
Charlee Bennett
Examiner (ID: 9707, Phone: (571)270-7972 , Office: P/1718 )
| Most Active Art Unit | 1718 |
| Art Unit(s) | 1714, 1718 |
| Total Applications | 605 |
| Issued Applications | 282 |
| Pending Applications | 114 |
| Abandoned Applications | 240 |
Applications
| Application number | Title of the application | Filing Date | Status |
|---|---|---|---|
Array
(
[id] => 16142155
[patent_doc_number] => 10704142
[patent_country] => US
[patent_kind] => B2
[patent_issue_date] => 2020-07-07
[patent_title] => Quick disconnect resistance temperature detector assembly for rotating pedestal
[patent_app_type] => utility
[patent_app_number] => 15/661441
[patent_app_country] => US
[patent_app_date] => 2017-07-27
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 4
[patent_figures_cnt] => 6
[patent_no_of_words] => 3834
[patent_no_of_claims] => 20
[patent_no_of_ind_claims] => 3
[patent_words_short_claim] => 164
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => patent
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15661441
[rel_patent_id] =>[rel_patent_doc_number] =>) 15/661441 | Quick disconnect resistance temperature detector assembly for rotating pedestal | Jul 26, 2017 | Issued |
Array
(
[id] => 12159352
[patent_doc_number] => 20180030617
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2018-02-01
[patent_title] => 'APPARATUS FOR MANUFACTURING A SECOND SUBSTRATE ON A FIRST SUBSTRATE INCLUDING REMOVAL OF THE FIRST SUBSTRATE'
[patent_app_type] => utility
[patent_app_number] => 15/641746
[patent_app_country] => US
[patent_app_date] => 2017-07-05
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 18
[patent_figures_cnt] => 18
[patent_no_of_words] => 9063
[patent_no_of_claims] => 20
[patent_no_of_ind_claims] => 3
[patent_words_short_claim] => 0
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => publication
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15641746
[rel_patent_id] =>[rel_patent_doc_number] =>) 15/641746 | Apparatus for manufacturing a second substrate on a first substrate including removal of the first substrate | Jul 4, 2017 | Issued |
Array
(
[id] => 17529867
[patent_doc_number] => 11302565
[patent_country] => US
[patent_kind] => B2
[patent_issue_date] => 2022-04-12
[patent_title] => Device for handling a semiconductor wafer in an epitaxy reactor and method for producing a semiconductor wafer having an epitaxial layer
[patent_app_type] => utility
[patent_app_number] => 16/309014
[patent_app_country] => US
[patent_app_date] => 2017-07-03
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 3
[patent_figures_cnt] => 4
[patent_no_of_words] => 2322
[patent_no_of_claims] => 12
[patent_no_of_ind_claims] => 1
[patent_words_short_claim] => 161
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => patent
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16309014
[rel_patent_id] =>[rel_patent_doc_number] =>) 16/309014 | Device for handling a semiconductor wafer in an epitaxy reactor and method for producing a semiconductor wafer having an epitaxial layer | Jul 2, 2017 | Issued |
Array
(
[id] => 13718079
[patent_doc_number] => 20170369994
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2017-12-28
[patent_title] => APPARATUS FOR PROCESSING A WAFER AND METHOD OF DEPOSITING A THIN FILM USING THE SAME
[patent_app_type] => utility
[patent_app_number] => 15/624255
[patent_app_country] => US
[patent_app_date] => 2017-06-15
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 0
[patent_figures_cnt] => 0
[patent_no_of_words] => 2340
[patent_no_of_claims] => 0
[patent_no_of_ind_claims] => -8
[patent_words_short_claim] => 185
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => publication
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15624255
[rel_patent_id] =>[rel_patent_doc_number] =>) 15/624255 | APPARATUS FOR PROCESSING A WAFER AND METHOD OF DEPOSITING A THIN FILM USING THE SAME | Jun 14, 2017 | Abandoned |
Array
(
[id] => 13598201
[patent_doc_number] => 20180350649
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2018-12-06
[patent_title] => ELECTROSTATIC CHUCK FOR USE IN SEMICONDUCTOR PROCESSING
[patent_app_type] => utility
[patent_app_number] => 15/612423
[patent_app_country] => US
[patent_app_date] => 2017-06-02
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 0
[patent_figures_cnt] => 0
[patent_no_of_words] => 4288
[patent_no_of_claims] => 0
[patent_no_of_ind_claims] => -18
[patent_words_short_claim] => 114
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => publication
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15612423
[rel_patent_id] =>[rel_patent_doc_number] =>) 15/612423 | Electrostatic chuck for use in semiconductor processing | Jun 1, 2017 | Issued |
Array
(
[id] => 11854799
[patent_doc_number] => 20170229291
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2017-08-10
[patent_title] => 'METHODS AND SYSTEMS TO ENHANCE PROCESS UNIFORMITY'
[patent_app_type] => utility
[patent_app_number] => 15/581446
[patent_app_country] => US
[patent_app_date] => 2017-04-28
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 8
[patent_figures_cnt] => 8
[patent_no_of_words] => 8200
[patent_no_of_claims] => 20
[patent_no_of_ind_claims] => 2
[patent_words_short_claim] => 0
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => publication
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15581446
[rel_patent_id] =>[rel_patent_doc_number] =>) 15/581446 | Methods and systems to enhance process uniformity | Apr 27, 2017 | Issued |
Array
(
[id] => 14938237
[patent_doc_number] => 20190304757
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2019-10-03
[patent_title] => PLASMA ETCH CHAMBER AND METHOD OF PLASMA ETCHING
[patent_app_type] => utility
[patent_app_number] => 16/306043
[patent_app_country] => US
[patent_app_date] => 2017-04-06
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 0
[patent_figures_cnt] => 0
[patent_no_of_words] => 6085
[patent_no_of_claims] => 0
[patent_no_of_ind_claims] => -28
[patent_words_short_claim] => 237
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => publication
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16306043
[rel_patent_id] =>[rel_patent_doc_number] =>) 16/306043 | Plasma etch chamber and method of plasma etching | Apr 5, 2017 | Issued |
Array
(
[id] => 11990178
[patent_doc_number] => 20170294333
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2017-10-12
[patent_title] => 'VACUUM CHUCK PRESSURE CONTROL SYSTEM'
[patent_app_type] => utility
[patent_app_number] => 15/464519
[patent_app_country] => US
[patent_app_date] => 2017-03-21
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 2
[patent_figures_cnt] => 2
[patent_no_of_words] => 3210
[patent_no_of_claims] => 20
[patent_no_of_ind_claims] => 3
[patent_words_short_claim] => 0
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => publication
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15464519
[rel_patent_id] =>[rel_patent_doc_number] =>) 15/464519 | Vacuum chuck pressure control system | Mar 20, 2017 | Issued |
Array
(
[id] => 11732685
[patent_doc_number] => 20170194128
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2017-07-06
[patent_title] => 'INDUCTIVE PLASMA SOURCE WITH METALLIC SHOWER HEAD USING B-FIELD CONCENTRATOR'
[patent_app_type] => utility
[patent_app_number] => 15/462507
[patent_app_country] => US
[patent_app_date] => 2017-03-17
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 4
[patent_figures_cnt] => 4
[patent_no_of_words] => 4007
[patent_no_of_claims] => 17
[patent_no_of_ind_claims] => 2
[patent_words_short_claim] => 0
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => publication
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15462507
[rel_patent_id] =>[rel_patent_doc_number] =>) 15/462507 | Inductive plasma source with metallic shower head using B-field concentrator | Mar 16, 2017 | Issued |
Array
(
[id] => 13428869
[patent_doc_number] => 20180265977
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2018-09-20
[patent_title] => DEPOSITION SYSTEM WITH VACUUM PRE-LOADED DEPOSITION HEAD
[patent_app_type] => utility
[patent_app_number] => 15/458250
[patent_app_country] => US
[patent_app_date] => 2017-03-14
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 0
[patent_figures_cnt] => 0
[patent_no_of_words] => 27007
[patent_no_of_claims] => 0
[patent_no_of_ind_claims] => -14
[patent_words_short_claim] => 294
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => publication
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15458250
[rel_patent_id] =>[rel_patent_doc_number] =>) 15/458250 | DEPOSITION SYSTEM WITH VACUUM PRE-LOADED DEPOSITION HEAD | Mar 13, 2017 | Abandoned |
Array
(
[id] => 16928270
[patent_doc_number] => 11049760
[patent_country] => US
[patent_kind] => B2
[patent_issue_date] => 2021-06-29
[patent_title] => Universal process kit
[patent_app_type] => utility
[patent_app_number] => 15/436936
[patent_app_country] => US
[patent_app_date] => 2017-02-20
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 6
[patent_figures_cnt] => 6
[patent_no_of_words] => 3967
[patent_no_of_claims] => 20
[patent_no_of_ind_claims] => 3
[patent_words_short_claim] => 260
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => patent
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15436936
[rel_patent_id] =>[rel_patent_doc_number] =>) 15/436936 | Universal process kit | Feb 19, 2017 | Issued |
Array
(
[id] => 16832414
[patent_doc_number] => 11008655
[patent_country] => US
[patent_kind] => B2
[patent_issue_date] => 2021-05-18
[patent_title] => Components such as edge rings including chemical vapor deposition (CVD) diamond coating with high purity SP3 bonds for plasma processing systems
[patent_app_type] => utility
[patent_app_number] => 15/428744
[patent_app_country] => US
[patent_app_date] => 2017-02-09
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 5
[patent_figures_cnt] => 6
[patent_no_of_words] => 5680
[patent_no_of_claims] => 20
[patent_no_of_ind_claims] => 4
[patent_words_short_claim] => 55
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => patent
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15428744
[rel_patent_id] =>[rel_patent_doc_number] =>) 15/428744 | Components such as edge rings including chemical vapor deposition (CVD) diamond coating with high purity SP3 bonds for plasma processing systems | Feb 8, 2017 | Issued |
Array
(
[id] => 11836795
[patent_doc_number] => 20170218514
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2017-08-03
[patent_title] => 'SUBSTRATE PROCESSING APPARATUS'
[patent_app_type] => utility
[patent_app_number] => 15/420352
[patent_app_country] => US
[patent_app_date] => 2017-01-31
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 31
[patent_figures_cnt] => 31
[patent_no_of_words] => 15271
[patent_no_of_claims] => 10
[patent_no_of_ind_claims] => 1
[patent_words_short_claim] => 0
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => publication
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15420352
[rel_patent_id] =>[rel_patent_doc_number] =>) 15/420352 | Substrate processing apparatus | Jan 30, 2017 | Issued |
Array
(
[id] => 14011505
[patent_doc_number] => 10224228
[patent_country] => US
[patent_kind] => B2
[patent_issue_date] => 2019-03-05
[patent_title] => Electrostatic chucks and substrate processing apparatus including the same
[patent_app_type] => utility
[patent_app_number] => 15/420211
[patent_app_country] => US
[patent_app_date] => 2017-01-31
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 7
[patent_figures_cnt] => 7
[patent_no_of_words] => 5183
[patent_no_of_claims] => 17
[patent_no_of_ind_claims] => 3
[patent_words_short_claim] => 276
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => patent
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15420211
[rel_patent_id] =>[rel_patent_doc_number] =>) 15/420211 | Electrostatic chucks and substrate processing apparatus including the same | Jan 30, 2017 | Issued |
Array
(
[id] => 11824770
[patent_doc_number] => 20170213707
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2017-07-27
[patent_title] => 'SUBSTRATE PROCESSING APPARATUS'
[patent_app_type] => utility
[patent_app_number] => 15/413521
[patent_app_country] => US
[patent_app_date] => 2017-01-24
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 10
[patent_figures_cnt] => 10
[patent_no_of_words] => 8813
[patent_no_of_claims] => 10
[patent_no_of_ind_claims] => 1
[patent_words_short_claim] => 0
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => publication
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15413521
[rel_patent_id] =>[rel_patent_doc_number] =>) 15/413521 | Substrate processing apparatus | Jan 23, 2017 | Issued |
Array
(
[id] => 11824821
[patent_doc_number] => 20170213758
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2017-07-27
[patent_title] => 'WAFER EDGE RING LIFTING SOLUTION'
[patent_app_type] => utility
[patent_app_number] => 15/399809
[patent_app_country] => US
[patent_app_date] => 2017-01-06
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 15
[patent_figures_cnt] => 15
[patent_no_of_words] => 8482
[patent_no_of_claims] => 20
[patent_no_of_ind_claims] => 3
[patent_words_short_claim] => 0
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => publication
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15399809
[rel_patent_id] =>[rel_patent_doc_number] =>) 15/399809 | Wafer edge ring lifting solution | Jan 5, 2017 | Issued |
Array
(
[id] => 16609182
[patent_doc_number] => 10910195
[patent_country] => US
[patent_kind] => B2
[patent_issue_date] => 2021-02-02
[patent_title] => Substrate support with improved process uniformity
[patent_app_type] => utility
[patent_app_number] => 15/399244
[patent_app_country] => US
[patent_app_date] => 2017-01-05
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 6
[patent_figures_cnt] => 7
[patent_no_of_words] => 4630
[patent_no_of_claims] => 12
[patent_no_of_ind_claims] => 2
[patent_words_short_claim] => 129
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => patent
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15399244
[rel_patent_id] =>[rel_patent_doc_number] =>) 15/399244 | Substrate support with improved process uniformity | Jan 4, 2017 | Issued |
Array
(
[id] => 13785235
[patent_doc_number] => 20190006156
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2019-01-03
[patent_title] => Plasma Processing Apparatus
[patent_app_type] => utility
[patent_app_number] => 16/067811
[patent_app_country] => US
[patent_app_date] => 2017-01-04
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 0
[patent_figures_cnt] => 0
[patent_no_of_words] => 3691
[patent_no_of_claims] => 0
[patent_no_of_ind_claims] => -6
[patent_words_short_claim] => 280
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => publication
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16067811
[rel_patent_id] =>[rel_patent_doc_number] =>) 16/067811 | Plasma Processing Apparatus | Jan 3, 2017 | Abandoned |
Array
(
[id] => 18073659
[patent_doc_number] => 11532497
[patent_country] => US
[patent_kind] => B2
[patent_issue_date] => 2022-12-20
[patent_title] => High power electrostatic chuck design with radio frequency coupling
[patent_app_type] => utility
[patent_app_number] => 15/383035
[patent_app_country] => US
[patent_app_date] => 2016-12-19
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 5
[patent_figures_cnt] => 9
[patent_no_of_words] => 7306
[patent_no_of_claims] => 17
[patent_no_of_ind_claims] => 2
[patent_words_short_claim] => 213
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => patent
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15383035
[rel_patent_id] =>[rel_patent_doc_number] =>) 15/383035 | High power electrostatic chuck design with radio frequency coupling | Dec 18, 2016 | Issued |
Array
(
[id] => 13958617
[patent_doc_number] => 20190055652
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2019-02-21
[patent_title] => INJECTOR OF SILICON FOR THE SEMICONDUCTOR INDUSTRY
[patent_app_type] => utility
[patent_app_number] => 16/065227
[patent_app_country] => US
[patent_app_date] => 2016-12-19
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 0
[patent_figures_cnt] => 0
[patent_no_of_words] => 2437
[patent_no_of_claims] => 0
[patent_no_of_ind_claims] => -19
[patent_words_short_claim] => 62
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => publication
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16065227
[rel_patent_id] =>[rel_patent_doc_number] =>) 16/065227 | INJECTOR OF SILICON FOR THE SEMICONDUCTOR INDUSTRY | Dec 18, 2016 | Abandoned |