Chau N Nguyen

Array ( [id] => 18356357 [patent_doc_number] => 11644755 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2023-05-09 [patent_title] => Lithographic method [patent_app_type] => utility [patent_app_number] => 17/279648 [patent_app_country] => US [patent_app_date] => 2019-09-11 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 7 [patent_figures_cnt] => 9 [patent_no_of_words] => 11826 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 79 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17279648 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 15713959 [patent_doc_number] => 20200103746 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2020-04-02 [patent_title] => APPARATUS AND METHOD FOR MONITORING REFLECTIVITY OF THE COLLECTOR FOR EXTREME ULTRAVIOLET RADIATION SOURCE [patent_app_type] => utility [patent_app_number] => 16/568044 [patent_app_country] => US [patent_app_date] => 2019-09-11 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 7209 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 150 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16568044 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 17208608 [patent_doc_number] => 11168972 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2021-11-09 [patent_title] => Detection device [patent_app_type] => utility [patent_app_number] => 16/564846 [patent_app_country] => US [patent_app_date] => 2019-09-09 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 1 [patent_figures_cnt] => 1 [patent_no_of_words] => 1569 [patent_no_of_claims] => 1 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 404 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16564846 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 16500711 [patent_doc_number] => 10866091 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2020-12-15 [patent_title] => Concentricity detection system [patent_app_type] => utility [patent_app_number] => 16/554823 [patent_app_country] => US [patent_app_date] => 2019-08-29 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 2 [patent_figures_cnt] => 2 [patent_no_of_words] => 1158 [patent_no_of_claims] => 15 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 146 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16554823 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 17230314 [patent_doc_number] => 20210356871 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2021-11-18 [patent_title] => RADIATION SYSTEM [patent_app_type] => utility [patent_app_number] => 17/277554 [patent_app_country] => US [patent_app_date] => 2019-08-28 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 12768 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -16 [patent_words_short_claim] => 2 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17277554 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 15257069 [patent_doc_number] => 20190377268 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2019-12-12 [patent_title] => METHOD FOR CORRECTING A REFLECTIVE OPTICAL ELEMENT FOR THE WAVELENGTH RANGE BETWEEN 5 NM AND 20 NM [patent_app_type] => utility [patent_app_number] => 16/550415 [patent_app_country] => US [patent_app_date] => 2019-08-26 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 4449 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -9 [patent_words_short_claim] => 124 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16550415 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 15257063 [patent_doc_number] => 20190377265 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2019-12-12 [patent_title] => IMPRINT LITHOGRAPHY [patent_app_type] => utility [patent_app_number] => 16/550451 [patent_app_country] => US [patent_app_date] => 2019-08-26 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 36591 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 2 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16550451 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 15257061 [patent_doc_number] => 20190377264 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2019-12-12 [patent_title] => METROLOGY ROBUSTNESS BASED ON THROUGH-WAVELENGTH SIMILARITY [patent_app_type] => utility [patent_app_number] => 16/549661 [patent_app_country] => US [patent_app_date] => 2019-08-23 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 15614 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -18 [patent_words_short_claim] => 2 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16549661 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 17886429 [patent_doc_number] => 20220301907 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2022-09-22 [patent_title] => METHOD AND DEVICE FOR THE ALIGNMENT OF SUBSTRATES [patent_app_type] => utility [patent_app_number] => 17/631261 [patent_app_country] => US [patent_app_date] => 2019-08-23 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 13071 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -24 [patent_words_short_claim] => 101 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17631261 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 16030665 [patent_doc_number] => 10677743 [patent_country] => US [patent_kind] => B1 [patent_issue_date] => 2020-06-09 [patent_title] => Inspection apparatus and inspection method [patent_app_type] => utility [patent_app_number] => 16/546526 [patent_app_country] => US [patent_app_date] => 2019-08-21 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 23 [patent_figures_cnt] => 27 [patent_no_of_words] => 6086 [patent_no_of_claims] => 14 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 205 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16546526 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 17589137 [patent_doc_number] => 11327404 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2022-05-10 [patent_title] => Lithographic apparatus and device manufacturing method [patent_app_type] => utility [patent_app_number] => 16/544283 [patent_app_country] => US [patent_app_date] => 2019-08-19 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 4 [patent_figures_cnt] => 15 [patent_no_of_words] => 8158 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 113 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16544283 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 17743980 [patent_doc_number] => 11392043 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2022-07-19 [patent_title] => Method and metrology apparatus for determining estimated scattered radiation intensity [patent_app_type] => utility [patent_app_number] => 16/539208 [patent_app_country] => US [patent_app_date] => 2019-08-13 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 5 [patent_figures_cnt] => 6 [patent_no_of_words] => 6889 [patent_no_of_claims] => 7 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 87 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16539208 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 17906930 [patent_doc_number] => 11460782 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2022-10-04 [patent_title] => Matching pupil determination [patent_app_type] => utility [patent_app_number] => 17/265632 [patent_app_country] => US [patent_app_date] => 2019-08-12 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 11 [patent_figures_cnt] => 14 [patent_no_of_words] => 19647 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 134 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17265632 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 15458177 [patent_doc_number] => 20200041913 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2020-02-06 [patent_title] => SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, AND STORAGE MEDIUM [patent_app_type] => utility [patent_app_number] => 16/521052 [patent_app_country] => US [patent_app_date] => 2019-07-24 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 8173 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -11 [patent_words_short_claim] => 63 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16521052 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 16493886 [patent_doc_number] => 10859922 [patent_country] => US [patent_kind] => B1 [patent_issue_date] => 2020-12-08 [patent_title] => Lithography system and method [patent_app_type] => utility [patent_app_number] => 16/515245 [patent_app_country] => US [patent_app_date] => 2019-07-18 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 10 [patent_figures_cnt] => 13 [patent_no_of_words] => 8874 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 272 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16515245 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 16291135 [patent_doc_number] => 10767976 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2020-09-08 [patent_title] => Optical displacement meter [patent_app_type] => utility [patent_app_number] => 16/512462 [patent_app_country] => US [patent_app_date] => 2019-07-16 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 17 [patent_figures_cnt] => 25 [patent_no_of_words] => 10011 [patent_no_of_claims] => 9 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 277 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16512462 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 15026739 [patent_doc_number] => 20190324374 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2019-10-24 [patent_title] => LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD [patent_app_type] => utility [patent_app_number] => 16/460159 [patent_app_country] => US [patent_app_date] => 2019-07-02 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 10497 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 46 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16460159 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 15515945 [patent_doc_number] => 10564555 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2020-02-18 [patent_title] => Method of reducing effects of reticle heating and/or cooling in a lithographic process [patent_app_type] => utility [patent_app_number] => 16/458601 [patent_app_country] => US [patent_app_date] => 2019-07-01 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 4 [patent_figures_cnt] => 5 [patent_no_of_words] => 9550 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 79 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16458601 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 15411719 [patent_doc_number] => 20200026182 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2020-01-23 [patent_title] => Metrology Apparatus and Method for Determining a Characteristic Relating to One or More Structures on a Substrate [patent_app_type] => utility [patent_app_number] => 16/456878 [patent_app_country] => US [patent_app_date] => 2019-06-28 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 8948 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -12 [patent_words_short_claim] => 2 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16456878 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 17053984 [patent_doc_number] => 20210263418 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2021-08-26 [patent_title] => TOOL FOR MODIFYING A SUPPORT SURFACE [patent_app_type] => utility [patent_app_number] => 17/260649 [patent_app_country] => US [patent_app_date] => 2019-06-27 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 11382 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 65 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17260649 [rel_patent_id] =>[rel_patent_doc_number] =>)