Search

Charlee Bennett

Examiner (ID: 18642)

Most Active Art Unit
1718
Art Unit(s)
1718, 1714
Total Applications
642
Issued Applications
298
Pending Applications
107
Abandoned Applications
246

Applications

Application numberTitle of the applicationFiling DateStatus
Array ( [id] => 18285230 [patent_doc_number] => 20230100702 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2023-03-30 [patent_title] => SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE AND NON-TRANSITORY COMPUTER READABLE RECORDING MEDIUM [patent_app_type] => utility [patent_app_number] => 17/903515 [patent_app_country] => US [patent_app_date] => 2022-09-06 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 9953 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -13 [patent_words_short_claim] => 156 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17903515 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/903515
SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE AND NON-TRANSITORY COMPUTER READABLE RECORDING MEDIUM Sep 5, 2022 Pending
Array ( [id] => 18208194 [patent_doc_number] => 20230054452 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2023-02-23 [patent_title] => SEMICONDUCTOR MANUFACTURING APPARATUS AND MANUFACTURING METHOD FOR SEMICONDUCTOR DEVICE [patent_app_type] => utility [patent_app_number] => 17/891300 [patent_app_country] => US [patent_app_date] => 2022-08-19 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 5444 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -8 [patent_words_short_claim] => 100 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17891300 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/891300
Semiconductor manufacturing apparatus and manufacturing method for semiconductor device Aug 18, 2022 Issued
Array ( [id] => 18210062 [patent_doc_number] => 20230056323 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2023-02-23 [patent_title] => PLASMA PROCESSING APPARATUS AND ETCHING METHOD [patent_app_type] => utility [patent_app_number] => 17/889632 [patent_app_country] => US [patent_app_date] => 2022-08-17 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 16115 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -16 [patent_words_short_claim] => 133 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17889632 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/889632
PLASMA PROCESSING APPARATUS AND ETCHING METHOD Aug 16, 2022 Pending
Array ( [id] => 18061696 [patent_doc_number] => 20220392783 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2022-12-08 [patent_title] => SUBSTRATE PROCESSING APPARATUS AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, AND RECORDING MEDIUM [patent_app_type] => utility [patent_app_number] => 17/889054 [patent_app_country] => US [patent_app_date] => 2022-08-16 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 13628 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -15 [patent_words_short_claim] => 151 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17889054 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/889054
Substrate processing apparatus, method of manufacturing semiconductor device, and recording medium Aug 15, 2022 Issued
Array ( [id] => 18950913 [patent_doc_number] => 11894219 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2024-02-06 [patent_title] => Method for processing substrate [patent_app_type] => utility [patent_app_number] => 17/870893 [patent_app_country] => US [patent_app_date] => 2022-07-22 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 7 [patent_figures_cnt] => 7 [patent_no_of_words] => 5387 [patent_no_of_claims] => 8 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 150 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17870893 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/870893
Method for processing substrate Jul 21, 2022 Issued
Array ( [id] => 19741129 [patent_doc_number] => 12217973 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2025-02-04 [patent_title] => Method of etching film and plasma processing apparatus [patent_app_type] => utility [patent_app_number] => 17/809096 [patent_app_country] => US [patent_app_date] => 2022-06-27 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 6 [patent_figures_cnt] => 9 [patent_no_of_words] => 7881 [patent_no_of_claims] => 10 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 312 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17809096 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/809096
Method of etching film and plasma processing apparatus Jun 26, 2022 Issued
Array ( [id] => 20332768 [patent_doc_number] => 12463052 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2025-11-04 [patent_title] => Directional selective junction clean with field polymer protections [patent_app_type] => utility [patent_app_number] => 17/846155 [patent_app_country] => US [patent_app_date] => 2022-06-22 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 8 [patent_figures_cnt] => 17 [patent_no_of_words] => 1126 [patent_no_of_claims] => 8 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 128 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17846155 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/846155
Directional selective junction clean with field polymer protections Jun 21, 2022 Issued
Array ( [id] => 19893225 [patent_doc_number] => 20250118537 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2025-04-10 [patent_title] => PLASMA PROCESSING APPARATUS AND HEATING APPARATUS [patent_app_type] => utility [patent_app_number] => 18/279755 [patent_app_country] => US [patent_app_date] => 2022-06-21 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 10598 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -6 [patent_words_short_claim] => 101 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18279755 [rel_patent_id] =>[rel_patent_doc_number] =>)
18/279755
PLASMA PROCESSING APPARATUS AND HEATING APPARATUS Jun 20, 2022 Pending
Array ( [id] => 19444463 [patent_doc_number] => 12094752 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2024-09-17 [patent_title] => Wafer edge ring lifting solution [patent_app_type] => utility [patent_app_number] => 17/843652 [patent_app_country] => US [patent_app_date] => 2022-06-17 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 14 [patent_figures_cnt] => 18 [patent_no_of_words] => 8212 [patent_no_of_claims] => 10 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 161 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17843652 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/843652
Wafer edge ring lifting solution Jun 16, 2022 Issued
Array ( [id] => 18585899 [patent_doc_number] => 20230268163 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2023-08-24 [patent_title] => SEMICONDUCTOR MANUFACTURING APPARATUS [patent_app_type] => utility [patent_app_number] => 17/842551 [patent_app_country] => US [patent_app_date] => 2022-06-16 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 10524 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -18 [patent_words_short_claim] => 188 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17842551 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/842551
SEMICONDUCTOR MANUFACTURING APPARATUS Jun 15, 2022 Abandoned
Array ( [id] => 18848717 [patent_doc_number] => 20230411121 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2023-12-21 [patent_title] => STACKABLE PLASMA SOURCE FOR PLASMA PROCESSING [patent_app_type] => utility [patent_app_number] => 17/842666 [patent_app_country] => US [patent_app_date] => 2022-06-16 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 17521 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 117 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17842666 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/842666
STACKABLE PLASMA SOURCE FOR PLASMA PROCESSING Jun 15, 2022 Pending
Array ( [id] => 20357653 [patent_doc_number] => 12473641 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2025-11-18 [patent_title] => Apparatus for providing a gas mixture to a reaction chamber and method of using same [patent_app_type] => utility [patent_app_number] => 17/842057 [patent_app_country] => US [patent_app_date] => 2022-06-16 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 4 [patent_figures_cnt] => 4 [patent_no_of_words] => 0 [patent_no_of_claims] => 14 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 165 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17842057 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/842057
Apparatus for providing a gas mixture to a reaction chamber and method of using same Jun 15, 2022 Issued
Array ( [id] => 17870694 [patent_doc_number] => 20220293431 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2022-09-15 [patent_title] => THERMAL ATOMIC LAYER ETCH WITH RAPID TEMPERATURE CYCLING [patent_app_type] => utility [patent_app_number] => 17/805081 [patent_app_country] => US [patent_app_date] => 2022-06-02 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 13632 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -19 [patent_words_short_claim] => 216 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17805081 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/805081
THERMAL ATOMIC LAYER ETCH WITH RAPID TEMPERATURE CYCLING Jun 1, 2022 Abandoned
Array ( [id] => 18065789 [patent_doc_number] => 20220396876 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2022-12-15 [patent_title] => SHOWERHEAD AND SUBSTRATE PROCESSING APPARATUS [patent_app_type] => utility [patent_app_number] => 17/805066 [patent_app_country] => US [patent_app_date] => 2022-06-02 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 5189 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -7 [patent_words_short_claim] => 95 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17805066 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/805066
Showerhead and substrate processing apparatus Jun 1, 2022 Issued
Array ( [id] => 18208322 [patent_doc_number] => 20230054580 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2023-02-23 [patent_title] => BATCH TYPE SUBSTRATE PROCESSING APPARATUS AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE USING THE SAME [patent_app_type] => utility [patent_app_number] => 17/826901 [patent_app_country] => US [patent_app_date] => 2022-05-27 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 7508 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 2 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17826901 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/826901
BATCH TYPE SUBSTRATE PROCESSING APPARATUS AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE USING THE SAME May 26, 2022 Issued
Array ( [id] => 19812310 [patent_doc_number] => 12243723 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2025-03-04 [patent_title] => Plasma processing apparatus [patent_app_type] => utility [patent_app_number] => 17/804027 [patent_app_country] => US [patent_app_date] => 2022-05-25 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 6 [patent_figures_cnt] => 6 [patent_no_of_words] => 7337 [patent_no_of_claims] => 3 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 304 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17804027 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/804027
Plasma processing apparatus May 24, 2022 Issued
Array ( [id] => 18789214 [patent_doc_number] => 20230377855 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2023-11-23 [patent_title] => LOWER DEPOSITION CHAMBER CCP ELECTRODE CLEANING SOLUTION [patent_app_type] => utility [patent_app_number] => 17/664324 [patent_app_country] => US [patent_app_date] => 2022-05-20 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 6178 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 69 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17664324 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/664324
LOWER DEPOSITION CHAMBER CCP ELECTRODE CLEANING SOLUTION May 19, 2022 Pending
Array ( [id] => 18757471 [patent_doc_number] => 20230360933 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2023-11-09 [patent_title] => SUBSTRATE TREATING FACILITY AND SUBSTRATE TREATING METHOD [patent_app_type] => utility [patent_app_number] => 17/739377 [patent_app_country] => US [patent_app_date] => 2022-05-09 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 10660 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -15 [patent_words_short_claim] => 2 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17739377 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/739377
SUBSTRATE TREATING FACILITY AND SUBSTRATE TREATING METHOD May 8, 2022 Pending
Array ( [id] => 20175904 [patent_doc_number] => 12394659 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2025-08-19 [patent_title] => Susceptors with film deposition control features [patent_app_type] => utility [patent_app_number] => 17/730967 [patent_app_country] => US [patent_app_date] => 2022-04-27 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 22 [patent_figures_cnt] => 41 [patent_no_of_words] => 11162 [patent_no_of_claims] => 23 [patent_no_of_ind_claims] => 4 [patent_words_short_claim] => 143 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17730967 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/730967
Susceptors with film deposition control features Apr 26, 2022 Issued
Array ( [id] => 17776976 [patent_doc_number] => 20220243325 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2022-08-04 [patent_title] => Rotating Disk Reactor with Split Substrate Carrier [patent_app_type] => utility [patent_app_number] => 17/717679 [patent_app_country] => US [patent_app_date] => 2022-04-11 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 14586 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -16 [patent_words_short_claim] => 179 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17717679 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/717679
Rotating Disk Reactor with Split Substrate Carrier Apr 10, 2022 Pending
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