Search

Chia How Michael Liu

Examiner (ID: 7313, Phone: (571)272-9019 , Office: P/2882 )

Most Active Art Unit
2882
Art Unit(s)
2851, 2882
Total Applications
473
Issued Applications
284
Pending Applications
0
Abandoned Applications
189

Applications

Application numberTitle of the applicationFiling DateStatus
Array ( [id] => 6517489 [patent_doc_number] => 20100220302 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2010-09-02 [patent_title] => 'PROJECTION EXPOSURE APPARATUS FOR SEMICONDUCTOR LITHOGRAPHY COMPRISING A COOLING DEVICE' [patent_app_type] => utility [patent_app_number] => 12/711993 [patent_app_country] => US [patent_app_date] => 2010-02-24 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 4 [patent_figures_cnt] => 4 [patent_no_of_words] => 3490 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0220/20100220302.pdf [firstpage_image] =>[orig_patent_app_number] => 12711993 [rel_patent_id] =>[rel_patent_doc_number] =>)
12/711993
PROJECTION EXPOSURE APPARATUS FOR SEMICONDUCTOR LITHOGRAPHY COMPRISING A COOLING DEVICE Feb 23, 2010 Abandoned
Array ( [id] => 11896624 [patent_doc_number] => 09766558 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2017-09-19 [patent_title] => 'Lithographic apparatus with flexible transportation line having varying stiffness between two objects' [patent_app_type] => utility [patent_app_number] => 12/710752 [patent_app_country] => US [patent_app_date] => 2010-02-23 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 9 [patent_figures_cnt] => 16 [patent_no_of_words] => 7069 [patent_no_of_claims] => 15 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 207 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 12710752 [rel_patent_id] =>[rel_patent_doc_number] =>)
12/710752
Lithographic apparatus with flexible transportation line having varying stiffness between two objects Feb 22, 2010 Issued
Array ( [id] => 6285030 [patent_doc_number] => 20100157269 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2010-06-24 [patent_title] => 'ILLUMINATION SYSTEM FOR ILLUMINATING A MASK IN A MICROLITHOGRAPHIC PROJECTION EXPOSURE APPARATUS' [patent_app_type] => utility [patent_app_number] => 12/711059 [patent_app_country] => US [patent_app_date] => 2010-02-23 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 13 [patent_figures_cnt] => 13 [patent_no_of_words] => 8848 [patent_no_of_claims] => 27 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0157/20100157269.pdf [firstpage_image] =>[orig_patent_app_number] => 12711059 [rel_patent_id] =>[rel_patent_doc_number] =>)
12/711059
Illumination system having a beam deflection array for illuminating a mask in a microlithographic projection exposure apparatus Feb 22, 2010 Issued
Array ( [id] => 9609643 [patent_doc_number] => 08786822 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2014-07-22 [patent_title] => 'Projection optical system with deformable optical element, exposure apparatus, and device manufacturing method' [patent_app_type] => utility [patent_app_number] => 12/710246 [patent_app_country] => US [patent_app_date] => 2010-02-22 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 10 [patent_figures_cnt] => 10 [patent_no_of_words] => 5906 [patent_no_of_claims] => 14 [patent_no_of_ind_claims] => 6 [patent_words_short_claim] => 46 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 12710246 [rel_patent_id] =>[rel_patent_doc_number] =>)
12/710246
Projection optical system with deformable optical element, exposure apparatus, and device manufacturing method Feb 21, 2010 Issued
Array ( [id] => 6232835 [patent_doc_number] => 20100265486 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2010-10-21 [patent_title] => 'METHOD OF CLAMPING A SUBSTRATE AND CLAMP PREPARATION UNIT' [patent_app_type] => utility [patent_app_number] => 12/708543 [patent_app_country] => US [patent_app_date] => 2010-02-19 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 9 [patent_figures_cnt] => 9 [patent_no_of_words] => 7910 [patent_no_of_claims] => 47 [patent_no_of_ind_claims] => 7 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0265/20100265486.pdf [firstpage_image] =>[orig_patent_app_number] => 12708543 [rel_patent_id] =>[rel_patent_doc_number] =>)
12/708543
Method of clamping a substrate and clamp preparation unit using capillary clamping force Feb 18, 2010 Issued
Array ( [id] => 6409000 [patent_doc_number] => 20100149511 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2010-06-17 [patent_title] => 'Illumination optical system, exposure apparatus, and exposure method' [patent_app_type] => utility [patent_app_number] => 12/656822 [patent_app_country] => US [patent_app_date] => 2010-02-17 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 31 [patent_figures_cnt] => 31 [patent_no_of_words] => 27722 [patent_no_of_claims] => 23 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0149/20100149511.pdf [firstpage_image] =>[orig_patent_app_number] => 12656822 [rel_patent_id] =>[rel_patent_doc_number] =>)
12/656822
Illumination optical system, exposure apparatus, and exposure method Feb 16, 2010 Abandoned
Array ( [id] => 6480751 [patent_doc_number] => 20100208228 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2010-08-19 [patent_title] => 'EXPOSURE APPARATUS, EXPOSURE METHOD, AND DEVICE MANUFACTURING METHOD' [patent_app_type] => utility [patent_app_number] => 12/707461 [patent_app_country] => US [patent_app_date] => 2010-02-17 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 12 [patent_figures_cnt] => 12 [patent_no_of_words] => 9190 [patent_no_of_claims] => 5 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0208/20100208228.pdf [firstpage_image] =>[orig_patent_app_number] => 12707461 [rel_patent_id] =>[rel_patent_doc_number] =>)
12/707461
EXPOSURE APPARATUS, EXPOSURE METHOD, AND DEVICE MANUFACTURING METHOD Feb 16, 2010 Abandoned
Array ( [id] => 6409016 [patent_doc_number] => 20100149513 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2010-06-17 [patent_title] => 'Fluid pressure compensation for immersion litography lens' [patent_app_type] => utility [patent_app_number] => 12/656703 [patent_app_country] => US [patent_app_date] => 2010-02-12 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 8 [patent_figures_cnt] => 8 [patent_no_of_words] => 4211 [patent_no_of_claims] => 26 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0149/20100149513.pdf [firstpage_image] =>[orig_patent_app_number] => 12656703 [rel_patent_id] =>[rel_patent_doc_number] =>)
12/656703
Fluid pressure compensation for immersion litography lens Feb 11, 2010 Abandoned
Array ( [id] => 6242773 [patent_doc_number] => 20100134772 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2010-06-03 [patent_title] => 'Exposure apparatus, method for cleaning member thereof, maintenance method for exposure apparatus, maintenance device, and method for producing device' [patent_app_type] => utility [patent_app_number] => 12/656456 [patent_app_country] => US [patent_app_date] => 2010-01-29 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 17 [patent_figures_cnt] => 17 [patent_no_of_words] => 31920 [patent_no_of_claims] => 25 [patent_no_of_ind_claims] => 5 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0134/20100134772.pdf [firstpage_image] =>[orig_patent_app_number] => 12656456 [rel_patent_id] =>[rel_patent_doc_number] =>)
12/656456
Exposure apparatus, method for cleaning member thereof, maintenance method for exposure apparatus, maintenance device, and method for producing device Jan 28, 2010 Abandoned
Array ( [id] => 6556660 [patent_doc_number] => 20100222898 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2010-09-02 [patent_title] => 'Stage-control systems and methods including inverse closed loop with adaptive controller' [patent_app_type] => utility [patent_app_number] => 12/657806 [patent_app_country] => US [patent_app_date] => 2010-01-27 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 24 [patent_figures_cnt] => 24 [patent_no_of_words] => 16310 [patent_no_of_claims] => 47 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0222/20100222898.pdf [firstpage_image] =>[orig_patent_app_number] => 12657806 [rel_patent_id] =>[rel_patent_doc_number] =>)
12/657806
Stage-control systems and methods including inverse closed loop with adaptive controller Jan 26, 2010 Abandoned
Array ( [id] => 9456527 [patent_doc_number] => 08717543 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2014-05-06 [patent_title] => 'Substrate holder, stage apparatus, and exposure apparatus with first support part provided in a suction space and second support part' [patent_app_type] => utility [patent_app_number] => 12/656058 [patent_app_country] => US [patent_app_date] => 2010-01-14 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 9 [patent_figures_cnt] => 9 [patent_no_of_words] => 9410 [patent_no_of_claims] => 21 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 182 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 12656058 [rel_patent_id] =>[rel_patent_doc_number] =>)
12/656058
Substrate holder, stage apparatus, and exposure apparatus with first support part provided in a suction space and second support part Jan 13, 2010 Issued
Array ( [id] => 6625063 [patent_doc_number] => 20100225894 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2010-09-09 [patent_title] => 'Lithography systems and methods' [patent_app_type] => utility [patent_app_number] => 12/655692 [patent_app_country] => US [patent_app_date] => 2010-01-04 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 16 [patent_figures_cnt] => 16 [patent_no_of_words] => 5664 [patent_no_of_claims] => 40 [patent_no_of_ind_claims] => 10 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0225/20100225894.pdf [firstpage_image] =>[orig_patent_app_number] => 12655692 [rel_patent_id] =>[rel_patent_doc_number] =>)
12/655692
Lithography systems and methods Jan 3, 2010 Abandoned
Array ( [id] => 9228390 [patent_doc_number] => 08634063 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2014-01-21 [patent_title] => 'Wafer with design printed outside active region and spaced by design tolerance of reticle blind' [patent_app_type] => utility [patent_app_number] => 12/637048 [patent_app_country] => US [patent_app_date] => 2009-12-14 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 8 [patent_figures_cnt] => 9 [patent_no_of_words] => 3493 [patent_no_of_claims] => 8 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 218 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 12637048 [rel_patent_id] =>[rel_patent_doc_number] =>)
12/637048
Wafer with design printed outside active region and spaced by design tolerance of reticle blind Dec 13, 2009 Issued
Array ( [id] => 6247767 [patent_doc_number] => 20100136796 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2010-06-03 [patent_title] => 'SUBSTRATE HOLDING MEMBER, IMMERSION TYPE EXPOSURE DEVICE AND METHOD OF FABRICATING SEMICONDUCTOR DEVICE' [patent_app_type] => utility [patent_app_number] => 12/628800 [patent_app_country] => US [patent_app_date] => 2009-12-01 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 12 [patent_figures_cnt] => 12 [patent_no_of_words] => 4995 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0136/20100136796.pdf [firstpage_image] =>[orig_patent_app_number] => 12628800 [rel_patent_id] =>[rel_patent_doc_number] =>)
12/628800
SUBSTRATE HOLDING MEMBER, IMMERSION TYPE EXPOSURE DEVICE AND METHOD OF FABRICATING SEMICONDUCTOR DEVICE Nov 30, 2009 Abandoned
Array ( [id] => 6242771 [patent_doc_number] => 20100134770 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2010-06-03 [patent_title] => 'EXPOSURE APPARATUS AND METHOD FOR MANUFACTURING DEVICE' [patent_app_type] => utility [patent_app_number] => 12/628934 [patent_app_country] => US [patent_app_date] => 2009-12-01 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 9 [patent_figures_cnt] => 9 [patent_no_of_words] => 6622 [patent_no_of_claims] => 14 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0134/20100134770.pdf [firstpage_image] =>[orig_patent_app_number] => 12628934 [rel_patent_id] =>[rel_patent_doc_number] =>)
12/628934
EXPOSURE APPARATUS AND METHOD FOR MANUFACTURING DEVICE Nov 30, 2009 Abandoned
Array ( [id] => 10500943 [patent_doc_number] => 09229341 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2016-01-05 [patent_title] => 'Reticle support that reduces reticle slippage' [patent_app_type] => utility [patent_app_number] => 12/627771 [patent_app_country] => US [patent_app_date] => 2009-11-30 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 10 [patent_figures_cnt] => 10 [patent_no_of_words] => 7394 [patent_no_of_claims] => 19 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 119 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 12627771 [rel_patent_id] =>[rel_patent_doc_number] =>)
12/627771
Reticle support that reduces reticle slippage Nov 29, 2009 Issued
Array ( [id] => 6285041 [patent_doc_number] => 20100157273 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2010-06-24 [patent_title] => 'LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD' [patent_app_type] => utility [patent_app_number] => 12/627108 [patent_app_country] => US [patent_app_date] => 2009-11-30 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 3 [patent_figures_cnt] => 3 [patent_no_of_words] => 4035 [patent_no_of_claims] => 18 [patent_no_of_ind_claims] => 4 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0157/20100157273.pdf [firstpage_image] =>[orig_patent_app_number] => 12627108 [rel_patent_id] =>[rel_patent_doc_number] =>)
12/627108
Lithographic apparatus and device manufacturing method with bearing to allow substrate holder to float with respect to substrate table Nov 29, 2009 Issued
Array ( [id] => 6365866 [patent_doc_number] => 20100079741 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2010-04-01 [patent_title] => 'PROJECTION OBJECTIVE FOR MICROLITHOGRAPHY' [patent_app_type] => utility [patent_app_number] => 12/624755 [patent_app_country] => US [patent_app_date] => 2009-11-24 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 16 [patent_figures_cnt] => 16 [patent_no_of_words] => 21494 [patent_no_of_claims] => 26 [patent_no_of_ind_claims] => 5 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0079/20100079741.pdf [firstpage_image] =>[orig_patent_app_number] => 12624755 [rel_patent_id] =>[rel_patent_doc_number] =>)
12/624755
PROJECTION OBJECTIVE FOR MICROLITHOGRAPHY Nov 23, 2009 Abandoned
Array ( [id] => 10020957 [patent_doc_number] => 09063439 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2015-06-23 [patent_title] => 'Projection objective for microlithography with stray light compensation and related methods' [patent_app_type] => utility [patent_app_number] => 12/624993 [patent_app_country] => US [patent_app_date] => 2009-11-24 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 16 [patent_figures_cnt] => 24 [patent_no_of_words] => 21220 [patent_no_of_claims] => 40 [patent_no_of_ind_claims] => 4 [patent_words_short_claim] => 217 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 12624993 [rel_patent_id] =>[rel_patent_doc_number] =>)
12/624993
Projection objective for microlithography with stray light compensation and related methods Nov 23, 2009 Issued
Array ( [id] => 6242778 [patent_doc_number] => 20100134775 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2010-06-03 [patent_title] => 'EXPOSURE APPARATUS AND DEVICE MANUFACTURING METHOD' [patent_app_type] => utility [patent_app_number] => 12/624722 [patent_app_country] => US [patent_app_date] => 2009-11-24 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 6 [patent_figures_cnt] => 6 [patent_no_of_words] => 9682 [patent_no_of_claims] => 13 [patent_no_of_ind_claims] => 4 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0134/20100134775.pdf [firstpage_image] =>[orig_patent_app_number] => 12624722 [rel_patent_id] =>[rel_patent_doc_number] =>)
12/624722
EXPOSURE APPARATUS AND DEVICE MANUFACTURING METHOD Nov 23, 2009 Abandoned
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