Search

Charlee Bennett

Examiner (ID: 18642)

Most Active Art Unit
1718
Art Unit(s)
1718, 1714
Total Applications
642
Issued Applications
298
Pending Applications
107
Abandoned Applications
246

Applications

Application numberTitle of the applicationFiling DateStatus
Array ( [id] => 19850619 [patent_doc_number] => 20250095970 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2025-03-20 [patent_title] => PLASMA PROCESSING CHAMBER LID COOLING [patent_app_type] => utility [patent_app_number] => 18/467211 [patent_app_country] => US [patent_app_date] => 2023-09-14 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 8130 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 96 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18467211 [rel_patent_id] =>[rel_patent_doc_number] =>)
18/467211
PLASMA PROCESSING CHAMBER LID COOLING Sep 13, 2023 Pending
Array ( [id] => 18848799 [patent_doc_number] => 20230411203 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2023-12-21 [patent_title] => APPARATUS FOR PROCESSING SUBSTRATE [patent_app_type] => utility [patent_app_number] => 18/456589 [patent_app_country] => US [patent_app_date] => 2023-08-28 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 3171 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -5 [patent_words_short_claim] => 178 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18456589 [rel_patent_id] =>[rel_patent_doc_number] =>)
18/456589
APPARATUS FOR PROCESSING SUBSTRATE Aug 27, 2023 Abandoned
Array ( [id] => 18831213 [patent_doc_number] => 20230399739 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2023-12-14 [patent_title] => HARD MASK DEPOSITION USING DIRECT CURRENT SUPERIMPOSED RADIO FREQUENCY PLASMA [patent_app_type] => utility [patent_app_number] => 18/454632 [patent_app_country] => US [patent_app_date] => 2023-08-23 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 8396 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 124 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18454632 [rel_patent_id] =>[rel_patent_doc_number] =>)
18/454632
HARD MASK DEPOSITION USING DIRECT CURRENT SUPERIMPOSED RADIO FREQUENCY PLASMA Aug 22, 2023 Pending
Array ( [id] => 18817938 [patent_doc_number] => 20230392278 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2023-12-07 [patent_title] => SUBSTRATE SUPPORTING PLATE, APPARATUS INCLUDING THE SUBSTRATE SUPPORTING PLATE, AND METHOD OF USING SAME [patent_app_type] => utility [patent_app_number] => 18/235589 [patent_app_country] => US [patent_app_date] => 2023-08-18 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 7974 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -19 [patent_words_short_claim] => 80 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18235589 [rel_patent_id] =>[rel_patent_doc_number] =>)
18/235589
SUBSTRATE SUPPORTING PLATE, APPARATUS INCLUDING THE SUBSTRATE SUPPORTING PLATE, AND METHOD OF USING SAME Aug 17, 2023 Pending
Array ( [id] => 20608630 [patent_doc_number] => 12584222 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2026-03-24 [patent_title] => Methods for thermal treatment of substrates [patent_app_type] => utility [patent_app_number] => 18/447603 [patent_app_country] => US [patent_app_date] => 2023-08-10 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 7 [patent_figures_cnt] => 11 [patent_no_of_words] => 0 [patent_no_of_claims] => 12 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 116 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18447603 [rel_patent_id] =>[rel_patent_doc_number] =>)
18/447603
Methods for thermal treatment of substrates Aug 9, 2023 Issued
Array ( [id] => 18757493 [patent_doc_number] => 20230360955 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2023-11-09 [patent_title] => COAXIAL LIFT DEVICE WITH DYNAMIC LEVELING [patent_app_type] => utility [patent_app_number] => 18/356553 [patent_app_country] => US [patent_app_date] => 2023-07-21 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 4863 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -18 [patent_words_short_claim] => 82 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18356553 [rel_patent_id] =>[rel_patent_doc_number] =>)
18/356553
COAXIAL LIFT DEVICE WITH DYNAMIC LEVELING Jul 20, 2023 Abandoned
Array ( [id] => 18757494 [patent_doc_number] => 20230360956 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2023-11-09 [patent_title] => COAXIAL LIFT DEVICE WITH DYNAMIC LEVELING [patent_app_type] => utility [patent_app_number] => 18/356579 [patent_app_country] => US [patent_app_date] => 2023-07-21 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 4866 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -13 [patent_words_short_claim] => 26 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18356579 [rel_patent_id] =>[rel_patent_doc_number] =>)
18/356579
COAXIAL LIFT DEVICE WITH DYNAMIC LEVELING Jul 20, 2023 Abandoned
Array ( [id] => 18741454 [patent_doc_number] => 20230350435 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2023-11-02 [patent_title] => INCREASING THE GAS EFFICIENCY FOR AN ELECTROSTATIC CHUCK [patent_app_type] => utility [patent_app_number] => 18/220705 [patent_app_country] => US [patent_app_date] => 2023-07-11 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 7996 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 54 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18220705 [rel_patent_id] =>[rel_patent_doc_number] =>)
18/220705
Increasing the gas efficiency for an electrostatic chuck Jul 10, 2023 Issued
Array ( [id] => 20201816 [patent_doc_number] => 12404586 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2025-09-02 [patent_title] => Substrate rotating apparatus, processing system, and processing method [patent_app_type] => utility [patent_app_number] => 18/723129 [patent_app_country] => US [patent_app_date] => 2023-06-23 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 11 [patent_figures_cnt] => 14 [patent_no_of_words] => 2329 [patent_no_of_claims] => 11 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 311 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18723129 [rel_patent_id] =>[rel_patent_doc_number] =>)
18/723129
Substrate rotating apparatus, processing system, and processing method Jun 22, 2023 Issued
Array ( [id] => 19274662 [patent_doc_number] => 12024775 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2024-07-02 [patent_title] => Gas distribution system and reactor system including same [patent_app_type] => utility [patent_app_number] => 18/207322 [patent_app_country] => US [patent_app_date] => 2023-06-08 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 8 [patent_figures_cnt] => 8 [patent_no_of_words] => 4491 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 174 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18207322 [rel_patent_id] =>[rel_patent_doc_number] =>)
18/207322
Gas distribution system and reactor system including same Jun 7, 2023 Issued
Array ( [id] => 19435988 [patent_doc_number] => 20240304486 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2024-09-12 [patent_title] => DIFFERENTIAL SUBSTRATE BACKSIDE COOLING [patent_app_type] => utility [patent_app_number] => 18/206443 [patent_app_country] => US [patent_app_date] => 2023-06-06 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 11478 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 131 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18206443 [rel_patent_id] =>[rel_patent_doc_number] =>)
18/206443
DIFFERENTIAL SUBSTRATE BACKSIDE COOLING Jun 5, 2023 Pending
Array ( [id] => 18940006 [patent_doc_number] => 20240035145 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2024-02-01 [patent_title] => MASK ASSEMBLY, APPARATUS OF MANUFACTURING THE SAME, METHOD OF REPAIRING THE MASK ASSEMBLY, AND METHOD OF MANUFACTURING THE MASK ASSEMBLY [patent_app_type] => utility [patent_app_number] => 18/329662 [patent_app_country] => US [patent_app_date] => 2023-06-06 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 13149 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -19 [patent_words_short_claim] => 101 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18329662 [rel_patent_id] =>[rel_patent_doc_number] =>)
18/329662
MASK ASSEMBLY, APPARATUS OF MANUFACTURING THE SAME, METHOD OF REPAIRING THE MASK ASSEMBLY, AND METHOD OF MANUFACTURING THE MASK ASSEMBLY Jun 5, 2023 Pending
Array ( [id] => 18679782 [patent_doc_number] => 20230317439 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2023-10-05 [patent_title] => APPARATUS FOR MONITORING A PLASMA PROCESS [patent_app_type] => utility [patent_app_number] => 18/203864 [patent_app_country] => US [patent_app_date] => 2023-05-31 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 9891 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -19 [patent_words_short_claim] => 2 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18203864 [rel_patent_id] =>[rel_patent_doc_number] =>)
18/203864
Apparatus for monitoring a plasma process May 30, 2023 Issued
Array ( [id] => 18658159 [patent_doc_number] => 20230304152 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2023-09-28 [patent_title] => ALD PROCESSING APPARATUS AND PROCESSING METHOD [patent_app_type] => utility [patent_app_number] => 18/325094 [patent_app_country] => US [patent_app_date] => 2023-05-29 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 14147 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -19 [patent_words_short_claim] => 181 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18325094 [rel_patent_id] =>[rel_patent_doc_number] =>)
18/325094
ALD processing apparatus and processing method May 28, 2023 Issued
Array ( [id] => 18653071 [patent_doc_number] => 20230298911 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2023-09-21 [patent_title] => DYNAMIC INTERFACE FOR PROVIDING A SYMMETRIC RADIO FREQUENCY RETURN PATH [patent_app_type] => utility [patent_app_number] => 18/323941 [patent_app_country] => US [patent_app_date] => 2023-05-25 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 13822 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 103 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18323941 [rel_patent_id] =>[rel_patent_doc_number] =>)
18/323941
DYNAMIC INTERFACE FOR PROVIDING A SYMMETRIC RADIO FREQUENCY RETURN PATH May 24, 2023 Pending
Array ( [id] => 18808329 [patent_doc_number] => 20230382662 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2023-11-30 [patent_title] => TRANSPORT SYSTEM, FILM FORMING APPARATUS, AND METHOD OF MANUFACTURING ARTICLE [patent_app_type] => utility [patent_app_number] => 18/323265 [patent_app_country] => US [patent_app_date] => 2023-05-24 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 10736 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -13 [patent_words_short_claim] => 146 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18323265 [rel_patent_id] =>[rel_patent_doc_number] =>)
18/323265
TRANSPORT SYSTEM, FILM FORMING APPARATUS, AND METHOD OF MANUFACTURING ARTICLE May 23, 2023 Pending
Array ( [id] => 18693140 [patent_doc_number] => 20230323535 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2023-10-12 [patent_title] => SEPARATION OF PLASMA SUPPRESSION AND WAFER EDGE TO IMPROVE EDGE FILM THICKNESS UNIFORMITY [patent_app_type] => utility [patent_app_number] => 18/321607 [patent_app_country] => US [patent_app_date] => 2023-05-22 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 9982 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -18 [patent_words_short_claim] => 172 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18321607 [rel_patent_id] =>[rel_patent_doc_number] =>)
18/321607
SEPARATION OF PLASMA SUPPRESSION AND WAFER EDGE TO IMPROVE EDGE FILM THICKNESS UNIFORMITY May 21, 2023 Pending
Array ( [id] => 20375189 [patent_doc_number] => 12482633 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2025-11-25 [patent_title] => Apparatus and method for delivering a plurality of waveform signals during plasma processing [patent_app_type] => utility [patent_app_number] => 18/199519 [patent_app_country] => US [patent_app_date] => 2023-05-19 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 6 [patent_figures_cnt] => 8 [patent_no_of_words] => 2397 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 192 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18199519 [rel_patent_id] =>[rel_patent_doc_number] =>)
18/199519
Apparatus and method for delivering a plurality of waveform signals during plasma processing May 18, 2023 Issued
Array ( [id] => 18759754 [patent_doc_number] => 20230363244 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2023-11-09 [patent_title] => ORGANIC VAPOR JET PRINTING SYSTEM [patent_app_type] => utility [patent_app_number] => 18/311550 [patent_app_country] => US [patent_app_date] => 2023-05-03 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 14653 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 106 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18311550 [rel_patent_id] =>[rel_patent_doc_number] =>)
18/311550
ORGANIC VAPOR JET PRINTING SYSTEM May 2, 2023 Pending
Array ( [id] => 19546277 [patent_doc_number] => 20240363313 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2024-10-31 [patent_title] => CHAMBER LID Temperature COOLING SYSTEM [patent_app_type] => utility [patent_app_number] => 18/141231 [patent_app_country] => US [patent_app_date] => 2023-04-28 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 4513 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 85 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18141231 [rel_patent_id] =>[rel_patent_doc_number] =>)
18/141231
CHAMBER LID Temperature COOLING SYSTEM Apr 27, 2023 Pending
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