Charlee Bennett

Array ( [id] => 18666625 [patent_doc_number] => 11773506 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2023-10-03 [patent_title] => Wafer susceptor with improved thermal characteristics [patent_app_type] => utility [patent_app_number] => 16/594253 [patent_app_country] => US [patent_app_date] => 2019-10-07 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 13 [patent_figures_cnt] => 13 [patent_no_of_words] => 6628 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 147 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16594253 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 15461831 [patent_doc_number] => 20200043740 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2020-02-06 [patent_title] => FOCUS RING FOR PLASMA ETCHER [patent_app_type] => utility [patent_app_number] => 16/594598 [patent_app_country] => US [patent_app_date] => 2019-10-07 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 9314 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 87 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16594598 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 17559044 [patent_doc_number] => 11315766 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2022-04-26 [patent_title] => Plasma processing apparatus and method for measuring thickness of ring member [patent_app_type] => utility [patent_app_number] => 16/590953 [patent_app_country] => US [patent_app_date] => 2019-10-02 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 9 [patent_figures_cnt] => 13 [patent_no_of_words] => 10149 [patent_no_of_claims] => 18 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 285 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16590953 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 16000863 [patent_doc_number] => 20200176302 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2020-06-04 [patent_title] => BUSHING PORTION AND A SUBSTRATE PROCESSING APPARATUS INCLUDING THE SAME [patent_app_type] => utility [patent_app_number] => 16/584098 [patent_app_country] => US [patent_app_date] => 2019-09-26 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 6914 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -18 [patent_words_short_claim] => 92 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16584098 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 15711775 [patent_doc_number] => 20200102653 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2020-04-02 [patent_title] => SUBSTRATE RETAINING APPARATUS, SYSTEM INCLUDING THE APPARATUS, AND METHOD OF USING SAME [patent_app_type] => utility [patent_app_number] => 16/584283 [patent_app_country] => US [patent_app_date] => 2019-09-26 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 6896 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -19 [patent_words_short_claim] => 76 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16584283 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 15932089 [patent_doc_number] => 20200157678 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2020-05-21 [patent_title] => LIFT PIN HOLDER ASSEMBLIES AND BODIES INCLUDING LIFT PIN HOLDER ASSEMBLIES [patent_app_type] => utility [patent_app_number] => 16/584452 [patent_app_country] => US [patent_app_date] => 2019-09-26 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 7056 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 75 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16584452 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 17224626 [patent_doc_number] => 11177136 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2021-11-16 [patent_title] => Abatement and strip process chamber in a dual loadlock configuration [patent_app_type] => utility [patent_app_number] => 16/584732 [patent_app_country] => US [patent_app_date] => 2019-09-26 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 11 [patent_figures_cnt] => 11 [patent_no_of_words] => 8005 [patent_no_of_claims] => 17 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 256 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16584732 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 15682033 [patent_doc_number] => 20200095680 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2020-03-26 [patent_title] => Placement Apparatus and Processing Apparatus [patent_app_type] => utility [patent_app_number] => 16/574977 [patent_app_country] => US [patent_app_date] => 2019-09-18 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 5947 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -14 [patent_words_short_claim] => 211 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16574977 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 15656885 [patent_doc_number] => 20200090973 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2020-03-19 [patent_title] => SUPPORT [patent_app_type] => utility [patent_app_number] => 16/567865 [patent_app_country] => US [patent_app_date] => 2019-09-11 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 4781 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -16 [patent_words_short_claim] => 79 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16567865 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 15717611 [patent_doc_number] => 20200105573 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2020-04-02 [patent_title] => COAXIAL LIFT DEVICE WITH DYNAMIC LEVELING [patent_app_type] => utility [patent_app_number] => 16/565287 [patent_app_country] => US [patent_app_date] => 2019-09-09 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 4842 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 157 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16565287 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 18402105 [patent_doc_number] => 11664253 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2023-05-30 [patent_title] => Semiconductor manufacturing apparatus and method of manufacturing semiconductor device [patent_app_type] => utility [patent_app_number] => 16/541227 [patent_app_country] => US [patent_app_date] => 2019-08-15 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 5 [patent_figures_cnt] => 10 [patent_no_of_words] => 6143 [patent_no_of_claims] => 6 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 174 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16541227 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 15184697 [patent_doc_number] => 20190362940 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2019-11-28 [patent_title] => CONTROL OF ON-WAFER CD UNIFORMITY WITH MOVABLE EDGE RING AND GAS INJECTION ADJUSTMENT [patent_app_type] => utility [patent_app_number] => 16/539494 [patent_app_country] => US [patent_app_date] => 2019-08-13 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 5534 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 92 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16539494 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 18481128 [patent_doc_number] => 11694880 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2023-07-04 [patent_title] => Lift thimble system, reaction chamber, and semiconductor processing equipment [patent_app_type] => utility [patent_app_number] => 17/263078 [patent_app_country] => US [patent_app_date] => 2019-07-30 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 6 [patent_figures_cnt] => 11 [patent_no_of_words] => 6208 [patent_no_of_claims] => 12 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 378 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17263078 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 16617198 [patent_doc_number] => 20210035851 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2021-02-04 [patent_title] => LOW CONTACT AREA SUBSTRATE SUPPORT FOR ETCHING CHAMBER [patent_app_type] => utility [patent_app_number] => 16/526840 [patent_app_country] => US [patent_app_date] => 2019-07-30 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 2917 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 134 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16526840 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 15455263 [patent_doc_number] => 20200040456 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2020-02-06 [patent_title] => FILM DEPOSITION APPARATUS AND FILM DEPOSITION METHOD [patent_app_type] => utility [patent_app_number] => 16/520955 [patent_app_country] => US [patent_app_date] => 2019-07-24 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 7265 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 75 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16520955 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 19399663 [patent_doc_number] => 12074049 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2024-08-27 [patent_title] => Permanent secondary erosion containment for electrostatic chuck bonds [patent_app_type] => utility [patent_app_number] => 16/452462 [patent_app_country] => US [patent_app_date] => 2019-06-25 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 3 [patent_figures_cnt] => 4 [patent_no_of_words] => 4997 [patent_no_of_claims] => 14 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 168 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16452462 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 17052653 [patent_doc_number] => 20210262087 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2021-08-26 [patent_title] => ARRANGEMENT FOR MEASURING THE SURFACE TEMPERATURE OF A SUSCEPTOR IN A CVD REACTOR [patent_app_type] => utility [patent_app_number] => 17/250221 [patent_app_country] => US [patent_app_date] => 2019-06-14 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 6229 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -13 [patent_words_short_claim] => 2 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17250221 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 17052653 [patent_doc_number] => 20210262087 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2021-08-26 [patent_title] => ARRANGEMENT FOR MEASURING THE SURFACE TEMPERATURE OF A SUSCEPTOR IN A CVD REACTOR [patent_app_type] => utility [patent_app_number] => 17/250221 [patent_app_country] => US [patent_app_date] => 2019-06-14 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 6229 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -13 [patent_words_short_claim] => 2 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17250221 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 14868915 [patent_doc_number] => 20190284699 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2019-09-19 [patent_title] => SYSTEM FOR SURFACE MODIFICATION BY LASER DIFFUSION [patent_app_type] => utility [patent_app_number] => 16/431519 [patent_app_country] => US [patent_app_date] => 2019-06-04 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 7088 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -7 [patent_words_short_claim] => 195 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16431519 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 19328768 [patent_doc_number] => 12046457 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2024-07-23 [patent_title] => Electrostatic chuck, focus ring, support base, plasma processing apparatus, and plasma processing method [patent_app_type] => utility [patent_app_number] => 16/644009 [patent_app_country] => US [patent_app_date] => 2019-06-03 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 10 [patent_figures_cnt] => 10 [patent_no_of_words] => 7175 [patent_no_of_claims] => 16 [patent_no_of_ind_claims] => 4 [patent_words_short_claim] => 320 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16644009 [rel_patent_id] =>[rel_patent_doc_number] =>)