Search

Chau N Nguyen

Examiner (ID: 17964, Phone: (571)272-1980 , Office: P/2847 )

Most Active Art Unit
2831
Art Unit(s)
2831, 2835, 2841, 3621, 2109, 2950, 2847
Total Applications
2818
Issued Applications
1931
Pending Applications
187
Abandoned Applications
700

Applications

Application numberTitle of the applicationFiling DateStatus
Array ( [id] => 17358351 [patent_doc_number] => 20220019147 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2022-01-20 [patent_title] => CIRCUIT PATTERN FORMING SHEET, CIRCUIT PATTERN MANUFACTURING APPARATUS, CIRCUIT PATTERN MANUFACTURING METHOD, AND CIRCUIT PATTERN MANUFACTURING PROGRAM [patent_app_type] => utility [patent_app_number] => 17/216205 [patent_app_country] => US [patent_app_date] => 2021-03-29 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 4809 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => 0 [patent_words_short_claim] => 2 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17216205 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/216205
CIRCUIT PATTERN FORMING SHEET, CIRCUIT PATTERN MANUFACTURING APPARATUS, CIRCUIT PATTERN MANUFACTURING METHOD, AND CIRCUIT PATTERN MANUFACTURING PROGRAM Mar 28, 2021 Abandoned
Array ( [id] => 18072446 [patent_doc_number] => 11531278 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2022-12-20 [patent_title] => EUV lithography system and method for decreasing debris in EUV lithography system [patent_app_type] => utility [patent_app_number] => 17/205397 [patent_app_country] => US [patent_app_date] => 2021-03-18 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 4 [patent_figures_cnt] => 5 [patent_no_of_words] => 8129 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 158 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17205397 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/205397
EUV lithography system and method for decreasing debris in EUV lithography system Mar 17, 2021 Issued
Array ( [id] => 17157575 [patent_doc_number] => 20210318626 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2021-10-14 [patent_title] => DETECTION APPARATUS, LITHOGRAPHY APPARATUS, ARTICLE MANUFACTURING METHOD, AND DETECTION METHOD [patent_app_type] => utility [patent_app_number] => 17/201005 [patent_app_country] => US [patent_app_date] => 2021-03-15 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 9121 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -7 [patent_words_short_claim] => 103 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17201005 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/201005
Detection apparatus, lithography apparatus, article manufacturing method, and detection method Mar 14, 2021 Issued
Array ( [id] => 18275741 [patent_doc_number] => 11614684 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2023-03-28 [patent_title] => Photomask inspection method and apparatus thereof [patent_app_type] => utility [patent_app_number] => 17/200867 [patent_app_country] => US [patent_app_date] => 2021-03-14 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 7 [patent_figures_cnt] => 9 [patent_no_of_words] => 7763 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 102 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17200867 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/200867
Photomask inspection method and apparatus thereof Mar 13, 2021 Issued
Array ( [id] => 17507000 [patent_doc_number] => 20220100103 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2022-03-31 [patent_title] => SYSTEM AND METHOD FOR OVERLAY ERROR REDUCTION [patent_app_type] => utility [patent_app_number] => 17/197707 [patent_app_country] => US [patent_app_date] => 2021-03-10 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 10142 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 2 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17197707 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/197707
System and method for overlay error reduction Mar 9, 2021 Issued
Array ( [id] => 18422019 [patent_doc_number] => 20230176483 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2023-06-08 [patent_title] => EXPOSURE MACHINE AND EXPOSURE METHOD [patent_app_type] => utility [patent_app_number] => 17/437752 [patent_app_country] => US [patent_app_date] => 2021-03-10 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 2914 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -11 [patent_words_short_claim] => 48 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17437752 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/437752
Exposure machine and exposure method Mar 9, 2021 Issued
Array ( [id] => 17743977 [patent_doc_number] => 11392040 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2022-07-19 [patent_title] => System and method for performing extreme ultraviolet photolithography processes [patent_app_type] => utility [patent_app_number] => 17/193827 [patent_app_country] => US [patent_app_date] => 2021-03-05 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 16 [patent_figures_cnt] => 16 [patent_no_of_words] => 13118 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 79 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17193827 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/193827
System and method for performing extreme ultraviolet photolithography processes Mar 4, 2021 Issued
Array ( [id] => 18256794 [patent_doc_number] => 20230083834 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2023-03-16 [patent_title] => END-OF-LIFE MONITORING OF DYNAMIC GAS LOCK MEMBRANES AND PUPIL FACET MIRRORS ANDDETECTION OF MEMBRANE RUPTURE IN LITHOGRAPHIC APPARATUSES [patent_app_type] => utility [patent_app_number] => 17/909348 [patent_app_country] => US [patent_app_date] => 2021-03-01 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 11021 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 43 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17909348 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/909348
END-OF-LIFE MONITORING OF DYNAMIC GAS LOCK MEMBRANES AND PUPIL FACET MIRRORS ANDDETECTION OF MEMBRANE RUPTURE IN LITHOGRAPHIC APPARATUSES Feb 28, 2021 Pending
Array ( [id] => 17846303 [patent_doc_number] => 11435670 [patent_country] => US [patent_kind] => B1 [patent_issue_date] => 2022-09-06 [patent_title] => Multi-component kernels for vector optical image simulation [patent_app_type] => utility [patent_app_number] => 17/187351 [patent_app_country] => US [patent_app_date] => 2021-02-26 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 15 [patent_figures_cnt] => 16 [patent_no_of_words] => 11040 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 121 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17187351 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/187351
Multi-component kernels for vector optical image simulation Feb 25, 2021 Issued
Array ( [id] => 17557477 [patent_doc_number] => 11314177 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2022-04-26 [patent_title] => Supporting an optical element [patent_app_type] => utility [patent_app_number] => 17/181548 [patent_app_country] => US [patent_app_date] => 2021-02-22 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 2 [patent_figures_cnt] => 4 [patent_no_of_words] => 16055 [patent_no_of_claims] => 21 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 193 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17181548 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/181548
Supporting an optical element Feb 21, 2021 Issued
Array ( [id] => 17394168 [patent_doc_number] => 11243175 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2022-02-08 [patent_title] => Sensitive particle detection with spatially-varying polarization rotator and polarizer [patent_app_type] => utility [patent_app_number] => 17/175179 [patent_app_country] => US [patent_app_date] => 2021-02-12 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 18 [patent_figures_cnt] => 26 [patent_no_of_words] => 13125 [patent_no_of_claims] => 45 [patent_no_of_ind_claims] => 4 [patent_words_short_claim] => 122 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17175179 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/175179
Sensitive particle detection with spatially-varying polarization rotator and polarizer Feb 11, 2021 Issued
Array ( [id] => 18591670 [patent_doc_number] => 11740564 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2023-08-29 [patent_title] => Lithography apparatus and method using the same [patent_app_type] => utility [patent_app_number] => 17/165626 [patent_app_country] => US [patent_app_date] => 2021-02-02 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 11 [patent_figures_cnt] => 14 [patent_no_of_words] => 6493 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 109 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17165626 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/165626
Lithography apparatus and method using the same Feb 1, 2021 Issued
Array ( [id] => 16856498 [patent_doc_number] => 20210157243 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2021-05-27 [patent_title] => METHOD AND ASSEMBLY FOR CHARACTERIZING A MASK OR A WAFER FOR MICROLITHOGRAPHY [patent_app_type] => utility [patent_app_number] => 17/164747 [patent_app_country] => US [patent_app_date] => 2021-02-01 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 5358 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -18 [patent_words_short_claim] => 135 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17164747 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/164747
Method and assembly for characterizing a mask or a wafer for microlithography Jan 31, 2021 Issued
Array ( [id] => 18414481 [patent_doc_number] => 11669020 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2023-06-06 [patent_title] => Method and apparatus for pattern fidelity control [patent_app_type] => utility [patent_app_number] => 17/162017 [patent_app_country] => US [patent_app_date] => 2021-01-29 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 9 [patent_figures_cnt] => 11 [patent_no_of_words] => 14645 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 87 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17162017 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/162017
Method and apparatus for pattern fidelity control Jan 28, 2021 Issued
Array ( [id] => 17530384 [patent_doc_number] => 11303092 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2022-04-12 [patent_title] => Radiation source and device for feeding back emitted radiation to a laser source [patent_app_type] => utility [patent_app_number] => 17/152425 [patent_app_country] => US [patent_app_date] => 2021-01-19 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 3 [patent_figures_cnt] => 3 [patent_no_of_words] => 7665 [patent_no_of_claims] => 21 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 147 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17152425 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/152425
Radiation source and device for feeding back emitted radiation to a laser source Jan 18, 2021 Issued
Array ( [id] => 17751166 [patent_doc_number] => 20220229371 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2022-07-21 [patent_title] => SYSTEM AND METHOD FOR MONITORING AND CONTROLLING EXTREME ULTRAVIOLET PHOTOLITHOGRAPHY PROCESSES [patent_app_type] => utility [patent_app_number] => 17/150685 [patent_app_country] => US [patent_app_date] => 2021-01-15 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 13136 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -22 [patent_words_short_claim] => 78 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17150685 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/150685
SYSTEM AND METHOD FOR MONITORING AND CONTROLLING EXTREME ULTRAVIOLET PHOTOLITHOGRAPHY PROCESSES Jan 14, 2021 Pending
Array ( [id] => 16856499 [patent_doc_number] => 20210157244 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2021-05-27 [patent_title] => METHOD FOR PRODUCING A REFLECTING OPTICAL ELEMENT OF A PROJECTION EXPOSURE APPARATUS AND REFLECTING OPTICAL ELEMENT FOR A PROJECTION EXPOSURE APPARATUS, PROJECTION LENS AND PROJECTION EXPOSURE APPARATUS [patent_app_type] => utility [patent_app_number] => 17/147293 [patent_app_country] => US [patent_app_date] => 2021-01-12 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 4983 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -13 [patent_words_short_claim] => 54 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17147293 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/147293
Method for producing a reflecting optical element of a projection exposure apparatus and reflecting optical element for a projection exposure apparatus, projection lens and projection exposure apparatus Jan 11, 2021 Issued
Array ( [id] => 17651076 [patent_doc_number] => 11353801 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2022-06-07 [patent_title] => Maintenance management method for lithography system, maintenance management apparatus, and computer readable medium [patent_app_type] => utility [patent_app_number] => 17/134944 [patent_app_country] => US [patent_app_date] => 2020-12-28 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 54 [patent_figures_cnt] => 56 [patent_no_of_words] => 27835 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 258 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17134944 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/134944
Maintenance management method for lithography system, maintenance management apparatus, and computer readable medium Dec 27, 2020 Issued
Array ( [id] => 16779736 [patent_doc_number] => 20210116815 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2021-04-22 [patent_title] => PATTERN FORMING SHEET, PATTERN MANUFACTURING APPARATUS, PATTERN MANUFACTURING METHOD, AND PATTERN MANUFACTURING PROGRAM [patent_app_type] => utility [patent_app_number] => 17/135671 [patent_app_country] => US [patent_app_date] => 2020-12-28 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 5750 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -16 [patent_words_short_claim] => 40 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17135671 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/135671
PATTERN FORMING SHEET, PATTERN MANUFACTURING APPARATUS, PATTERN MANUFACTURING METHOD, AND PATTERN MANUFACTURING PROGRAM Dec 27, 2020 Abandoned
Array ( [id] => 16729321 [patent_doc_number] => 20210096468 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2021-04-01 [patent_title] => IMPRINT LITHOGRAPHY [patent_app_type] => utility [patent_app_number] => 17/120506 [patent_app_country] => US [patent_app_date] => 2020-12-14 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 36608 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 2 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17120506 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/120506
Imprint lithography Dec 13, 2020 Issued
Menu