Search

Chau N Nguyen

Examiner (ID: 17964, Phone: (571)272-1980 , Office: P/2847 )

Most Active Art Unit
2831
Art Unit(s)
2831, 2835, 2841, 3621, 2109, 2950, 2847
Total Applications
2818
Issued Applications
1931
Pending Applications
187
Abandoned Applications
700

Applications

Application numberTitle of the applicationFiling DateStatus
Array ( [id] => 16584444 [patent_doc_number] => 20210018846 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2021-01-21 [patent_title] => SPECTRAL FEATURE SELECTION AND PULSE TIMING CONTROL OF A PULSED LIGHT BEAM [patent_app_type] => utility [patent_app_number] => 16/980467 [patent_app_country] => US [patent_app_date] => 2019-03-01 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 24969 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -19 [patent_words_short_claim] => 2 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16980467 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/980467
Spectral feature selection and pulse timing control of a pulsed light beam Feb 28, 2019 Issued
Array ( [id] => 17621479 [patent_doc_number] => 11340532 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2022-05-24 [patent_title] => Prolonging optical element lifetime in an EUV lithography system [patent_app_type] => utility [patent_app_number] => 16/977360 [patent_app_country] => US [patent_app_date] => 2019-02-28 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 14 [patent_figures_cnt] => 18 [patent_no_of_words] => 14998 [patent_no_of_claims] => 29 [patent_no_of_ind_claims] => 9 [patent_words_short_claim] => 103 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16977360 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/977360
Prolonging optical element lifetime in an EUV lithography system Feb 27, 2019 Issued
Array ( [id] => 16659023 [patent_doc_number] => 20210055660 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2021-02-25 [patent_title] => INSPECTION SYSTEM, LITHOGRAPHIC APPARATUS, AND INSPECTION METHOD [patent_app_type] => utility [patent_app_number] => 16/977503 [patent_app_country] => US [patent_app_date] => 2019-02-25 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 11764 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -18 [patent_words_short_claim] => 53 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16977503 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/977503
INSPECTION SYSTEM, LITHOGRAPHIC APPARATUS, AND INSPECTION METHOD Feb 24, 2019 Pending
Array ( [id] => 17499040 [patent_doc_number] => 11287743 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2022-03-29 [patent_title] => Control system and method [patent_app_type] => utility [patent_app_number] => 16/977667 [patent_app_country] => US [patent_app_date] => 2019-02-21 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 4 [patent_figures_cnt] => 7 [patent_no_of_words] => 8336 [patent_no_of_claims] => 15 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 161 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16977667 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/977667
Control system and method Feb 20, 2019 Issued
Array ( [id] => 15515937 [patent_doc_number] => 10564551 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2020-02-18 [patent_title] => Method for determining a focus position of a lithography mask and metrology system for carrying out such a method [patent_app_type] => utility [patent_app_number] => 16/280521 [patent_app_country] => US [patent_app_date] => 2019-02-20 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 5 [patent_figures_cnt] => 7 [patent_no_of_words] => 5386 [patent_no_of_claims] => 19 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 133 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16280521 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/280521
Method for determining a focus position of a lithography mask and metrology system for carrying out such a method Feb 19, 2019 Issued
Array ( [id] => 17468444 [patent_doc_number] => 11274919 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2022-03-15 [patent_title] => Measurement system, substrate processing system, and device manufacturing method [patent_app_type] => utility [patent_app_number] => 16/279639 [patent_app_country] => US [patent_app_date] => 2019-02-19 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 16 [patent_figures_cnt] => 19 [patent_no_of_words] => 34896 [patent_no_of_claims] => 37 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 246 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16279639 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/279639
Measurement system, substrate processing system, and device manufacturing method Feb 18, 2019 Issued
Array ( [id] => 15458179 [patent_doc_number] => 20200041914 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2020-02-06 [patent_title] => LITHOGRAPHY SYSTEM AND LITHOGRAPHY METHOD [patent_app_type] => utility [patent_app_number] => 16/279237 [patent_app_country] => US [patent_app_date] => 2019-02-19 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 6389 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 2 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16279237 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/279237
Lithography system and lithography method Feb 18, 2019 Issued
Array ( [id] => 14570097 [patent_doc_number] => 20190212655 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2019-07-11 [patent_title] => METHOD AND APPARATUS FOR INSPECTION AND METROLOGY [patent_app_type] => utility [patent_app_number] => 16/279001 [patent_app_country] => US [patent_app_date] => 2019-02-19 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 20216 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 2 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16279001 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/279001
Method and apparatus for inspection and metrology Feb 18, 2019 Issued
Array ( [id] => 16623135 [patent_doc_number] => 20210041788 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2021-02-11 [patent_title] => GUIDED PATTERNING DEVICE INSPECTION [patent_app_type] => utility [patent_app_number] => 16/965130 [patent_app_country] => US [patent_app_date] => 2019-02-19 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 33891 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 88 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16965130 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/965130
Guided patterning device inspection Feb 18, 2019 Issued
Array ( [id] => 17179686 [patent_doc_number] => 11156925 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2021-10-26 [patent_title] => Positioning system for a lithographic apparatus [patent_app_type] => utility [patent_app_number] => 16/976326 [patent_app_country] => US [patent_app_date] => 2019-02-14 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 6 [patent_figures_cnt] => 13 [patent_no_of_words] => 6499 [patent_no_of_claims] => 18 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 216 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16976326 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/976326
Positioning system for a lithographic apparatus Feb 13, 2019 Issued
Array ( [id] => 17090719 [patent_doc_number] => 11118903 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2021-09-14 [patent_title] => Efficient illumination shaping for scatterometry overlay [patent_app_type] => utility [patent_app_number] => 16/275085 [patent_app_country] => US [patent_app_date] => 2019-02-13 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 11 [patent_figures_cnt] => 14 [patent_no_of_words] => 9748 [patent_no_of_claims] => 36 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 145 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16275085 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/275085
Efficient illumination shaping for scatterometry overlay Feb 12, 2019 Issued
Array ( [id] => 17636433 [patent_doc_number] => 11347154 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2022-05-31 [patent_title] => Cleaning a structure surface in an EUV chamber [patent_app_type] => utility [patent_app_number] => 16/961747 [patent_app_country] => US [patent_app_date] => 2019-02-12 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 24 [patent_figures_cnt] => 42 [patent_no_of_words] => 19444 [patent_no_of_claims] => 21 [patent_no_of_ind_claims] => 6 [patent_words_short_claim] => 147 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16961747 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/961747
Cleaning a structure surface in an EUV chamber Feb 11, 2019 Issued
Array ( [id] => 15105437 [patent_doc_number] => 10474041 [patent_country] => US [patent_kind] => B1 [patent_issue_date] => 2019-11-12 [patent_title] => Digital lithography with extended depth of focus [patent_app_type] => utility [patent_app_number] => 16/267359 [patent_app_country] => US [patent_app_date] => 2019-02-04 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 10 [patent_figures_cnt] => 10 [patent_no_of_words] => 7841 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 111 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16267359 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/267359
Digital lithography with extended depth of focus Feb 3, 2019 Issued
Array ( [id] => 16221922 [patent_doc_number] => 20200247038 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2020-08-06 [patent_title] => Digital Projection System for the Development of Photolithography Devices [patent_app_type] => utility [patent_app_number] => 16/264133 [patent_app_country] => US [patent_app_date] => 2019-01-31 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 2211 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -6 [patent_words_short_claim] => 28 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16264133 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/264133
Digital Projection System for the Development of Photolithography Devices Jan 30, 2019 Abandoned
Array ( [id] => 15951939 [patent_doc_number] => 10663872 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2020-05-26 [patent_title] => Lithographic apparatus [patent_app_type] => utility [patent_app_number] => 16/263429 [patent_app_country] => US [patent_app_date] => 2019-01-31 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 7 [patent_figures_cnt] => 9 [patent_no_of_words] => 11005 [patent_no_of_claims] => 17 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 146 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16263429 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/263429
Lithographic apparatus Jan 30, 2019 Issued
Array ( [id] => 15950779 [patent_doc_number] => 10663287 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2020-05-26 [patent_title] => Polishing apparatus [patent_app_type] => utility [patent_app_number] => 16/248599 [patent_app_country] => US [patent_app_date] => 2019-01-15 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 13 [patent_figures_cnt] => 14 [patent_no_of_words] => 10059 [patent_no_of_claims] => 11 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 187 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16248599 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/248599
Polishing apparatus Jan 14, 2019 Issued
Array ( [id] => 14570105 [patent_doc_number] => 20190212659 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2019-07-11 [patent_title] => OPTICAL SYSTEM, IN PARTICULAR FOR A MICROLITHOGRAPHIC PROJECTION EXPOSURE APPARATUS [patent_app_type] => utility [patent_app_number] => 16/241462 [patent_app_country] => US [patent_app_date] => 2019-01-07 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 4861 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 225 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16241462 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/241462
Optical system, in particular for a microlithographic projection exposure apparatus Jan 6, 2019 Issued
Array ( [id] => 16894597 [patent_doc_number] => 11036145 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2021-06-15 [patent_title] => Large area self imaging lithography based on broadband light source [patent_app_type] => utility [patent_app_number] => 16/230667 [patent_app_country] => US [patent_app_date] => 2018-12-21 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 10 [patent_figures_cnt] => 12 [patent_no_of_words] => 6203 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 247 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16230667 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/230667
Large area self imaging lithography based on broadband light source Dec 20, 2018 Issued
Array ( [id] => 16423400 [patent_doc_number] => 20200348598 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2020-11-05 [patent_title] => SYSTEMS AND METHODS FOR REDUCING RESIST MODEL PREDICTION ERRORS [patent_app_type] => utility [patent_app_number] => 16/771343 [patent_app_country] => US [patent_app_date] => 2018-12-20 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 16659 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 99 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16771343 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/771343
Systems and methods for reducing resist model prediction errors Dec 19, 2018 Issued
Array ( [id] => 16809957 [patent_doc_number] => 20210132512 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2021-05-06 [patent_title] => Lithographic Apparatus, an Operating Method and Device Manufacturing Method [patent_app_type] => utility [patent_app_number] => 16/962940 [patent_app_country] => US [patent_app_date] => 2018-12-14 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 5702 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -18 [patent_words_short_claim] => 2 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16962940 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/962940
Lithographic apparatus, an operating method and device manufacturing method Dec 13, 2018 Issued
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