 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17033177 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/033177
Process kit with adjustable tuning ring for edge uniformity control Sep 24, 2020 Issued
Array ( [id] => 18507530 [patent_doc_number] => 11705357 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2023-07-18 [patent_title] => Substrate processing system including electrostatic chuck and method for manufacturing electrostatic chuck [patent_app_type] => utility [patent_app_number] => 17/032099 [patent_app_country] => US [patent_app_date] => 2020-09-25 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 7 [patent_figures_cnt] => 7 [patent_no_of_words] => 6094 [patent_no_of_claims] => 18 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 81 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17032099 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/032099
Substrate processing system including electrostatic chuck and method for manufacturing electrostatic chuck Sep 24, 2020 Issued
Array ( [id] => 18360767 [patent_doc_number] => 20230142358 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2023-05-11 [patent_title] => STRUCTURAL BODY AND HEATING APPARATUS [patent_app_type] => utility [patent_app_number] => 17/768814 [patent_app_country] => US [patent_app_date] => 2020-09-25 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 7602 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -9 [patent_words_short_claim] => 84 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17768814 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/768814
Structural body and heating apparatus Sep 24, 2020 Issued
Array ( [id] => 16557606 [patent_doc_number] => 20210002754 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2021-01-07 [patent_title] => COMPONENT FOR USE IN PLASMA PROCESSING APPARATUS, PLASMA PROCESSING APPARATUS, AND METHOD FOR MANUFACTURING THE COMPONENT [patent_app_type] => utility [patent_app_number] => 17/021643 [patent_app_country] => US [patent_app_date] => 2020-09-15 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 6227 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -10 [patent_words_short_claim] => 210 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17021643 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/021643
Component for use in plasma processing apparatus, plasma processing apparatus, and method for manufacturing the component Sep 14, 2020 Issued
Array ( [id] => 17115499 [patent_doc_number] => 20210296096 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2021-09-23 [patent_title] => EDGE RING AND PLASMA PROCESSING APPARATUS [patent_app_type] => utility [patent_app_number] => 17/017487 [patent_app_country] => US [patent_app_date] => 2020-09-10 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 3732 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -18 [patent_words_short_claim] => 87 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17017487 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/017487
Edge ring and plasma processing apparatus Sep 9, 2020 Issued
Array ( [id] => 16673572 [patent_doc_number] => 20210062335 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2021-03-04 [patent_title] => APPARATUS FOR MANUFACTURING SEMICONDUCTOR DEVICE [patent_app_type] => utility [patent_app_number] => 17/010541 [patent_app_country] => US [patent_app_date] => 2020-09-02 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 8157 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 99 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17010541 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/010541
Apparatus for manufacturing semiconductor device Sep 1, 2020 Issued
Array ( [id] => 17431685 [patent_doc_number] => 20220059394 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2022-02-24 [patent_title] => METHOD AND DEVICE TO REDUCE EPITAXIAL DEFECTS DUE TO CONTACT STRESS UPON A SEMICONDCUTOR WAFER [patent_app_type] => utility [patent_app_number] => 17/000701 [patent_app_country] => US [patent_app_date] => 2020-08-24 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 5880 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 84 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17000701 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/000701
Method and device to reduce epitaxial defects due to contact stress upon a semicondcutor wafer Aug 23, 2020 Issued
Array ( [id] => 18205417 [patent_doc_number] => 11587821 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2023-02-21 [patent_title] => Substrate lift mechanism and reactor including same [patent_app_type] => utility [patent_app_number] => 16/944271 [patent_app_country] => US [patent_app_date] => 2020-07-31 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 5 [patent_figures_cnt] => 5 [patent_no_of_words] => 4028 [patent_no_of_claims] => 8 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 228 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16944271 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/944271
Substrate lift mechanism and reactor including same Jul 30, 2020 Issued
Array ( [id] => 18331773 [patent_doc_number] => 11637027 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2023-04-25 [patent_title] => Thermal reflector device for semiconductor fabrication tool [patent_app_type] => utility [patent_app_number] => 16/939683 [patent_app_country] => US [patent_app_date] => 2020-07-27 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 10 [patent_figures_cnt] => 12 [patent_no_of_words] => 6808 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 137 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16939683 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/939683
Thermal reflector device for semiconductor fabrication tool Jul 26, 2020 Issued
Array ( [id] => 16617191 [patent_doc_number] => 20210035844 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2021-02-04 [patent_title] => SHEATH AND TEMPERATURE CONTROL OF PROCESS KIT [patent_app_type] => utility [patent_app_number] => 16/939160 [patent_app_country] => US [patent_app_date] => 2020-07-27 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 3773 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 56 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16939160 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/939160
Sheath and temperature control of process kit Jul 26, 2020 Issued
Array ( [id] => 20331234 [patent_doc_number] => 12461507 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2025-11-04 [patent_title] => Substrate processing apparatus, substrate processing method, semiconductor device manufacturing method, and control program [patent_app_type] => utility [patent_app_number] => 16/921652 [patent_app_country] => US [patent_app_date] => 2020-07-06 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 14 [patent_figures_cnt] => 14 [patent_no_of_words] => 9644 [patent_no_of_claims] => 18 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 276 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16921652 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/921652
Substrate processing apparatus, substrate processing method, semiconductor device manufacturing method, and control program Jul 5, 2020 Issued
Array ( [id] => 18999050 [patent_doc_number] => 11915905 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2024-02-27 [patent_title] => Support unit and substrate treating apparatus including the same [patent_app_type] => utility [patent_app_number] => 16/918299 [patent_app_country] => US [patent_app_date] => 2020-07-01 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 8 [patent_figures_cnt] => 8 [patent_no_of_words] => 6616 [patent_no_of_claims] => 15 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 220 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16918299 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/918299
Support unit and substrate treating apparatus including the same Jun 30, 2020 Issued
Array ( [id] => 20701749 [patent_doc_number] => 12624451 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2026-05-12 [patent_title] => Atomic layer deposition apparatus [patent_app_type] => utility [patent_app_number] => 17/622274 [patent_app_country] => US [patent_app_date] => 2020-06-26 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 2 [patent_figures_cnt] => 4 [patent_no_of_words] => 0 [patent_no_of_claims] => 16 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 435 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17622274 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/622274
Atomic layer deposition apparatus Jun 25, 2020 Issued
Array ( [id] => 16361487 [patent_doc_number] => 20200318238 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2020-10-08 [patent_title] => DEPOSITION SYSTEM WITH VACUUM PRE-LOADED DEPOSITION HEAD [patent_app_type] => utility [patent_app_number] => 16/903505 [patent_app_country] => US [patent_app_date] => 2020-06-17 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 26975 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -10 [patent_words_short_claim] => 357 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16903505 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/903505
Deposition system with vacuum pre-loaded deposition head Jun 16, 2020 Issued
Array ( [id] => 20041418 [patent_doc_number] => 20250179640 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2025-06-05 [patent_title] => HEATING APPARATUS, CVD EQUIPMENT INCLUDING THE HEATING APPARATUS [patent_app_type] => utility [patent_app_number] => 17/609087 [patent_app_country] => US [patent_app_date] => 2020-06-05 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 4841 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -25 [patent_words_short_claim] => 2 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17609087 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/609087
HEATING APPARATUS, CVD EQUIPMENT INCLUDING THE HEATING APPARATUS Jun 4, 2020 Pending
Array ( [id] => 17752653 [patent_doc_number] => 20220230858 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2022-07-21 [patent_title] => WINDOW FOR PLASMA OES DIAGNOSIS, AND PLASMA APPARATUS USING SAME [patent_app_type] => utility [patent_app_number] => 17/595928 [patent_app_country] => US [patent_app_date] => 2020-05-28 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 3881 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -8 [patent_words_short_claim] => 179 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17595928 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/595928
Window for plasma OES diagnosis, and plasma apparatus using same May 27, 2020 Issued
Array ( [id] => 16286119 [patent_doc_number] => 20200279721 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2020-09-03 [patent_title] => SEMICONDUCTOR REACTION CHAMBER SHOWERHEAD [patent_app_type] => utility [patent_app_number] => 16/878443 [patent_app_country] => US [patent_app_date] => 2020-05-19 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 5750 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -5 [patent_words_short_claim] => 107 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16878443 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/878443
Semiconductor reaction chamber showerhead May 18, 2020 Issued
Array ( [id] => 17673206 [patent_doc_number] => 20220186373 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2022-06-16 [patent_title] => SUBSTRATE PROCESSING DEVICE [patent_app_type] => utility [patent_app_number] => 17/436651 [patent_app_country] => US [patent_app_date] => 2020-05-19 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 9106 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -15 [patent_words_short_claim] => 200 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17436651 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/436651
SUBSTRATE PROCESSING DEVICE May 18, 2020 Pending
Array ( [id] => 16808405 [patent_doc_number] => 20210130958 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2021-05-06 [patent_title] => HEATING APPARATUS AND CHEMICAL VAPOR DEPOSITION SYSTEM [patent_app_type] => utility [patent_app_number] => 16/878582 [patent_app_country] => US [patent_app_date] => 2020-05-19 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 5002 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -18 [patent_words_short_claim] => 146 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16878582 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/878582
HEATING APPARATUS AND CHEMICAL VAPOR DEPOSITION SYSTEM May 18, 2020 Abandoned
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