Search

Charlee Bennett

Examiner (ID: 18642)

Most Active Art Unit
1718
Art Unit(s)
1718, 1714
Total Applications
642
Issued Applications
298
Pending Applications
107
Abandoned Applications
246

Applications

Application numberTitle of the applicationFiling DateStatus
Array ( [id] => 19733709 [patent_doc_number] => 12211710 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2025-01-28 [patent_title] => Stage, film-forming apparatus, and film-processing apparatus [patent_app_type] => utility [patent_app_number] => 17/219316 [patent_app_country] => US [patent_app_date] => 2021-03-31 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 21 [patent_figures_cnt] => 44 [patent_no_of_words] => 10598 [patent_no_of_claims] => 18 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 241 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17219316 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/219316
Stage, film-forming apparatus, and film-processing apparatus Mar 30, 2021 Issued
Array ( [id] => 17913671 [patent_doc_number] => 20220316066 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2022-10-06 [patent_title] => LEVEL MONITORING AND ACTIVE ADJUSTMENT OF A SUBSTRATE SUPPORT ASSEMBLY [patent_app_type] => utility [patent_app_number] => 17/218882 [patent_app_country] => US [patent_app_date] => 2021-03-31 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 6276 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 144 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17218882 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/218882
Level monitoring and active adjustment of a substrate support assembly Mar 30, 2021 Issued
Array ( [id] => 17878513 [patent_doc_number] => 11450536 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2022-09-20 [patent_title] => Substrate processing apparatus and method of manufacturing semiconductor device [patent_app_type] => utility [patent_app_number] => 17/211951 [patent_app_country] => US [patent_app_date] => 2021-03-25 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 18 [patent_figures_cnt] => 20 [patent_no_of_words] => 13615 [patent_no_of_claims] => 19 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 174 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17211951 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/211951
Substrate processing apparatus and method of manufacturing semiconductor device Mar 24, 2021 Issued
Array ( [id] => 16948576 [patent_doc_number] => 20210207267 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2021-07-08 [patent_title] => COATING PROCESSES FOR VACUUM CHAMBER ARRANGEMENTS AND APPARATUS THEREOF [patent_app_type] => utility [patent_app_number] => 17/209259 [patent_app_country] => US [patent_app_date] => 2021-03-23 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 6078 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 375 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17209259 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/209259
Coating processes for vacuum chamber arrangements and apparatus thereof Mar 22, 2021 Issued
Array ( [id] => 17295360 [patent_doc_number] => 20210391199 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2021-12-16 [patent_title] => MAGAZINE SUPPORTING EQUIPMENT AND SEMICONDUCTOR MANUFACTURING APPARATUS INCLUDING THE SAME [patent_app_type] => utility [patent_app_number] => 17/200981 [patent_app_country] => US [patent_app_date] => 2021-03-15 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 6436 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 127 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17200981 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/200981
Magazine supporting equipment and semiconductor manufacturing apparatus including the same Mar 14, 2021 Issued
Array ( [id] => 16936813 [patent_doc_number] => 20210202702 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2021-07-01 [patent_title] => METHOD AND APPARATUS FOR SELECTIVE NITRIDATION PROCESS [patent_app_type] => utility [patent_app_number] => 17/202131 [patent_app_country] => US [patent_app_date] => 2021-03-15 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 5848 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 150 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17202131 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/202131
Method and apparatus for selective nitridation process Mar 14, 2021 Issued
Array ( [id] => 16904765 [patent_doc_number] => 20210183681 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2021-06-17 [patent_title] => SUBSTRATE SUPPORT WITH MULTIPLE EMBEDDED ELECTRODES [patent_app_type] => utility [patent_app_number] => 17/186873 [patent_app_country] => US [patent_app_date] => 2021-02-26 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 3824 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -18 [patent_words_short_claim] => 183 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17186873 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/186873
Substrate support with multiple embedded electrodes Feb 25, 2021 Issued
Array ( [id] => 18718210 [patent_doc_number] => 11795545 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2023-10-24 [patent_title] => Multiple temperature range susceptor, assembly, reactor and system including the susceptor, and methods of using the same [patent_app_type] => utility [patent_app_number] => 17/167820 [patent_app_country] => US [patent_app_date] => 2021-02-04 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 5 [patent_figures_cnt] => 5 [patent_no_of_words] => 3780 [patent_no_of_claims] => 19 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 273 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17167820 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/167820
Multiple temperature range susceptor, assembly, reactor and system including the susceptor, and methods of using the same Feb 3, 2021 Issued
Array ( [id] => 20583102 [patent_doc_number] => 12575365 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2026-03-10 [patent_title] => Edge ring transfer with automated rotational pre-alignment [patent_app_type] => utility [patent_app_number] => 17/793715 [patent_app_country] => US [patent_app_date] => 2021-01-20 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 8 [patent_figures_cnt] => 16 [patent_no_of_words] => 2468 [patent_no_of_claims] => 26 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 192 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17793715 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/793715
Edge ring transfer with automated rotational pre-alignment Jan 19, 2021 Issued
Array ( [id] => 19168384 [patent_doc_number] => 11984296 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2024-05-14 [patent_title] => Substrate support with improved process uniformity [patent_app_type] => utility [patent_app_number] => 17/151366 [patent_app_country] => US [patent_app_date] => 2021-01-18 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 6 [patent_figures_cnt] => 7 [patent_no_of_words] => 4665 [patent_no_of_claims] => 13 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 139 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17151366 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/151366
Substrate support with improved process uniformity Jan 17, 2021 Issued
Array ( [id] => 16966150 [patent_doc_number] => 20210217649 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2021-07-15 [patent_title] => EDGE RING AND SUBSTRATE PROCESSING APPARATUS [patent_app_type] => utility [patent_app_number] => 17/145171 [patent_app_country] => US [patent_app_date] => 2021-01-08 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 3730 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -18 [patent_words_short_claim] => 55 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17145171 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/145171
EDGE RING AND SUBSTRATE PROCESSING APPARATUS Jan 7, 2021 Abandoned
Array ( [id] => 18192673 [patent_doc_number] => 20230046192 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2023-02-16 [patent_title] => Device For Generating A Dielectric Barrier Discharge And Method For Treating An Object To Be Activated [patent_app_type] => utility [patent_app_number] => 17/758546 [patent_app_country] => US [patent_app_date] => 2020-12-17 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 5846 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -18 [patent_words_short_claim] => 2 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17758546 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/758546
Device for generating a dielectric barrier discharge and method for treating an object to be activated Dec 16, 2020 Issued
Array ( [id] => 17007580 [patent_doc_number] => 20210238741 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2021-08-05 [patent_title] => COVER RING AND GROUND SHIELD FOR PHYSICAL VAPOR DEPOSITION CHAMBER [patent_app_type] => utility [patent_app_number] => 17/119436 [patent_app_country] => US [patent_app_date] => 2020-12-11 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 6337 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 71 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17119436 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/119436
COVER RING AND GROUND SHIELD FOR PHYSICAL VAPOR DEPOSITION CHAMBER Dec 10, 2020 Pending
Array ( [id] => 18147178 [patent_doc_number] => 20230021035 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2023-01-19 [patent_title] => LINEARLY MOVING MECHANISM AND METHOD OF SUPPRESSING PARTICLE SCATTERING [patent_app_type] => utility [patent_app_number] => 17/757173 [patent_app_country] => US [patent_app_date] => 2020-12-07 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 12621 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -15 [patent_words_short_claim] => 280 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17757173 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/757173
Linearly moving mechanism and method of suppressing particle scattering Dec 6, 2020 Issued
Array ( [id] => 16723789 [patent_doc_number] => 20210090936 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2021-03-25 [patent_title] => CARRIER PLATE FOR USE IN PLASMA PROCESSING SYSTEMS [patent_app_type] => utility [patent_app_number] => 17/113848 [patent_app_country] => US [patent_app_date] => 2020-12-07 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 13396 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 244 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17113848 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/113848
Carrier plate for use in plasma processing systems Dec 6, 2020 Issued
Array ( [id] => 19701861 [patent_doc_number] => 12195877 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2025-01-14 [patent_title] => Substrate support device for a reaction chamber of an epitaxial reactor with gas flow rotation, reaction chamber and epitaxial reactor [patent_app_type] => utility [patent_app_number] => 17/778923 [patent_app_country] => US [patent_app_date] => 2020-11-23 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 5 [patent_figures_cnt] => 9 [patent_no_of_words] => 3938 [patent_no_of_claims] => 11 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 294 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17778923 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/778923
Substrate support device for a reaction chamber of an epitaxial reactor with gas flow rotation, reaction chamber and epitaxial reactor Nov 22, 2020 Issued
Array ( [id] => 20389229 [patent_doc_number] => 12488963 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2025-12-02 [patent_title] => Substrate processing apparatus [patent_app_type] => utility [patent_app_number] => 17/778757 [patent_app_country] => US [patent_app_date] => 2020-11-19 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 4 [patent_figures_cnt] => 4 [patent_no_of_words] => 0 [patent_no_of_claims] => 6 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 246 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17778757 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/778757
Substrate processing apparatus Nov 18, 2020 Issued
Array ( [id] => 19121291 [patent_doc_number] => 11965262 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2024-04-23 [patent_title] => Substrate supporting plate, thin film deposition apparatus including the same, and thin film deposition method [patent_app_type] => utility [patent_app_number] => 17/092599 [patent_app_country] => US [patent_app_date] => 2020-11-09 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 9 [patent_figures_cnt] => 15 [patent_no_of_words] => 6018 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 90 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17092599 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/092599
Substrate supporting plate, thin film deposition apparatus including the same, and thin film deposition method Nov 8, 2020 Issued
Array ( [id] => 16601481 [patent_doc_number] => 20210028012 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2021-01-28 [patent_title] => PLASMA ENHANCED CVD WITH PERIODIC HIGH VOLTAGE BIAS [patent_app_type] => utility [patent_app_number] => 17/070821 [patent_app_country] => US [patent_app_date] => 2020-10-14 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 5990 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -11 [patent_words_short_claim] => 95 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17070821 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/070821
Plasma enhanced CVD with periodic high voltage bias Oct 13, 2020 Issued
Array ( [id] => 19717637 [patent_doc_number] => 12203161 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2025-01-21 [patent_title] => Component for plasma processing apparatus and plasma processing apparatus including component [patent_app_type] => utility [patent_app_number] => 17/764141 [patent_app_country] => US [patent_app_date] => 2020-09-29 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 2 [patent_figures_cnt] => 4 [patent_no_of_words] => 4961 [patent_no_of_claims] => 15 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 85 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17764141 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/764141
Component for plasma processing apparatus and plasma processing apparatus including component Sep 28, 2020 Issued
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