Chia How Michael Liu

Array ( [id] => 4844239 [patent_doc_number] => 20080180647 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2008-07-31 [patent_title] => 'FOCUS MONITOR MARK, FOCUS MONITORING METHOD, AND DEVICE PRODUCTION METHOD' [patent_app_type] => utility [patent_app_number] => 12/019728 [patent_app_country] => US [patent_app_date] => 2008-01-25 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 12 [patent_figures_cnt] => 12 [patent_no_of_words] => 5259 [patent_no_of_claims] => 8 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0180/20080180647.pdf [firstpage_image] =>[orig_patent_app_number] => 12019728 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 5341438 [patent_doc_number] => 20090180088 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2009-07-16 [patent_title] => 'Illumination Sources for Lithography Systems' [patent_app_type] => utility [patent_app_number] => 12/013201 [patent_app_country] => US [patent_app_date] => 2008-01-11 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 7 [patent_figures_cnt] => 7 [patent_no_of_words] => 5517 [patent_no_of_claims] => 21 [patent_no_of_ind_claims] => 4 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0180/20090180088.pdf [firstpage_image] =>[orig_patent_app_number] => 12013201 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 4806635 [patent_doc_number] => 20080170213 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2008-07-17 [patent_title] => 'STAGE APPARATUS, EXPOSURE APPARATUS, AND DEVICE MANUFACTURING METHOD' [patent_app_type] => utility [patent_app_number] => 11/971990 [patent_app_country] => US [patent_app_date] => 2008-01-10 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 26 [patent_figures_cnt] => 26 [patent_no_of_words] => 6209 [patent_no_of_claims] => 13 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0170/20080170213.pdf [firstpage_image] =>[orig_patent_app_number] => 11971990 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 4897780 [patent_doc_number] => 20080117393 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2008-05-22 [patent_title] => 'Exposure apparatus and device fabricating method' [patent_app_type] => utility [patent_app_number] => 12/007348 [patent_app_country] => US [patent_app_date] => 2008-01-09 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 15 [patent_figures_cnt] => 15 [patent_no_of_words] => 15589 [patent_no_of_claims] => 5 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0117/20080117393.pdf [firstpage_image] =>[orig_patent_app_number] => 12007348 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 4674417 [patent_doc_number] => 20080212045 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2008-09-04 [patent_title] => ' OPTICAL SYSTEM WITH AT LEAST A SEMICONDUCTOR LIGHT SOURCE AND A METHOD FOR REMOVING CONTAMINATIONS AND/OR HEATING THE SYSTEMS' [patent_app_type] => utility [patent_app_number] => 11/970456 [patent_app_country] => US [patent_app_date] => 2008-01-07 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 14 [patent_figures_cnt] => 14 [patent_no_of_words] => 11961 [patent_no_of_claims] => 26 [patent_no_of_ind_claims] => 4 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0212/20080212045.pdf [firstpage_image] =>[orig_patent_app_number] => 11970456 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 4891716 [patent_doc_number] => 20080100813 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2008-05-01 [patent_title] => 'Cleanup method for optics in immersion lithography' [patent_app_type] => utility [patent_app_number] => 12/003038 [patent_app_country] => US [patent_app_date] => 2007-12-19 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 7 [patent_figures_cnt] => 7 [patent_no_of_words] => 3998 [patent_no_of_claims] => 28 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0100/20080100813.pdf [firstpage_image] =>[orig_patent_app_number] => 12003038 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 4864937 [patent_doc_number] => 20080143996 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2008-06-19 [patent_title] => 'PROCESSING APPARATUS' [patent_app_type] => utility [patent_app_number] => 11/957568 [patent_app_country] => US [patent_app_date] => 2007-12-17 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 15 [patent_figures_cnt] => 15 [patent_no_of_words] => 8897 [patent_no_of_claims] => 9 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0143/20080143996.pdf [firstpage_image] =>[orig_patent_app_number] => 11957568 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 5543947 [patent_doc_number] => 20090153824 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2009-06-18 [patent_title] => 'MULTIPLE CHUCK SCANNING STAGE' [patent_app_type] => utility [patent_app_number] => 11/958201 [patent_app_country] => US [patent_app_date] => 2007-12-17 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 5 [patent_figures_cnt] => 5 [patent_no_of_words] => 4559 [patent_no_of_claims] => 25 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0153/20090153824.pdf [firstpage_image] =>[orig_patent_app_number] => 11958201 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 5543941 [patent_doc_number] => 20090153818 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2009-06-18 [patent_title] => 'METHOD AND APPARATUS FOR EXTRACTING DOSE AND FOCUS FROM CRITICAL DIMENSION DATA' [patent_app_type] => utility [patent_app_number] => 11/958086 [patent_app_country] => US [patent_app_date] => 2007-12-17 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 4 [patent_figures_cnt] => 4 [patent_no_of_words] => 8477 [patent_no_of_claims] => 22 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0153/20090153818.pdf [firstpage_image] =>[orig_patent_app_number] => 11958086 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 4864931 [patent_doc_number] => 20080143990 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2008-06-19 [patent_title] => 'EXPOSURE APPARATUS AND DEVICE MANUFACTURING METHOD' [patent_app_type] => utility [patent_app_number] => 11/956597 [patent_app_country] => US [patent_app_date] => 2007-12-14 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 11 [patent_figures_cnt] => 11 [patent_no_of_words] => 4900 [patent_no_of_claims] => 6 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0143/20080143990.pdf [firstpage_image] =>[orig_patent_app_number] => 11956597 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 4864928 [patent_doc_number] => 20080143987 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2008-06-19 [patent_title] => 'EXPOSURE APPARATUS AND DEVICE FABRICATION METHOD' [patent_app_type] => utility [patent_app_number] => 11/955705 [patent_app_country] => US [patent_app_date] => 2007-12-13 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 12 [patent_figures_cnt] => 12 [patent_no_of_words] => 7236 [patent_no_of_claims] => 7 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0143/20080143987.pdf [firstpage_image] =>[orig_patent_app_number] => 11955705 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 4877828 [patent_doc_number] => 20080151211 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2008-06-26 [patent_title] => 'MULTIPLE-USE PROJECTION SYSTEM' [patent_app_type] => utility [patent_app_number] => 11/951746 [patent_app_country] => US [patent_app_date] => 2007-12-06 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 5 [patent_figures_cnt] => 5 [patent_no_of_words] => 11041 [patent_no_of_claims] => 48 [patent_no_of_ind_claims] => 5 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0151/20080151211.pdf [firstpage_image] =>[orig_patent_app_number] => 11951746 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 6585759 [patent_doc_number] => 20100097584 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2010-04-22 [patent_title] => 'EXPOSURE APPARATUS AND DEVICE FABRICATION METHOD' [patent_app_type] => utility [patent_app_number] => 12/444103 [patent_app_country] => US [patent_app_date] => 2007-12-05 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 14 [patent_figures_cnt] => 14 [patent_no_of_words] => 6398 [patent_no_of_claims] => 11 [patent_no_of_ind_claims] => 4 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0097/20100097584.pdf [firstpage_image] =>[orig_patent_app_number] => 12444103 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 6484327 [patent_doc_number] => 20100092881 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2010-04-15 [patent_title] => 'Process, Apparatus and Device' [patent_app_type] => utility [patent_app_number] => 12/516909 [patent_app_country] => US [patent_app_date] => 2007-12-03 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 6 [patent_figures_cnt] => 6 [patent_no_of_words] => 6487 [patent_no_of_claims] => 24 [patent_no_of_ind_claims] => 4 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0092/20100092881.pdf [firstpage_image] =>[orig_patent_app_number] => 12516909 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 8353241 [patent_doc_number] => 08248579 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2012-08-21 [patent_title] => 'Lithographic apparatus, device manufacturing method and device for correcting overlay errors between overlapping patterns' [patent_app_type] => utility [patent_app_number] => 11/948801 [patent_app_country] => US [patent_app_date] => 2007-11-30 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 5 [patent_figures_cnt] => 10 [patent_no_of_words] => 6444 [patent_no_of_claims] => 21 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 196 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 11948801 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 4953436 [patent_doc_number] => 20080186460 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2008-08-07 [patent_title] => 'Lithographic apparatus and method' [patent_app_type] => utility [patent_app_number] => 11/987131 [patent_app_country] => US [patent_app_date] => 2007-11-27 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 10 [patent_figures_cnt] => 10 [patent_no_of_words] => 9950 [patent_no_of_claims] => 23 [patent_no_of_ind_claims] => 6 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0186/20080186460.pdf [firstpage_image] =>[orig_patent_app_number] => 11987131 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 5562538 [patent_doc_number] => 20090135390 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2009-05-28 [patent_title] => 'LITHOGRAPHIC ALIGNMENT MARKS' [patent_app_type] => utility [patent_app_number] => 11/944857 [patent_app_country] => US [patent_app_date] => 2007-11-26 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 7 [patent_figures_cnt] => 7 [patent_no_of_words] => 4705 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0135/20090135390.pdf [firstpage_image] =>[orig_patent_app_number] => 11944857 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 11577168 [patent_doc_number] => 09632425 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2017-04-25 [patent_title] => 'Lithographic apparatus, a dryer and a method of removing liquid from a surface' [patent_app_type] => utility [patent_app_number] => 11/984825 [patent_app_country] => US [patent_app_date] => 2007-11-21 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 7 [patent_figures_cnt] => 15 [patent_no_of_words] => 9437 [patent_no_of_claims] => 37 [patent_no_of_ind_claims] => 5 [patent_words_short_claim] => 147 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 11984825 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 4645495 [patent_doc_number] => 08023105 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2011-09-20 [patent_title] => 'Compact projection exposure device and associated exposure process performed by the device for exposing film-shaped tape to form circuit patterns' [patent_app_type] => utility [patent_app_number] => 11/985941 [patent_app_country] => US [patent_app_date] => 2007-11-19 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 8 [patent_figures_cnt] => 12 [patent_no_of_words] => 10382 [patent_no_of_claims] => 10 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 320 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/08/023/08023105.pdf [firstpage_image] =>[orig_patent_app_number] => 11985941 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 4914003 [patent_doc_number] => 20080094602 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2008-04-24 [patent_title] => 'Illumination optical system, exposure apparatus, and exposure method' [patent_app_type] => utility [patent_app_number] => 11/979516 [patent_app_country] => US [patent_app_date] => 2007-11-05 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 31 [patent_figures_cnt] => 31 [patent_no_of_words] => 27693 [patent_no_of_claims] => 33 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0094/20080094602.pdf [firstpage_image] =>[orig_patent_app_number] => 11979516 [rel_patent_id] =>[rel_patent_doc_number] =>)