Search

Charlee Bennett

Examiner (ID: 9707, Phone: (571)270-7972 , Office: P/1718 )

Most Active Art Unit
1718
Art Unit(s)
1714, 1718
Total Applications
605
Issued Applications
282
Pending Applications
114
Abandoned Applications
240

Applications

Application numberTitle of the applicationFiling DateStatus
Array ( [id] => 18766932 [patent_doc_number] => 11817341 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2023-11-14 [patent_title] => Electrostatic chuck for use in semiconductor processing [patent_app_type] => utility [patent_app_number] => 17/652243 [patent_app_country] => US [patent_app_date] => 2022-02-23 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 6 [patent_figures_cnt] => 9 [patent_no_of_words] => 4341 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 96 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17652243 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/652243
Electrostatic chuck for use in semiconductor processing Feb 22, 2022 Issued
Array ( [id] => 17810769 [patent_doc_number] => 20220262604 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2022-08-18 [patent_title] => SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE AND NON-TRANSITORY COMPUTER-READABLE RECORDING MEDIUM [patent_app_type] => utility [patent_app_number] => 17/670812 [patent_app_country] => US [patent_app_date] => 2022-02-14 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 10338 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 174 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17670812 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/670812
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE AND NON-TRANSITORY COMPUTER-READABLE RECORDING MEDIUM Feb 13, 2022 Pending
Array ( [id] => 20204047 [patent_doc_number] => 12406830 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2025-09-02 [patent_title] => Apparatus for treating substrate and method for treating substrate [patent_app_type] => utility [patent_app_number] => 17/547303 [patent_app_country] => US [patent_app_date] => 2021-12-10 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 13 [patent_figures_cnt] => 18 [patent_no_of_words] => 1170 [patent_no_of_claims] => 17 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 144 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17547303 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/547303
Apparatus for treating substrate and method for treating substrate Dec 9, 2021 Issued
Array ( [id] => 20204047 [patent_doc_number] => 12406830 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2025-09-02 [patent_title] => Apparatus for treating substrate and method for treating substrate [patent_app_type] => utility [patent_app_number] => 17/547303 [patent_app_country] => US [patent_app_date] => 2021-12-10 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 13 [patent_figures_cnt] => 18 [patent_no_of_words] => 1170 [patent_no_of_claims] => 17 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 144 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17547303 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/547303
Apparatus for treating substrate and method for treating substrate Dec 9, 2021 Issued
Array ( [id] => 20204047 [patent_doc_number] => 12406830 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2025-09-02 [patent_title] => Apparatus for treating substrate and method for treating substrate [patent_app_type] => utility [patent_app_number] => 17/547303 [patent_app_country] => US [patent_app_date] => 2021-12-10 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 13 [patent_figures_cnt] => 18 [patent_no_of_words] => 1170 [patent_no_of_claims] => 17 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 144 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17547303 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/547303
Apparatus for treating substrate and method for treating substrate Dec 9, 2021 Issued
Array ( [id] => 19610889 [patent_doc_number] => 12159770 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2024-12-03 [patent_title] => Cooled shield for ICP source [patent_app_type] => utility [patent_app_number] => 17/544139 [patent_app_country] => US [patent_app_date] => 2021-12-07 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 15 [patent_figures_cnt] => 18 [patent_no_of_words] => 9646 [patent_no_of_claims] => 16 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 249 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17544139 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/544139
Cooled shield for ICP source Dec 6, 2021 Issued
Array ( [id] => 19721804 [patent_doc_number] => 12207362 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2025-01-21 [patent_title] => Support unit, substrate treating apparatus including the same and temperature control method [patent_app_type] => utility [patent_app_number] => 17/534329 [patent_app_country] => US [patent_app_date] => 2021-11-23 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 7 [patent_figures_cnt] => 8 [patent_no_of_words] => 7582 [patent_no_of_claims] => 16 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 91 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17534329 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/534329
Support unit, substrate treating apparatus including the same and temperature control method Nov 22, 2021 Issued
Array ( [id] => 18125744 [patent_doc_number] => 20230011361 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2023-01-12 [patent_title] => SYSTEM AND METHOD FOR WAFER BREAKAGE PREVENTION [patent_app_type] => utility [patent_app_number] => 17/455978 [patent_app_country] => US [patent_app_date] => 2021-11-22 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 3930 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 132 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17455978 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/455978
SYSTEM AND METHOD FOR WAFER BREAKAGE PREVENTION Nov 21, 2021 Abandoned
Array ( [id] => 18379677 [patent_doc_number] => 20230154766 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2023-05-18 [patent_title] => PRE-CLEAN CHAMBER ASSEMBLY ARCHITECTURE FOR IMPROVED SERVICEABILITY [patent_app_type] => utility [patent_app_number] => 17/529684 [patent_app_country] => US [patent_app_date] => 2021-11-18 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 7864 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 126 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17529684 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/529684
PRE-CLEAN CHAMBER ASSEMBLY ARCHITECTURE FOR IMPROVED SERVICEABILITY Nov 17, 2021 Pending
Array ( [id] => 17615295 [patent_doc_number] => 20220157575 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2022-05-19 [patent_title] => APPARATUS FOR PLASMA PROCESSING AND PLASMA PROCESSING SYSTEM [patent_app_type] => utility [patent_app_number] => 17/525190 [patent_app_country] => US [patent_app_date] => 2021-11-12 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 11599 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -11 [patent_words_short_claim] => 2 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17525190 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/525190
APPARATUS FOR PLASMA PROCESSING AND PLASMA PROCESSING SYSTEM Nov 11, 2021 Pending
Array ( [id] => 17599287 [patent_doc_number] => 20220148861 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2022-05-12 [patent_title] => SUBSTRATE PROCESSING APPARATUS [patent_app_type] => utility [patent_app_number] => 17/520735 [patent_app_country] => US [patent_app_date] => 2021-11-08 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 5855 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -7 [patent_words_short_claim] => 153 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17520735 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/520735
SUBSTRATE PROCESSING APPARATUS Nov 7, 2021 Abandoned
Array ( [id] => 17615364 [patent_doc_number] => 20220157644 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2022-05-19 [patent_title] => SUBSTRATE SUPPORTING ASSEMBLY AND SUBSTRATE PROCESSING APPARATUS [patent_app_type] => utility [patent_app_number] => 17/520353 [patent_app_country] => US [patent_app_date] => 2021-11-05 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 4309 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -8 [patent_words_short_claim] => 158 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17520353 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/520353
Substrate supporting assembly and substrate processing apparatus Nov 4, 2021 Issued
Array ( [id] => 17964043 [patent_doc_number] => 20220344624 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2022-10-27 [patent_title] => MASK ASSEMBLY AND, APPARATUS AND METHOD OF MANUFACTURING DISPLAY APPARATUS [patent_app_type] => utility [patent_app_number] => 17/512224 [patent_app_country] => US [patent_app_date] => 2021-10-27 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 15298 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 87 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17512224 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/512224
MASK ASSEMBLY AND, APPARATUS AND METHOD OF MANUFACTURING DISPLAY APPARATUS Oct 26, 2021 Pending
Array ( [id] => 17551478 [patent_doc_number] => 20220122820 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2022-04-21 [patent_title] => SUBSTRATE PROCESSING APPARATUS [patent_app_type] => utility [patent_app_number] => 17/504625 [patent_app_country] => US [patent_app_date] => 2021-10-19 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 6479 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -8 [patent_words_short_claim] => 94 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17504625 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/504625
SUBSTRATE PROCESSING APPARATUS Oct 18, 2021 Pending
Array ( [id] => 19765887 [patent_doc_number] => 12224188 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2025-02-11 [patent_title] => Cooling sheet attachment apparatus to focusing ring for semiconductor manufacturing apparatus [patent_app_type] => utility [patent_app_number] => 17/500494 [patent_app_country] => US [patent_app_date] => 2021-10-13 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 8 [patent_figures_cnt] => 9 [patent_no_of_words] => 5945 [patent_no_of_claims] => 9 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 253 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17500494 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/500494
Cooling sheet attachment apparatus to focusing ring for semiconductor manufacturing apparatus Oct 12, 2021 Issued
Array ( [id] => 17339365 [patent_doc_number] => 20220005696 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2022-01-06 [patent_title] => SiC EPITAXIAL GROWTH APPARATUS [patent_app_type] => utility [patent_app_number] => 17/477055 [patent_app_country] => US [patent_app_date] => 2021-09-16 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 4103 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -9 [patent_words_short_claim] => 168 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17477055 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/477055
SiC EPITAXIAL GROWTH APPARATUS Sep 15, 2021 Pending
Array ( [id] => 18110014 [patent_doc_number] => 20230002894 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2023-01-05 [patent_title] => SHADOW RING LIFT TO IMPROVE WAFER EDGE PERFORMANCE [patent_app_type] => utility [patent_app_number] => 17/473118 [patent_app_country] => US [patent_app_date] => 2021-09-13 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 14662 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 64 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17473118 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/473118
Shadow ring lift to improve wafer edge performance Sep 12, 2021 Issued
Array ( [id] => 18782106 [patent_doc_number] => 11823872 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2023-11-21 [patent_title] => Electrostatic chuck apparatus and semiconductor manufacturing apparatus [patent_app_type] => utility [patent_app_number] => 17/463834 [patent_app_country] => US [patent_app_date] => 2021-09-01 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 5 [patent_figures_cnt] => 6 [patent_no_of_words] => 2698 [patent_no_of_claims] => 18 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 72 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17463834 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/463834
Electrostatic chuck apparatus and semiconductor manufacturing apparatus Aug 31, 2021 Issued
Array ( [id] => 18226824 [patent_doc_number] => 20230065818 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2023-03-02 [patent_title] => SEMICONDUCTOR APPARATUS FOR DEPOSITION PROCESS [patent_app_type] => utility [patent_app_number] => 17/460318 [patent_app_country] => US [patent_app_date] => 2021-08-30 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 6197 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 120 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17460318 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/460318
SEMICONDUCTOR APPARATUS FOR DEPOSITION PROCESS Aug 29, 2021 Pending
Array ( [id] => 17536627 [patent_doc_number] => 20220115236 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2022-04-14 [patent_title] => METHOD AND APPARATUS TO ELIMINATE CONTAMINANT PARTICLES FROM AN ACCELERATED NEUTRAL ATOM BEAM AND THEREBY PROTECT A BEAM TARGET [patent_app_type] => utility [patent_app_number] => 17/408002 [patent_app_country] => US [patent_app_date] => 2021-08-20 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 6915 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -9 [patent_words_short_claim] => 88 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17408002 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/408002
METHOD AND APPARATUS TO ELIMINATE CONTAMINANT PARTICLES FROM AN ACCELERATED NEUTRAL ATOM BEAM AND THEREBY PROTECT A BEAM TARGET Aug 19, 2021 Abandoned
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