Search

Charlee Bennett

Examiner (ID: 9707, Phone: (571)270-7972 , Office: P/1718 )

Most Active Art Unit
1718
Art Unit(s)
1714, 1718
Total Applications
605
Issued Applications
282
Pending Applications
114
Abandoned Applications
240

Applications

Application numberTitle of the applicationFiling DateStatus
Array ( [id] => 19943567 [patent_doc_number] => 12315703 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2025-05-27 [patent_title] => Plasma processing apparatus and methods of manufacturing semiconductor device using the same [patent_app_type] => utility [patent_app_number] => 17/397530 [patent_app_country] => US [patent_app_date] => 2021-08-09 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 10 [patent_figures_cnt] => 10 [patent_no_of_words] => 0 [patent_no_of_claims] => 10 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 449 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17397530 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/397530
Plasma processing apparatus and methods of manufacturing semiconductor device using the same Aug 8, 2021 Issued
Array ( [id] => 17370464 [patent_doc_number] => 20220025516 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2022-01-27 [patent_title] => RECIPROCATING ROTARY CVD EQUIPMENT AND APPLICATION METHOD [patent_app_type] => utility [patent_app_number] => 17/386191 [patent_app_country] => US [patent_app_date] => 2021-07-27 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 8106 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -10 [patent_words_short_claim] => 362 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17386191 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/386191
Reciprocating rotary CVD equipment and application method Jul 26, 2021 Issued
Array ( [id] => 17983011 [patent_doc_number] => 20220349047 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2022-11-03 [patent_title] => SEMICONDUCTOR WAFER CARRIER STRUCTURE AND METAL-ORGANIC CHEMICAL VAPOR DEPOSITION DEVICE [patent_app_type] => utility [patent_app_number] => 17/377079 [patent_app_country] => US [patent_app_date] => 2021-07-15 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 4950 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 45 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17377079 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/377079
SEMICONDUCTOR WAFER CARRIER STRUCTURE AND METAL-ORGANIC CHEMICAL VAPOR DEPOSITION DEVICE Jul 14, 2021 Abandoned
Array ( [id] => 17852336 [patent_doc_number] => 20220282378 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2022-09-08 [patent_title] => SHIELDING MECHANISM AND SUBSTRATE-PROCESSING DEVICE WITH THE SAME [patent_app_type] => utility [patent_app_number] => 17/355020 [patent_app_country] => US [patent_app_date] => 2021-06-22 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 4461 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -18 [patent_words_short_claim] => 81 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17355020 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/355020
SHIELDING MECHANISM AND SUBSTRATE-PROCESSING DEVICE WITH THE SAME Jun 21, 2021 Abandoned
Array ( [id] => 18743291 [patent_doc_number] => 20230352279 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2023-11-02 [patent_title] => MULTI-STATION PROCESSING TOOLS WITH STATION-VARYING SUPPORT FEATURES FOR BACKSIDE PROCESSING [patent_app_type] => utility [patent_app_number] => 18/002289 [patent_app_country] => US [patent_app_date] => 2021-06-21 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 10954 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -18 [patent_words_short_claim] => 98 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18002289 [rel_patent_id] =>[rel_patent_doc_number] =>)
18/002289
MULTI-STATION PROCESSING TOOLS WITH STATION-VARYING SUPPORT FEATURES FOR BACKSIDE PROCESSING Jun 20, 2021 Pending
Array ( [id] => 17145200 [patent_doc_number] => 20210313213 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2021-10-07 [patent_title] => SUBSTRATE SUPPORT WITH MULTIPLE EMBEDDED ELECTRODES [patent_app_type] => utility [patent_app_number] => 17/353643 [patent_app_country] => US [patent_app_date] => 2021-06-21 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 3816 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -18 [patent_words_short_claim] => 186 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17353643 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/353643
SUBSTRATE SUPPORT WITH MULTIPLE EMBEDDED ELECTRODES Jun 20, 2021 Abandoned
Array ( [id] => 18533148 [patent_doc_number] => 20230238223 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2023-07-27 [patent_title] => CARRIER RINGS WITH RADIALLY-VARIED PLASMA IMPEDANCE [patent_app_type] => utility [patent_app_number] => 18/002614 [patent_app_country] => US [patent_app_date] => 2021-06-21 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 10212 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -18 [patent_words_short_claim] => 59 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18002614 [rel_patent_id] =>[rel_patent_doc_number] =>)
18/002614
CARRIER RINGS WITH RADIALLY-VARIED PLASMA IMPEDANCE Jun 20, 2021 Pending
Array ( [id] => 18631715 [patent_doc_number] => 20230290620 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2023-09-14 [patent_title] => ELECTROSTATIC CHUCK [patent_app_type] => utility [patent_app_number] => 17/999830 [patent_app_country] => US [patent_app_date] => 2021-05-27 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 6162 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -11 [patent_words_short_claim] => 130 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17999830 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/999830
ELECTROSTATIC CHUCK May 26, 2021 Pending
Array ( [id] => 17217667 [patent_doc_number] => 20210351005 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2021-11-11 [patent_title] => PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD [patent_app_type] => utility [patent_app_number] => 17/242150 [patent_app_country] => US [patent_app_date] => 2021-04-27 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 10172 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -9 [patent_words_short_claim] => 63 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17242150 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/242150
Plasma processing apparatus and plasma processing method Apr 26, 2021 Issued
Array ( [id] => 17023822 [patent_doc_number] => 20210247693 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2021-08-12 [patent_title] => METHOD OF FORMING AN ENHANCED UNEXPOSED PHOTORESIST LAYER [patent_app_type] => utility [patent_app_number] => 17/231299 [patent_app_country] => US [patent_app_date] => 2021-04-15 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 5042 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -13 [patent_words_short_claim] => 104 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17231299 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/231299
Method of forming an enhanced unexposed photoresist layer Apr 14, 2021 Issued
Array ( [id] => 20213874 [patent_doc_number] => 12410518 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2025-09-09 [patent_title] => Injector configured for arrangement within a reactor of a vertical furnace and vertical furnace [patent_app_type] => utility [patent_app_number] => 17/230047 [patent_app_country] => US [patent_app_date] => 2021-04-14 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 3 [patent_figures_cnt] => 3 [patent_no_of_words] => 0 [patent_no_of_claims] => 19 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 203 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17230047 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/230047
Injector configured for arrangement within a reactor of a vertical furnace and vertical furnace Apr 13, 2021 Issued
Array ( [id] => 17448108 [patent_doc_number] => 20220068613 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2022-03-03 [patent_title] => PLASMA PROCESSING EQUIPMENT [patent_app_type] => utility [patent_app_number] => 17/221891 [patent_app_country] => US [patent_app_date] => 2021-04-05 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 5527 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 137 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17221891 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/221891
Plasma processing equipment Apr 4, 2021 Issued
Array ( [id] => 17913671 [patent_doc_number] => 20220316066 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2022-10-06 [patent_title] => LEVEL MONITORING AND ACTIVE ADJUSTMENT OF A SUBSTRATE SUPPORT ASSEMBLY [patent_app_type] => utility [patent_app_number] => 17/218882 [patent_app_country] => US [patent_app_date] => 2021-03-31 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 6276 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 144 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17218882 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/218882
Level monitoring and active adjustment of a substrate support assembly Mar 30, 2021 Issued
Array ( [id] => 19733709 [patent_doc_number] => 12211710 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2025-01-28 [patent_title] => Stage, film-forming apparatus, and film-processing apparatus [patent_app_type] => utility [patent_app_number] => 17/219316 [patent_app_country] => US [patent_app_date] => 2021-03-31 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 21 [patent_figures_cnt] => 44 [patent_no_of_words] => 10598 [patent_no_of_claims] => 18 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 241 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17219316 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/219316
Stage, film-forming apparatus, and film-processing apparatus Mar 30, 2021 Issued
Array ( [id] => 17878513 [patent_doc_number] => 11450536 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2022-09-20 [patent_title] => Substrate processing apparatus and method of manufacturing semiconductor device [patent_app_type] => utility [patent_app_number] => 17/211951 [patent_app_country] => US [patent_app_date] => 2021-03-25 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 18 [patent_figures_cnt] => 20 [patent_no_of_words] => 13615 [patent_no_of_claims] => 19 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 174 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17211951 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/211951
Substrate processing apparatus and method of manufacturing semiconductor device Mar 24, 2021 Issued
Array ( [id] => 16948576 [patent_doc_number] => 20210207267 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2021-07-08 [patent_title] => COATING PROCESSES FOR VACUUM CHAMBER ARRANGEMENTS AND APPARATUS THEREOF [patent_app_type] => utility [patent_app_number] => 17/209259 [patent_app_country] => US [patent_app_date] => 2021-03-23 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 6078 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 375 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17209259 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/209259
Coating processes for vacuum chamber arrangements and apparatus thereof Mar 22, 2021 Issued
Array ( [id] => 16936813 [patent_doc_number] => 20210202702 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2021-07-01 [patent_title] => METHOD AND APPARATUS FOR SELECTIVE NITRIDATION PROCESS [patent_app_type] => utility [patent_app_number] => 17/202131 [patent_app_country] => US [patent_app_date] => 2021-03-15 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 5848 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 150 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17202131 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/202131
Method and apparatus for selective nitridation process Mar 14, 2021 Issued
Array ( [id] => 17295360 [patent_doc_number] => 20210391199 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2021-12-16 [patent_title] => MAGAZINE SUPPORTING EQUIPMENT AND SEMICONDUCTOR MANUFACTURING APPARATUS INCLUDING THE SAME [patent_app_type] => utility [patent_app_number] => 17/200981 [patent_app_country] => US [patent_app_date] => 2021-03-15 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 6436 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 127 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17200981 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/200981
Magazine supporting equipment and semiconductor manufacturing apparatus including the same Mar 14, 2021 Issued
Array ( [id] => 16904765 [patent_doc_number] => 20210183681 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2021-06-17 [patent_title] => SUBSTRATE SUPPORT WITH MULTIPLE EMBEDDED ELECTRODES [patent_app_type] => utility [patent_app_number] => 17/186873 [patent_app_country] => US [patent_app_date] => 2021-02-26 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 3824 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -18 [patent_words_short_claim] => 183 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17186873 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/186873
Substrate support with multiple embedded electrodes Feb 25, 2021 Issued
Array ( [id] => 18718210 [patent_doc_number] => 11795545 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2023-10-24 [patent_title] => Multiple temperature range susceptor, assembly, reactor and system including the susceptor, and methods of using the same [patent_app_type] => utility [patent_app_number] => 17/167820 [patent_app_country] => US [patent_app_date] => 2021-02-04 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 5 [patent_figures_cnt] => 5 [patent_no_of_words] => 3780 [patent_no_of_claims] => 19 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 273 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17167820 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/167820
Multiple temperature range susceptor, assembly, reactor and system including the susceptor, and methods of using the same Feb 3, 2021 Issued
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